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©2015 SPTS Technologies - Confidential & Proprietary
David Butler
VP of Product Management & Marketing
Aluminium Nitride Piezoelectric
Technology for Next Generation MEMS
2
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ PiezoMEMS in high volume production – BAW
■ Emerging applications for piezoMEMS
■ Microphones
■ Ultrasonic transducers: PMUTS
■ Other applications
■ Processing challenges for AlN MEMS
■ Thickness control
■ Crystal orientation
■ Stress control
■ Summary
Contents
©2015 SPTS Technologies - Confidential & Proprietary
Volume PiezoMEMS Production - BAW
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Two types of filter in any smartphone
■ Surface Acoustic Wave – SAW
■ Bulk Acoustic Wave – BAW
■ BAW uses AlN piezoelectric layers
■ Material “rings” at a set frequency – a filter
■ BAW used for applications > 1.8GHz
■ First appeared with 3G
■ BAW devices manufactured in standard Si fab
■ Avago & Qorvo dominate the market, @90% share
■ Epcos growing fast from a small base
AlN PiezoMEMS Ship in Huge Volumes
5
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ BAW filters shrink as frequency rises
■ Big benefit for 4G/LTE (2.3-2.7GHz and 3.5GHz in future)
■ Low insertion losses, less power consumption
■ Steeper skirts prevent interference
■ Pack signals into smaller bands
Why BAW?
6
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ 41 separate RF bands supported by a smartphone
■ Different countries, different carriers, GSM to 4G
■ 6 to 8 BAW in a smartphone
■ First shipped in ~2005. 8 Billion AlN BAW will ship this year
3G, 4G, 5G…. BAW Growth
7
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ SMR - Solidly Mounted Resonator. Used by Qorvo, Epcos
■ Multi-pair Bragg reflector under AlN
■ W/SiOx bi-layer stack
■ Reflects acoustic wave back into resonator – more efficient
■ FBAR – Film Bulk Acoustic Resonator. The other 50%
■ Replaces Bragg reflector with air gap
■ Used by Avago
SMR BAW - @50% of the Market
©2015 SPTS Technologies - Confidential & Proprietary
Microphones
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Up to 4 MEMS mics in a modern smartphone
■ Large arrays give stronger signal, better pick-up
■ To support large arrays need:
■ High signal to noise ratio (SNR)
■ Tight tolerance, mic to mic
Microphone Content Increasing
iPhone iPhone 3 iPhone 3GS iPhone 4 iPhone 5
1 ECM
microphone
1 ECM
microphone
1 ECM
microphone
2 high SNR
MEMS
microphones
+ 1 MEMS
microphone
for headset
3 high SNR
MEMS
microphones
+ 1 MEMS
microphone
for headset
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ An array focuses on the desired signal
■ Reduces the undesired signal
■ Can locate the target signal in a room
■ Voice control of home appliances
■ Noise cancellation in a phone
■ Best performance needs well matched mics
■ AlN matching is well understood from BAW fabs
Microphone Arrays
11
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Capacitive mic read signal across two near surfaces
■ Surfaces can stick together. Sensitive to dust & moisture
■ In a piezo mic, sound deflects the AlN plates
■ Creates strain, converts into electrical signal
■ Easier to control thickness of plates than a gap
AlN PiezoMEMS Microphones
Capacitive PiezoMEMS
(Vesper)
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Suspend part above silica dust
■ Average particle size 6um
■ Blow dust with compressed air for 10 secs
■ Gently blow out dust from several cm
PiezoMic is Dust Proof
Capacitive microphone Piezo microphone (Vesper)
©2015 SPTS Technologies - Confidential & Proprietary
Ultrasonic Transducers
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ A PMUT looks for ultrasonic echoes
■ Echo strains the AlN membrane and generates a charge
■ Electronics read that charge and amplify it
■ Multiple uses
■ Fingerprint sensor
■ Patterns on a finger give different echoes
■ Chemical sensor
■ Absorbed chemicals change mass of AlN transducer
■ Change frequency of response
■ Fat sensor – personal health
■ Blood screening, bone density.. Personal sonogram
■ Gesture control
■ Ultrasonic signal travels through air
■ Echo from fingertips hovering above phone screen
Piezoelectric Micromachined Ultrasonic
Transducer - PMUT
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Capacitive sensors rely on pushing surfaces together
■ A ridge closes the gap, valley does not. Can be fooled by dirt, moisture
■ A PMUT sensor uses ultrasonic reflections
■ Finger valleys contain air – strong echo
■ Ridges give weak echo
■ Generate a 3D image, with some depth information
■ Impervious to moisture, grime. More foolproof
■ Rapidly growing market – 17% CAGR to $14B by 2020
PMUT Fingerprint Sensors Advantage
UC Davis/Chirp
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ 24x8 PMUT array
■ AlN piezo deposited on wafer, bonded to CMOS wafer
■ 220um well etched from back of MEMS to leave a Si/AlN membrane
■ Generate ultrasonic pulse
■ Apply voltage to deflect AlN membrane & emit pulse
■ Read echo from finger
■ Reflected wave deflects AlN – generates charge
UC Davis/Chirp Fingerprint Sensor
Finger
Valleys – big echo
Ridge – small echo
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Energy harvesters
■ 10’s of uWatts potential with AlN
■ More power needs bigger die – 300mm?
