300 mm Equipment Base Software Functionality ...¼ˆ旧)/ライン...2 INTRODUCTION.....2 2.1 Scope.............................................................................................................................2

300 mm Equipment Base Software Functionality Requirements – Error Handling and Extended Scenarios: Selete/ISMT Computer

Integrated Manufacturing (CIM) Base Functionality Requirements Collaboration, Phase 2, Rev. 2.0

International SEMATECH Technology Transfer #00114018B-XFR

© 2001 International SEMATECH, Inc.

International SEMATECH and the International SEMATECH logo are registered service marks of International

SEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc.

Product names and company names used in this publication are for identification purposes only and may be trademarks or service marks of their respective companies.

300 mm Equipment Base Software Functionality Requirements – Error Handling and Extended Scenarios: Selete/ISMT Computer Integrated Manufacturing (CIM) Base Functionality Requirements Collaboration,

Phase 2, Rev. 2.0 Technology Transfer #00114018B-XFR

International SEMATECH December 21, 2001

Abstract: Selete and International SEMATECH (ISMT) are working together in a collaborative effort to support the implementation of 300 mm software requirements. The joint effort has resulted in a set of base equipment functional requirements and sample base equipment operational scenarios that encompass common requirements from the IC maker community. The resulting work is intended to provide guidance to equipment suppliers on the interpretation and application of the Computer Integrated Manufacturing (CIM) Global Joint Guidance and SEMI standards. The effort will provide reduced variations in operational requirements and encourage consistent implementations across all equipment. This document describes the operation and implementation of production equipment to help suppliers interpret the CIM Global Joint Guidance and SEMI standards. Only the most common configurations of production equipment are included; not all IC maker requirements or equipment types are covered. This revision reflects modifications to the scenarios based on standards updates.

Keywords: 300 mm Wafers, Automated Materials Handling, Computer Integrated Manufacturing, Equipment Performance, Factory Automation, Failure Analysis, Software Integration, Standards

Authors: Selete/ISMT Working Group: D. Bloss, P. Cross, L. Pivin (Intel), K. Gartland (IBM), G. Crispieri, Y. Kominato (Mitsubishi Electric), T. Katsuyama (NEC), M. Fujita, T. Masui (Selete), B. Crandell (TI), T. Miki (Toshiba), Y. Ohyama (Selete)

Approvals: Gino C. Crispieri, Project Manager Information & Control Standards Jackie Ferrell, Program Manager for Guidelines & Standards Randy Goodall, Associate Director for Manufacturing Methods & Productivity Laurie Modrey, Technical Information Transfer Team Leader

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Table of Contents

1 EXECUTIVE SUMMARY..................................................................................................... 1

2 INTRODUCTION .................................................................................................................. 2 2.1 Scope ............................................................................................................................. 2 2.2 About This Document ................................................................................................... 2

2.2.1 Position............................................................................................................... 2 2.2.2 Section Descriptions........................................................................................... 2 2.2.3 Revision History................................................................................................. 3

2.3 Reference Documents ................................................................................................... 3 2.3.1 Selete/ISMT CIM Collaboration ........................................................................ 3 2.3.2 300 mm Semiconductor Factory Guidelines ...................................................... 3 2.3.3 SEMI Standards.................................................................................................. 3 2.3.4 SEMI Ballots ...................................................................................................... 4 2.3.5 300 mm Software Test Methods ........................................................................ 4

3 EXTENDED SCENARIOS.................................................................................................... 5 3.1 Multiple Products in A Carrier...................................................................................... 5

3.1.1 Base Functional Requirements ........................................................................... 5 3.1.2 Base Operational Procedure ............................................................................... 6 3.1.3 Base Communication Control Scenario ............................................................. 7 3.1.4 Scenario Details.................................................................................................. 8 3.1.5 Scenario Message Details................................................................................. 14

4 FAILURE AND RECOVERY .............................................................................................. 34 4.1 Overview ..................................................................................................................... 34 4.2 Approach ..................................................................................................................... 34 4.3 E84 Failures................................................................................................................. 35

4.3.1 Description ....................................................................................................... 35 4.3.2 Types of E84 Errors ......................................................................................... 35 4.3.3 Selected E84 Failures ....................................................................................... 37

4.4 Slot Map Failure at FIMS Port.................................................................................... 42 4.4.1 Description ....................................................................................................... 42 4.4.2 Types of FIMS Port Slot Map Failure.............................................................. 42 4.4.3 Selected Failures............................................................................................... 42

4.5 Internal Buffer Equipment .......................................................................................... 48 4.5.1 Base Functional Requirements ......................................................................... 48

4.6 Carrier ID Read Failure............................................................................................... 48 4.6.1 Description ....................................................................................................... 48 4.6.2 Types of Failures .............................................................................................. 48 4.6.3 Selected Failures............................................................................................... 48

4.7 Job Creation Failure .................................................................................................... 54 4.7.1 Description ....................................................................................................... 54 4.7.2 Types of Failures .............................................................................................. 54 4.7.3 Selected Failures............................................................................................... 54

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Technology Transfer #00114018B-XFR International SEMATECH

4.8 Docking/Clamping Failures ........................................................................................ 57 4.8.1 Description ....................................................................................................... 57 4.8.2 Types of Failures .............................................................................................. 57 4.8.3 Selected Failures............................................................................................... 57

5 GLOSSARY OF TERMS ..................................................................................................... 66

6 CONTACTS.......................................................................................................................... 66 6.1 Selete Manufacturing Technology Research Department........................................... 66 6.2 ISMT CIM Study Group ............................................................................................. 66

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List of Figures

Figure 1 E84 Failure (1 of 4) ................................................................................................. 38



Figure 4 E84 Failures (4 of 4) ................................................................................................ 41

Figure 5 Slot Map Failure at FIMS Port – Fixed Buffer (1 of 5)........................................... 43





Figure 10 Slot Map Failure at FIMS Port – Internal Buffer (1 of 2) ....................................... 48

Figure 11 Slot Map Failure at FIMS Port – Internal Buffer (2 of 2) ....................................... 48

Figure 12 Carrier ID Failure (1 of 4) ....................................................................................... 50




Figure 16 Job Creation Failure (1 of 2).................................................................................... 55

Figure 17 Job Creation Failure (2 of 2).................................................................................... 56

Figure 18 Clamp/Dock Failures (1 of 3) .................................................................................. 59



Figure 21 Undock/Unclamp Failures (1 of 4) .......................................................................... 62




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List of Tables

Table 1 Revision History ........................................................................................................ 3

Table 2 Base Functional Requirements for Multiple Products in a Carrier Scenario ............ 5

Table 3 Base Scenario for Multi Process Job Usage in Fixed Buffer Equipment .................. 8

Table 4 Base Functional Requirements for E84 TP3/TA4 Timeout ..................................... 37

Table 5 Base Functional Requirements for Slot Map Failure at FIMS Port: Fixed Buffer Equipment .................................................................................................... 42

Table 6 Base Functional Requirements for Slot Map Failure at FIMS Port: Internal Buffer ....................................................................................................................... 48

Table 7 Base Functional Requirements for Carrier ID Read Failure ................................... 49

Table 8 Base Functional Requirements for Job Creation Failure......................................... 54

Table 9 Base Function Requirements for Clamp/Dock and Undock/Unclamp Failures .................................................................................................................... 58

1


1 EXECUTIVE SUMMARY

IC makers require implementation of 300 mm production equipment based on the CIM Global Joint Guidance and SEMI standards. Selete and International SEMATECH (ISMT) are working together in a collaborative effort to support the implementation of 300 mm software requirements. The joint effort has resulted in a set of base equipment functional requirements and sample base equipment operational scenarios that encompass common requirements from the IC maker community. The resulting work is intended to provide guidance to equipment suppliers on the interpretation and application of the CIM Global Joint Guidance and SEMI standards that will reduce variations in operational requirements and encourage consistent implementations across all equipment.

The collaborative effort has been divided into phases:

• Phase 1 defines base requirements and examples of base operational scenarios for two sample equipment types: a fixed buffer single-wafer processing tool and an internal buffer batch processing tool. These base requirements reflect areas of commonality across the IC makers as well as identify areas where requirements and usage may differ because of the type of products being manufactured or because of different operational philosophies. Phase 1 for fixed buffer single-wafer processing tools was completed in April 2000. Phase 1 for internal buffer batch processing tools was completed in July 2000. (For Phase 1, see the ISMT and Selete document, “300 mm Equipment Base Software Functionality Requirements – Fixed Buffer and Internal Buffer Type Equipment: Selete/International SEMATECH CIM Base Functionality Requirements Collaboration, Phase 1B” on International SEMATECH’s website [www.sematech.org]).

• Phase 2 extends the Phase 1 requirements and sample scenarios by adding a sample extended capability scenario and sample failure/recovery scenarios. The extended capability scenario is Multiple Products in a Carrier. The Failure/Recovery scenarios include the following:

– AMHS Parallel I/O (E84) Failure

– Slot Map Failure at FIMS Port

– Carrier ID Read Failure

– Job Creation Failure

– Docking/Clamping Failure.

These failure/recovery scenarios are representative examples of the types of failures seen on tools in all factories. Phase 2 publication was completed in October 2000. This document reflects revisions to the scenarios according to standards updates.

• Phase 3 provides a set of equipment test specifications for a representative sample set of typical equipment usage scenarios for roundtrip operations. Phase 3 publication was completed in December 2000.

2


2 INTRODUCTION

2.1 Scope

This document describes the operation and implementation of production equipment to help suppliers interpret the CIM Global Joint Guidance and SEMI standards. Only the most common configurations of production equipment are included; not all IC maker requirements or equipment types are covered.

2.2 About This Document

2.2.1 Position

This document is intended for use by IC makers, software suppliers, and production equipment suppliers.

IC makers should use this document for

• Providing guidance to equipment suppliers on the interpretation and application of the CIM Global Joint Guidance and SEMI standards

• Documenting specific functional requirements, operational scenarios, and test verification plans for 300 mm production equipment

Software suppliers and production equipment suppliers should use this document for

• Identifying consensus and non-consensus functional requirements from the IC maker community

• Determining how the implementation of specific requirements will be verified

2.2.2 Section Descriptions

• EXECUTIVE SUMMARY (Section 1) – High level overview of the collaboration

• INTRODUCTION (Section 2)

– Discussion of details on the collaboration scope and document logistics

• EXTENDED SCENARIOS (Section 3)

– Additional scenarios that extend Phase 1 functionality

• FAILURE AND RECOVERY (Section 4) – Key types of failures shown in flowchart format with examples of factory

recovery.

