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ZQJ-230D HELIUM LEAK DETECTOR

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KYKY

MODEL ZQJ-230D

HELIUM MASS SPECTROMETER LEAK

DETECTOR

OPERATION/MAINTENANCE MANUAL

KYKY TECHNOLOGY DEVELOPMENT LTD

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ZQJ-230D Helium Mass Spectrometer Leak Detector

TABLE OF CONTENTS

SECTION PAGE

PREFACE

SALES & SERVICE

SECTION GENERAL DESCRIPTION..... 1-1

1.1 Helium mass Spectrometer leak detection (MSLD). ...1-1

1.2 Methods of testing for leaks.....1-4

1.3 Leak detection methods.. ....1-5

1.3.1 Test Piece Evacuated........1-5

1.3.2 Test Piece Pressurized.......1-6

1.3.3 Test Piece Already Sealed.....1-7

1.4Conversions.....1-7

SECTION KYKY ZQJ-230D DESCRIPTION.............2-1

2.1 Basic Leak Detector.......2-1

2.1.1 General........2-1

2.1.2 Mechanical Pump.......2-6

2.1.3 Turbo Pump ....2-6

2.1.4 Spectrometer Tube......2-6

2.2 Test-Cycle Description.2-8

2.3 Specifications..2-10

2.4 Site requirements.............2-11

2.5 Basic Unit and Standard Accessories......2-11

SECTION OPERATING THE ZQJ-230D LEAK DETECTOR...3-1

3.1 Control and indicators........3-1

3.2 StartUp procedure..........3-4

3.3 Tuning adjustments and Calibration Check.....3-5

3.3.1 Range selection...3-5

3.3.2 Using helium reservoir 1eak for tuning .....3-6

3.4 Operating Procedures.........3-7

3.4.1 Normal test cycle(10 Pa or less)......3-7

3.4.2 Testing at higher pressure (10~20Pa) ....3-7

3.4.3Prolonged pumpdown cycle (rough delay)....3-8

3.4.4Testing at highter pressure(above 20 Pa)...3-8

3.4.5Testing with Sniffer...3-8

3.5 Shutdown and Restarting Procedures ...3-9

3.5.1 General ..3-9

3.5.2 Shutdown for Overnight or Weekend(standby)......3-9

3.5.3 Complete Shutdown...3-9

SECTION MAINTENACE.....4-1

4.1 Introduction..........4-1

4.2 Daily maintenance........4-3

4.2.1 Leak Detector sensitivity check........4-3

4.3 Weekly maintenance....4-3

I

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4.3.1 Oil level........4-3

4.4 Semi-annual maintenance........4-3

4.4.1 Mechanical pump oil change-complete shutdown...4-3

4.4.2 Turbo pump filling lubricant oil...4-4

4.5 Annual maintenance (or as-required maintenance)..4-44.5.1 General......4-4

4.5.2 Removing Cleaning and Reinstalling spectrometer tube..4-4

4.5.3 Valve Block Cleaning....4-7

4.5.4 1on Source replacement......4-8

4.6 E1ectronics System......4-8

4.6.1 General .....4-8

4.6.2 Emission Contro1 adjustment.......4-9

4.6.3 Adjustment of Ion Source voltage.4-9

4.6.4 Adjustment of Thermocouple Gauge..4-10

4.6.5 Overpressure Protection adjustment.......4-10

4.6.6 Display Amplifier adjustment (leak Rate)...4-11

4.6.7 Turbo pump start-up adjustment.........4-11

4.6.8 Residual Background Check ......4-12

4.7 Leak Detector self-test...4-12

SECTION TROUBLESHOOTING.....5-1

II

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Preface

Dear cust omer ,

You have chosen a Hel i umMass Spect r omet er Leak

Det ect or f r om KYKY

Technol ogy Devel opment LTD. The uni t you have

acqui r ed you benef i t

f r omt he company s many wi t h year s of exper i ence

i n t he ar eas of vacuum

and l eak det ect i on t echnol ogy.

