ELECTRONICS

Purified Graphite Silicon Carbide Graphite

Enhancement

Innovative solutions for the Semiconductor Industry

Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: semicon@mersen.com H

T25

GB

0111

Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811

A GLOBAL PLAYER

A WORLD EXPERTin materials and solutionsfor high temperature processes

Main production sites

Industrial or commercial branch

St-Marys, USA

Holytown, Scotland UK

Gennevilliers, France

Chongqing, China

www.mersen.com

Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative

solutions to address its clients specific

needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.

Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40

A wide range of high purity products

7 2

Silicon Carbide coating

Pyrocoating and bulk pyrocarbon

Carbon / Carbon AEROLOR®

Rigid carbon insulation CALCARB®

Flexible graphite

Vitreous carbon impregnation

Glassy carbon

Reference TmaxDensity Open Rf(MPa)CTECoatingthicknessHardnessYoung porosity 10-6°C-1 modulusGPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop

liquids

Grade Density Grainsize Porosity FS CTE, Resistivity Therma micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C

2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100

*askforspecificsize

Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%

XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk

ReferenceDensityOpenporosityCTESizeV251.4502810limitedto3mmwallthickness

ReferenceDensityFS(MPa)Flexuralmodulus(GPa)MaximumSizeA2521.70100 10 Tubelength3000mm Ringø2200mm

ReferenceDensityThermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm

ReferenceThicknessmmWidthDensityEmissivityCoefficientPAPYEX®0.5to1.51000mm1.0 0.74

Reference Tmax Depthofimpregnation

VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm

For your wafer quality get our Ultra High Purity

Gas tight, tohermeticcoatings,are renownspecialitiesofMersen topreventundesiredwaferdoping.

Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,epitaxyreactorsMOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…

Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.

Mersen’scleanroompackagingallowsforstraightuseincustomer’scleanrooms.

High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.

Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.

ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.

Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7

Purity Ash content (ppm)

Purified graphite

Specialties

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 1 31/05/11 17:10

ELECTRONICS

Purified Graphite Silicon Carbide Graphite

Enhancement

Innovative solutions for the Semiconductor Industry

Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: semicon@mersen.com H

T25

GB

0111

Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811

A GLOBAL PLAYER

A WORLD EXPERTin materials and solutionsfor high temperature processes

Main production sites

Industrial or commercial branch

St-Marys, USA

Holytown, Scotland UK

Gennevilliers, France

Chongqing, China

www.mersen.com

Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative

solutions to address its clients specific

needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.

Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40

A wide range of high purity products

7 2

Silicon Carbide coating

Pyrocoating and bulk pyrocarbon

Carbon / Carbon AEROLOR®

Rigid carbon insulation CALCARB®

Flexible graphite

Vitreous carbon impregnation

Glassy carbon

Reference TmaxDensity Open Rf(MPa)CTECoatingthicknessHardnessYoung porosity 10-6°C-1 modulusGPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop

liquids

Grade Density Grainsize Porosity FS CTE, Resistivity Therma micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C

2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100

*askforspecificsize

Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%

XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk

ReferenceDensityOpenporosityCTESizeV251.4502810limitedto3mmwallthickness

ReferenceDensityFS(MPa)Flexuralmodulus(GPa)MaximumSizeA2521.70100 10 Tubelength3000mm Ringø2200mm

ReferenceDensityThermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm

ReferenceThicknessmmWidthDensityEmissivityCoefficientPAPYEX®0.5to1.51000mm1.0 0.74

Reference Tmax Depthofimpregnation

VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm

For your wafer quality get our Ultra High Purity

Gas tight, tohermeticcoatings,are renownspecialitiesofMersen topreventundesiredwaferdoping.

Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,epitaxyreactorsMOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…

Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.

Mersen’scleanroompackagingallowsforstraightuseincustomer’scleanrooms.

High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.

Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.

ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.

Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7

Purity Ash content (ppm)

Purified graphite

Specialties

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 1 31/05/11 17:10

6

From semiconductor material making

Polysilicon reactors Crystal growing furnace equipment

Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers

Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust

Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto

highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic

conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes

Athightemperature, grainforcooling conductivity

imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®

2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®

andISOLOR®

... to wafer processing

Requiredfunctions

Products

SolutionsBestChoiceBestValue

Products

Applicationexamples

Requiredfunctions

SolutionsBestChoiceBestValue

Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis

Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab

Singlewafersusceptors forsemiconductors targets crucibles accessories

MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess

Lowercontamination

CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating

Applicationexamples

HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)

ThermaltransferThermalConductivityλ

ChemicalinertiaCoatingthickness,Porediameter

Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)

Bestchoicebestvalue

fundamental reasons for you to get the best value from the best solution:

OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:

Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.

Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytosystemsinaccordancewitheverdemandingdimensionalrequirements.

Mersen knows how to tune their performance to the heaviest thermal shocks, whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.

Toshortencustomerprocesstime,Mersenfeaturesarangeofspecial lightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.

10

5

1

10000

Refractory Alloy

Relativescale

SiCGraphite

CMg0

Mo

2000 3000 0

C

PyC

Al203

g/cm3

Ti

Steel

Mo

W

5 10 15 20

Copper

Iron

Kovar

Mo

Glass

W

Carbon

Graphite

0 2 4 6 8 10 12 14 16 18

10-6/C

+100%

+50%

0%

-50%

-100%0 500 1000

Thermal expansion

Thermal conductivity

1500 2000 2500 3000

Resistivity

Mechanicalstrength

12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:

for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.

Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.

Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.

Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.

Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12

0 100 200 300 400

W/m/C

Copper

Ti

Al

Graphite

Iron

Al203

Steel

W/m/°C

Grades

0 20 40 60 80 100 120 140

2340 102

852450

1062120

1122123

1042114

1222320

852020

1162191

772910

2318 81

3

Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.

4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproducedbytheworldwideleaderMersen,inlargequantities,throughalean organization at a lowest cost and according to the highest qualitystandards.

5

Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6

Mersen a strong material Specific flexual strength (Mpa kg/m3 vs temperature)

Mersen wide range of thermal expansion coefficients meet most interface

requirements

Graphite a light refractory meterial

Comparison of thermal conductivities Thermal conductivity

Graphite meterials typical main characteristics variation versus temperature to room

temperature properties

53 4

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 2 31/05/11 17:10

6

From semiconductor material making

Polysilicon reactors Crystal growing furnace equipment

Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers

Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust

Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto

highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic

conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes

Athightemperature, grainforcooling conductivity

imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®

2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®

andISOLOR®

... to wafer processing

Requiredfunctions

Products

SolutionsBestChoiceBestValue

Products

Applicationexamples

Requiredfunctions

SolutionsBestChoiceBestValue

Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis

Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab

Singlewafersusceptors forsemiconductors targets crucibles accessories

MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess

Lowercontamination

CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating

Applicationexamples

HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)

ThermaltransferThermalConductivityλ

ChemicalinertiaCoatingthickness,Porediameter

Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)

Bestchoicebestvalue

fundamental reasons for you to get the best value from the best solution:

OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:

Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.

Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytosystemsinaccordancewitheverdemandingdimensionalrequirements.

Mersen knows how to tune their performance to the heaviest thermal shocks, whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.

Toshortencustomerprocesstime,Mersenfeaturesarangeofspecial lightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.

10

5

1

10000

Refractory Alloy

Relativescale

SiCGraphite

CMg0

Mo

2000 3000 0

C

PyC

Al203

g/cm3

Ti

Steel

Mo

W

5 10 15 20

Copper

Iron

Kovar

Mo

Glass

W

Carbon

Graphite

0 2 4 6 8 10 12 14 16 18

10-6/C

+100%

+50%

0%

-50%

-100%0 500 1000

Thermal expansion

Thermal conductivity

1500 2000 2500 3000

Resistivity

Mechanicalstrength

12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:

for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.

Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.

Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.

Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.

Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12

0 100 200 300 400

W/m/C

Copper

Ti

Al

Graphite

Iron

Al203

Steel

W/m/°C

Grades

0 20 40 60 80 100 120 140

2340 102

852450

1062120

1122123

1042114

1222320

852020

1162191

772910

2318 81

3

Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.

4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproducedbytheworldwideleaderMersen,inlargequantities,throughalean organization at a lowest cost and according to the highest qualitystandards.