• GLOSSARY OF TERMS (Section 5) – Definition of key terms from the document

• CONTACTS (Section 6) – Key contact information

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2.2.3 Revision History

Table 1 Revision History

Revision Date Contents

1.0 10/18/2000 Phase 2 - Extended scenario and Failure/Recovery Flows

2.0 12/04/2001 Updates per SEMI standard changes 0701 cycle and further review of the recovery scenarios.

2.3 Reference Documents

2.3.1 Selete/ISMT CIM Collaboration

• Phase 1 Rev.2.0 document – HTtp://www.sematech.org/public/docubase/document/3953cxfr.pdf

2.3.2 300 mm Semiconductor Factory Guidelines

• General index for 300 mm program documents – http://www.sematech.org/public/resources/300 mm/guide.htm

• CIM Global Joint Guidance for 300 mm Semiconductor Factories Release Five – http://www.sematech.org/public/docubase/document/3534deng.pdf

• Global Joint Guidance for 300 mm Semiconductor Factories – http://www.sematech.org/public/docubase/support/j300.pdf

• 300 mm Integrated Vision for Semiconductor Factories: Release Three – http://www.sematech.org/public/docubase/abstract/3659ceng.htm

2.3.3 SEMI Standards

• SEMI E1-0697 Specification for 3 inch, 100 mm, 125 mm and 150 mm Plastic and Metal Wafer Carriers

• SEMI E5-1000 SEMI Equipment Communications Standard 2 Message Content (SECS-II)

• SEMI E30-1000 Generic Model for Communications and Control of Manufacturing Equipment (GEM)

• SEMI E37-0298 High-Speed SECS Message Services (HSMS) Generic Services

• SEMI E39-0600 Object Services Standard: Concepts, Behavior, and Services (OSS)

• SEMI E40-0701 Standard for Processing Management

• SEMI E42-0299E Recipe Management Standard: Concepts, Behavior, and Service

• SEMI E47-95 Specification for 150 mm/200 mm Pod Handles

• SEMI E62-0999 Provisional Specification for 300 mm Front Opening Interface Mechanical Standard (FIMS)

• SEMI E63-0600A Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

• SEMI E84-1000 Specification for Enhanced Carrier Handoff Parallel I/O Interface

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• SEMI E87-0701 Provisional Specification for Carrier Management (CMS)

• SEMI E90-0701 Specification for Substrate Tracking

• SEMI E94-0701 Provisional Specification for Control Job Management

• SEMI E99-1000 The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

• SEMI E102-0600 Provisional Specification for CIM Framework Material Transport and Storage Component

• SEMI E105-1000 Provisional Specification for CIM Framework Scheduling Component

• SEMI E101-1000 Provisional Guide for EFEM Functional Structure Model

• SEMI M1-0600 Specification for Polished Monocrystalline Silicon Wafers

Copies of these documents are available from SEMI.

SEMI North America (Headquarters) 3081 Zanker Road San Jose, California 95134-2127 USA Tel: 1-408-943-6900 Fax: 1- 408-928-9600 E-mail: [email protected] Web: http://www.semi.org

2.3.4 SEMI Ballots

• Document 3115E Revisions to SEMI E87: Standard for Carrier Management

• Document 3098 Provisional Specification For Manual Handoff Operation Interface at E15.1 Load Port

Copies of these documents are available from SEMI.

2.3.5 300 mm Software Test Methods

• 300 mm Operational Flowcharts – http://www.sematech.org/public/resources/stds/300 mm /300_os_v09.pdf

• Index to Equipment Integration and Automation Testing Users Group Documents

– http://www.sematech.org/public/resources/stds/300 mm /methods.htm

• Important Information About These Documents – http://www.sematech.org/public/resources/stds/300 mm /impinfo.htm

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3 EXTENDED SCENARIOS

3.1 Multiple Products in A Carrier

This scenario is almost the same as the scenario for fixed buffer-equipment verification. The difference is that a control job is sent for a carrier that has two process jobs instead of one. The two process jobs could represent two different products. Note that the recipes and variable parameters provided for the two process jobs may or may not be the same.

3.1.1 Base Functional Requirements

Table 2 details the Base Functional Requirements for this scenario.

Table 2 Base Functional Requirements for Multiple Products in a Carrier Scenario

# Function Variation GL or Std Fixed Buffer Single Wafer

Base Scenario

1a Fixed buffer E101 √� √�

1b EFEM Type

Internal buffer E101 ×� �

2a Single Wafer √� √�

2b 1 Carrier M Wafer Batch Op n.c.

2c

Unit Cycle Size

N Carrier Batch √� �

3 # of Load ports 2 or more Factory GJG √� √�

4a FOUP E47.1 √� √�

4b Carrier Type

Open Cassette E1.9 Hw n.c.

5a Delivery Position Hw n.c. √�

5b FOUP Clamping

Docked Position Hw n.c. √�

6a On Carrier Complete E87 Op n.c. √�

6b FOUP Undocking Trigger

AMHS Triggered E87 Op n.c.

7a Automatic (AMHS) E84 √� √�

7b Carrier Handoff

Manual (PGV) 3352 Hw n.c.

8a Read-Only (barcode) GL2.6 – 2.8 Hw n.c. √�

8b Electronic R/W (IR/RF) GL2.6 – 2.8 Hw n.c.

8c

Carrier ID Type

Electronic RO (RF) GL2.6 – 2.8 Hw n.c.

9a Automatic E87 √� √�

9b

Carrier Delivery and Pickup (Access Mode) Manual E87 √� �

10a Infrequent E87 Op n.c. √�

10b Access Mode change

Frequent E87 Op n.c.

11a Host verify E87 Op n.c. �

11b Carrier ID Verification

Equipment Verify E87 Op n.c. √�

12a Bind E87 Op n.c. √�

12b Load port Reservation

Reserve E87 Op n.c.

13 Slot Map Reader Confirm Wafer Exists E87 √� √�

6



Base Scenario

14a Host Verify E87 Op n.c.

14b

Slot Map Verification Eqp Verify E87 Op n.c. √�

15 Substrate Tracking Yes E90 √� √�

16 Host Provides Wafer ID/ Content Map

Yes E87, E90 √� √�

17 Wafer ID Reader Yes E90 ×� �

18a Before delivery E94 Op n.c.

18b

Process Job/Control Job Creation and Carrier Delivery

After delivery E94 √� √�

19a 1 process 1 carrier E40,E94 √�

19b 1 process M carriers E40,E94 ✕ �

19c N process 1 carrier E40,E94 √� √�

19d

Process Job/Control Job Usage

N process M carriers E40,E94 Op n.c. �

20 NPW Operation Managed by Control Job/Process Job

Yes E94 √� �

21 Slot-to-Slot Integrity Yes E87 √� √�

22 Wafer Carrier/ Slot Destination Location

User provides E94 Op n.c.

23a host-initiated E30,E42 √� √�

23b Recipe Download

operator-initiated E30,E42 √� �

24 Capacity Check Yes √� �

25a Slot Map Read Timing At load port Hw n.c.

25b At FIMS port � √�

3.1.2 Base Operational Procedure

The sequence of actions is the same as for the Fixed Buffer Single Wafer Equipment Base Operational Procedure. The difference is that the message defining process jobs in Step 31 defines two process jobs, PJ1 and PJ2, and the Control Job then specifies both PJ1 and PJ2 for the same carrier.

Wafers in slots 1–12 will be processed using the PJ1 process job, and wafers in slots 13–25 will be processed using PJ2. The sequence of actions outlined here in the Base Operational Scenario were jointly developed by ISMT and Selete. They are as follows:

1. A host “binds” a known carrier to a load port on the equipment

2. The automated material handling system (AMHS) delivers the carrier to the specified load port.

3. The equipment reads the carrier ID of the newly arrived carrier.

4. The read carrier ID is compared to that specified in the initial “bind” command (from step #1), and if identical, equipment notifies the host of carrier ID verification success.

5. The front opening unified pod (FOUP) is docked, and its door is opened.

6. The FOUP slots are scanned by equipment.

7


7. The scan result is compared to the slot map specified in the initial “bind” command (from step #1), and if identical, equipment notifies the host of slot map verification success.

8. The host sends the recipes to the equipment.

9. The host requests the available control job queue space from equipment and available process job queue space.

10. The host creates process job(s) and a control job on the equipment

11. Control and first process job start.

12. Substrates from first process job are processed.

13. First process job completes.

14. Second process job starts.

15. Substrates from second process job are processed.

16. Process and control job complete.

17. The carrier is moved to the unload position

18. The AMHS picks up the carrier.

19. Load port is ready for next carrier.

3.1.3 Base Communication Control Scenario

3.1.3.1 Scenario Assumptions

The scenario on the following pages maps the requirements of the Base Operational Scenario to example SECS-II messages. This scenario is useful for showing the actual contents of the SECS communications between a host and equipment interface. Several assumptions were made in building this scenario. Those assumptions were as follows:

1. The access mode has been set to AUTO at some time before the scenario transactions begin.

2. This scenario does not show all state transitions for every state model for the associated standards, rather a subset that is relevant to the selected base functional requirements detailed.

3. Several pre-defined event reports are detailed in the scenario. It is assumed these event reports were created by standard E30 report creation mechanisms at some time before the beginning of the scenario transactions. These event reports have both VIDs and object attributes attached.

4. Process Job state model events are based on E30 events. PR Milestone events are not used in this scenario.

5. The PR Process Start attributes are set (process job initiates automatically if material is present).

6. There is no pre-conditioning or post-conditioning defined on process jobs.

7. The CJ Start Method attribute is set to AUTO (control job initiates automatically rather than waiting for host start).

8. This scenario shows one possible implementation. Because of the asynchronous nature of some of the messages, the delivery order of messages cannot be guaranteed. For instance, control job complete event report could arrive before or after carrier

8


complete event report. In this particular scenario, it was decided to show the control job complete event before the carrier complete event.

9. This scenario assumes the equipment is compliant to GEM (E30) and HSMS (E37).

10. Object attributes are accessible as equipment DVVALs (i.e., through S6F11 event reporting mechanisms) when events are triggered.

11. In this scenario, the numeric values assigned to the IDs for variables, events, and reports defined within the 300 mm standards were arbitrarily created for example purposes only, since actual numbering for VIDs, CEIDs, and RPTIDs is not standardized. In the SML layouts, these variables will be underlined for clarification purposes (e.g., QueueAvailableSpace). The actual numeric value of these variable, event, and report identifiers will vary from one implementation to the next.

