13
OOFCC-30 A Machine Approach for Field Weakening of Permanent- Magnet Motors John S. Hsu *Oak Ridge National Laboratory Copyright @ 1998 Society of Automotive Engineers, Inc. ABSTRACT The commonly known technology of field weakening for permanent-magnet (PM) rnciom is achieved by controlling ihe direct-axis current component through an inverfer, Wfhout using mechanical variation of the air gap, a new machine approach for field weakening of PM machines by direct control of air-gap fluxes is introduced, The dernagnstizaticm situation due to fie/d weakening is not an issue with this new method. In fact, the PMs are strengthened at field weakening. The field-weakening ratio can reach 10: f or higher. This teci-motogy is parficulady useful for the PM generators and electric vehicle drives. INTRODUCTION When a vetticle is cruising at high speed, the required torque is normally low, and the supply voltage to the motor has a certain limit. Therefore, field weakening is an essential requirement for motors used for electric vehicle drive. The field weakening can be obtained easily for an induction motor when its supply frequency IS increased without proportionally increasing the motor terminal voltage. On the contrary, from the word “permanent,” the motor terminal voltage may not easily be reduced when the supply frequency goes up. The field weakening is not an inherent property of PM motors. Various relatively complex approaches for obtaining field weakening of PM motors exist, For PM generators, if their field can be controlled, the need of using a buck-boost converter to control the generator output voltage measured at the direct current (DC) link and then using the inverter to change back to alternating current could be eliminated, There are ideas on adjus!ing the air gap mechanically for field weakening of PM motors, However, their mechanical instability may cause a certain concern. Chan et al. [1] introduced the use of transformer electromotive force (emf) to oppose the rotational emf by purposely producing a slope on the armature current. Certain torque ripples would be generated. Sebastian and Slemon proposed that with optimum alignment of the stator and magnet fields, maximum torque per ampere is achieved up to a break-point speed [2]. Operation at higher speeds with reduced torque is achieved by adjustment of the current angle to reduce the effective magnet flux (i.e., the equivalent of field weakening). Sozer and Torrey [3] presented an approach for adaptive control of the surface mount PM motor over its entire speed range. The adaptive flux- weakening scheme is able to determine the right amount of direct-axis current at any operating condition. Namuduri and Murty [4] focused their discussion on the pulse-width-modulation (PWM) strategy and the microcontroller system that implements the phase-angle control scheme. The authors concluded that though the PM motors were not designed for field weakening by phase-angle control, experiments showed that the torque at no-load speed can be increased significantly with phase advance, at the expense of increased motor losses. Soong and Miller [5] based their study on the work by Morimoto et al. [6] for the maximum torque field-weakening control. They concluded that the optimal high-saliency interior PM motor design is the most promising for applications requiring a wide field- weakening range, Prepared by the Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, managed by Lockheed Martin Energy Research Corp. for the U. S. Depamnent of Energy under contract DE-AC05-960R22464. The submitted manuscript has been authored by a contractor of the U. S, Government under contract No. DE-AC05-960R22464. Accmdingfy, the U. S. Government retains a nonexclusive, royalty-free license to publish or reproduce the published form of this contribution, or allow others to do so, for U. S. Government purposes.

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OOFCC-30

A Machine Approach for Field Weakening of Permanent-Magnet Motors

John S. Hsu

*Oak Ridge National Laboratory

Copyright @ 1998 Society of Automotive Engineers, Inc.

ABSTRACT

The commonly known technology of fieldweakening for permanent-magnet (PM) rnciom isachieved by controlling ihe direct-axis currentcomponent through an inverfer, Wfhout usingmechanical variation of the air gap, a new machineapproach for field weakening of PM machines by directcontrol of air-gap fluxes is introduced, Thedernagnstizaticm situation due to fie/d weakening is notan issue with this new method. In fact, the PMs arestrengthened at field weakening. The field-weakeningratio can reach 10: f or higher. This teci-motogy isparficulady useful for the PM generators and electricvehicle drives.