■ Speakers
■ Inertial sensors
■ DETF – Double ended tuning fork. Made of AlN
■ Motion imparts momentum to proof mass - @100ng
■ Strains DETF, either compressive or tensile
■ Strain converted to a signal – detect direction of motion
■ BUT huge installed base for capacitive, tough to displace
Other Potential Applications
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ AlN is the CMOS fab-friendly choice
■ Able to integrate into monolithic device – CMOS MEMS
■ Mature, understood, cost-effective, working
■ Scandium doped AlN now being investigated
■ Higher coupling coefficient than AlN
■ Very expensive material
■ Lead Zirconium Titanate - PZT
■ @10X higher coupling coefficient than AlN
■ Not easy to deposit
■ Not allowed in CMOS fab
Other Piezoelectric Materials?
Film stress, MPa
AlN
Sc-AlN
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Very similar to that required by BAW makers
■ Excellent non-uniformity
■ Thickness dictates frequency of “ring”
■ Best uniformity required to the wafer edge
■ (In BAW, ion beam trimming tunes the layer)
■ The “right” texture, or crystal orientation
■ Measured by XRD, want Full Width Half Max (FWHM) of <1.5°
■ If >2.5°, piezoelectric effect largely lost
■ Stress – the most critical. Across wafer and through layer
■ Stressed membranes can break
■ Stress change through the film can cause a cantilever to curl
Processing Challenges for AlN MEMS
©2015 SPTS Technologies - Confidential & Proprietary
AlN Piezo Processing
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Best performance dictates single wafer processing
■ Isolated modules. AlN sensitive to vacuum contamination
■ Usually configured with pretreat, electrode & AlN dep
AlN Processing Basics
RHSE
Electrode
(Mo, W, AlCu) AlN
Sigma fxP: PVD cluster system for AlN & electrodes
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
AlN PVD Chamber
Reactive sputtering Ar & N2 mix
Platen RF bias for stress control
@150 to 250C
Rotating for NU
Pulse DC on pure Al target AlN is an insulator
Rotating magnetron x, y and z adjustment for NU
Rotation speed for NU
Shutter “no-wafer” pasting with pure Al
Particle & process control
Shielding Roughened for low particles
Cryopump AlN sensitive to contamination
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Deposition rate naturally falls as target ages
■ Target to wafer spacing increases as target consumed
■ Changes in material ejection angles as surface erosion profile develops
■ Software automatically adjusts target power or process time
Adjusting for Target Life
y = -8E-11x4 + 2E-07x
3 - 0.0001x
2 + 0.0086x + 99.5
95.0
95.5
96.0
96.5
97.0
97.5
98.0
98.5
99.0
99.5
100.0
0 100 200 300 400 500
Acc Power (kWhr)
To
oli
ng
Fac
tor
(A/k
W/m
in)
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Rotating magnetron generates eddy currents in target
■ Opposes the magnetic field
■ Biggest effect at edge of target, faster magnet sweep
■ Causes change in target erosion, centre to edge
■ Slow magnetron spin speed in recipe, to balance effect
2nd Order Uniformity Adjustment
0
0.5
1
1.5
2
2.5
3
25 30 35 40
Uniform
ity %
1 S
igm
a
Rotation Speed
Magnetron rotation speed, 200mm wafers
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
Tight Wafer to Wafer Thickness Control
AlN thickness repeatability over 350 200 mm wafers 0.12% 1σ
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ As volume ramps, makers moving to 200mm
■ Steep reduction in AlN thickness at wafer edge on 200 mm wafers
■ Difficult/costly for edge trim correction
■ Common problem for 200 mm AlN using planar rotating magnetron
WIW NU Improvement at 200mm
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
New Uniformity Hardware
Original BKM
B-MAX Process
For one customer, B-MAX gave
a 10-15% increase in yield
200mm wafer
3mm EE
0.24% 1 sigma
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Goal is highly oriented AlN to get piezoelectric effect
■ Grows best on smooth surfaces
■ Use reactive etch before electrode
Crystal Orientation
Smoothing Etch AlN FWHM
“Rough” oxide underlayer No 3.0°
“Rough” oxide underlayer Yes 1.4°
With smoothing etch
Al FWHM = 2.4°
Roughness = 2.2 nm
AlN FWHM = 1.4°
Without smoothing etch
Al FWHM = 5.0°
Roughness = 30 nm
AlN FWHM = 3.0° X
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ RF Bias used to control stress of AlN film
■ More ion bombardment -> more compressive film
■ Control Options
■ Forward Power
■ DC Bias
■ Film Thickness
■ Increasing thickness requires
higher bias for set stress level
AlN Stress Control
Ar+ e- Ar+ e- e-
Matching
Unit 13.56 MHz
Generator
-500
0
500
1000
0 20 40 60 80 100
Platen power (W)
Str
ess (
MP
a)
0
50
100
150
200
0 5 10 15 20 25 30 35 40 45 50
Wafer Count
Str
es
s (
MP
a)
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This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ AlN piezoMEMS in production since 2005
■ Bulk acoustic wave filters in every smartphone
■ Growth will continue with demands for bandwidth
■ New applications emerging, low voltage MEMS
■ More robust microphones
■ Multiple uses for ultrasonic transducers
■ Wearables, IoT… PiezoMEMS activity increasing
■ Processing demands similar to BAW
■ Very tight thickness control with minimum EE
■ More emphasis on stress
■ Active CIP programs at equipment vendors
■ New piezo materials and integration
■ Hardware and process optimization
Summary
31
This presentation and the information contained within it is the property of SPTS Technologies and is confidential. Any duplication, disclosure, distribution, dissemination or copying
of this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of SPTS Technologies. © 2015 SPTS Technologies
■ Matt Crowley - Vesper
■ David Horsley – Chirp and UC Davis
■ David Schnaufer - Qorvo
■ Gianluca Piazza – Carnegie Mellon
■ Emmanuel Quevy – consultant. Founded Si Labs
■ Xavier Rottenburg – imec
Thanks to…