A 3D Micromixer Fabrication With Dry Film Resist

Advisor ： Cheng-Hsien Liu Reporter ： Yu-Sheng LinDate ： 2007/04/18

A.D. Radadia1, L. Cao1, H.K. Jeong1, M.A. Shannon2, R.I. Masel1

1Department of Chemical and Biomolecular Engineering, 2Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, USA MEMS 2007 pp.361~364

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Outline

IntroductionFabricationMicro-mixer designResultsConclusions

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Introduction DFR ： Dry Film Resist

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Fabrication

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Micro-mixer Design6 layers

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Compare of wet etching and RIE

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Results

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Microscopic images of (a) 4 patterned layers

(b) 6 patterned layers and a cap layer

Microscopic images during process

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Conclusions

A technique utilizing by dry film resist to build 3D microstructures with 6 layers patterned has been developed.Dry film resist is available in bio-compatible format.Future work will focus on building MEMS devices for biosensing applications.

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Thank you for your attention !

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Woodpile structure

3 layers

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Ref: M.S. Munson, P. Yager, Analytica Chimica ACTA, 2003 pp.63~71