INTRODUCTION

When a vetticle is cruising at high speed, therequired torque is normally low, and the supply voltageto the motor has a certain limit. Therefore, fieldweakening is an essential requirement for motors usedfor electric vehicle drive. The field weakening can beobtained easily for an induction motor when its supplyfrequency IS increased without proportionally increasingthe motor terminal voltage. On the contrary, from theword “permanent,” the motor terminal voltage may noteasily be reduced when the supply frequency goes up.The field weakening is not an inherent property of PMmotors. Various relatively complex approaches forobtaining field weakening of PM motors exist, For PMgenerators, if their field can be controlled, the need ofusing a buck-boost converter to control the generatoroutput voltage measured at the direct current (DC) linkand then using the inverter to change back to alternatingcurrent could be eliminated,

There are ideas on adjus!ing the air gapmechanically for field weakening of PM motors,

However, their mechanical instability may cause acertain concern.

Chan et al. [1] introduced the use oftransformer electromotive force (emf) to oppose therotational emf by purposely producing a slope on thearmature current. Certain torque ripples would begenerated.

Sebastian and Slemon proposed that withoptimum alignment of the stator and magnet fields,maximum torque per ampere is achieved up to abreak-point speed [2]. Operation at higher speedswith reduced torque is achieved by adjustment of thecurrent angle to reduce the effective magnet flux (i.e.,the equivalent of field weakening).

Sozer and Torrey [3] presented an approachfor adaptive control of the surface mount PM motorover its entire speed range. The adaptive flux-weakening scheme is able to determine the rightamount of direct-axis current at any operatingcondition.

Namuduri and Murty [4] focused theirdiscussion on the pulse-width-modulation (PWM)strategy and the microcontroller system thatimplements the phase-angle control scheme. Theauthors concluded that though the PM motors werenot designed for field weakening by phase-anglecontrol, experiments showed that the torque at no-loadspeed can be increased significantly with phaseadvance, at the expense of increased motor losses.

Soong and Miller [5] based their study on thework by Morimoto et al. [6] for the maximum torquefield-weakening control. They concluded that theoptimal high-saliency interior PM motor design is themost promising for applications requiring a wide field-weakening range,

●Prepared by the Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, managed by Lockheed Martin Energy Research Corp. forthe U. S. Depamnent of Energy under contract DE-AC05-960R22464.The submitted manuscript has been authored by a contractor of the U. S, Government under contract No. DE-AC05-960R22464.Accmdingfy, the U. S. Government retains a nonexclusive, royalty-free license to publish or reproduce the published form of this contribution,or allow others to do so, for U. S. Government purposes.

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ION-BEAM-INDUCED DEFECTS AND DEFECT INTERACTIONS INPEROVSKITE-STRUCTURE TITANATES

W,J. WEBER, W. JLANG, S. THEVUTHASAN, and R.E. WILLIFORDPucij7c Northwest National Laboratoy

Richiand, Washington 99352, USA

A. MEL13RUM and L.A, BOATNEROak Ridge National Labomtoty%&Ridge, Tennessee 37831, L&4

Abstract

Ion-beam irradiation of perovskite structures results in the production and accumulationof defects. Below a critical temperature, irradiation also leads to a crystalline-to-rurmrphous transformation. The critical temperature for amorphizaticm under 800 keVKr+ ion irradiation is 425,440 and 550 K for SrTi@, CaT103 and EtaTi03, respectively.The results of icm-ehanne[ing studies on SrTi03 irradiated with 1.0 MeV Auz+ ionssuggest that the crystalline-to-amorphous transformation is dominated by theaccumulation and interaction of irradiation-induced defects. h SrTi03 irradiated withHe+ and 0+ ions at 180 K, isochronal annealing studies indicate that there is significantrecovery of defects on both the oxygen and cation sublatlices between 200 and 400 K.These results suggest that defeet recovery processes may control the kinetics ofanmrphization. A fit of the direet-impacddefect-stimulated model to the data for Sfli03suggests that the kinetics of amorphization are controlled by both a nearly athermalirradiation-assisted recovmy process with an activation energy of 0.1 * 0.05 eV and athermal defect recovery process with an activation energy of 0.6 + 0.1 eV. In SrTi03implanted with 40 keV H’ to 5.0 x lC)lGand 1.0 x 10’7 ions/cm2, annealing at 470 Kincreases the backseattcring yield from Sr and Ti and is mostly likely due to thecoalescence of Hz into bubble nuclei. Annealing at 570 K and higher results in theformation of blisters or large ckaved areas.