3.1.4 Scenario Details

The detailed sequences of messages exchanged by the equipment and the host are shown in Table 3.

Table 3 Base Scenario for Multi Process Job Usage in Fixed Buffer Equipment

# Description DIR SECS Message Notes

1

Host sends a “Bind” command containing CarrierID, PortID, Content Map and WaferID information (E87)

H → E S3F17 (Bind)

2 Equipment responds with acknowledge of Bind

H ← E S3F18 (Ack)

3

Equipment notifies host of Port Association state model transition from “Not Associated” to “Associated” Event (E87)

H ← E S6F11 (Associated) Carrier Object is instantiated at this time.

4 Host acknowledges "Associated" Event

H → E S6F12 (Ack)

5

Equipment notifies host of Port Reservation transition from “Not Reserved” to “Reserved” Event (E87)

H ← E S6F11 (Reserved)

6 Host acknowledges "Reserved" Event

H → E S6F12 (Ack)

AMHS attempts material delivery (E84 handshake initiates)

7

Equipment notifies Host that a carrier transfer begins with "Ready to Load" to "Transfer Blocked" Event (E87)

H ← E S6F11 (TransferBlocked)

8 Host acknowledges "Transfer Blocked" event

H → E S6F12 (Ack)

AMHS completes material transfer (E84 handshake finish)

9



9 Equipment notifies host that Material has arrived- "Material Received" Event (E30)

H ← E S6F11 (MaterialReceived)

10 Host acknowledges "Material Received" Event

H → E S6F12 (Ack)

11 Equipment notifies host transition from "Reserved" to "Not Reserved" Event (E87)

E → H S6F11 (Not Reserved)

12 Host acknowledges "Not Reserved" event

H ← E S6F12 (Ack)

13 Equipment notifies host of "Carrier Clamped" event (E87) at load position.

H ← E S6F11 (Carrier Clamped)

14 Host Acknowledges "Carrier Clamped" Event

H → E S6F12 (Ack)

Equipment reads the Carrier ID (no event sent) (E99)

15 Equipment notifies host of "ID Not Read" to "ID Verification OK" event (E87)

H ← E S6F11 (ID VerificationOK)

16 Host acknowledge "ID Verification OK" event

H → E S6F12 (Ack)

17 Equipment notifies host of "Carrier Location Changed" event (E87)

H ← E S6F12 (Carrier Location Changed)

18 Host Acknowledges "Carrier Location Changed" event

H → E S6F12 (Ack)

Carrier is Docked (No event Sent)

19 Equipment opens the FOUP Door and sends "Carrier Opened" Event (E87)

H ← E S6F11 (CarrierOpened)

20 Host acknowledges "Carrier Opened" Event

H → E S6F12 (Ack)

21

Equipment reads the Slot Map and verifies, sends "Slot Map Not Read" to "Slot Map Verify OK" Event (E87)

H ← E S6F11 (SlotMapVerifyOK) Equipment makes substrate tracking information available to the host (E90) when the equipment successfully reads slot map.

22 Host acknowledges "Slot Map Verify OK" Event

H → E S6F12 (Ack)

23 Host requests to send multi-block recipe to tool(E30)

H → E S7F1 (ProcessProgramLoadInquire)

24 Equipment acknowledges request to send multi-block recipe from host

H ← E S7F2 (Ack)

10



25 Host sends multi-block recipe to tool (E30)

H → E S7F3 (ProcessProgramSend)

26 Equipment acknowledges receipt of multi-block recipe from host

H ← E S7F4 (Ack)

Step 23 to 26 are repeated for the necessary recipes

27 Host requests Available Control Job Space (E30, E94)

H → E S1F3 (CJQueueSpace)

28 Equipment sends available Control Job queue Space

H ← E S1F4 (CJQueueSpaceResponse)

29 Host requests available PJ Queue Space(E40)

H → E S16F21 (PRGet Space)

30 Equipment sends available PJ Queue Space

H ← E S16F22 (PRGet SpaceResponse)

31 Host issues PJ Multi Create Command (E40)

H → E S16F15 (PRJobMulti Create)

32 Equipment acknowledges PJ Multi Create Command

H ← E S16F16 (Ack)

33

Equipment notifies host transition from creation to Process Job "Queued/Pooled" Event (E40)

H → E S6F11 (Queue/Pooled)

34 Host acknowledges Process Job "Queued/Pooled" Event

H ← E S6F12 (Ack)

Steps 33 and 34 are sent for each of the Process jobs being created

35 Host issues CJ Create Command using object services (E94, E39)

H → E S14F9 (Create Object Request)

36 Equipment acknowledges Create Object Request Command

H ← E S14F10 (Ack)

37 Equipment sends CJ "Created" to "Queued" Event (E94)

H ← E S6F11 (Queued)

38 Host acknowledges Control Job Queued Event

H → E S6F12 (Ack)

39 Equipment sends host CJ "Queued" to "Selected" Event (E94)

H ← E S6F11 (Selected)

40 Host acknowledges CJ "Queued" to "Selected" Event

H → E S6F12 (Ack)

41 Equipment sends host CJ "Selected" to "Executing" Event (E94)

H ← E S6F11 (Executing)

42 Host acknowledges CJ "Executing" Event

H → E S6F12 (Ack)

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43

Equipment sends host PJ "Queued/Pooled" to "Setting up" event (E40)

H ← E S6F11 (Setting Up) This event only sent for the first substrates specified in the first (PJ1) and the second (PJ2) process jobs

44 Host acknowledges PJ "Setting Up" Event

H → E S6F12 (Ack)

45

Wafers pulled from carrier, Carrier Accessing status transitions from "Not Accessed" to "In Access" event (E87)

H ← E S6F11 (InAccess) This event is only sent for the first wafer in the carrier

46 Host acknowledges "In Access" event

H → E S6F12 (Ack)

47 Equipment sends substrate "At Source" to "At Work" event (E90)

H ← E S6F11 (At Work)

48 Host acknowledges "At Work" event

H → E S6F12 (Ack)

49

Equipment sends host PJ "Setting Up" to "Processing" event (E40)

H ← E S6F11 (Processing) This event only sent for the first substrates specified in the first (PJ1) and the second (PJ2) process jobs

50 Host acknowledges PJ "Processing" event

H → E S6F12 (Ack)

51 Equipment sends "Needs Processing" to "In Process" event (E90)

H ← E S6F11 (In Process) Processing has initiated on substrate

52 Host acknowledges "In Process" Event

H → E S6F12 (Ack)

Processing on substrate has been completed

53

Equipment sends transition from substrate state model "In Process" to "Processed" event (E90)

H ← E S6F11 (Processed)

54 Host acknowledges Substrate "Processed" event

H → E S6F12 (Ack)

55

Equipment sends host PJ transition from "Processing" to "Process Complete" event (E40)

H → E S6F11 (Process Complete) This event is only sent for the last substrate specified in the first (PJ1) and second (PJ2) process jobs after processing completes.

56 Host acknowledges PJ "Process Complete" event

H → E S6F12 (Ack)

57

Equipment sends transition from substrate state model "At Work" to "At Destination" event (E90)

H ← E S6F11 (At Destination) Substrate is returned to carrier

12



58 Host acknowledges substrate " At Destination" event

H ← E S6F12 (Ack)

59

If last substrate from Process Job, equipment sends transition from PJ "Process Complete" to Process Job extinction event (E40)

H ← E S6F11 (Process Job Extinction)

This event sent only is all substrates specified in the process job are processed. Sent with completion of all PJ1 substrates and with all PJ2 substrates.

60 Host acknowledges Process Job Extinction event

H → E S6F12 (Ack)

Steps 43 - 60 are repeated for every wafer in the carrier

61

If last process job, equipment sends transition from Control Job State Model "Executing" to "Completed" event (E94)

H ← E S6F11 (Completed)

62 Host acknowledges "Completed" event

H → E S6F12 (Ack)

63 Equipment closes the carrier door and sends "Carrier Closed" event (E87)

H ← E S6F11 (CarrierClosed)

64 Host acknowledges "Carrier Closed" event

H → E S6F12 (Ack)

65

Equipment sends host transition from Carrier Access state model "In Access" to "Carrier Complete" event (E87)

H ← E S6F11 (CarrierComplete)

66 Host acknowledges "Carrier Complete" event

H → E S6F12 (Ack)

67 Equipment sends "Carrier Location Changed" event (E87)

H ← E S6F11 (Carrier Location Changed)

68 Host acknowledges "Carrier Location Changed" event

S6F12 (Ack)

69

Equipment notifies host of Port state model transition from "Transfer Blocked" to "Ready to Unload" Event (E87)

H ← E S6F11 (Ready to Unload)

70 Host acknowledges "Ready to Unload" event

H → E S6F12 (Ack)

AMHS attempts material pickup (E84 handshake initiates)

71

Equipment notifies host of Port state model transition from "Ready to Unload" to "Transfer Blocked" (E87)

H ← E S6F11 (Transfer Blocked)

13



72 Host acknowledges "Transfer Blocked" event

H → E S6F12 (Ack)

AMHS completes material pickup (E84 handshake completes)

73

Equipment notifies host that material has departed from equipment "Material Removed" Event (E30)

H ← E S6F11 (Material Removed)

74 Host acknowledges "Material Sent" event

H → E S6F12 (Ack)

75

Equipment notifies host of Port Association state model transition from “Associated” to “Not Associated” Event (E87)

H ← E S6F11 (Not Associated)

76 Host acknowledges “Not Associated” event

H → E S6F12 (Ack)

77

Equipment notifies host of Port State Model transition from “Transfer Blocked” to “Ready to Load” event (E87)

H ← E S6F11 (ReadyToLoad)

78 Host acknowledges “Ready to Load” event

H → E S6F12 (Ack) Equipment is ready to receive new material for processing.