The KYKY ZQJ - 230D l eak det ect or was especi al l y

desi gned f or i nt egr at i on i n i ndust r i al syst ems.

I t s ver sat i l i t y, si mpl e oper at i on and

avai l abl e i nt er f aces al l ow t hi s devi ce t o be used

i n many ar eas of appl i cat i on. Thi s Manual

cont ai ns i mpor t ant i nf or mat i on on t he f unct i ons,

i nst al l at i on, st ar t - up and oper at i on of t he

ZQJ - 230D Leak det ect or .

Note We recommend t hat you car ef ul l y r ead t hi s

Manual t o ensur e opt i mumoper at i ng condi t i ons r i ght

f r om t he star t .

III

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IV

Sales & Service

Internet users:

In the China, you can contact KYKY TECHNOLOGYDEVELOPMENT LTD.

Add: No.13 Bei'ertiao, Zhongguancun, Haidian District, Beijing,

China

Postcode: 100190

Tel: +86-10-62571592 +86-10-62565522

+86-10-82548198 +86-10-82548998

Service800-810-62617951 010-62565812

Fax: 0086-010-62617951

Send email to Customer Service &Technical SupportE-mail: [email protected]

Visit our web site at http://www.kyky.com.cn/
mailto:[email protected]:[email protected]://www.kyky.com.cn/http://www.kyky.com.cn/docc/fzlm.htmhttp://www.kyky.com.cn/docc/fzlm.htmhttp://www.kyky.com.cn/mailto:[email protected]

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1-1 GENERAL DESCRIPTION

SECTION GENERAL DESCRIPTION

1.1 HELIUM MASS SPECTROMETER LEAK DETECTION

(MSLD)

A mass spectrometer is a machine that can produce, sort and detect gaseous ion

species. As such it requires a high vacuum to operate effectively.

A helium mass spectrometer 1eak detector basically consists of a simple mass

spectrometer tuned to helium and an associated high vacuum system. Helium isextremely well-suited as a probe (test) gas because:

It is a small light atom that can penetrate small holes and move rapidly. This

latter quality reduces both response and clean-up time.

It is inert therefore non-reactive and non-toxic

Helium is easily detected by a simple mass spectrometer

It is readily available and inexpensive and it also has a low atmospheric

partial pressure (5 ppm or 4 millitorr absolute), so it presents a low

background signal.

A helium mass spectrometer leak detector (HMSLD) is a complete system for

locating and/or measuring the size of 1eaks into or out of a device or a containerIn

use, This method of leak detection is initiated when the tracer gas , helium , is

introduced to a test part that is connected to the MSLD systemThe helium from the

test part leak travels through the system. Its partial pressure is measured, and results

are displayed on a 1eak rate measurement meter. The MSLD operating principle

consists of ionizing gases in a vacuum and accelerating the various ions through an

electric and magnetic field. The helium ions are separated and collected and the

resulting ion current is amplified and measured. See Figure 1-1.

The heart of the leak detector is the mass spectrometer tube. See Figure 25.

In operation, electrons produced by a hot filament enter the ion chamber and collide

with gas atoms and mo1eculesCreating ions quantitatively proportional to the

pressure in the ion chamberThese ions are repelled out of the ion chamber

through the exit slit by the repeller filed. The combined electrostatic of the repeller

exit slit, focus platesand ground slit collimates the ion beam so that it enters the

magnetic field as a straight ribbon of ions.

At the entrance to the magnetic field, ions of all gas species are presented and

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detected. If an ion collector were placed at this point its voltage would be

proportional to the total pressure in the ion chamber. However as the ions pass

through this magnetic field, they are deflected in proportion to their mass-to-charge

ratio.