L Introduction

Compounds with the perovskite structure represent a rich class of materials withpotential applications ranging from electronic and optoelectronic devices to theimmobilization of nuclear wastes, Irradiation with energetic ions can be used to modifythe surface and near-surface properties of such materials, introduce new elements anddefwts, induce phase transformations, and study irradiation effmts. Subsequent thermalannealing can lead to full or partial recovery, evolution of new micmstmctures, and the

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determination of activation energies associated with various recovery stages.Consequently, irradiation with energetic ions and subsequent thermal annealing can beused to induce and study a rich set of defects and transformation processes in perovskitesh-uctures that could lead to tmhnologicil advances.

Many oxides with the perovskite structure undergo an irradiation-inducedcrystalline-to-amorphous phase transition [1- 10]; however, the mechanism for thisirradiation-induced amorphization has not yet been identified. In several of thesestudies, thermal annealing was utilized to study the epitaxial regrowth of the ion-beam-induced amorphized layers [1-6,8]. The activation energies for epitaxial reflowth havebeen determined to be 0.95 and 1.85 eV for SrTi03 [4] and CaTiO~ [8], respectively, inmoist (H20) atmospheres. In dry atmospheres, the activation energies for epitaxialregrowth have been determined to increase to 1.2 and 3.9 eV for SrTi03 [4] and CaTiOs[8], respectively. Several perovskite-structure oxides also undergo one or moredisplacive phase transitions at temperatures below the critical temperature forarrmrphization; however, no significant effmts of this transition on amorphization havebeen observed [9].

In the present study, the results for ion-beam-induced disordering in CaTiC)J;SrTi03, and BaTiO~ are reviewed, and new results are presented. In addition, the resultshorn thermal annealing of ion-beam-induced damage in Sfli03 are reported. Some ofthese results have been reported previously [9-1 1].

Z Experimental procedures

As described previously [9], the single crystals of CaTi03 and BaTiO~ used in thestudies conducted by CM Ridge National Laboratory (ORNL) were grown by a fluxtechnique, while the SrTi03 single crystals were grown by flame fusion. Specimens fortransmission electron microscopy (T’EM)were prepared by hand polishing and then ionmilling at 77 K with 4 keV Ar+ ions. The specimens were irradiated at the HVEM-Tandem facility (i.e., in vacuum) at Argonne National Laboratory (ANL) using either0.8 MeV KS+or 0.8 MeV Xe+ at an ion flux of 1.7 x 1012ions/cm2/s. The irradiation-induced amorphization was monitored in situ, using electron diffraction techniques, as afunction of temperature. To facilitate comparisons of dose dependence, the ion fluencefor complete amorphization was normalized to an equivalent displacement dose indisplacements per atom (dpa) using TRIM 97 and a displacement energy of 25 eV.

