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External Use
SMARTWEB®
Advanced PVD R2R Equipment for
Leading Edge Touch Panel Applications
Reiner Kukla Product Manager Flexible Electronics
Applied Materials
AIMCAL Fall Tech Conference
Oct 23-26, 2011
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AIMCAL Fall Tech Conference Oct 24, 2011 2
1. Introduction
2. Flexible Products Requirements for R2R Coaters
3. SmartWeb® SL for R&D and Pilot Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
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1. Introduction
2. Flexible Products Requirements for R2R Coaters
3. SmartWeb® SL for R&D and Pilot Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
AIMCAL Fall Tech Conference Oct 24, 2011 3
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Applied Materials is the global leader in providing innovative equipment,
services and software to enable the manufacture of advanced semiconductor,
flat panel display and solar photovoltaic products. Our technologies help make
innovations like smartphones, flat screen TVs and solar panels more affordable
and accessible to consumers and businesses around the world. At Applied
Materials, we turn today’s innovations into the industries of tomorrow.
Applied Materials - Who We Are
AIMCAL Fall Tech Conference Oct 24, 2011
4
1970+
Computing
1990+
Communications
2010+
Energy and Environment
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* As of May 23, 2011
Fiscal year-end October 31, 2010
Other information as of Q2 end, May 1, 2011
At A Glance
Applied Materials solar energy system at its campus in
Sunnyvale, CA, is one of the largest corporate solar
power installations in the U.S.
Ticker: Nasdaq: AMAT
Market Cap*: $18.2 billion
Fiscal 2010 Revenue: $9.5 billion
Fiscal 2010 R&D: $1.1 billion
Founded: November 10, 1967
Headquarters: Santa Clara, California
Global Presence: 87 locations in
20 countries
RD&E and/or
Manufacturing
Centers:
Canada, China, Germany,
India, Israel, Italy, Singapore,
Switzerland, Taiwan,
United States
Employees: ~13,100 worldwide
Patents: ~8,200 issued
AIMCAL Fall Tech Conference Oct 24, 2011 5
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Reporting Segments
AIMCAL Fall Tech Conference Oct 24, 2011 6
DISPLAY
Lowering cost and
improving performance of
displays
ENERGY &
ENVIRONMENTAL
SOLUTIONS
Lowering the
cost of electricity
APPLIED GLOBAL
SERVICES
Optimizing output and
efficiency of semiconductor,
display and solar fabs
through services, equipment
and automation software
SILICON SYSTEMS
GROUP
Pursuing growth in
emerging logic,
emerging memory and
packaging technologies
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Applied Materials Large Area R2R Systems
World‘s Largest Roll-to-Roll
Sputter Machine
2.1m wide with 5 cathodes
MultiWeb
First Modular Web Coater
Optimized for Flex Electronics
flexible, versatile, scalable
SmartWeb SL
World‘s Largest & Fastest
Evaporation Metallizers
Up to 4.5m wide, 20 m/sec
TopMet
In Situ Patterning
100μm resolution, 8 m/sec,
on 0.7μm thick polymer
MultiMet
Highest Flexibility Electron
Beam Evaporators for
Blanket & Gradient Oxides
TopBeam
SmartWeb XL
High volume production
up to 12 front side cathodes
Flexible Electronics, Flex PV > 625 R2R Coaters
Installed Worldwide
AIMCAL Fall Tech Conference Oct 24, 2011 7
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AIMCAL Fall Tech Conference Oct 24, 2011 8
1. Introduction
2. Flexible Product Requirements for
R2R Coaters
3. SmartWeb® SL for R&D and Pilot Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
External Use
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2.2 Touch Panels
Increasing demand for interactive
and human-oriented display
Touch panel is hot trend sparked by
Apple’s iPhone, iPad
Rapid market acceptance and strong
worldwide demand
Emerging new technologies to
capture new trends
AIMCAL Fall Tech Conference Oct 24, 2011 9
Source: Apple
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Touch Panel Forecast
10
Source: DisplaySearch Emerging Display Technologies, 2009
16% CAGR (revenue)
~20% CAGR (units)
AIMCAL Fall Tech Conference Oct 24, 2011
In 2011 multiple forecasts confirm an expected CAGR of 16-18% for Touch Panels in total for next 5 years,
with an increasing share of flexible vs rigid ITO electrodes
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11 AIMCAL Fall Tech Conference Oct 24, 2011
Touch Panel Market Trend Multi-Touch: Lots of new applications, e.g. rotating, enlarging of
details, finger painting, playing piano,…
Mobile to large size: From handheld devices to large stationary
installations like 60 inch diameter TV Screens
Window 7 supports multi-touch screen