The path of a charged particle moving in a magnetic field is described from massspectrum principle as:

R=(144/B) 10-4 [(M/Z)U]1/2

R--Radius of curvature (cm

B--Magnetic fieldT

M/Z--Mass-to-charge ratio of ion

U--Accelerating voltage of ionV

In the mass spectrometer tube, R and B are held constant and we are concerned only

with singly ionized helium atoms (M=4), and (Z=1) so the only variable to adjust isU. When the voltage is adjusted for collecting helium ions, the machine is said to be

tuned to helium, and mass (4) will plot as shown in Fig.1-2.

The spectrometer tube is typically designed and adjusted so that hydrogen ions are

deflected 135helium ions 90 and all heavier species less than 90as shown in

Fig.1-1. Consequently, only helium ions pass through the field exit slits and arrive at

the collector. The collector current is therefore proportional to the partial pressure of

helium in the spectrometer tube and within the normal operating pressure range of

the HMSLD is not affected by the pressure of other residual gases. The collectorcurrent is measured by an electrometer amplifier and displayed on the meter as a leak

rate.

KYKY spectrometer tube illustrated in Figure 2-4 shows a total ion monitor as an

integral part of the tube. It monitors total pressure within the tube to initial protection

of the filament in case of an excessive pressure rise.

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1.2 Methods of Testing for LeaksThere are basically two accepted approaches to helium leak detection---the

conventional system and the Contra-Flow method shown in Figure1-3. Contra-Flowtechnique takes advantage of the differenced in compression ratios (outlet pressure

divided by inlet pressure) produced by the turbo pump for gases of different

molecular weights. For example, the maximum compression ratio for helium may be

100 or 1000, while for oxygen, nitrogen, and other gases contained in air, the ratios

are normally far in excess of 1 million.

This principle is implemented in the leak detector by introducing helium (and other

inlet gases, such as those resulting from a leak in the test piece) into the turbo pump

outlet (foreline) rather than into the normal pump inlet as in conventional leak

detectors. Helium, has a much lower maximum compression ration than other gasescontained in air and diffuses backwards through the turbo pump to reach the

spectrometer tube, where it is detected in the normal manner. Although the

mechanical pump is also attached to the turbo pump fore-line and removes all inlet

gases including helium. There is no appreciable loss of sensitivity in the Contra-Flow

leak detector.

One advantage of the Contra-Flow is the ability to begin leak detection at a higher

(rough vacuum) pressure. This allows the presence of outgassing during leak

detection. Contra-Flaw, the method of testing of leaks, is adopted by the KYKY

ZQJ-230D.

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1.3 Leak detection methods

Most leak detection methods depend on the use of a tracer gas passing through the

leak and being detected on the other side (for example, visual detection of air bubbles

in water). The mass spectrometer leak detector operates with helium as a tracer and is

widely used because it combines high sensitivity with production testing capability.

The three basic methods in common use are described below.

1.3.1 Test Piece EvacuatedThe object to be tested is evacuated by the leak detector roughing pump, then valve

into the spectrometer vacuum system. The surface of the test object is then probed

with a small jet of helium to locate individual leaks, or surrounded by helium

(hooded) for an overall leak check.

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Fig.1-4 Test Piece Evacuated: Tracer Probe Used to Locate Leak

Fig. 1-5 Test Piece Evacuated and Hooded with Helium Atmosphere to

Determine Overall Leak Rate

1.3.2Test Piece Pressurized

Fig. 1-6 Test Piece Pressurized: Detector Probe Used to Locate Leak

A sampling probe is connected to the leak detector. The object to be tested is filled

with helium at the desired test pressure and the probe is moved over its surface.Some of the helium escaping from a leak is captured through the probe and enters the

leak detector, thus locating the leak.

Sensitivity of this type of testing is limited to about 108 Pam3/sec, since most of the

escaping helium diffuses into the surrounding atmosphere. The sensitivity is also

limited by operator technique and variation in ambient helium concentration in the

vicinity of the testing.

An alternative to probing is to enclose the object and probe the enclosure for a

change in helium content.