The SrTiOt single crystals used in the studies at the Pacific Northwest NationalLaboratory (l?NNL) were obtained from Cornmereial Crystal Laboratories, Inc. andwere oriented rdong the [100] axis. Both the accumulation of disorder and subsequentthermal recovery were followed in situ using 2 MeV He+ Rutherford BackscatteringSpectroscopy in channeling geometry @BS/C), as described previously [10]. Thesingle crystals were imdiated at 180 to 200 K with 410 keV Ha+, 400 keV 0+ or 1.0MeV Auw ions at an incident angle of 60”, which produced near-surface damage thatcauld be probed by RBS/C methods. The irradiation and in situ ion-beam analysis werecarried out using the accelerator faciIity at the Environmental Molecular Sciencesbborato~ at PNNL. Single crystals of SI’’1703were also implanted at 120 K with 40keV W ions by Implant Sciences Corporation to ion fluences of 5.0 x 1016and 1.0 x

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1.0

al>“% 0.45a

0.2

i’ 1 1 1 I I

D1/DSModel

‘“%

0.0 1 1 1 1

0.0 0.5 1.0 1.5 2.0

Dose (dpa)

Figure 1. Relativedisorderat the damagepeak in Sr’11~ irradiatedat 200 Kwith 1.0 MeV AU*+ions. Also shown is a tit of Eq. (1) to the data

1017ions/cm2 [11]. These hydrogen-implanted samples were subsequently characterizedand subjected to a thermid annealing study atPNNL. Isoehronal annealing on all thesesamples was performed in situ (i.e., in vacuum] at temperatures ranging from 300 to870 K for time periods of 20 minutes. Mter each annealing step, the sample was cooleddown, and the R13S/C measurements were performed at 300 K. In the case of thehydrogen-implanted samples, hydrogen nuclear reaction analysis (NRA) was alsocanied ouc using the resonant lH(%,UY)’60 reaction, to monitor the hydrogen profile.The sample was in random orientation during the hydrogen profile measurements, andMylar film was used for hydrogen calibration.

3. Results and diSCUSSi031S

3.1. DAMAGE ACCUMULATIC)N

The accumulation of relative disorder as a function of dose (dpa) in SrTi03 irradiatd at200 K with 1.0 MeV Auz+ions is shown in Figure 1. The relative disorder shows a verystrong sigmoickd dependence on dose, and the resulm indicate that the random level (oramorphous state] is reached at a dose of about 1.0 dpa As discussed elsewhere [12],several models of amorphization can be used to describe the sigmoidal behavior shownin Figure 1. One model that has proven useful is the direct-impactidefect-stimulated(DUDS) model for amorphization [12]. In the absence of any recovery prcwesses, theamorphous fraction, ~a,in this model is given by the following expression:

f.= 1- (I3 + q) / {u, + u. exp[(a, + CfJlll}, (1)

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L

SrTiC13

* 0.15 300 K, 13 ham

~.-0~ 0.10

z~

~ 0.05

-“d❑0.00

0.0 0.2 0.4 0.6 0.8 1.0

Pre-Existing Disorder

Figure 2. Recovery of disorder at 300 K (13 hours) as a function of pre-existing disorder in SrTiC)3irradiated at 20UK with 1.0 MeV Auz+ions,

where a~ and q are effective cross sections for direct-impact and defect-stimulatedamorphization, respectively, and D is the dose. A fit of this model to the data is shownin Figure 1 and yieids a value of about 300 for cr~rr~,which is the largest value of thisratio measured to date in this laboratory. This large value for @rg indicates the strongdominance of defmt accumulation in the amorphization process. At low doses (43.3dpa), both arnorphization and interstitial defects contribute to the relative disorder,which may explain why the relative disorder is slightly higher than that indicated by themodel fit in this dose range.

3.2. DAMAGE RECOVERY

The specimens irradiated with 1.0 MeV Au> ions (I&we 1) were subsequentlyannealed at 300 K for 13 hours in order to investigate the amount of rmovery for agiven level of disorder. The amount of recovered disorder as a function of pre-existing,irradiation-induced disorder is shown in Figure 2 and should be proportional to therelative contribution of interstitial defects to the measured disorder. The results indicatethat the maximum recovery probably occurs betwcxm40% and 80% disorder, which iswhere the product of the crystalline fraction, 1-f~, and the concentration of imdiation-induced point defects in the residual crystalline phase reaches a maximum. The relativerecovery at a pre-existing disorder of 1.0 demeaaes with dose, indicating somecontinued defect contribution to the disorder as it initially reaches the random level.

