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University of Siena & INFN Pisa University of Trento & TIFPA University of Padova & INFN Padova University of Pavia & INFN Pavia Array of Silicon A valanche Pixels (ASAP) P. S. Marrocchesi – 170705 INFN sez. di Pisa

Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

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Page 1: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

University of Siena & INFN Pisa

University of Trento & TIFPA University of Padova & INFN Padova

University of Pavia & INFN Pavia

Array of Silicon Avalanche Pixels (ASAP)

P.  S.  Marrocchesi  –  170705  -­‐  INFN  sez.  di  Pisa  

Page 2: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

Outline

Ø  Sensor concept and architecture

Ø  Brief status report and perspectives

Ø  FTE

Ø  Richieste in sezione

2 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 3: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

APIX particle detector concept

Discriminators

Coincidence detector

Quenching Particle detection

Dark counts

Basic idea: Use of two Geiger-mode avalanche detectors (SPADs) in coincidence to detect particles l  Digital read-out l  Reduced Dark Count Rate: DCR = DCR1 * DCR2 * 2ΔT l  Timing performances l  Low power consumption l  Low material budget

3 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 4: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

APIX demonstrator: pixel cross-section

è CMOS process allow integrated electronics (not feasible in SiPM integrated process)

è  Metal shielding to avoid optical cross-talk è  Vertical interconnection by bump bonding

4 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 5: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

APIX pixel array (1st prototype)

43µm x 45µm

40µm x 40µm

35µm x 35µm

30µm x 30µm

l  Sensor array of 16 rows x 48 SPADs

l  Pixel size: 50 µm x 75 µm

l  Total sensor dimensions: 1.2 x 2.4 mm2

Electronics

Detector area

Bonding pad

Shielded detectors Unshielded pixels with different active

area

Array partitioning: l  Two SPAD types: p+/nwell and p-

well/n-iso l  Different SPAD active areas:

30 – 35 – 40 – 45 micron side l  Some unshielded structures for

testing with light l  Coincidence between SPAD with the

same size and with different sizes 5 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 6: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

APIX final assembly Dark Count Rate

Dark Count Rate for different coincidence time ΔT: 10ns, 1.5ns, 0.75ns

DCRCOINC = DCR1 x DCR2 x 2ΔT

T = 20°C

DCRCOINC = 27 counts/s mm2

6

*

Type 2

P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 7: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

Coincidence detection

Count rate in coincidence between two pixels in the same column Normalized rate:

1 2 3 4 5 6 7

Cross-talk

Cross-talk

7 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 8: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

Crosstalk vs substrate thickness

8 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 9: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

2016  Beam  test  at  CERN  SPS  North  Area  (H4  beam  line)    Two  APIX2  sensors  under  test  +  silicon  Beam  Tracker    Charged  parRcle  beams  with  energy  50,  100,  150,  200  and  300  GeV  

 4  Si-­‐strip  detectors  

 2  APIX2  pixel  detectors      

 6  Si-­‐strip  detectors  

 2  HD    Si-­‐strip  detectors  

 2  HD    Si-­‐strip  detectors  

 Beam  Tracker  

On-­‐line  event  display  beam  –  YZ  view  beam  –  XZ  view  

9 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 10: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

•  Measured  efficiency    56.2  ±  5  %  (stat+sys)  

•  Expected  (purely  geometrical)  FF  =  52%    

•  =>  EffecRve  detector  efficiency  close  to  100%  (only  limited  by  FF)  

•  Higher  staRsRcs  and  improved  beam  tracking  accuracy  foreseen  for  next  beam  test    

     

Efficiency  measurement  in  6  different  fiducial  regions  

DefiniRon  of  6  areas  covered  by  the    reconstructed  track  impact  point  (IP)  

4  different  markers:  residual  between  impact  point  and  pixel  center  in  units  of  σ

10 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 11: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

APIX2  imaging:  Example  of  two  regions-­‐of-­‐interest  separated  by  ~  100  um  

•  Efficiency  close  to  100%  (only  limited  by  FF)      

11 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 12: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