14


3.1.5 Scenario Message Details

1. <S3F17 W <L <U4 0> <A "Bind"> // Service Name <A "CARRIERXYZ"> // Carrier ID <U1 1> // Port ID <L <L < A "ContentMap"> // Content Map ( LotID - WaferIDs) <L <L <A "Lot123"> <A "Wafer001”> > <L <A "Lot123"> <A "Wafer002”> > : <L <A "Lot123"> <A "Wafer024"> > <L <A "Lot123"> <A "Wafer025"> > > > <L < A "Slot map"> // Slot Map <L <U1 3> // Slot 1 Correctly Occupied <U1 3> // Slot 1 Correctly Occupied <U1 3> // Slot 1 Correctly Occupied : <U1 3> // Slot 1 Correctly Occupied <U1 3> // Slot 1 Correctly Occupied > > <L <A "Usage"> //Content of this carrier, in this case, PRODUCT substrates <A "PRODUCT"> > > > > 2. <S3F18 <L <U1 0> <L > > >

15


3. <S6,F11 W <L <U2 1> <U2 405> //Event = Not Associated to Associated transition <L <L <U2 500> //Report 500 <L <A “2000062413205622”> //GEM timestamp- CLOCK <U1 2> //PortTransfer State = Ready to Load <U1 1> //Port ID- 1 <A "CARRIERXYZ"> //CarrierID <U1 0> //CarrierIDStatus Attribute- ID Not Read <U1 0> //Slot MapStatus Attribute- Slot Map not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // CarrierAccessing Status Attribute- Carrier Not Accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 4. <S6F12 <B[1/1] 0x00> > 5. <S6,F11 W <L <U2 1> <U2 805> //Event = Not Reserved to Reserved transition <L <L <U2 500> //Report 500 <L <A “2000062413205822”> //GEM timestamp- CLOCK <U1 2> // PortTransfer State=Ready to Load <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 0> // CarrierIDStatus Attribute- ID Not Read <U1 0> //Slot MapStatus Attribute- Slot Map not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // CarrierAccessing Status Attribute- Carrier Not Accessed <U1 1> // Port Resevation State VID- Load port Reserved > > > > > 6. <S6F12 <B[1/1] 0x00> >

16


7. <S6,F11 W <L <U2 1> <U2 205> //Event = Ready to Load to Transfer Blocked transition <L <L <U2 500> //Report 500 <L <A “2000062413215022”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 0> // CarrierIDStatus Attribute- ID Not Read <U1 0> //Slot MapStatus Attribute- Slot Map not Read <U1 1> // Port Association State VID- Load port Associated <U1 0> // CarrierAccessing Status Attribute- Carrier Not Accessed <U1 1> // Port Resevation State VID- Load port Reserved > > > > > 8. <S6F12 <B[1/1] 0x00> > 9. <S6,F11 <L <U2 1> <U2 300> //Event = Material Received (GEM) <L <L <U2 500> //Report 500 <L <A “2000062413215500”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 0> // CarrierIDStatus Attribute- ID Not Read <U1 0> //SlotMapStatus Attribute - Slot Map Not Read <U1 1> // Port Association State VID- Load port Associated <U1 0> // Carrier AccessingStatus Attribute- Carrier Not Accessed <U1 1> // Port Resevation State VID- Load port Reserved > > > > > 10. <S6F12 <B[1/1] 0x00> >

17


11. <S6,F11 W <L <U2 1> <U2 806> //Event = Reserved to Not Reserved transition <L <L <U2 500> //Report 500 <L <A “2000062413215822”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 0> // CarrierIDStatus Attribute- ID Not Read <U1 0> //Slot MapStatus Attribute- Slot Map not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // CarrierAccessing Status Attribute- Carrier Not Accessed <U1 0> // Port Resevation State VID- Load port Not Reserved > > > > > 12. <S6F12 <B[1/1] 0x00> > 13. <S6F11 W <L <U2 1> <U2 256> //Event = Carrier Clamped <L <L <U2 500> //Report 500 <L <A “2000062413215923”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Not Read <U1 0> //SlotMapStatus Attribute – Slot Map Not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier AccessingStatus Attribute- Not accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 14. <S6F12 <B[1/1] 0x00> >

18


15. <S6F11 W <L <U2 1> <U2 206> //Event = ID not read to ID Verification OK <L <L <U2 500> //Report 500 <L <A “2000062413220023”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Verification OK <U1 0> //SlotMapStatus Attribute – Slot Map Not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier AccessingStatus Attribute- Not accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 16. <S6F12 <B[1/1] 0x00> > 17. <S6F11 W <L <U2 1> <U2 286> //Event = Carrier Location Changed <L <L <U2 500> //Report 500 <L <A “2000062413220123”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Verification OK <U1 0> //SlotMapStatus Attribute – Slot Map Not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier AccessingStatus Attribute- Not accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 18. <S6F12 <B[1/1] 0x00> >

19


19. <S6F11 W <L <U2 1> <U2 220> //Event = Carrier Opened <L <L <U2 500> //Report 500 <L <A “2000062413220323”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Verification OK <U1 0 > //SlotMapStatus Attribute – Slot Map Not Read <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier AccessingStatus Attribute- Not accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 20. <S6F12 <B[1/1] 0x00> > 21. <S6F11 W <L <U2 1> <U2 207> //Event = Slot Map Not Read to Slot Verification OK <L <L <U2 500> //Report 500 <L <A “2000062413220522”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2> //SlotMap Status Attribute- Slot Map Verification OK <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier Accessing Status Attribute - Carrier Not Accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 22. <S6F12 <B[1/1] 0x00> >

20


23. <S7F1 W <L <A “RECIPE1”> // Host wants to download this recipe. Requests permission. <U4 48000> > > 24. <S7F2 > 25. <S7F3 W <L <A “RECIPE1”> > > 26. <S7F4 > 27. <S1F3 W <L <U4 1000> // Request for Control Job Queue space, QueueAvailable Space > > 28. <S1F4 <U2 8> // equipment has room for 8 more control jobs > 29. <S16F21 W > // Send request for process job queue space 30. <S16F22 <U2 12> // Available process job queue space >

21


31. <S16F15 W //Multiple process job create <L <U4 0> <L <L <A "PROCESSJOB1"> // Process Job ID // Material format code- Carrier=FOUP > <L <L <A "CARRIERXYZ"> // Carrier ID <L <U1 1> // Slot 1 <U1 2> // Slot 2 <U1 3> // Slot 3 : <U1 11> // Slot 11 <U1 12> // Slot 12 > > > <L <U1 1> // Recipe Method, no recipe tuning <A “RECIPE1”> // Recipe name to apply <L > // No recipe tuning parameters > <BOOL 1> // SETS start method to autostart <U4 > // No CEID to pause process job for > <L <A "PROCESSJOB2"> // Process Job ID // Material format code- Carrier=FOUP > <L <L <A "CARRIERXYZ"> // Carrier ID <L <U1 13> // Slot 13 <U1 14> // Slot 14 <U1 15> // Slot 15 : <U1 24> // Slot 24 <U1 25> // Slot 25 > > > <L <U1 1> // Recipe Method, no recipe tuning <A “RECIPE2”> // Recipe name to apply <L > // No recipe tuning parameters > <BOOL 1> // SETS start method to autostart <U4 > // No CEID to pause process job for > > > 32. <S16F16 <L <L <A "PROCESSJOB1"> <A "PROCESSJOB2"> > <L

22


<U1 0> <L> > > > 33. <S6F11 W <L <U2 1> <U2 600> //Event= Process Job created to QUEUED/POOLED <L <L <U2 700> //Report 700 <L <A “2000062413231026”> //GEM timestamp- CLOCK <A “PROCESSJOB1”> //OBJID <U1 0> // PRJobState attribute- QUEUED/POOLED <A “RECIPE1”> // recipe ID for this process job > > > > > 34. <S6F12 <B[1/1] 0x00> >

23


35. <S14F9 W <L <A " "> // ObjSpec- Control Job object specifier <A "ControlJob”> //Object Type- Control Job <L <L <A “ObjID”> // attribute Object ID <A “CONTROLJOB1”> //Object ID > <L <A “ProcessingCtrlSpec”> //attribute for attaching PRjobs <L <A “PROCESSJOB1”> <A "PROCESSJOB2"> > > <L <A “CarrierInputSpec”> //Carrier Input Spec attr- list of MID <L <A “CARRIERXYZ”> > > <L <A “MtrlOutSpec”> // attribute which maps src to dest <L > //empty list since unicassette > <L <A “ProcessOrderMgmt”> //attribute for process job order <A “LIST”> > <L <A “StartMethod”> // Start Method <BOOL 1> // AutoStart set to True > > > > 36. <S14F10 <L <A "ControlJob:CONTROLJOB1>"> <L> <L <U1 0> <L > > >

24


37. <S6F11 W <L <U2 1> <U2 800> //Event= Control Job Created to QUEUED <L <L <U2 600> //Report 600 <L <A “2000062413234526”> //GEM timestamp- CLOCK <A “CONTROLJOB1”> //OBJID <U1 0 > // Control Job attribute- QUEUED > > > > > 38. <S6F12 <B[1/1] 0x00> > 39. <S6F11 W <L <U2 1> <U2 801> //Event= Control Job QUEUED to SELECTED <L <L <U2 600> //Report 600 <L <A “2000062413235006”> //GEM timestamp- CLOCK <A “CONTROLJOB1”> //OBJID <U1 1 > // Control Job attribute- SELECTED > > > > > 40. <S6F12 <B[1/1] 0x00> > 41. <S6F11 W <L <U2 1> <U2 803> //Event= Control Job SELECTED to EXECUTING <L <L <U2 600> //Report 600 <L <A “2000062413235226”> //GEM timestamp- CLOCK <A “CONTROLJOB1”> //OBJID <U1 3 > // Control Job attribute- EXECUTING > > > > > 42. <S6F12 <B[1/1] 0x00> >

25


43. <S6F11 W <L <U2 1> <U2 603> //Event= Process Job QUEUED/POOLED to SETTING UP <L <L <U2 700> //Report 700 <L <A “2000062413240026”> //GEM timestamp- CLOCK <A “PROCESSJOB1”> //OBJID <U1 1> // PRJobState attribute- SETTING UP <A “RECIPE1”> // recipe ID for this process job > > > > > 44. <S6F12 <B[1/1] 0x00> > 45. <S6F11 W <L <U2 1> <U2 208> //Event = Carrier Not Accessed to In Access <L <L <U2 500> //Report 500 <L <A “2000062413240723”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Verification OK <U1 2 > //SlotMapStatus Attribute – Slot Map Verification OK <U1 1> // Port Association State VID- Load port associated <U1 1> // Carrier AccessingStatus Attribute- In Access <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 46. <S6F12 <B[1/1] 0x00> >