Single crystals of SrTiO~ were irradiated at 180 K to low doses with 410 keV He+or 400 keV 0+ to produce a partially damaged state (<25% disorder at the damagepeak} consisting primady of point defects. The recovery of defects in these sampleswas studied by isochrona! annealing. The recovery behavior for disorder on the oxygensublattice at the damage peak is shown in Figure 3 for SfliC)3 irradiated with 400 keV

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I I I 1 r 1 ( II

SrTi03

400 keV C)+(6x 10’s ionslm’)

1

(20 minute anneals)

I0.0 ~

200 300 400 500 600 700 600 900

Temperature {K)

Figure 3. Isochronalrecove~ on the oxygen sublattice at the damage peakfor SfliOj irrdated with400 keV O’ ions at }80 K.

0+ ions. The results indicate that thermal recovery processes on the oxygen sublatticeare complete after annealing at 475 K for this sample and these irradiation conditions.The results also suggest the presence of two recovery stages on the oxygen sublmtice,with peak recoveries at about 200 and 300 K, respectively. Based on experimentalstudies [13, 14] the.activation energy for migration of oxygen vacancies in single crystalSrTQ is on the order of 0.98 to 1.3 eV, and a computer simulation study of defects inSrTiQ (15] indicates that the oxygen vacancy has a minimum migration energy of 0.65eV. More recently, computer simulation studies at PN_NLindicate that the minimummigration energy for the oxygen interstitial in SrT103 is about 0.2 eV, and furthercomputer simulation studies are in progress. These activation energies for migration ofpoint defects on the oxygen sublattice am consistent with the recovery behaviorobserved in F:gure 3.

Thermal recovery of the disorder on the cation subtattice at the damage peak isshown in Figure 4 for SrTiC)3single crystals irradiated with either410 keV He+ ions or400 keV 0+ ions. The results show a single reeovery stage between 200 and 400 K, andgradual recovery at higher temperatures, which is similar to the recovery behaviorpreviously observed in SrlTQ irradiated with 1.0 MeV AU2+[10] to low ion fluences.Complete recovery on the cation sublattice occurs at temperatures above 900 K. Basedcm computer simulations [15], the cation vacancy migration energies are 2.52 and 11.6eV for Sr and Ti, respectively, which suggests these defects are relatively immobiIeduring irradiation and thermal anneaiing. The results of preliminary computersimulations at PNNL indicate that long-range migration of Sr and Ti interatitials requireactivation energies of 4.34 and 3.33 eV, respectively; however, short-range migrationpathways also exist for Sr and Ti interstitkds with activation energies of 0,96 and 0.87eV, respectively. Such short-range migrations would produce only partial reccwe~from the recombination of close-pairs, which is consistent with the behavior observed

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❑ 410 lteV He+(5x 1019 ions/m2)

o 0 400 keV 0+

(6x 10’8 ionrdmz)

[20 minute anneais}

()~ ~

200 300 400 500 600 700 800 900

Temperature (K)

Figure 4. Isochronai recovery on the cation sublattice for SrTIC+ irradiatedwith 410 keV He+m 400 keV 0+ ions at 180 K.

in Figure 4. Furthermore, oxygen defects will induce minor displacements ofneighboring cations, which will contribute somewhat to the observed disorder on thecation sublattice. Consequently, the recovery of defmts on the oxygen sublattice shouldalso relieve some Ioeal displacive disorder on the cation sublattice.