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1.3.3 Test Piece Already Sealed

Fig. 1-7 Test Piece Sealed with Helium or Mixture of Helium and Other Gases:

Bell Jar Used to Determine Overall Leak Rate

Sometimes it is necessary to leak check a completely sealed object. This may be

done by placing helium inside the object before sealing (either 100% or mixed withother gas used for backfilling). The object is then placed in a vacuum chamber

connected to the leak detector. Helium escaping from the object into the vacuum

chamber is detected by the spectrometer tube. Sensitivity depends on the partial

pressure of helium in the object.

If the presence of helium in the finished object is undesirable, units already sealed

may first be placed in a container that is then pressurized with helium for a specific

time at a known pressure. Helium will enter the object through any leaks and may be

detected later, as described in the previous paragraph. Gross leaks may sometimes

not be detected, since all helium entering through a large leak may be lost prior to

testing. Also, spurious signals may be given by helium not entering the object, but

entering surface fissures and remaining long enough to be detected.

1.4 ConversionsPa Torr mbar bar atm

1Pa 1 0.7510-2

0.01 10-5

0.9910-5

1Torr 133 1 1.33 1.3310-3

1.3210-3

1 mbar 100 0.75 1 10-3

0.9910-3

1 bar 105

750 1000 1 0.99

1atm 1.013105

760 1013 1.013 1

Pam3/S TorrL/S mbarL/S atmmL/S

1 Pam3/S 1 7.5 10 9.9

1 TorrL/S 0.133 1 1.33 1.32

1 mbarL/S 0.1 0.75 1 0.99

1 atmmL/S 0.101 0.76 1.01 1

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SECTION KYKY ZQJ-230D DESCRIPTION

2.1 Basic Leak Detector

2.1.1 General

As shown in Fig.2-1, Model ZQJ-230D includes an analytical sensing tube called a

spectrometer tube, electronics to operate the tube, a vacuum system to maintain a

very high vacuum within this tube, and an electronic control box control the

electromagnetic valves. In addition, a rough vacuum pump and a system of valves

are provided to enable test cycles to be carried out.

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2-1 KYKY ZQJ-230D DESCRIPTION

2

8

7

5

4

3

1

6

9

1

2

3

4

5

6

7

8

Fig.2-1 KYKY Model ZQJ-230D Leak Detector

ALeft View BRear View

Left View: 1.Test Port; 2.Electronic control Box; 3.Electromagnetic valve control Board;

4.Electromagnetic Valve; 5.Valve Bulk; 6.Vent Valve; 7.Main Power; 8.Turbo Pump Power;

9.Mechanical Pump

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Rear View: 1.Test Port; 2.Thermocouple Gauge (Test Port); 3.Turbo Pump; 4.Electromagnetic

Valve; 5.Valve Bulk; 6.Thermocouple Gauge (Foreline); 7.Electromagnetic valve control Board;

8.Mechanical Pump

Fig.2-2 Front panel of ZQJ-230D

Fig.2-3 Operation panel of ZQJ-230D

For convenience, the primary operating controls and indicators are mounted on thefront panel of the instrument. Secondary controls, used less frequently, are mounted

on PCBs. e. The pumpdown and test cycle is controlled by the Test switch and the

Vent button on the operation panel. During a test cycle, operator only needs operate

between the Test switch and the Vent button. When the Test switch is in the ON

position, only the rough valve light and the test valve light illuminate, which indicate

the detector is in the test state. When the test switch is in the Off position and the

Vent button is pressed, only the Vent valve light and the Test valve light illuminate,

which indicate the detector is in the Vent state.

The Roughing Delay switch is to evacuate the large volume object or a gross leak.

The normal operating states of the ZQJ-230D valves are given in Table 2-1.