26


47. <S6F11 W <L <U2 1> <U2 401> //Event= Substrate goes from AT SOURCE to AT WORK <L <L <U2 530> //Report 530 <L <A “2000062413274006”> //GEM timestamp- CLOCK <A “Lot123”> //Lot ID <A "Wafer001"> //WaferID attribute <A "Location 1" > // Substrate loc attribute- Equip dependent <U1 0> // Substrate Processing - Needs Processing <U1 1> // Substrate State - At Work <A "PRODUCT"> // Substrate Usage - Product Wafer > > > > > 48. <S6F12 <B[1/1] 0x00> > 49. <S6F11 W <L <U2 1> <U2 604> //Event= Process Job SETTING UP to PROCESSING <L <L <U2 700> //Report 700 <L <A “2000062413304226”> //GEM timestamp- CLOCK <A “PROCESSJOB1”> //OBJID <U1 3> // PRJobState attribute- PROCESSING <A “RECIPE1”> // recipe ID for this process job > > > > > 50. <S6F12 <B[1/1] 0x00> >

27


51. <S6F11 W <L <U2 1> <U2 402> //Event= Substrate goes from NEEDS PROCESSING to IN PROCESS <L <L <U2 530> //Report 530 <L <A “2000062413314506”> //GEM timestamp- CLOCK <A “Lot123”> //Lot ID <A "Wafer001"> //WaferID attribute <A "Location 2" > // Substrate loc attribute- Equip dependent <U1 1> // Substrate Processing - In Process <U1 1> // Substrate State - At Work <A "PRODUCT"> // Substrate Usage - Product Wafer > > > > > 52. <S6F12 <B[1/1] 0x00> > 53. <S6F11 W <L <U2 1> <U2 403> //Event= Substrate goes from IN PROCESS to PROCESSED <L <L <U2 530> //Report 530 <L <A “2000062413334806”> //GEM timestamp- CLOCK <A “Lot123”> //Lot ID <A "Wafer001"> //WaferID attribute <A "Location 1" > // Substrate loc attribute- Equip dependent <U1 2> // Substrate Processing - Processed <U1 1> // Substrate State - At Work <A "PRODUCT"> // Substrate Usage - Product Wafer > > > > > 54. <S6F12 <B[1/1] 0x00> >

28


55. <S6F11 W <L <U2 1> <U2 605> //Event= Process Job PROCESSING to PROCESS COMPLETE <L <L <U2 700> //Report 700 <L <A “2000062413515226”> //GEM timestamp- CLOCK <A “PROCESSJOB1”> //OBJID <U1 4> // PRJobState attribute- PROCESS COMPLETE <A “RECIPE1”> // recipe ID for this process job > > > > > 56. <S6F12 <B[1/1] 0x00> > 57. <S6F11 W <L <U2 1> <U2 405> //Event= Substrate goes from AT WORK to DESTINATION <L <L <U2 530> //Report 530 <L <A “2000062413515706”> //GEM timestamp- CLOCK <A “Lot123”> //Lot ID <A "Wafer001"> //WaferID attribute <A "Location 3" > // Substrate loc attribute- Equip dependent <U1 2> // Substrate Processing - Processed <U1 2> // Substrate State - At Destination <A "PRODUCT"> // Substrate Usage - Product Wafer > > > > > 58. <S6F12 <B[1/1] 0x00> >

29


59. <S6F11 W <L <U2 1> <U2 609> //Event= Process Job PRJobComplete <L <L <U2 700> //Report 700 <L <A “2000062413524026”> //GEM timestamp- CLOCK <A “PROCESSJOB1”> //OBJID <U1 4> // PRJob attribute- PROCESS COMPLETE <A “RECIPE1”> // recipe ID for this process job > > > > > 60. <S6F12 <B[1/1] 0x00> > 61. <S6F11 W <L <U2 1> <U2 805> //Event= Control Job EXECUTING to COMPLETED <L <L <U2 600> //Report 600 <L <A “2000062414124226”> //GEM timestamp- CLOCK <A “CONTROLJOB1”> //OBJID <U1 5 > // Control Job attribute- COMPLETED > > > > > 62. <S6F12 <B[1/1] 0x00> >

30


63. <S6F11 W <L <U2 1> <U2 222> //Event= Carrier Closed <L <L <U2 500> //Report 500 <L <A “2000062414125222”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2> //SlotMap Status Attribute- Slot Map Verification OK <U1 1> // Port Association State VID- Load port associated <U1 1> // Carrier Accessing Status Attribute - Carrier Accessed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 64. <S6F12 <B[1/1] 0x00> > 65. <S6F11 W <L <U2 1> <U2 227> //Event= Carrier Accessing In Access to Carrier Complete <L <L <U2 500> //Report 500 <L <A “2000062414135322”> //GEM timestamp- CLOCK <U1 12> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2> //SlotMap Status Attribute- Slot Map Verification OK <U1 1> // Port Association State VID- Load port associated <U1 2> // Carrier Accessing Status Attribute - Carrier Completed <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 66. <S6F12 <B[1/1] 0x00> >

31


67. <S6F11 W <L <U2 1> <U2 286> //Event = Carrier Location Changed <L <L <U2 500> //Report 500 <L <A “2000062414135523”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Verification OK <U1 0> //SlotMapStatus Attribute – Slot Map Verification OK <U1 1> // Port Association State VID- Load port associated <U1 0> // Carrier AccessingStatus Attribute- Not accessed <U1 0> // Port Reservation State VID- Load port Not reserved > > > > > 68. <S6F12 <B[1/1] 0x00> > 69. <S6F11 W <L <U2 1> <U2 208> //Event = Transfer Blocked to Ready to Unload transition <L <L <U2 500> //Report 500 <L <A “2000062414135622”> //GEM timestamp- CLOCK <U1 3> // PortTransfer State=Ready to Unload <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Validation OK <U1 2> //Slot MapStatus Attribute- Slot Map Validation OK <U1 1> // Port Association State VID- Load port Associated <U1 2> // CarrierAccessing Status Attribute- Carrier Completed <U1 0> // Port Reservation State VID- Load port Not reserved > > > > > 70. <S6F12 <B[1/1] 0x00> >

32


71. <S6F11 W <L <U2 1> <U2 209> //Event = Ready to Unload to Transfer Blocked transition <L <L <U2 500> //Report 500 <L <A “2000062414135822”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //Port ID- 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID Validation OK <U1 2> //Slot MapStatus Attribute- Slot Map Validation OK <U1 1> // Port Association State VID- Load port Associated <U1 2> // CarrierAccessing Status Attribute- Carrier Completed <U1 0> // Port Reservation State VID- Load port Not reserved > > > > > 72. <S6F12 <B[1/1] 0x00> > 73. <S6F11 W <L <U2 1> <U2 303> //Event = Material Removed (GEM) <L <L <U2 500> //Report 500 <L <A “2000062414140023”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A "CARRIERXYZ"> // CarrierID <U1 2> // CarrierIDStatus Attribute- ID verification OK <U1 2> //SlotMapStatus Attribute - Slot Map Verification OK <U1 1> // Port Association State VID- Load port Associated <U1 2> // Carrier AccessingStatus Attribute- Carrier Completed <U1 0> // Port Resevation State VID- Load port Not Reserved > > > > > 74. <S6F12 <B[1/1] 0x00> >

33


75. <S6F11 W <L <U2 1> <U2 237> //Event= Port Associated to Not Associated <L <L <U2 500> //Report 500 <L <A “2000062414140222”> //GEM timestamp- CLOCK <U1 1> // PortTransfer State=Transfer Blocked <U1 1> //PortID - 1 <A ""> // CarrierID NULL <U1 > // CarrierIDStatus Attribute- NULL <U1 > //SlotMap Status Attribute- NULL <U1 0> // Port Association State VID- Load port not associated <U1 > // Carrier Accessing Status Attribute - NULL <U1 0> // Port Resevation State VID- Load port Not reserved > > > > > 76. <S6F12 <B[1/1] 0x00> > 77. <S6F11 W <L <U2 1> <U2 209> //Event = Transfer Blocked to Ready to Load transition <L <L <U2 500> //Report 500 <L <A “2000062414140802”> //GEM timestamp- CLOCK <U1 2> // PortTransfer State=Ready to Load <U1 1> //Port ID- 1 <A ""> // CarrierID NULL <U1 > // CarrierIDStatus Attribute- NULL <U1 > //Slot MapStatus Attribute- NULL <U1 0> // Port Association State VID- Load port not Associated <U1 > // CarrierAccessing Status Attribute- NULL <U1 0> // Port Reservation State VID- Load port Not reserved > > > > > 78. <S6F12 <B[1/1] 0x00> >

34


4 FAILURE AND RECOVERY

4.1 Overview

The 300 mm semiconductor manufacturing factory will be highly automated. It will be an integrated system requiring little or no operator intervention when operating under normal or “business as usual” situations. The factory control system, commonly called the Manufacturing Execution System (MES), will use information generated by the production equipment, the transport system, and the scheduling system to run the factory. This includes selecting carriers for delivery to and from production equipment, delivering to and picking up from the production equipment, set up, and process execution.

Experience teaches us that in the complex world of semiconductor manufacturing, no factory runs “business as usual” completely. Many process, equipment, and material problems are found on a daily basis. In the highly automated 300 mm factory, recovery from these problems quickly and with minimal effort is required to maximize the huge investments these factories represent.

At a high level, all errors or exceptions can be thought of as occurring within the following five step sequence:

1. Factory or equipment operations running normally (“business as usual”)

2. An abnormal incident, error, or exception occurs

3. The error is detected by

a. The equipment

b. The host system

c. An operator or technician monitoring the line

4. The error, the error condition, or cause of the problem is fixed

5. The factory is restored to normal operations

The requirements on equipment for step one are partially described in the Global Joint Guidelines, the Vision document, the SEMI standards, and each IC makers individual equipment specifications. The Selete/ISMT collaboration effort has defined a small example list of the kind of errors that might occur and are listed in this document. The methods of error detection are numerous and not addressed for all errors. Only a few examples are included. The method of fixing the errors is specific to the errors, the equipment, and the factory where the equipment is operated.

IC makers encourage equipment and MES suppliers to develop solutions that reduce the amount of manual intervention required, but acknowledge the inevitability of manual intervention for many of the problems expected in the factory. The flowcharts included in this document are primarily directed at addressing step five, returning the factory to “business as usual.”

4.2 Approach

For each type of failure addressed in Phase 2, a list of possible variations of the basic type is included. For example, for parallel I/O failures, SEMI E84 defines ten timeouts, four for the active equipment and six for the passive equipment. In addition to these timeouts, a parallel I/O can fail in other ways. These are all listed in Section 4.3.

35


Rather than use the traditional message flow called “scenarios,” the section on failures uses flowcharts in a way similar to that used for operational flows for testing. [Ref: EIATUG URL to operational flows].

Flowcharts can show multiple possible paths, or scenarios, and more than one type of failure within a single flow.

