Customer Benefits Applications

• Proven robust technology offering high

reliability

• Compound rotor design that provides high

pumping speed with minimum footprint

• Adjustable rotational speed for optimized

pumping parameters

• 5 axis maglev rotor suspension system

offering :

No contamination

Low level of Noise and Vibration

Installation in any orientation

• High foreline tolerance up to 1.5 Torr

• DN100 or DN160 inlet flange connection

• CE marked and Rohs compliant

• Optical and Mechanical Data Storage• Coating• Electron Microscopy• CVD and PVD• Load lock chambers

Alcatel Vacuum Technology offers a new hybrid turbomolecular vacuum pump with the advanced technology of magnetic bearings for medium sized applications. This compactdesign with integrated control electronics brings the high reliability of 5-axis, mag-lev rotorsuspension to the 300 – 500 liter/sec application range on flanges as small as DN100.

The ATH500M is compact enough to easily replace most conventional ball bearing turbopumps of similar pumping speed in embedded applications.

Maglev Turbomolecular Pump

ATH 500M

POWERFUL YET COMPACT DESIGN

36172_Adixen_FlyerATH500M_1208.qxd 27/03/09 15:06 Page 1

Ø 180 (7.09)

Ø 225 (8.85) in DN 160 ISOF Flange*

Ø 2

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EXHAUST(DN25 ISO KF)

PURGE FITTING(1/8 G FEMALE)

WATER COOLING IN/OUT(1/8 NPT FEMALE)

*All dimensions in mm (inch)

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Maglev Turbomolecular Pump ATH 500M

Alcatel Vacuum Technology France98, avenue de Brogny - BP 2069 - 74009 ANNECY CEDEX - FRANCE - Tel.: (33) (0) 4 50 65 77 77 - Fax: (33) (0) 4 50 65 77 89

www.adixen.com

KoreaAlcatel VacuumTechnology KoreaTel: (82) 31 206 6277Fax: (82) 31 204 6279

ChinaAlcatel VacuumTechnology ShanghaiTel: (8621) 5027 0628Fax: (8621) 3895 3815

NetherlandsAlcatel VacuumTechnology NetherlandsTel: (31) 345 478 400Fax: (31) 345 531 076

France (Headquarters)Alcatel VacuumTechnology FranceTel: 33 (0)4 50 65 77 77Fax: 33 (0)4 50 65 77 89

SingaporeAlcatel-Lucent SingaporeTel: (65) 6254 0828Fax: (65) 6254 7018

GermanyAlcatel HochvakuumTechnik GmbHTel: (49) 9342 96 10 0Fax: (49) 9342 96 10 30

SwedenAdixen Scandinavia Tel: (46) 13 35 59 00Fax: (46) 13 35 59 01

IndiaAlcatel Vacuum Technology IndiaTel: (91) 124 4737777 Fax: (91) 124 4737799

TaiwanAlcatel VacuumTechnology TaiwanTel: (886) 3 5599 230Fax: (886) 3 5599 231

ItalyAlcatel Vacuum Systems S.p.A.Tel: (39) 039 686 3855Fax: (39) 039 667 125

United KingdomAlcatel VacuumTechnology (U.K.) LtdTel: (44) 1 506 418 000Fax: (44) 1 506 418 002

JapanAlcatel-Lucent Japan LtdTel: (81) 3 6431 7130Fax: (81) 45 544 0049

USAAlcatel VacuumProductsTel: (1) 781 331 4200Fax: (1) 781 331 4230

Technical data

Pumping speed Ar 350 500 l/sN2 340 500 l/sHe 250 340 l /sH2 150 200 l/s

Compression Ratio Ar 1 .108

N2 1 .107

He 1 .104

H2 1 .103

Ultimate Pressure (1) 7.10-8 TorrMaximum continuous flow rate N2 2500 sccmMaximum continuous inlet pressure 0.1 TorrMaximum exhaust pressure 1.5 TorrNominal Power 350 WMaximum rotation speed 50 000 rpmStart Up time < 3 minCooling water flow > 60 l/hPower Supply 48 VDCWeight 13 (29) kg (lbs)Vibration level 0.01 µmNoise level 39 dbA

(1) Measured to Pneurop standards

DN100 DN 160 Units

Product Features :

• Maintenance free magnetic bearings• Clean, Oil-free vacuum• High resistance to air inrush• Compact size (254 mm, 10.0 inches in DN160 flange) and weight (13 kg, 29 lbs)• ISO F, ISO K and CFF flanges available• RS232/485• Standard 15 pin Sub D communication connector• 230VAC/48VDC power supply available• Hand Held Display Module available

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