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Upgrade Info ATLAS 2D - Extreme Field of View Imaging ATLAS 2D : Large Area Imaging for Unrivaled Productivity

ATLAS 2D - Extreme Field of View Imaging - ZEISS · PDF fileATLAS 2D - Extreme Field of View Imaging ... ATLAS allows users to get to data analysis faster. ... - SmartSEM API options

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ATLAS 2D - Extreme Field of View ImagingATLAS 2D : Large Area Imaging for Unrivaled Productivity

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Contact: Dr. Ulrich Kohl-Roscher

Date: December 2013

Introduction

The ATLAS system is an integrated package comprising hard-

ware and software that can automatically acquire large field

of view images and image mosaics without compromising

resolution. In combination with any scanning electron micro-

scope from Carl Zeiss, it enables quick and efficient imaging

of large-area specimens with nanometre resolution.

With its adaptive 16-bit scan generator and dual super-sam-

pling signal acquisition, ATLAS acquires individual images up

to one gigapixel in size (32k x 32k) at up to sixteen bits per

pixel.

By integrating into the SmartSEM software for microscope

control and calling upon its rich suite of automation fea-

tures, ATLAS allows for the automated acquisition of an

image spanning extremely large fields of view. With suitable

specimens, unattended operation can acquire multi-image

montages exceeding one terapixel in size.

With these capabilities, ATLAS can capture images of regions

of centimetre scale at nanometre resolution with just a few

hours of work. The continuous zoom function of the built-in

image viewer allows you to enlarge the final image from

a complete overview down to nanometre resolution. As a

result, ATLAS separates studying the specimen from the task

of acquiring the image.

ATLAS offers users a new degree of productivity.

ATLAS 2D - Extreme Field of View ImagingATLAS 2D : Large Area Imaging for Unrivaled Productivity

Availability

The instrument is available for:

• EVO series

• 15xx series

• SUPRA series

• ULTRA series

• MERLIN series

• CrossBeam series

Benefits

• Produce images into the terapixel range

By stitching single images each as large as 32k X 32k

pixels (1 gigapixel), ATLAS allows for the imaging of areas

into the range of square centimetres at nanometre reso-

lutions.

• Reduce time operating the microscope

By automating acquisition and first-pass stitching,

ATLAS allows users to get to data analysis faster.

• Acquire images for later exploration

By imaging larger areas of potential interest, ATLAS re-

duces the need to return to the lab for follow up acquisi-

tions.

• Distribute results easily

By exporting the final stitched image to HTML, ATLAS

makes results universally compatible and accessible using

the feature-rich ATLAS browser-based viewer that can run

from a local hard drive, over your intranet, or across the

Internet.

ATLAS meets the demand for efficient, cost-effective methods of examining a steadily rising number of speci-

mens with constantly increasing sizes, using resolutions in the nanometre range.

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Operation

The ATLAS system includes:

- Acquisition and scan generator hardware

- Workstation class PC & LCD

- The ATLAS software

- The VE-Viewer software

Upgrade Path

ATLAS will run on any Zeiss microscope that has the fol-

lowing:

- SmartSEM API options.

- SmartSEM V05.04 or later.

The retrofit must be performed by an authorised Carl Zeiss

Microscopy service engineer. For further information,

contact:

[email protected]

Part Ordering no.

ATLAS for non-MERLIN Systems

ATLAS PC, ATLAS Hardware, Smart

EXTIF Switch Box, Necessary Cables,

licenses.

347823-9060-

000

ATLAS for MERLIN Systems

ATLAS PC, ATLAS Hardware, Smart

EXTIF Switch Box, Necessary Cables,

licenses.

347823-9063-

000

Figure 1

A single 1 gigapixel image taken with the ATLAS system covering 1 mm of field of view with a 32 nm resolution.

1 mm

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Figure 2

Comparison of an ATLAS image to the size of the typical SEM image. Several ATLAS images can be stitched together to cover fields of view visible to the naked eye.

OneATLASTM

Image

100’s ofTypical SEM

Images

ATLASTM Mosaic

Naked EyeField of View

Figure 3

0.3 x 0.3 mm² area acquired. Left: 3072 x 2304 pixels resolution (7 Megapixels), 792 images, >1500 seams, 2.5 hours acquition time. Right: ATLAS 32,768 x 32,768 pixel resolution (1024 Megapixels), 4 images, 4 seams, 0.5 hours acquisition time.

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Carl Zeiss Microscopy GmbH 07745 Jena, Germany [email protected] www.zeiss.com/microscopy