(2011!12!02) HRTEM and CBED for Analysis Materials

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    Physics departmentPhysics department

    Principle & practice of transmission electron

    diffraction.

    Tran Ngoc Cuong

    Physics department.,

    Dongguk University, KOREA

    Date: 2011/12/03

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    Physics departmentPhysics department

    Principal operation

    Transmission electron microscopy (TEM) is a microscopy technique whereby a

    beam of electrons is transmitted through an ultra thin specimen, interacting with the

    specimen as it passes through. An image is formed from the interaction of the

    electrons transmitted through the specimen; the image is magnified and focused ontoan imaging device, such as a fluorescent screen, on a layer of photographic film, or

    to be detected by a sensor such as a CCD camera.

    The operating modes:

    Transmission electron microscopy

    Scanning electron microscopy

    Scanning TEM

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    Components of the TEM

    optical components in a basic TEM

    Electron gun: connecting this to a high voltage

    source (typically ~100-300 kV).

    Aperture: mechanical devices which allow for

    the selection of different aperture sizes.

    Specimen port: high vacuum, TEM grid sizes

    is a 3.05 mm diameter ring.

    Objective lens focuses on the specimen.

    Projector lens: transfers the diffraction pattern

    onto the viewing screen.

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    Physics departmentPhysics department

    Three basic operating modes of an electron microscope

    Three types of TEM contrast for a specimen including a crystalline region (left half) and

    an amorphous region(right half).

    Three microstructural characterization techniques known as Selected Area Electron

    Diffraction (SAED), Conventional Transmission Electron Microscopy (CTEM) and

    High-Resolution Transmission Electron Microscopy (HRTEM).

    (a) bright-field image (b) dark-field image (c) phase contrast, high-resolution image

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    Take selected-area diffraction pattern

    (a) Image formation (a) For selected are diffraction

    Alter strength of

    intermediate lens and

    focus diffraction pattern

    on to screen

    By tilting a crystalline

    sample to low-index

    zone axes, SAED

    patterns can be used to

    identify crystal

    structures and measure

    lattice parameters.

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    Convergent-beam electron diffraction

    Basic principle

    Convergent beam electron diffraction, generally referred to as CBED, is one of the

    most powerful techniques for the determination of crystal structure in the field of

    transmission electron microscopy (TEM).

    The geometry of electron diffraction is different in these two modes, namely

    SAED and CBED

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    Convergent-beam electron diffraction

    Instead of parallel illumination with selected-area aperture, CBED uses highly

    converged illumination to select a much smaller specimen region

    (a) SAED (a) CBED

    Diffraction spots of the SAED are enlarged

    into CBED discs.

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    Comparing SAED and CBED

    SAED consists of a set of spots CBED consists of a set of discs

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    Effect of Convergence Angle

    Each spot becomes a disc which variations in intensity, they contain a wealth of

    information about the symmetry and thickness of the crystal and are widely used in TEM

    The electrons are scattered though

    2 B.

    Electrons are scattered from all the

    directions in the convergent conical

    illumination.

    Each point in the direct beam disc is

    one direction of illumination so each

    point in the disc can be scattered by

    the same 2 B.

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    Advanced CBED

    Patterns from dynamical scattering in direct and diffraction discs allow determination

    of:

    - Polarity of non-centrosymmetric crystals

    - Sample thickness

    simulated and experimental CBED patterns for GaN and ZnO

    g = hkl means that the (hkl) reflection satisfies its Bragg condition

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    Advanced CBED

    Inelastic scattering which can go

    in any direction

    Elastic scattering which can go

    only in specific directions.