Table 2-1 ZQJ-230D Valve State Table

Operating state Rough Valve Test Valve Vent Valve

Rough Open Close Close

Test Open Open Close

Vent Close Open Open

Delay Close Open Close

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According to actual application, transfer pressure should be chose. Usually, small

object should be set at 5 Pa, larger object at 10 Pa, and sniffer test mode at 20 Pa.

As shown in Fig.2-2, test port pressure and roughing pressure are displayed on the

log scale, 20-segment horizontal bar graph. This display is calibrated in Pa from zeroto atmosphere.

Directly below the horizontal bar graph is a 50-segment vertical bar graph with an

associated digital range exponent which displays helium leak rate from 510-11 up

to 1010-5 pam3/s. These segments are also illuminated red. Associated with the

leak rate bar graph are controls for range selection (Table 2-2) to accommodate

different size leak. Light emitting diodes (LEDS) at the ends of the vertical bar graph

indicate over-scale and under-scale conditions.

Table 2-2 Display and Range SelectionRange Selection Range

8 10-5 10-6 10-7 10-8

9 10-6 10-7 10-8 10-9

10 10-7 10-8 10-9 10-10

Other operating controls on the front panel-near the vertical bar graph, are a control

for zeroing the leak-rate display (FINE ZERO), and a green FIL, indicator which

lights when the spectrometer tube filament is turned On and emission is present

inside the tube. When the FIL indicator is off, leak testing can not be accomplishedbecause the spectrometer tube will be unable to detect helium.

In addition to controls for running and adjusting the leak rate, the main electronics

assembly has controls for calibration-volume adjustment, and filament turn on. An

analog meter for indicating pressure (in Pa) is in the spectrometer tube.

There is a separate switch for changing sensitivity (High or Low).

The spectrometer tube and its electrical connection are visible in the space below the

manifold. A flange, which connects the spectrometer tube to the manifold assembly

above it, enables the spectrometer tube to vent to the atmosphere for maintenance

purposes.

A rear view of the ZQJ-230D Leak Detector is in the Fig.2-1B. The thermocouple

gauge is connected to the valve block assembly. An O-ring is compressed during the

process and not only secures the thermocouple to the block but also effect a good

vacuum seal. When primary power is applied, this device senses the port pressure

and provides an electrical signal which drives the horizontal bar-graph display.

During test, the test port pressure is at a medium vacuum level provided by themechanical pump (approximately 2Pa).

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The test port coupling above the thermocouple is a 28.5mm diameter quick-connect

O-ring sealed compression coupling which enables vacuum-tight connection to the

test object either directly or through an adapter as required.

Also mounted on the side panel is an exhaust fan for the internal electronic

assemblies: a grid covering the loudspeaker; recording device (for measuring or

recording leak rates).

An internal audio circuit in the ZQJ-230D Leak Detector is connected to the

loudspeaker. It provides an audible signal which can be heard when leak testing is

performed at distances near or remote from the ZQJ-230D. The frequency or tone of

the signal varies in direct proportion to the leak-rate measurement; the higher the

leak rate, the higher the pitch; the lower the leak rate, the lower the pitch. Loudness

is determined by a volume control on the front panel.

Inside the leak detector cabinet is the spectrometer tube, the turbo pump, three

electronic printed-circuit boards, power and control transformers, interconnecting

cabling, and other mechanical and electrical components. The three printed-circuit

boards are: the display board, which contains the bar-graph displays and associated

drivers; the vacuum control board; and the main electronics-board for the

spectrometer tube. All three printed-circuit boards are replaceable at the user level.

A driven electronics for the turbo pump is located at ground panel of the cabinet. As

shown in Fig.2-4. The electronics includes the-main electronics assembly, a display

board and the vacuum control board. The display board contains the RANGE switch

and the bar graphs for the test port pressure and leak-rate displays. It also contains

the LEDs and circuitry for the under-scale and over-scale indications, as well as the

LED for the filament-on indication. The fine ZERO control on this board is

connected across the COARSE ZERO control on the main electronics assembly; the

COARSE ZERO control, in turn, is connected to the preamplifier in the spectrometer

tube. The 3-second timer, which lights all segments of the bar-graph displays when

main power is first applied, is also located on the display board. All of the remaining

circuitry is located on the main electronics assembly, with the exception of the circuitbreakers, transformers, line filter, loudspeaker, repays and ac junction box, which are

mounted on the cabinet.