3.3. TEMPERATURE DEPENDENCE OF AMORPI-IIZATIOI’J

The temperature dependence of the dose necessary to achieve the amorphous state, asdetermiried by TEM techniques, in SrTIO~, CaTiQ, and BaTiO~ irradiated with 800keV Kr+ions has been reported previously [9], and the results are summarized in Figure5. (Note: the dose in Figure 5 has been renormalizd based on a displacement energy of25 eV.) As discussed previously [9], the arnorphization dose is not noticeably affectedby the displacive phase transition at 108 K in SrTi03; in the case of BaTi03, however,the displacive phase transition at 393 K results in a minor de&ease in amorphizationdose with increasing temperature. The critical temperature, T., *eve w~ch the ‘l’’EM-anmrphous state cannot be produced under these irradiation conditions, inereaaes from425 K for SrTiQ. to 550 K for BaTiOj, The critical temperature are summarized inTable 1, along with the temperature, T,, for thermal epitaxial recrystallization of “amorphous layers in these materkds [1,4,8,16]. If a thermal recovery process controlsthe criticaI temperature for amorphization, then Tc will generally exceed thetemperature at which the thermal recovery prooess is nody active (in the absence ofirradiation) because the rate of thermal recovery must balance the damage productionrate [12]. It is clear that thermat epitaxy occurs at temperatures much higher than thecritical temperature for amorphization. Consequently, prwes=s other than maepitaxy should control the critical temperature for amorphization in these materials. Inthe case of SrTi03, the thermal defect recovery “stages that Me observed at 3~ K for

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c1

800 keV Kr+

v Ba170~

o 100 200 300 400 500 600

Temperature [K)

Figure 5, Temperature dependence of dose to read TEM amorphous statein SfliC)3, Callt33, snd BaTiOq irradiated with MU keV Kr+ (adapted from

MeMrum et al. [9])

anions and cations in Figures 3 and 4 could be the recovery processes controlling thecritical temperature. and inhibiting amorphization,

The dose necessary to achieve the TEM amorphous state in SrTi03 irradiated with800 keV Kr+ or 800 keV Xe+ ions is shown in Figure 6 as a function of temperature,Tbe amorphization dose in SrTiOg is relatively independent of irradiation temperaturebelow 200 K. Above this temperature, the amorphization dose increases withtemperature. This onset for an observable effect of temperature on amorphization isconsistent with the onset of thermal defect recovery processes in Figures 3 and 4. The

temperature dependence of the amorphization dose shows only a weak dependence onthe damage-energy density (i.e., ion mass) for these ions and is mostly withinexperimental error. The critical temperature under Kr+ irradiation may be slightly lower(QO K) than under Xe+ irradiation, and this is consistent with a slightly lower damageproduction rate for Kr+ relative to Xc+. The weak dependence of TCon damage-energydensity in Figure 6 is consistent with the critical temperature being controlled by a

TABLE 1. Critical temperature, Tc,for amorphization under irradiation with 800keV Kr+ ions [9] and the temperature, Tn for epitaxial recrystallization.

Material T, (K) T, (K)

SrTiQ 425 575 [1 ,4]

CaTi03 440 685 [8]

BaTiO, 550 <1375 [161

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SrTi03

0 800 keV Kr+

~ 800 keV Xe+

A x x AY Y

01 t 1 t I Io 100 200 300 400

Temperature (K]

Figure 6, Temperature dependenceof dose to reach the TEM amorphousstate in SrTi03 irradiated with WI keV Kr+m MO keV XE+ions.

thermal recovery process, as described previous~y [12]. However, irradiation withlighter ions (lower energy density) may exhibit a decrease in TCas irradiation-assistedrecovery processes bemme dominant [12].

A relationship between dose and temperature to achieve a specific amorphous statebaa been r=ently derived based on the kinetic direct-impaddefect.stimulated modelfor arnorphization [12], which considers both epitaxial recrystallization, KJT), anddefect recombinatiordamihilation, K~T), rates. Since epitaxial recrystallization doesnot appear to play a significant role in the temperature dependence of amorphization inSfli03, the dose to achieve a specific amorphous state in this material is given by theexpression [12]:

D= [D. + A@In{ 1- AK~T)[l - exp(-DJ+A)] )] I [1 - A.KJT)], {2)

where A = [$ (cf*+ ~,)]-’, $ is the ion flux, and DOis the dose to achieve the specificamorphous s~te at O K, Furthermore, as noted eIsewhere [12], the recovery rate in Eq.(2] is the sum of temperature-dependent rate constants for both irradiation-assisted andthermal annealing processes (i.e., KJT) = KIJT) + K~T)], each with its own effectivejump frequency and activation energy. The imtdiation-assisted recovery processes maybe nearly athermal with low activation energies. The result of an iterative fit of Eq. (2)

to the data is shown in Figure 6 and yields activation energies of 0.1 &0.05 eV and 0,6* 0.1 eV for irradiation-assisted and thermal recovery processes, respectively. Theactivation energy of 0.6 f 0.1 eV for the thermal recovery process is consistent with thethermal recovery processes in Figures 3 and 4 and with the calculated activation energyfor oxygen vacancy migration [15].

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2000 ~ I 1 +

I 40 keV H+, 5, CIX111’Sicms/cm2

200 400 600 Boo -

Channel Number

Figure 7. Rf3S/C backscattering spectra from SfliOq after hydrogen impkmtation to5.0 x 1016iondcmzand after isoclmmal annealing.

3.4. EFFECTS OF HYDRC)GEN IMPLANTATION

The channeling spectra from the irradkted and virgin regions are presented as afunction of anneiling temperature, along with the random spech-um, in Figure 7 for anion fluen~ of 5.0 x 1016~/cm2. Clnly the RBS/C speetra from the irradiated regionafter isoehronal annealing at 300, 470 and 570 K are shown to minimize the overlap ofdifferent spectra As expeaed, the irradiation-induced disorder (300 K spectrum) onboth the Ti and Sr sublattiees is rather dilute, The as-implanted hydrogen concentrationprofile and several profiles after annealing are shown in Figure 8. The as-implantedhydrogen concentration profile (300 K) shows a broad profile due to diffusion and amaximum at about 300 nm which according to TRIM calculations is where the peak ofthe implanted hydrogen profile should occur. The measurements indicate that the totalamount of hydrogen within the analyzed region is 4.43 x l(l~bH/cmz, which indicatesthat some hydrogen has diffused to the surface or beyond the analyzed region.Annealing the sampIe to 370 K resulted in a slight increase in the backscattming yieldfrom the Sr and T1 subhttices (not shown) suggesting that there is some increaseddisordering due to annealing, perhaps as a result of hydrogen coalescence. Themaximum in the hydrogen profile after annealing at 370 K shifts to a depth of 275 MO,which is coincident with the darnage peak predicted by TRIM. Furthermore, thehydrogen profile sharpens somewhat after annealing at 370 K, and the total amount ofhydrogen in the analyzed region is reduced slightIy to 4.26 x 1016EUcm2.

The local disorder generated on the Sr and Ti sublattiees is significantly increasednear the damaged peak position after annealing at 470 K (Figure 7). The local disorder

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3.5I 1 1 I I I

40 keV H+ -0--300 K

+ 370 K5.0x10t6 ions/crn2

+ 470 K

--A- 57o K

I I 1 1 k 1 I I-Of 0.0 0.1 0.2 0.3 0.4 0.5 0.6

Depth (~m)

Figure 8, Hydrogen profile, based on nuclear reaction analysis, in SrTK)3 after hydrogenimplantation to 5.0 x 1016ion#cm2 and after isoehronai annealing.