Source: Visual Planet, DisplaySearch
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Capacitive and Resistive Serve 90% of Market
Projected - Capacitive type
Need both X and Y ITO patterning
ITO on glass or film depending on applications
Illustration courtesy of Elo TouchSystems
Analog Resistive type
Multi-Touch Single-Touch
AIMCAL Fall Tech Conference Oct 24, 2011 12
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• Modularity
- Possibility to add functions (pre-, post-treatment, Interleaf,
load locks,….) /cathodes
- Possibility to use/exchange different cathode types
DC, AC, planar, rotatable
• „Clean Room compatibility‟
• Minimum Moving Parts on Top of Coating Drum, especially
no Unwinder, Rewinder (main source of particles)
• No Sputter-Down
• Minimized Number of Guide Rollers
• In-Situ Diagnostics for Quality Control
• Scalability
Design Requirements for Flex Electronics
AIMCAL Fall Tech Conference Oct 24, 2011 13
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AIMCAL Fall Tech Conference Oct 24, 2011 14
1. Introduction
2. Flexible Products Requirements for R2R Coaters
3. SmartWeb® SL for R&D and Pilot
Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
External Use
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SmartWeb Product Family
• Web Width: 400 – 600 – 800mm
• 3 cathodes per drum
• 1 or 2 drum system
• Web Width: 1000 – 1400mm
• 6 cathodes per drum
• 1 or 2 drum system
SmartWeb SL
SmartWeb XL
AIMCAL Fall Tech Conference Oct 24, 2011 15
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Modular Roll Coater SmartWeb SL Unwinder, 1 Process Module with 3 Process Stations, Rewinder
AIMCAL Fall Tech Conference Oct 24, 2011 16
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Optimized for High Volume Production
AIMCAL Fall Tech Conference Oct 24, 2011 17 17
Rapid Roll Exchange
Eliminates Need to Open
Main Process Chamber
• Load Lock Capability
• Tension Isolation
• Interleaf Option
• Metal & Polymer Foils
• Web Thicknesses 6~500μm
• Line Speeds 0.1~20 m/min
• Forward & Backward Operation
• Scratch & Wrinkle-Free Handling
< 1 minute
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Easy Access for Target/Shield Change, Service
SmartWeb 6-800: 2 Process Module, 6 Process Stations
18 AIMCAL Fall Tech Conference Oct 24, 2011
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AIMCAL Fall Tech Conference Oct 24, 2011 19
Wide Variety of High Performance Sources
19
TwinMag™ planar AC cathodes for dielectrics
TwinMag rotatable AC cathodes for dielectrics.
High utilization DC planar cathodes
Super-high utilization DC rotatable cathodes
Delivering Flexible Process Capability
In-situ pre-clean sources
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DC Rotatable Cathode – Principle Setup
Su
bs
trate
Continuous rotation during sputtering cleans the entire target surface
AIMCAL Fall Tech Conference Oct 24, 2011 20
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DC Rotatable Cathodes
No re-deposition on the ITO surface no nodules !!
Target surface remains clean until end of lifetime
AIMCAL Fall Tech Conference Oct 24, 2011 21
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Completely Interchangeable Cathodes
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AIMCAL Fall Tech Conference Oct 24, 2011 23
Integrated Optical Process Monitoring
Insitu spectrometer for transmittance
spectrometer
control panel
measuring heads
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In-Situ Process Monitoring Optoplex for Spectral Reflectance, Transmission & Absorption
AIMCAL Fall Tech Conference Oct 24, 2011 24
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AIMCAL Fall Tech Conference Oct 24, 2011 25
1. Introduction
2. Flexible Products Requirements for R2R Coaters
3. SmartWeb® SL for R&D and Pilot Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
External Use
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AIMCAL Fall Tech Conference Oct 24, 2011 26
Expanding Market Scaling Production
26
SmartWeb
3-400 SmartWeb
6-800
SmartWeb
1400
Visual Planet Apple i-phone
External Use
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AIMCAL Fall Tech Conference Oct 24, 2011 27
Design Simplicity – Scaled Up
SmartWeb 6-800
SmartWeb XL 12-1400
800 mm
Sputter Width
1400 mm
Sputter Width
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SmartWeb XL Service Platforms
AIMCAL Fall Tech Conference Oct 24, 2011 28
External Use
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SmartWeb Performance in Mass Production of Touch Panel Layer Stacks
AIMCAL Fall Tech Conference Oct 24, 2011 29
Pressure < 6E-6 mbar in 40 Min from door close
Customer A
External Use