5

Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6

Mersen a strong material Specific flexual strength (Mpa kg/m3 vs temperature)

Mersen wide range of thermal expansion coefficients meet most interface

requirements

Graphite a light refractory meterial

Comparison of thermal conductivities Thermal conductivity

Graphite meterials typical main characteristics variation versus temperature to room

temperature properties

53 4

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 2 31/05/11 17:10

6

From semiconductor material making

Polysilicon reactors Crystal growing furnace equipment

Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers

Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust

Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto

highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic

conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes

Athightemperature, grainforcooling conductivity

imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®

2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®

andISOLOR®

... to wafer processing

Requiredfunctions

Products

SolutionsBestChoiceBestValue

Products

Applicationexamples

Requiredfunctions

SolutionsBestChoiceBestValue

Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis

Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab

Singlewafersusceptors forsemiconductors targets crucibles accessories

MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess

Lowercontamination

CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating

Applicationexamples

HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)

ThermaltransferThermalConductivityλ

ChemicalinertiaCoatingthickness,Porediameter

Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)

Bestchoicebestvalue

fundamental reasons for you to get the best value from the best solution:

OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:

Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.

Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytosystemsinaccordancewitheverdemandingdimensionalrequirements.

Mersen knows how to tune their performance to the heaviest thermal shocks, whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.

Toshortencustomerprocesstime,Mersenfeaturesarangeofspecial lightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.

10

5

1

10000

Refractory Alloy

Relativescale

SiCGraphite

CMg0

Mo

2000 3000 0

C

PyC

Al203

g/cm3

Ti

Steel

Mo

W

5 10 15 20

Copper

Iron

Kovar

Mo

Glass

W

Carbon

Graphite

0 2 4 6 8 10 12 14 16 18

10-6/C

+100%

+50%

0%

-50%

-100%0 500 1000

Thermal expansion

Thermal conductivity

1500 2000 2500 3000

Resistivity

Mechanicalstrength

12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:

for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.

Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.

Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.

Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.

Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12

0 100 200 300 400

W/m/C

Copper

Ti

Al

Graphite

Iron

Al203

Steel

W/m/°C

Grades

0 20 40 60 80 100 120 140

2340 102

852450

1062120

1122123

1042114

1222320

852020

1162191

772910

2318 81

3

Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.

4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproducedbytheworldwideleaderMersen,inlargequantities,throughalean organization at a lowest cost and according to the highest qualitystandards.

5

Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6

Mersen a strong material Specific flexual strength (Mpa kg/m3 vs temperature)

Mersen wide range of thermal expansion coefficients meet most interface

requirements

Graphite a light refractory meterial

Comparison of thermal conductivities Thermal conductivity

Graphite meterials typical main characteristics variation versus temperature to room

temperature properties

53 4

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 2 31/05/11 17:10

6

From semiconductor material making

Polysilicon reactors Crystal growing furnace equipment

Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers

Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust

Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto

highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic

conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes

Athightemperature, grainforcooling conductivity

imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®

2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®

andISOLOR®

... to wafer processing

Requiredfunctions

Products

SolutionsBestChoiceBestValue

Products

Applicationexamples

Requiredfunctions

SolutionsBestChoiceBestValue

Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis

Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab

Singlewafersusceptors forsemiconductors targets crucibles accessories

MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess

Lowercontamination

CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating

Applicationexamples

HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)

ThermaltransferThermalConductivityλ

ChemicalinertiaCoatingthickness,Porediameter

Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)

Bestchoicebestvalue

fundamental reasons for you to get the best value from the best solution:

OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:

Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.

Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytosystemsinaccordancewitheverdemandingdimensionalrequirements.

Mersen knows how to tune their performance to the heaviest thermal shocks, whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.

Toshortencustomerprocesstime,Mersenfeaturesarangeofspecial lightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.

10

5

1

10000

Refractory Alloy

Relativescale

SiCGraphite

CMg0

Mo

2000 3000 0

C

PyC

Al203

g/cm3

Ti

Steel

Mo

W

5 10 15 20

Copper

Iron

Kovar

Mo

Glass

W

Carbon

Graphite

0 2 4 6 8 10 12 14 16 18

10-6/C

+100%

+50%

0%

-50%

-100%0 500 1000

Thermal expansion

Thermal conductivity

1500 2000 2500 3000

Resistivity

Mechanicalstrength

12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:

for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.

Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.

Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.

Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.

Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12

0 100 200 300 400

W/m/C

Copper

Ti

Al

Graphite

Iron

Al203

Steel

W/m/°C

Grades

0 20 40 60 80 100 120 140

2340 102

852450

1062120

1122123

1042114

1222320

852020

1162191

772910

2318 81

3

Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.

4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproducedbytheworldwideleaderMersen,inlargequantities,throughalean organization at a lowest cost and according to the highest qualitystandards.