For each flowchart, a Base Functional Requirements table is provided to show the variation(s) shown in the particular flow. For this table, a variation for a specific Base Functional Requirement is checked only if it is explicitly shown in the flowchart. If none of the variations are checked, then the flowchart should apply to a scenario using any of the variations. If all of the variations of a Base Functional Requirement are checked, then the flowchart includes all of them explicitly.

Each type of failure contains a description of the failure and a list of the different ways that type of failure can occur. Where multiple variations exist, there is an explanation of why specific variations were selected for further development as a flowchart. In the operational flowchart itself, the actors are Operator, Host, AMHS, and the Equipment (production equipment). No message flow scenarios are necessary for the error recovery, but the flowchart indicates the interactions among the actors, including any messages sent.

4.3 E84 Failures

4.3.1 Description

E84 failures include those that occur at the start of, or during, a parallel I/O transaction based on SEMI E84. There are basically two major types: one where the production equipment signals a problem by using either HO_AVBL or ES, and one that is based on timeouts at either the production equipment or the AMHS equipment or both.

4.3.2 Types of E84 Errors

Different failure modes affect equipment type and the timing of failure on recovery options.

1. Handoff Interlock Abnormal — Equipment detects abnormal conditions in the handoff. This may indicate interference of the AMHS with the equipment in the handoff conflict area.

2. Handoff Unavailable— Equipment is not available for material handoff operation to the AMHS

3. Emergency Stop Request — Inform Emergency Stop Request to the AMHS. This signal is normally ON. The production equipment may turn this signal OFF at any time before a transaction or during a transaction to indicate that the AMHS should immediately halt all activity. In particular, an overhead hoist must halt immediately.

36


• AMHS Timers

The AMHS provides the TA1, TA2, TA3, TA4 and TD1 timers. The TD1 Delay Timer is included here for completeness.

4. TA1 Interlock Timeout for AMHS — AMHS fails to detect L_REQ (loading) or U_REQ (unloading) going OFF within the interval after VALID is set ON specified by the TA1 timer.

5. TA2 Interlock Timeout for AMHS — AMHS fails to detect READY ON within the interval after TR_REQ ON specified by the TA2 timer.

6. TA3 Interlock Timeout for AMHS — AMHS fails to detect READY OFF within the interval after COMPT ON specified by the TA3 timer.

7. TA4 Interlock Timeout of AMHS — AMHS fails to detect L_REQ/U_REQ OFF within the interval after BUSY ON specified by the TA4 timer.

Note: The TA4 timer is not currently defined in E84 but has been identified as important to allow the AMHS to detect a problem in the handoff itself.

8. TD1 Delay Timer – Specifies the delay between VALID signals of two successive handoffs. Equipment may need time to detect the second VALID signal transition to ON.

• Production Equipment Timers

The Production Equipment provides the TP1, TP2, TP3, TP4, TP5, and TP6 timers.

9. TP1 Interlock timeout for Equipment — The TP1 timer measures the interval between L_REQ/U_REQ ON and TR_REQ ON.

10. TP2 Interlock timeout for Equipment — The TP2 timer measures the interval between READY ON and BUSY ON.

11. TP3 Interlock timeout for Equipment — The TP3 timer measures the interval between BUSY ON and either the actual detection of a newly placed carrier (loading) or the removal of an existing carrier (unloading).

A carrier is detected whenever both the carrier presence sensor and the carrier placement sensor are activated and have stopped fluctuating (bouncing). If the carrier placement sensor is not activated, the carrier may be present but turned around.

The removal of a carrier is detected whenever both the carrier presence sensor and the carrier placement sensor change state from activated (carrier detect) to inactive (carrier not detected).

12. TP4 Interlock Timeout for Equipment — The TP4 timer measures the interval between L_REQ OFF (loading) or U_REQ OFF (unloading) and BUSY OFF.

13. TP5 Interlock Timeout for Equipment — The TP5 timer measures the interval between READY OFF and VALID OFF.

14. TP6 Interlock Timeout for Equipment — The TP6 timer measures the interval between VALID OFF following one handoff within the continuous handoff transaction and VALID ON of the next handoff. A continuous handoff transaction is indicated by the AMHS signal CONT ON during the first handoff in the sequence.

37


4.3.3 Selected E84 Failures

The E84 TP3 timeout failure caused by a carrier sensor failure was selected in combination with a carrier presence/placement failure to illustrate how one failure can trigger a second failure. In addition, after determining that the AMHS will wait forever for L_REQ OFF before raising COMPT, it was agreed that the AMHS should have an additional timer, TA4, not currently specified in E84. TA4 would be set at the time BUSY is turned ON and would be cleared when L_REQ (for loading) or U_REQ (for unloading) is turned OFF. Without this timer, the AMHS is unable to detect an alarm condition which should be reported to its supervisor.

4.3.3.1 Carrier Sensor Fail at Equipment on Delivery 1. AMHS reaches handoff location in front of load port, Turns CS_0 on

2. AMHS turns VALID signal on

3. Equipment turns L_REQ (U_REQ) on

4. AMHS turns TR_REQ on to request equipment to start handoff operation

5. Equipment turns READY signal on when ready for handoff

6. AMHS turns BUSY signal on and starts transfer

7. Carrier not detected on equipment before TP3 Timeout (Equipment detects timeout)

Note: Both the carrier presence and the carrier placement sensor must operate properly for the carrier to be detected. The carrier could be placed 180 degrees off, or either sensor could fail to change to the required state and settle.

8. Equipment notifies Host by event and alarm reports.

4.3.3.1.1 Base Functional Requirements

Table 4 shows the base functional requirements sin the E84 TP3/TA4 flowcharts. Only those variations marked with a check are explicitly shown.

Table 4 Base Functional Requirements for E84 TP3/TA4 Timeout


Internal Buffer

Multiple Wafer

Base Scenario

4a Carrier Type FOUP E47.1 √ √ √

7a Carrier Handoff Automatic (AMHS) E84 √ √ √

9a Carrier Delivery and Pickup (Access Mode)

Automatic E87 √ √ √

38


4.3.3.1.2 Flowchart for E84 Failures

AMHS Equipment Host Operator

Carrier Sensor Failure with E84 Timeout (Tool detects timeout on carrier placement)

Comment

Loadport(LP) 1Access Mode = Auto

Creates ATransport Job

For Carrier X ToLP1

LoadportHO_AVAIL = ON

ES = ONPOWER = ON

AMHS VehicleArrives With

Carrier X.

Set CS_0 ONSet CS_1 OFFSet Valid ON

Set TA1 Timer

PIO

Detect Valid ONDetect CS_0 ONDetect CS_1 OFF

Set L_REQ ONSet TP1 Timer

PIO

Detect L_REQ ONClear TA1 TimerSet TR_REQ ONSet TA2 Timer

AMHS is ready tostart handloff

Detect TR_REQ ONClear TP1 TimerSet READY ONSet TP2 Timer

PIO

Equipment isready to start

handoffDetect READY ON

Clear TA2 TimeSet BUSY ON

Set TA4

AMHS is startinghandoff

AMHS Begins ToPlace Carrier On

LP1

Detect BUSY ONClear TP2 TimerSet TP3 Timer.

Wait For CarrierPresense And

Carrier PlacementSensor To

Indicate Carrier IsDeliveredCorrectly.

Equipment waitsfor carrierdetection

1b1a

Initial State

AMHS requestaccess to LP1

Equipment is ready toload at LP1

PIO

AMHS waits forequipment toacknowledge

receipt of carrier

Event: ReadyTo Load

Event: TransferBlocked

Move Carrier X to Equipment’s LP1

Figure 1 E84 Failure (1 of 4)

39


1b

CarrierDetected?

TP3 TimedOut?

Carrier detectionrequires both

carrier presensesensor and carrierplacement sensordetecting expected

condition aftersettling

Yes

AMHS Equipment

1a

L_REQOFF

Detected?

TA4 TimedOut?

AMHS NotifiesHost

AMHS RequestsOperator

InterventionAMHS Does NotRelease Carrier

Awaits OperatorIntervention

Yes

EquipmentNotifies HostEquipmentRequestsOperator

InterventionAwaits Operator

Intervention

No

No 3d

Yes

3e

Alarm: PIO Failure

2a OR3a

2b OR3b

No

Alarm: HandoffTimeout Error

Yes

Host Operator Comment

Alarm: OperatorIntervention Required

Alarm: OperatorIntervention Required


No


40


Set HO_AVBL Off

HO_AVBL = OFFIndicates That ThisTool May Be Having

Difficulties WithReceiving CarriersAnd Is Unavilable

For Hand-Off

Operator Decision:Set LP1 Out Of

Service?

ENDEND

Event: LP1 Out OfService


OperatorIntervention/

Decision:Retry OrCancel?

Typically, OpeatorWill:

- Manually CommandAMHS To Release

Carrier- Reset OHV Vehicle- PGV Or OHV Carrier

Back To Stocker

Cancel PIOTransaction

3c

2b

Remote Command:LP1 Out Of Service

Cancel

Cancel PIOTransaction

Clear TP3Set L_REQ OffSet READY Off

Retry

PIO

PIO

PIO

Clear TA4Set BUSY OffSet COMP Off

Set TR_REQ OffSet VALID OffSet CS_0 Off

2a

END

EquipmentAMHS

Cancel At Equipment

Cancel AMHS

No

Yes



41


If Alarm Cleared,Host Logs That

Operator ClearedAlarm

Note: COMPT IsNever Turned On In

This ScenarioUnless Successful

Delivery Occurs

Clear TP3 TimerSet L_REQ OffSet TP4 Timer

Alarm: Cleared

Clear Alarm AfterPlacing Carrier

Correctly On LP1 Continue AtEquipment

Continue At AMHSComplete

PIO Transaction

Clear TA4 TimerSet BUSY OFFSet COMPT ONSet TA3 Timer

Set TR_REQ OFF

PIO

END

3b3a

Host Operator CommentAMHS Equipment

3c

END

3d

Clear TP4 TimerSet READY OFF

Clear TA3 TimerSet COMPT OFFSet VALID OFFSet CS_1 OFF

PIO

PIO

Step 7 Phase 1aOr

Step 5Phase 1b

3e

Operator May- Manually

Command AMHS ToRelease Carrier

- Reset OHV Vehicle- Reset Carrier At

LP1

PIO


Figure 4 E84 Failures (4 of 4)

42


4.4 Slot Map Failure at FIMS Port

4.4.1 Description

A slot map failure can occur in several ways: the slot map reader may fail, the slot map read by the equipment may not match the slot map provided by the host, or the slot map contents has a problem (cross-slotted wafer, for example). In addition, a failure at the load port of a fixed buffer equipment is a simpler problem for recovery than a failure at an internal front-opening interface mechanical standard (FIMS) port in an internal buffer equipment, which is typically batch equipment and may already have loaded other carriers in the batch.

