240-451 VLSI, 2000

1

Lecture Lecture 5 5

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Design Rules

240-451 VLSI, 2000

2

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Design Rules

• Interface between designer and process engineer

• Guidelines for constructing process masks

• Unit dimension: Minimum line width

– scalable design rules: lambda parameter

– absolute dimensions (micron rules)

240-451 VLSI, 2000

3

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

1. Diffusion not lower than 2

2. Poly not lower than 2

2

2

240-451 VLSI, 2000

4

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

3. Diffusion and diffusion not lower than 3

3

240-451 VLSI, 2000

5

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

4. Poly and poly not lower than 2

Mead and Conway

2

240-451 VLSI, 2000

6

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

5. Poly and diffusion not lower than 1

1

240-451 VLSI, 2000

7

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

6. Poly cross diffusion

2

240-451 VLSI, 2000

8

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

7.

1 1

1 1

240-451 VLSI, 2000

9

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

8. Contact cut on diffusion

2

2

240-451 VLSI, 2000

10

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

9. Contact cut on poly

2

2

240-451 VLSI, 2000

11

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

2

2

Mead and Conway

10. Contact cut on metal

240-451 VLSI, 2000

12

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

11.,12. In Metal

Mead and Conway

33

240-451 VLSI, 2000

13

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

13.,14. Contact Cut3

2

240-451 VLSI, 2000

14

Department of Computer Engineering, Prince of Songkla University by Wannarat Suntiamorntut

Mead and Conway

15. Buttering contact 6

4