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ITO Deposition Rate and Uniformity
All numbers in nm*m/min
Average Min Max
Before
long run 42.8 42.5 43.6
Before
long run 44.0 43.5 44.6
After
long run 42.7 42.0 43.3
After long
run 43.6 43.1 44.0
in100 mm
35
36
37
38
39
40
41
42
43
44
45
0 2 4 6 8 10 12 14
Ra
te /
nm
*m/m
in
Cross-Web Measurement Position
ITO DDR before and after long Run
before long run
before long run
after long run
after long run
Good Cross Web Uniformity, stable over full roll length
AIMCAL Fall Tech Conference Oct 24, 2011 30
External Use
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Common Touch Panel Coating Types
AIMCAL Fall Tech Conference Oct 24, 2011 31
Different layer stacks with ITO and optically active multi-layers
Need more transparent and functional (e.g AR) layers in one pass
Need to drive down the manufacturing cost (10% price decrease / year)
SiO2 / ITO Resistive 2 layer stack
Low b* value, b * 0
Resistive & Capacitive 3 layer stack
High Transparency
T @ 550 nm ≥ 93 %
Resistive & Capacitive
3 layer stack
“Invisible” ITO Capacitive 4 layer stack
Virtually All Touch Panels Today Use ITO
as the Preferred Transparent Conductor
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“Invisible ITO” for Projective Capacitive TP
AIMCAL Fall Tech Conference Oct 24, 2011 32
PET
(HardCoat)
SiO2
ITO
RITO REtch
PET
(HardCoat)
SiO2
ITO
X-Layer
Y-Layer
4-layer system
RITO REtch
Random
Memory
Rearside
Substrate : 1.60 Glas / Medium : 1 / Incidence Angle : 0 / With Rearside Reflection / Without Outer Substrate / Without Beam Reverse
WAVELENGTH [nm]
800780760740720700680660640620600580560540520500480460440420400
RE
FLE
CTA
NC
E in
%
50
48
46
44
42
40
38
36
34
32
30
28
26
24
22
20
18
16
14
12
10
8
6
4
2
0
Calculated Reflectance of SiO2 + ITO and SiO2 for touch panels
RSiO2+ITO
RSiO2
Random
Memory
Rearside
Substrate : 1.60 Glas / Medium : 1 / Incidence Angle : 0 / With Rearside Reflection / Without Outer Substrate / Without Beam Reverse
WAVELENGTH [nm]
800780760740720700680660640620600580560540520500480460440420400
RE
FL
EC
TA
NC
E in
%
24
22
20
18
16
14
12
10
8
6
4
2
0
RSiO2+X+Y+ITO
RSiO2+X+Y
Calculated Reflectance of SiO2 + X+ Y in comparison with
SiO2 + X + Y+ ITO
4-layer system
External Use
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SmartWeb XL Provides Highest Productivity
Layer system
(400 W / q )
Typical Coating
Speed
(1 process module)
Annual Productivity
(1300mm width)
SiO2 / ITO 6 m / min 2.5 M m2 / year
Low b* value
b * 0 3 m / min 1.4 M m2 / year
High transmittance
T @ 550 nm = 93 % 2 m / min 1.1 M m2 / year
Invisible ITO 2 m / min 1.1 M m2 / year
AIMCAL Fall Tech Conference Oct 24, 2011 33
Large Scale and Reliable Production Drives Cost Down
Actual system speeds and annual productivity depend on customer –specific production requirements and system usage
External Use
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B 0
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AIMCAL Fall Tech Conference Oct 24, 2011 34
1. Introduction
2. Flexible Products Requirements for R2R Coaters
3. SmartWeb® SL for R&D and Pilot Production
4. SmartWeb XL for Mass Production
5. Summary
Agenda
External Use
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B 0
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R 6
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SmartWeb Product Family
• Web Width: 400 – 600 – 800mm
• 3 cathodes per drum
• 1 or 2 drum system
• Web Width: 1000 – 1400mm
• 6 cathodes per drum
• 1 or 2 drum system
SmartWeb SL
SmartWeb XL
AIMCAL Fall Tech Conference Oct 24, 2011 35
External Use
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B 0
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B 57
R 155
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B 255
R 146
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B 0
R 75
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B 75
R 6
G 30
B 60
The SmartWeb Platform
‘Cleanroom compatible’ design
Minimized number of guide rollers
Minimized number of parts on top of coating drum
No Sputter-Down
Unwinder and Rewinder in separate chambers aside process module
Scratch free and wrinkle free web winding
Modular Architecture, prepared to add hardware for future requirements
Same components from R&D to pilot production to large volume
Optimized deposition source for each material: planar, rotatable, AC, DC
In-situ measurement of electrical and optical layer parameters
Recipe handling, data logging
Production proven in Touch Panel industry
AIMCAL Fall Tech Conference Oct 24, 2011 36 36
Designed for high quality at high reliability and minimum effective cost
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