4.4.2 Types of FIMS Port Slot Map Failure

1. Slot Map Reading Failure (hardware failure of slot map reader) — Slot map reader does not respond; slot map contents are unreadable (bad data)

2. Unmatched Slot Map — Host and equipment have different maps

3. Double Slot, Cross Slot — Carrier contents are improper

4.4.3 Selected Failures

Because the equipment configuration has such a strong impact on options for recovery, separate flowcharts are provided for the fixed buffer equipment and the internal buffer equipment. In both cases, all of the types of slot map failure are shown.

4.4.3.1 Fixed Buffer Equipment

4.4.3.1.1 Base Functional Requirements

Table 5 Base Functional Requirements for Slot Map Failure at FIMS Port: Fixed Buffer Equipment


Internal Buffer

Multiple Wafer

Base Scenario

1a EFEM Type Fixed buffer E101 √ × √


5a FOUP Clamping Delivery Position Hw n.c. Hw n.c. √

6a FOUP Undocking On Carrier Complete E87 Op n.c. Op n.c. √




13 Slot Map Reader Confirm Wafer Exists E87 √ √ √

14a Host Verify E87 Op n.c. Op n.c. √

14b

Slot Map Verification Eqp Verify E87 Op n.c. Op n.c. √

25a Slot Map Read Timing At load port Hw n.c. √

25b At FIMS port √ √

43


4.4.3.1.2 Flowchart for Slot Map Failure at FIMS Port: Fixed Buffer Equipment

AMHS Equipment Host Operator Comments

Slot Map Failure - Fixed Buffer Equipment

slot map reader error

SuccessfulCarrierID

verification, door isopened

Yes

Change state towaiting for host,alarm to Host

(slot map readfailure)

CancelCarrierto Equipment

No

Change state toCarrier Stopped,

Slot MapVerification Fail.Close door and

prepare carrier forunload

Port Action:Cancel Carrier

EquipmentBased

Verification?

Yes

Slot map ok?

Phase 1Equipment Based

Verification Step 19No

2a 2b

No

3a 3b

Alarm: Slot Map ReadFail

Must havereceived the slotmap via service

(Bind,ProceedWithCarrier

or CarrierNotification)

Yes

Event: Waiting For Host(include slot map read)[host based verification]

Slot map ok?

Event:SlotMapVerificationOK

Yes

Inform: Slot Map ReadFail

Equipment ReportsSlot Map Reader

Failure

Opeator ActionRequired to

solve theproblem

5c

At this point host oroperator creates atransport job for thecarrier to be picked

up from theequipment

Figure 5 Slot Map Failure at FIMS Port – Fixed Buffer (1 of 5)

44




2a

change state towaiting for host

Close FOUP doorchange carrier state to

Verification Failed,Carrier Stopped.

Prepare carrier forUnload

2b

Host Issues aCancel Carrier

to theequipment

Ok toProceed with

Carrier?

NoThis Option may not

be used"Proceed With Carrier"

Issued

Yes

3b3a

Port Action:CancelCarrier

Event : WaitingFor Host(slotmap included)

3a

At this point host oroperator creates a

transport job for thecarrier to be picked

up from theequipment


45




3b

Carrier associated withcontrol /process

jobs

End

No

Cancel job

This decision blockexists becauseProcess jobs andcontrol jobs canbe created byservice from thehost prior tomaterial arrival.

Is theControl Job inthe Queued

State?

No

Is theControlJob inthe Selected

Date

DeselectControl Job

Yes

Deselect Job

There is noway to stopCancel a Jobin theWaiting for StartState. Once ithas been selected,it must be stoppedor aborted.

No

Stop ControlJob

Stop Job

CJStop

4b

Cancel Controljob

CJDeselect

InputReceived?

3a

No

CancelJobReceived?

Yes

DeselectJob

Received?

DeselectJob Ack

received?

NoNo Yes

Ack

Yes

Yes

CJCancel

Yes

4a

Ack

Ack

StopJobReceived?

No

Yes

5a

No

Transport systemretrieves the carrier

from equipment.Then, equipment

may receive arequest to place the

loadport out ofservice


46




4b

Process Jobin Queued/

Pooled state?

Cancel ProcessJob(s)

Yes

Cancel ProcessJob

PRJob Cancel

Stop Process Job

No

Stop ProcessJob

PRJob Stop

End

5a

4a

This steps concludecleanup of Controland Process Jobs

from the equipmentthat where

associated with thecarrier.

Equipment waits fortransport system topickup carrier. The

equipment mayrecieve a request to

place the loadport outof service by the

operator.


47




7a

Operatorphysically fixesslot map reader

and retests

Equipment may beplaced Off Line

until Problem getscorrected

Change Load Portto In Service

Place Load PortOut of Service

Change Load PortStatus to Out Of

Service

ChangeServiceStatus

Change LoadPort Status toREADY TO

LOAD

Change Service Status

End

InputReceived?

No

Yes

Event: Out Of Service

ProblemResolved?

Yes

No

End

Event: In ServiceEvent: Transfer ReadyEvent: Ready To Load

5c5a

This scenarioconcludes the

maintenance stepswhich may be

performed after thecarrier leaves the

equipment.


48


4.5 Internal Buffer Equipment

4.5.1 Base Functional Requirements

Table 6 Base Functional Requirements for Slot Map Failure at FIMS Port: Internal Buffer


Internal Buffer

Multiple Wafer

Base Scenario

1b EFEM Type Internal buffer E101 × √ √


13 Slot Map Reader Confirm Wafer Exists E87 √ √ √

14a Host Verify E87 Op n.c. Op n.c. √

14b

Slot Map Verification Eqp Verify E87 Op n.c. Op n.c. √

25b Slot Map Read Timing At FIMS port √ √

4.5.1.1.1 Flowchart for Slot Map Failure at FIMS Port – Internal Buffer Equipment

Figure 10 Slot Map Failure at FIMS Port – Internal Buffer (1 of 2)

Figure 11 Slot Map Failure at FIMS Port – Internal Buffer (2 of 2)

4.6 Carrier ID Read Failure

4.6.1 Description

A carrier ID failure occurs when the equipment is unable to read the carrier’s ID tag.

4.6.2 Types of Failures 1. Read Error

a. Physical problems, including a carrier ID reader failure or a failure of placing the carrier in the necessary read zone.

b. Bad data on the tag. The tag cannot be read properly.

c. The tag has no data or is missing.

2. Data Error

a. The carrier ID as read is different from the carrier ID expected.


The following flowchart shows both read errors and data errors for both equipment-based and host-based Carrier ID verification methods.

49


In this flowchart, when a Carrier ID read error occurs, the host must determine whether or not the carrier can be confirmed and whether it is safe to continue. In most cases, it will be necessary to confirm the ID manually, replace the carrier ID reader, or return the carrier for maintenance.

4.6.3.1 Base Functional Requirements

Table 7 Base Functional Requirements for Carrier ID Read Failure


Internal Buffer

Multiple Wafer

Base Scenario


11a Host verify E87 √ √ √

11b Carrier ID Verification

Equipment Verify E87 Op n.c. Op n.c. √

50


4.6.3.2 Flowchart for Carrier ID Read Failures


CarrierID Read Failure

TransferComplete

ID ReadAvailable?

BypassRead ID?

ProceedWith

Carrier?

4a

No

No

Yes

Yes

No

Yes

END

No previous Bindcommand issued

Event: Carrier IDWAITNG FOR HOST

END

Event: ID Verification

OK

Proceed WithCarrier

LoadPortAssociated?

4b

Instantiate NewCarrier Object

IDVerification

OK

Yes

Previous Bindcommand issued

2a

No

Figure 12 Carrier ID Failure (1 of 4)

51


Object AlreadyBeen Created?

3a

2a

PortAssociated With

AnotherCarrier?

No

Yes

Delete OtherCarrier

Associated WithThe Loadport

Yes

Create NewCarrier Object

No

Associate NewCarrier With

Actual Loadport

Prepare CarrierFor Unload

Proceed WithCarrier?

No

END (Carrier IDVerification OK)

Yes

4a

Event: Carrier IDWAITING FOR HOST

Cancel Carrier

Event: CarrierIDVerificationFail,

ProceedWithCarrier



2a

CarrierIDRead

Success

CarrierInstantiated

Already?

PortAssociated

With AnotherCarrier?

ProceedWith Carrier?

END END

Delete TheOther Carrier

Associated WithThis Port

Instantiate NewCarrier Object

Associate NewCarrier With

Loadport

4b

3a

Yes

Yes

Yes

Yes

No

No

No

ID VerificationOK

4a

Event: WAITINGFOR HOST

ProceedWith Carrier

Event:CarrierID

VerificationOK

No


52


3a



3a

CarrierAssociatedWith ThisLoadport?

CarrierIDVerification OK

No

Yes CarrierState ID NOT

READ

DuplicateCarrierID

Yes

No

ProceedWith

Carrier?

Yes

No

4a

END

Alarm:Duplicate CarrierID

Cancel TheAssociation

END

ProceedWith

Carrier

CarrierAssociated

With Another Loadport?

LoadportAssociated

With AnotherCarrier?

DeleteAssociatedObject

InstantiateCarrier

Yes

No

Yes

No

Event: WAITINGFOR HOST


53


4a4b



4a

CarrierAssociated

With Any CJ/PJ?

ID VerificationFailed

END

No

Carrier ReadyTo Unload

END

Cancel ControlJob

Event: CarrierIDRead Fail

CJ And PJ ForThis CarrierShould BeRemoved

4b

CancelCarrierAtPort

Event: Ready ToUnload


54


4.7 Job Creation Failure

4.7.1 Description

A job creation failure occurs when the host is unable to create a control job or a process job.

4.7.2 Types of Failures 1. Not enough space for process job

2. Not enough space for control job

3. Incorrect format for process job

4. Incorrect format for control job

5. Process jobs specified in control job do not exist


All the different types of job creation failures are shown in the flowchart.


Table 8 Base Functional Requirements for Job Creation Failure


Internal Buffer

Multiple Wafer

Base Scenario

None illustrated None illustrated

55


4.7.3.2 Flowchart for Job Creation Failures


Control and Process Job Creation Failure

Host waits forjobs to becompleted

Sufficientspaceexists?