on these two sublattices is well separated in the spectrum and is very prominentcompared to the disorder generated horn implantation damage, The total amount ofhydrogen after annealing at 470 K remains unchanged (4,26 x 1016 Wcmz), Thehydrogen profile indicates some diffusion towards the surface; however, the peak in theprofile at 275 rtrn becomes more pronounced. Since scanning ekdron microscopy(SEM) results indicate the presence of hydrogen blis~rs at higher annealingtemperatures [11], the increase in baekscattering yield at the damage peak is believed tobe caused by the nucleation of Hz bubbles, which locally distort the structure andprovide new scattering surfaces. The shift in the peak of the hydrogen profile tocoincidence with the peak in the damage profile indicates diffusion and trapping of thehydrogen at irradiation-induced defects. Annealing at 570 K results in a significantdecrease in the lU3S/C backscattering yield from the peak damage region, an increase inthe backseattering yield from the surface peak region, and a slight increase in thebackscattering from the region between the surface peak and the damage peak. Thehydrogen profile after annealing at 570 K indicates a significant loss of hydrogen fromthe imphinted region. SEM results indicate that large cleaved areas exist after annealingthis sample. This behavior is similar to the so-called “smart cutting” obsemed in Si[17], which suggests that it maybe possible to produce large cleaved single crystals oftitanate perovskites with a controlled thickness on the order of 50 nm to severalhundred nanometers for research or device applications.

Similar R13S/C and hydrogen profiles have been obtained for an ion fluence of 1,0x 10’7W/cm2. In these samples, annealing at 57(I K results in a much larger increase inthe FU3S/C backscattcring yield across the penetration depth of the implanted hydrogen.The hydrogen profile after annealing at 570 K indicates an increase in the hydrogen

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concentration near the surface region and a drxmase in the total amount of hydrogenwithin the analyzed region, but not a complete loss of hydrogen as observed for 5.0 x10’6 ~/cm2. The sudden increase in the backscattering yield across the penetrationdepth is caused by the deformation of the surface region due to the formation of largehydrogen blisters, which are large enough to misorient the blister surface relative to thesubstrate. Annealing at 670 K reduces the total amount of hydrogen, as the blistersbegin to burst, and after annealing at 770 K, the hydrogen is nearly completely lost.This behavior is due to the blisters bursting and releasing Hz gas, which leads to bothexfoliated blister surfaces and blister caps, as shown by SEM [11].

4. Conclusions

Ion-beam irradiation of SrTiC)l, CaTi03, and BaTiOs results in a crystalline-to-amorphous transformation below a critical temperature. In the case of irradiation with800 keV Kr+ ions, this critical temperature is 425, 440 and 550 K for SrTiOg, CaTiOgand BaTiOg, respectively. Ion-channeling studies of damage accumulation in SrTiOsirradiated with 1.0 MeV Auh ions suggest that the crystallin~to-amorphoustransformation is dominated by the accumulation and interaction of irradiation-induceddefects. In SrTi03 irradiated with He+ and 0+ ions at 180 K, isochronai annealingstudies indicate that there is significant recovery of defects on both the oxygen andcation sublattices between 200 and 400 K. These defect recovery processes may controlthe kinetics of amorphization. A fit of the direct-impactldefect-stimulated model to thedata for SrTiCl~ suggests that the kinetics of amorphization are controlled by both anearly athermrd irradiation-assisted recovery process with an activation energy of 0.1 *0.05 eV and a thertnat defect recovery process with an activation energy of 0.6 * 0.1eV. In SrT~03 implanted with 40 keV ~, annealing at 470 K resuits in increasedbackscattering from Sr and Ti in the damage peak due to the nucleation of H2 bubbles;annealing at 570 K and higher results in the formation of blisters or large cleaved areas.

Ackuowkdgements

This research was sponsored by the US Deptu-tment of Energy through the Division ofMaterials Sciences, Office of Basic Energy Sciences and the EnvironmentalManagement Science Program at both PNNL and ORNL. The work at PNNL wasperformed under Contract DE-AC06-76RL0 1830, rmd the work at ORNL wasperformed under Contract DBAAC05-96C)R. AM also acknowledges support fromNSERC, Canada. This study utilized the axelerator facilities within the EnvironmentalMolecular Sciences Laboratory at PNNL, which is a national scientific user facilitysponsored by the DOE C)filce of Biological and Environmental Research. The authorsalso gratefully acknowledge the staff at the HVEM-Tandem facility @NL) forassistance with the irradiation experiments.

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