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8/3/2019 (2011!12!02) HRTEM and CBED for Analysis Materials
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Physics departmentPhysics department
Principle & practice of transmission electron
diffraction.
Tran Ngoc Cuong
Physics department.,
Dongguk University, KOREA
Date: 2011/12/03
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Principal operation
Transmission electron microscopy (TEM) is a microscopy technique whereby a
beam of electrons is transmitted through an ultra thin specimen, interacting with the
specimen as it passes through. An image is formed from the interaction of the
electrons transmitted through the specimen; the image is magnified and focused ontoan imaging device, such as a fluorescent screen, on a layer of photographic film, or
to be detected by a sensor such as a CCD camera.
The operating modes:
Transmission electron microscopy
Scanning electron microscopy
Scanning TEM
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Components of the TEM
optical components in a basic TEM
Electron gun: connecting this to a high voltage
source (typically ~100-300 kV).
Aperture: mechanical devices which allow for
the selection of different aperture sizes.
Specimen port: high vacuum, TEM grid sizes
is a 3.05 mm diameter ring.
Objective lens focuses on the specimen.
Projector lens: transfers the diffraction pattern
onto the viewing screen.
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Three basic operating modes of an electron microscope
Three types of TEM contrast for a specimen including a crystalline region (left half) and
an amorphous region(right half).
Three microstructural characterization techniques known as Selected Area Electron
Diffraction (SAED), Conventional Transmission Electron Microscopy (CTEM) and
High-Resolution Transmission Electron Microscopy (HRTEM).
(a) bright-field image (b) dark-field image (c) phase contrast, high-resolution image
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Take selected-area diffraction pattern
(a) Image formation (a) For selected are diffraction
Alter strength of
intermediate lens and
focus diffraction pattern
on to screen
By tilting a crystalline
sample to low-index
zone axes, SAED
patterns can be used to
identify crystal
structures and measure
lattice parameters.
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Convergent-beam electron diffraction
Basic principle
Convergent beam electron diffraction, generally referred to as CBED, is one of the
most powerful techniques for the determination of crystal structure in the field of
transmission electron microscopy (TEM).
The geometry of electron diffraction is different in these two modes, namely
SAED and CBED
8/3/2019 (2011!12!02) HRTEM and CBED for Analysis Materials
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Convergent-beam electron diffraction
Instead of parallel illumination with selected-area aperture, CBED uses highly
converged illumination to select a much smaller specimen region
(a) SAED (a) CBED
Diffraction spots of the SAED are enlarged
into CBED discs.
8/3/2019 (2011!12!02) HRTEM and CBED for Analysis Materials
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Comparing SAED and CBED
SAED consists of a set of spots CBED consists of a set of discs
8/3/2019 (2011!12!02) HRTEM and CBED for Analysis Materials
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Effect of Convergence Angle
Each spot becomes a disc which variations in intensity, they contain a wealth of
information about the symmetry and thickness of the crystal and are widely used in TEM
The electrons are scattered though
2 B.
Electrons are scattered from all the
directions in the convergent conical
illumination.
Each point in the direct beam disc is
one direction of illumination so each
point in the disc can be scattered by
the same 2 B.
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Advanced CBED
Patterns from dynamical scattering in direct and diffraction discs allow determination
of:
- Polarity of non-centrosymmetric crystals
- Sample thickness
simulated and experimental CBED patterns for GaN and ZnO
g = hkl means that the (hkl) reflection satisfies its Bragg condition
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Advanced CBED
Inelastic scattering which can go
in any direction
Elastic scattering which can go
only in specific directions.