2_High Stroke Robot System_Semicon Taiwan 2011

8/3/2019 2_High Stroke Robot System_Semicon Taiwan 2011

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High Stroke Robot system

for TSV, Wet and Exposure systems

High Stroke Robot system

for TSV, Wet and Exposure systems

Takeshi Sasaki

Factory Automation groupTOHO KASEI CO.,LTD, Japan

TOHO-FA

Semicon Taiwan 2011, Sep.82011


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AgendaAgenda

High Stroke RobotHigh Stroke Robot

TTR Tracked Telescopic RobotTTR Tracked Telescopic Robot

Low Pass Line and Longer Arm RobotLow Pass Line and Longer Arm Robot

AWL Auto Wafer LoaderAWL Auto Wafer Loader

300mm

450mm

Speed & FineSpeed & Fine


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tacked rocess Module

for TSV 3D Packaging and Wet Process

EFEM :

RD300-570 + Linear Track

Process :

RD300-1050 + Linear Track

TSV/3D Packaging configured by 4port EFEM, Multi Chamber and Stacked

Process Modules for 3 types of SUBSTRATES Handling,

1) 400mm DF (Dicing Frame), 2) 300mm Quartz Wafer, 3) 300mm Silicon Wafer

TTR Tracked Telescopic Robot configured by TELE-ROBOT + LINEAR TRACK

with best combination with high Z-STROKE, fine POSITIONING and high SPEED.


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For Stacked Process Module and high Throughput Process

Max.1200mmZ stroke and min.400mmFL High Speed 1200mm/1sec

Dual Arm Robot 0.05mm positioning

TelescopicFolding

1050mm2-step

1200mm3-step

High Stroke RobotHigh Stroke Robot--11

RD300-1200FZR300-660 RD300-1050RD300-570

Z=660mm

400mmFL

570mm2-step


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High Stroke RobotHigh Stroke Robot--22

TelescopicFolding

1050mm2-step 1200mm3-stepZ=660mm

400mm

FL

570mm2-step

RD300-1200FZR300-660 RD300-1050RD300-570

1100mm Stroke


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High Stroke Robot SpecificationHigh Stroke Robot Specification

model RD300-570 RD300-1050 RD300-1200

axis 5 (2-step) 5 (2-step) 6 (3-step)

Envelope

R1, R2 Axis 651 mm

T Axis 330 deg

Z Axis 570mm 1,050 mm 1,200 mm

Speed

R1, R2 Axis 1,050 mm/s

T Axis 196 deg/s

Z Axis 570mm/s 1,000 mm/s 1,200 mm/s

Repeatability

R1, R2 Axis 0.05 mm

T Axis 0.02 deg

Z Axis 0.1 mm

Motor AllAC Servo Motor, Absolute Encoder,

Harmonic DrivePayload 2.0 kgf

mapping (Optional)

Clean [email protected]

Weight 55 kg 80 kg 110 kg

Components

AC servo motor

Absolute Encoder Harmonic Drive

Linear Track

Smart Motion

2 FOUP Access

Wafer Mapping

Fast Movement

3-axis Movement

Z 3-step Movement

Teaching

ANSI Teaching Pendant

Direct Teaching

Software Command :

Put, Get , Swap

CE marking

Toughness Al 6061

High Speed, high Power AC Servo

Fine Positioning, Harmonic Drive


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TTR Tracked Telescopic Robot

1) 400mm Dicing Frame

2) 300mm Glass Wafer

3) 300mm Silicon Waferwith Face down


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AC Servo MotorIncremental Encoder

Pole Sensor

800WLinear Track

1700W

400W

200W

100W

100W

100W

Motor

R-arm

Rotation

AC Servo Motor

Absolute Encoder

Brake

Z-1

total

Z-2

AC Servo Motor

Absolute Encoder

Harmonic Drive

L-arm

Functionaxis

Gear Ratio 92 :Harmonic rive 50 :

Puley / Timing Belt 1.84 : 1

Resolution :

Rotation

2084 pulse/deg

Positioning Repeatability

0.0310.0160.031L-arm X-Z

0.0330.0190.033L-arm X-Y

0.0390.0380.026R-arm X-Z

0.0370.0270.034R-arm X-Y

TTR

RD300-1050

LOST motionfm RIGHTfm LEFTmove , dirTR arm

Positioning Repeatability : mm

Power : Telescopic Robot_RD300-1050 (Z=1050mm Stroke)


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Low Pass Line Robot_FZR

Feature : Folding Z-axis

Lower Pass Line 400mmFL

Long Z stroke 660mm

Long Arm Stroke 1100mm

Dual Arm Robot 0.05mm Positioning

400mmFL

660mm Z-stroke

Folding

Concept

Dual arm Robot

Extension 1100mm

Folding Z Robot FZR300-660


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Low Pass Line Robot_RD300-200

Feature : LED 50-150mm & 300mm Wafer

Dual Arm Robot

with AC Servo/Ab.Encoder/Harm.Drive

High Speed 1m/s all Axis

Fine Positioning 0.05mm

Low Pass Line 490mmFL

Arm Reach 750mm

Z Stroke 200/300mm Wafer Mapping


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AWL300 (Auto Wafer Loader)


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Compact 300mm EFEM

Compact 1port EFEM and AWL(Auto Wafer Loader)

Dual arm Robot, FOUP Opener and Prealigner Configuration Lower Cost and High Performance

50um and 0.02deg Fine Positioning and high Speed

Demo

@ Booth#1929


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Exposure System with AWL

Mejiro Stepper from TOHO-KASEI

with AWL Auto Wafer Loader 50mm 300mm Configuration

High Cost Performance


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AWL-LED

4inch Wafer

300mm CF Tray

FOUP

4inch Carrier

Centering

Prealigner

Index

300mmCF Tray

Dual Arm RobotRight arm :

4inch Wafer with Bernoulli Chuck

Left arm :

300mm CF Tray by Edge Clamp

FOUP

Transfer

FOUP Buffer

4inch to 300mm /FOUP Transfer


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Thanks !Thanks !TOHO-KASEI Booth at #1929

e-mail: [email protected]

http://www.toho-kasei.co.jp

TOHO-KASEI CO,. LTD, JapanTaiwan TOHO Technical Center @ Hsinchu

TOHO-FA

Documents

2_High Stroke Robot System_Semicon Taiwan 2011