5

Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6

Mersen a strong material Specific flexual strength (Mpa kg/m3 vs temperature)

Mersen wide range of thermal expansion coefficients meet most interface

requirements

Graphite a light refractory meterial

Comparison of thermal conductivities Thermal conductivity

Graphite meterials typical main characteristics variation versus temperature to room

temperature properties

53 4

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 2 31/05/11 17:10

ELECTRONICS

Purified Graphite Silicon Carbide Graphite

Enhancement

Innovative solutions for the Semiconductor Industry

Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: semicon@mersen.com H

T25

GB

0111

Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811

A GLOBAL PLAYER

A WORLD EXPERTin materials and solutionsfor high temperature processes

Main production sites

Industrial or commercial branch

St-Marys, USA

Holytown, Scotland UK

Gennevilliers, France

Chongqing, China

www.mersen.com

Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative

solutions to address its clients specific

needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.

Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40

A wide range of high purity products

7 2

Grade Density Grainsize Porosity FS CTE, Resistivity Therma micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C

2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100

*askforspecificsize

Silicon Carbide coating

Pyrocoating and bulk pyrocarbon

Carbon / Carbon AEROLOR®

Rigid carbon insulation CALCARB®

Flexible graphite

Vitreous carbon impregnation

Glassy carbon

liquids

For your wafer quality get our Ultra High Purity

Gas tight, tohermeticcoatings,are renownspecialitiesofMersen topreventundesiredwaferdoping.

Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,epitaxyreactorsMOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…

Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.

Mersen’scleanroompackagingallowsforstraightuseincustomer’scleanrooms.

High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.

Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.

ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.

Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7

Purity Ash content (ppm)

Purified graphite

Specialties

Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%

XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk

Reference Density FS(MPa) Flexuralmodulus(GPa) MaximumSize A252 1.70 100 10 Tubelength3000mm Ringø2200mm

Reference Density Thermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm

Reference Thicknessmm Width Density EmissivityCoefficient PAPYEX® 0.5to1.5 1000mm 1.0 0.74

Reference Tmax Depthofimpregnation

VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm

Reference Density Openporosity CTE Size V25 1.45 0 2810-6 limitedto3mmwallthickness

Reference Tmax Density Open Rf(MPa) CTE Coatingthickness Hardness Young porosity 10-6°C-1 modulus GPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop

0511-XXX-broch_HT25GB_4vts_810x297-31/05/2011.indd 1 31/05/11 18:25

ELECTRONICS

Purified Graphite Silicon Carbide Graphite

Enhancement

Innovative solutions for the Semiconductor Industry

Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: semicon@mersen.com H

T25

GB

0111

Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811

A GLOBAL PLAYER

A WORLD EXPERTin materials and solutionsfor high temperature processes

Main production sites

Industrial or commercial branch

St-Marys, USA

Holytown, Scotland UK

Gennevilliers, France

Chongqing, China

www.mersen.com

Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative

solutions to address its clients specific

needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.

Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40

A wide range of high purity products

7 2

Silicon Carbide coating

Pyrocoating and bulk pyrocarbon

Carbon / Carbon AEROLOR®

Rigid carbon insulation CALCARB®

Flexible graphite

Vitreous carbon impregnation

Glassy carbon

Reference TmaxDensity Open Rf(MPa)CTECoatingthicknessHardnessYoung porosity 10-6°C-1 modulusGPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop

liquids

Grade Density Grainsize Porosity FS CTE, Resistivity Therma micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C

2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100

*askforspecificsize

Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%

XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk

ReferenceDensityOpenporosityCTESizeV251.4502810limitedto3mmwallthickness

ReferenceDensityFS(MPa)Flexuralmodulus(GPa)MaximumSizeA2521.70100 10 Tubelength3000mm Ringø2200mm

ReferenceDensityThermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm

ReferenceThicknessmmWidthDensityEmissivityCoefficientPAPYEX®0.5to1.51000mm1.0 0.74

Reference Tmax Depthofimpregnation

VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm

For your wafer quality get our Ultra High Purity

Gas tight, tohermeticcoatings,are renownspecialitiesofMersen topreventundesiredwaferdoping.

Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,epitaxyreactorsMOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…

Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.

Mersen’scleanroompackagingallowsforstraightuseincustomer’scleanrooms.

High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.

Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.

ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.

Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7

Purity Ash content (ppm)

Purified graphite

Specialties

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