Papers  and  talks      [1]  N.  D'Ascenzo  et  al,  "Silicon  avalanche  pixel  sensor  for  high  precision  tracking",  2014  JINST  9  C03027,  doi:10.1088/1748-­‐0221/9/03/C03027.      [2]    L.  Pancheri  et  al.,  “First  prototypes  of  two-­‐Rer  avalanche  pixel  sensors  for  parRcle  detecRon”,  14th  Vienna  Conference  on  InstrumentaRon,  Vienna,  Austria,  15  –  19  February  2016.        [3]    A.  Ficorella  et  al.,  "Crosstalk  mapping  in  CMOS  SPAD  arrays,"  2016  46th  European  Solid-­‐State  Devices  Research  Conference,  ESSDERC,  Lausanne,  Switzerland,  12  –  15  September  2016.        [4]    L.  Pancheri  et  al.,  “VerRcally-­‐integrated  CMOS  Geiger-­‐mode  avalanche  pixel  sensors,”  14th  Topical  Seminar  on  InnovaRve  ParRcle  and  RadiaRon  Detectors  (IPRD16),  Siena,  Italy,  3  -­‐  6  October  2016.        [5]    L.  Pancheri  et  al.,  “Two-­‐Tier  Pixelated  Avalanche  Sensor  for  ParRcle  DetecRon  in  150nm  CMOS”,  IEEE  NSS/MIC,  Strasbourg,  France,  29  October  –  5  November  2016.      [6]    P.  Brogi  et  al.,  “  A  new  Avalanche  Pixel  Sensor  for  charged  parRcle  detecRon  (APIX2)”,  7th  Young  Researcher  MeeRng,  Torino,  Italy,  October  24-­‐26,  2016      [7]    L.  Pancheri  et  al.,  ”First  DemonstraRon  of  a  Two-­‐Tier  Pixelated  Avalanche  Sensor  for  ParRcle  DetecRon”,  Journal  of  the  Electron  Devices  Society,    Vol.  5  NO.5,  September  2017.    [8]  A.  Ficorella  et  al.,‘Crosstalk  CharacterizaRon  of  a  Two-­‐Tier  Pixelated  Avalanche  Sensor  for  Charged  ParRcle  DetecRon”,  IEEE  Journal  of  Selected  Topics  in  Quantum  Electronics    Vol.  24  Issue  2    (2017.09.21)    [9]  P.  S.  Marrocchesi  et  al.,  “APiX  :  a  Geiger-­‐mode  avalanche  digital  sensor  for  charged  parRcle  detecRon“  ,    IEEE  NSS/MIC/RTSD,  Atlanta,  21-­‐18  October  2017.      

12  P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 13: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

48x48 cells, 75 um pitch, 1 bit memory, 6-parallel readout

24x72 cells, 50 um pitch, 1 bit memory, 3-parallel readout

48x1

1 ce

lls, 7

5 um

pit

ch,

10 b

it c

ount

er

test structures

83% fill factor

43% fill factor

45% fill factor

13 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

2nd prototype delivered by LF in late Spring 2018.

Bump bonding order placed at the end of 2017.

Page 14: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

ASAP 2019 run: Improvements w/r to APiX prototypes

§  Strategies to improve efficiency: –  Process scaling: improve geometrical Fill-Factor –  Thinning: improve efficiency for low-energy particles (e.g.: beta-emitters)

§  Dark count reduction: –  Reduce DCR of single layer: process tailoring (dedicated

implantations) –  Reduce contaminations (imaging process)

§  Large areas: –  Through-Silicon Vias (TSV): buttable modules

14 P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa  

Page 15: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

P.  S.  Marrocchesi  –  180703  -­‐  INFN  sez.  di  Pisa   15  

Page 16: Array of Silicon Avalanche Pixels (ASAP) · Ø Brief status report and perspectives Ø FTE Ø Richieste in sezione P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 2. APIX particle

ASAP: Richieste di servizi in sezione per il 2019  

•  Supporto  gruppo  alte-­‐tecnologie  (micro-­‐bonding)  

•  Supporto  progetazione  eletronica  (2  mesi  uomo)  

•   Officina  Meccanica  (0.5  mese  uomo)  meccanica  test  arRcles    

     

16  P.  S.  Marrocchesi  –  170705  -­‐  INFN  sez.  di  Pisa