Yes

Host requestsControl job

queue space

No

Host issuesPRJOB Multi

Create command

Create Formatacceptable?

Issue anError

No

Host waits forjobs to becompleted

Sufficientspaceexists?

Yes

Host requestsProcess Jobqueue space

No

Any otherparameter

error?

Host notifiesEngineering or

operator

No

Yes

START

Retry

Retry

S16F15PrMultiCreate

S16F21PRgetSpace

Ack = False

2a

Notify: PJcreation failure

Yes

Issue anError

Ack = False

S1F3 CJQueueSpace

Figure 16 Job Creation Failure (1 of 2)

56



Control and Process Job Creation Failure

2a

Issue PJAcknowledge

Ack = True

Create ControlJob

S14F9CreateCJ

Create Formatacceptable?

Issue anError

No

Any PJMissing?

Host notifiesEngineering or

operator

No

Yes

OBJACK=1

Yes

Issue anError

OBJACK=1

Perform OrdinaryProcessing

END

OBJACK=0CJQueued

Event

Inform Host ofsuccessfulcreation ofControl Job

CJSelectedEvent

Notify: Control JobCreation Failure

Figure 17 Job Creation Failure (2 of 2)

57


4.8 Docking/Clamping Failures

4.8.1 Description

Clamping locks the carrier at the delivery position on a load port to prevent accidental jostling or improper removal. Not all equipment can clamp at the delivery position. Failure to clamp is not a high priority type of failure, so long as fixed buffer equipment is still be able to dock the carrier at the FIMS port and internal buffer equipment is still able to move the carrier into the internal buffer. The factory may choose to continue to operate with that load port until the next scheduled preventive maintenance period.

Failure to unclamp, on the other hand, means that the carrier cannot be removed, and the load port must be placed OUT OF SERVICE, either automatically by the equipment or by the host.

4.8.2 Types of Failures 1. Clamp failure at delivery.

2. Clamp failure on internal buffer equipment after CarrierOut.

3. Unclamp failure on fixed buffer equipment after undocking.

4. Unclamp failure on AMHS triggered unlock.

5. Dock failure on fixed buffer equipment after CarrierID verification.

6. Dock failure on internal buffer equipment before SlotMapID verification.

7. Undock failure on fixed buffer equipment after CarrierComplete and FOUP door closed.

8. Undock failure on internal buffer equipment after CarrierComplete and FOUP door closed.


Clamp and unclamp failures that occur at the point of delivery are handled similarly for both fixed buffer and internal buffer equipment. However, recovery from docking and undocking failures are greatly affected by the design of the equipment, depending on where the FIMS port is located within the equipment. Also, clamping and docking failures occur at the beginning of a run, while undocking and unclamping failures occur at the end of a run.

Two flowcharts are provided, one showing clamping and docking failures and one showing undocking and unclamping failures. Both fixed buffer equipment and internal buffer equipment cases are represented.


Table 9 covers the flowcharts for both clamping/docking failures and undocking/unclamping failures.

58


Table 9 Base Function Requirements for Clamp/Dock and Undock/Unclamp Failures


Internal Buffer

Multiple Wafer

Base Scenario

1a Fixed buffer E101 √ × √

1b EFEM Type

Internal buffer E101 × √ √


5a Delivery Position Hw n.c. Hw n.c. √

5b FOUP Clamping

Docked Position Hw n.c. Hw n.c. √

6a On Carrier Complete E87 Op n.c. Op n.c. √

6b FOUP Undocking

AMHS Triggered 3115c Op n.c. Op n.c. √




59


4.8.3.2 Flowchart for Clamp/Dock Failures

Equipment Host Operator Comment

LP1Associated with

Carrier ABCAccess mode = AutoReservation State=

RESERVED

Carrier ReceivedAt LP1

LP1 -> NOTRESERVED

Equipment ReportsClamp FailureNotify Host and

Operator

1a

LP1 AcceptsCarrier ABCTransactionCompletesNormally.

CarrierClamped?

Attempts ToClamp Carrier.

Clamp ShouldEngage As Soon As

PIO TransactionCompletes.

Carrier ID May BeRead

Asynchronously.Assume The ID Is

Read With No Errors.

Host Has PreviouslySent A Bind RequestFor LP1 And Carrier

ABC

Event: MaterialReceived

Event: LP1Not Reserved

Alarm: ClampFailure LP1

Notify: ClampFailure LP1

AMHS VehicleArrives AndSuccesfully

DeliversCarrier ABC To

LP1

AMHS VehicleMoves Away.

AMHS

PIO

1bNo

Yes

Clamp and Dock Failure Fixed Buffer

Figure 18 Clamp/Dock Failures (1 of 3)

60


AMHS Equipment Host Operator Comment

1a

Operatorresponse

?

No

Dock CarrierAt FIMS Port

OperatorIntervention

Retry orCancel?

Operatorintervention:

Cancel orContinue?

CarrierDocked

2a

No

Cancel

Call MaintenancePersonnel

Retry

Step 15 ofNormal

Round TripScenario forFixed BufferEquipment

Yes

2a

Port Action: CancelCarrier At LP1

Seal Is Not Made IfDocking Fails. DoorMay Not Be Opened.

Yes

Carrier Docked -Continue

Operations OrCancel Carrier

Alarm: Carrier Dock/Undock Failure

Notify: DockFailure LP1

Cancel

Yes

Internal Buffer MustMove Carrier To

Internal FIMS Port

Operator Must BeAble To Instruct

Equipment After AFailure

1b

Continue AtEquipment

ReadCarrierID

Clear Alarm AfterSolving The Problem

Alarm Cleared

Succesfullverificationand read?

NoGo To CarrierID FailureScenario

Yes

Event: Carrier IDVerification OK

Clear Alarm AndRetry

Cancel CarrierABC

CancelCarrier?

OperatorResponse?

Yes

No



61


Place LP1 Out OfService

2a

Place LP1 OutOf Service

Wait For CarrierTo Be Removed

Attempt To ReturnCarrier To Delivery

Position

Port Action: LP1Out Of Service

Event:LP1 OutOf Service

Event:LP1 ReadyTo Unload

LP1 May Not BeUsed For

Normal MaterialProcessing

While Out OfService


Must Delete AnyJobs For This

Carrier

Returnsuccessfully

?

No

Alarm: Carrier Dock/Undock Failure

EquipmentAMHS

Yes

Notify: Carrier Dock/Undock Failure

OperatorIntervention

Move Carrier ToUnload Position

CarrierRemoved?

Yes

Yes

CarrierRemoved?

Operator PlacesCarrier Properly

No

END

Event:LP1 ReadyTo Load



62


4.8.3.3 Flowchart for Undock/Unclamp Failures


Carrier ABC atFIMS Port

Carrier CompleteFOUP Door Closed

Equipment reportsundock failure

Notify Host

1a

EquipmentAttemptsto undock

Carrier

3b

Yes

NoAlarm: Carrier Dock/

Undock FailureNotify: Undock

Failure

Event: Carrier ABCComplete

Event: Carrier Closed

Host Will DetermineTiming Of

Maintenance- It Is Possible To

Unload Other CarriersAt A Second FIMS

Port.

CarrierUndocked?

Undock/ Unclamp Failure Scenario

Figure 21 Undock/Unclamp Failures (1 of 4)

63


1a

MoveCarrier

To LoadportLP1

AMHSTriggered

Unlock?

AMHSVALID ON

?

2a


Yes

Yes

Carrier Can NotBe Removed

Until Unclamped

AMHS ArrivesCS_0 ONCS_1 OFFVALID ON PIO

No

2b

Detect CS_0 ONSet U_REQ ON

PIO

PIODetect U_REQ ONSet TR_REQ ON

No

Event:LP1 Ready ToUnload

Carrier Is MovedFrom The FIMS Port

To The Load Port

Equipment AttemptsTo Unclamp The

Carrier



64


2a


Attempts toUnclampCarrier

CarrierUnclamped?

Yes

Detect TR_REQ ONSet READY ON

PIO

No

Detect READY ONSet BUSY ON PIO

Carrier Is NoLonger DetectedSet U_REQ OFF

PIO

Carrier Must BeUndocked And

Unclamped BeforeREADY ON Is Set

3a

At Completion OfTransfer

Set BUSY OFFSet COMPT ON

Set TR_REQ OFF

PIO

Detect COMP ONSet READY OFF

PIO

Detect READY OFFSet VALID OFF

Set COMPT OFF

PIO

Step 63Phase

1a

Event: LP1 TransferBlocked

2b



65


Place LP1 OutOf Service

Wait ForMaintenance


3a

Put LP1 OutOf Service

Notify Host andoperator

Alarm: ClampFailure LP1 Notify: Clamp

Failure LP1

3b

LP1 can no longerbe used for deliveryoperator decides to

put LP1 out ofservice

If internal buffer,operator may

attempt to unload atanother loadportCarrier Action: LP1

OutOf Service

Event:LP1 OUTOF SERVICE

Operatordecides to put

LP1 Out ofService

Yes

END



66


5 GLOSSARY OF TERMS

• Carrier ID tag (tag, ID tag) — a physical device for storing carrier ID and other information. There are two basic types of tags: read-only tags and read/write tags. [SEMI E99-1000]

• Tag fault — any condition that causes errors when reading or writing to the tag, including power faults and tag damage.

6 CONTACTS

For more information about this document or referenced material, please contact the following:

6.1 Selete Manufacturing Technology Research Department

Address: Semiconductor Leading Edge Technologies, Inc. 292 Yoshida-cho, Totsuka-ku Yokohama, 244-0817, Japan

Phone: +81-45-866-6800

Fax: +81-45-866-6880

Name Company Phone e-Mail

Tomoyuki Masui Selete 81-45-866-6772 [email protected]

Satoshi Kono Selete 81-45-866-6975 [email protected]

Yasushi Ohyama Selete [email protected]

6.2 ISMT CIM Study Group

Address: International SEMATECH 2706 Montopolis Drive Austin, Texas 78741

Phone: (512) 356-3232

Fax: (512) 356-7848

Name Company Phone e-Mail

Dave Bloss Intel (480) 554-1099 [email protected]

Blaine Crandell TI (972) 927-5844 [email protected]

Gino Crispieri ISMT (512) 356 7547 [email protected]

Peter Cross Intel (480) 554-8861 [email protected]

Karl Gartland IBM (802) 769-2529 [email protected]

James Y. C. Lu TSMC 886-3-5785112-2712 [email protected]

International SEMATECH Technology Transfer 2706 Montopolis Drive

Austin, TX 78741

http://www.sematech.org e-mail: [email protected]