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University of Siena & INFN Pisa
University of Trento & TIFPA University of Padova & INFN Padova
University of Pavia & INFN Pavia
Array of Silicon Avalanche Pixels (ASAP)
P. S. Marrocchesi – 170705 -‐ INFN sez. di Pisa
Outline
Ø Sensor concept and architecture
Ø Brief status report and perspectives
Ø FTE
Ø Richieste in sezione
2 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
APIX particle detector concept
Discriminators
Coincidence detector
Quenching Particle detection
Dark counts
Basic idea: Use of two Geiger-mode avalanche detectors (SPADs) in coincidence to detect particles l Digital read-out l Reduced Dark Count Rate: DCR = DCR1 * DCR2 * 2ΔT l Timing performances l Low power consumption l Low material budget
3 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
APIX demonstrator: pixel cross-section
è CMOS process allow integrated electronics (not feasible in SiPM integrated process)
è Metal shielding to avoid optical cross-talk è Vertical interconnection by bump bonding
4 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
APIX pixel array (1st prototype)
43µm x 45µm
40µm x 40µm
35µm x 35µm
30µm x 30µm
l Sensor array of 16 rows x 48 SPADs
l Pixel size: 50 µm x 75 µm
l Total sensor dimensions: 1.2 x 2.4 mm2
Electronics
Detector area
Bonding pad
Shielded detectors Unshielded pixels with different active
area
Array partitioning: l Two SPAD types: p+/nwell and p-
well/n-iso l Different SPAD active areas:
30 – 35 – 40 – 45 micron side l Some unshielded structures for
testing with light l Coincidence between SPAD with the
same size and with different sizes 5 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
APIX final assembly Dark Count Rate
Dark Count Rate for different coincidence time ΔT: 10ns, 1.5ns, 0.75ns
DCRCOINC = DCR1 x DCR2 x 2ΔT
T = 20°C
DCRCOINC = 27 counts/s mm2
6
*
Type 2
P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
Coincidence detection
Count rate in coincidence between two pixels in the same column Normalized rate:
1 2 3 4 5 6 7
Cross-talk
Cross-talk
7 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
Crosstalk vs substrate thickness
8 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
2016 Beam test at CERN SPS North Area (H4 beam line) Two APIX2 sensors under test + silicon Beam Tracker Charged parRcle beams with energy 50, 100, 150, 200 and 300 GeV
4 Si-‐strip detectors
2 APIX2 pixel detectors
6 Si-‐strip detectors
2 HD Si-‐strip detectors
2 HD Si-‐strip detectors
Beam Tracker
On-‐line event display beam – YZ view beam – XZ view
9 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
• Measured efficiency 56.2 ± 5 % (stat+sys)
• Expected (purely geometrical) FF = 52%
• => EffecRve detector efficiency close to 100% (only limited by FF)
• Higher staRsRcs and improved beam tracking accuracy foreseen for next beam test
Efficiency measurement in 6 different fiducial regions
DefiniRon of 6 areas covered by the reconstructed track impact point (IP)
4 different markers: residual between impact point and pixel center in units of σ
10 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
APIX2 imaging: Example of two regions-‐of-‐interest separated by ~ 100 um
• Efficiency close to 100% (only limited by FF)
11 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
Papers and talks [1] N. D'Ascenzo et al, "Silicon avalanche pixel sensor for high precision tracking", 2014 JINST 9 C03027, doi:10.1088/1748-‐0221/9/03/C03027. [2] L. Pancheri et al., “First prototypes of two-‐Rer avalanche pixel sensors for parRcle detecRon”, 14th Vienna Conference on InstrumentaRon, Vienna, Austria, 15 – 19 February 2016. [3] A. Ficorella et al., "Crosstalk mapping in CMOS SPAD arrays," 2016 46th European Solid-‐State Devices Research Conference, ESSDERC, Lausanne, Switzerland, 12 – 15 September 2016. [4] L. Pancheri et al., “VerRcally-‐integrated CMOS Geiger-‐mode avalanche pixel sensors,” 14th Topical Seminar on InnovaRve ParRcle and RadiaRon Detectors (IPRD16), Siena, Italy, 3 -‐ 6 October 2016. [5] L. Pancheri et al., “Two-‐Tier Pixelated Avalanche Sensor for ParRcle DetecRon in 150nm CMOS”, IEEE NSS/MIC, Strasbourg, France, 29 October – 5 November 2016. [6] P. Brogi et al., “ A new Avalanche Pixel Sensor for charged parRcle detecRon (APIX2)”, 7th Young Researcher MeeRng, Torino, Italy, October 24-‐26, 2016 [7] L. Pancheri et al., ”First DemonstraRon of a Two-‐Tier Pixelated Avalanche Sensor for ParRcle DetecRon”, Journal of the Electron Devices Society, Vol. 5 NO.5, September 2017. [8] A. Ficorella et al.,‘Crosstalk CharacterizaRon of a Two-‐Tier Pixelated Avalanche Sensor for Charged ParRcle DetecRon”, IEEE Journal of Selected Topics in Quantum Electronics Vol. 24 Issue 2 (2017.09.21) [9] P. S. Marrocchesi et al., “APiX : a Geiger-‐mode avalanche digital sensor for charged parRcle detecRon“ , IEEE NSS/MIC/RTSD, Atlanta, 21-‐18 October 2017.
12 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
48x48 cells, 75 um pitch, 1 bit memory, 6-parallel readout
24x72 cells, 50 um pitch, 1 bit memory, 3-parallel readout
48x1
1 ce
lls, 7
5 um
pit
ch,
10 b
it c
ount
er
test structures
83% fill factor
43% fill factor
45% fill factor
13 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
2nd prototype delivered by LF in late Spring 2018.
Bump bonding order placed at the end of 2017.
ASAP 2019 run: Improvements w/r to APiX prototypes
§ Strategies to improve efficiency: – Process scaling: improve geometrical Fill-Factor – Thinning: improve efficiency for low-energy particles (e.g.: beta-emitters)
§ Dark count reduction: – Reduce DCR of single layer: process tailoring (dedicated
implantations) – Reduce contaminations (imaging process)
§ Large areas: – Through-Silicon Vias (TSV): buttable modules
14 P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa
P. S. Marrocchesi – 180703 -‐ INFN sez. di Pisa 15
ASAP: Richieste di servizi in sezione per il 2019
• Supporto gruppo alte-‐tecnologie (micro-‐bonding)
• Supporto progetazione eletronica (2 mesi uomo)
• Officina Meccanica (0.5 mese uomo) meccanica test arRcles
16 P. S. Marrocchesi – 170705 -‐ INFN sez. di Pisa