The leak detector principle block graph is Fig.2-4

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Fig.2-4 Simplified Block Diagram of ZQJ-230D

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2.1.2 Mechanical Pump

The pump performs two basic functions:

1. Provides the intermediate vacuum required to operate the turbo pump (about10 Pa)

2. Provides tile rough pumping capacity required to evacuate the test object

operate it for testing.

The pump inlet port is required with a KF 25 flange. A hose can be connected to

outlet if exhaust vapors are undesirable.

2.1.3 Turbo Pump

The pump provides high vacuum required to operate spectrometer tube. Its pumping

speed is 150 L/S. The air cooled pump is developed by KYKY. When environment

temperature is over 30, the turbo pump should be cooled with water.

2.1.4 Spectrometer Tube

All exploded view of the spectrometer tube is shown in Fig. 2-5. This tube is the

heart of the ZQJ-30D Leak Detector. Operating at less than 10-2Pa, it identifies

helium in the presence of other gases by ionization and magnetic separation. It

produces all output current proportional to the amount of helium present at any timewithin the tube. This current is amplified and used to drive the vertical bar graph

display on the front panel of the instrument. This display indicates leak rate in

Pam3/S.

Internal electronic circuits operate the spectrometer tube and the leak rate bar graph

and also provide an audible tone (if desired) that fluctuates with the leak rate. The

vacuum system provide the necessary vacuum. 310-2 Pa or less. The valve system

and roughing pump evacuate the object to be tested and properly sequence the testing

operation.

The spectrometer tube is attached by means of a flange with an integral O-ring.

Subassemblies include collector/preamplifier, and an ion source. The tube is

surrounded by a magnetic field provided by two large pole pieces fastened to a block

of Alnico V Magnet. Placing rotatable external eccentric magnetic pole pieces on

each side of the ion source enclosure allows adjustment of the electron beam

direction for maximum ionization and sensitivity (Fig. 2-6).The block of Alnico V is

mounted permanently between two large rectangular soft iron plates. Inserts in these

plates direct the magnetic flux into two pole pieces that define the magnetic field

which separates the helium, from other ions. Made of nickel-plated mild steel the twopieces are identical keyed for proper insertion, and O-ring sealed to the spectrometer

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tube to facilitate service. Other inserts provide field for the ion source.

The ion source emits electrons when one of its two filaments is heated. As these

electrons collide with the helium atoms, positive helium ions are generated. Other

gas atoms and molecules present in the ion chamber are also ionized, creating

addition positive ions in the chamber. All of the positive ions are forced out througha slit in the ion chamber, by the repelling action of a high voltage electrode. These

streams of ions are then passed through a magnetic field in the spectrometer tube.

where they are deflected in proportion to their mass charge ratio.

Fig.2-5 Cutaway View of Spectrometer Tube

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Fig.2-6 Spectrometer Tube and Magnet Assembly

2.2 TEST-CYCLE DESCRIPITION

Test-cycle description is as follows (See Fig2-7)

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Fig.2-7 KYKY ZQJ-230D Leak Detector Flow Diagram

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Initially both the turbo pump and the mechanical pump are running and the test port

is opened (unplugged). With the Test switch in the OFF position, press the white

button. Then the vent valve is opened and the rough valve is closed, so that air and

other gases in the inlet manifold are vented to the atmosphere (Fig2-7A vent).At the

same time, the test valve is opened, so that the pump evacuate the spectrometer tubeand the mechanical pump evacuates the pump through the foreline. When the turbo

pump is started up, the spectrometer tube pressure is low enough (310-2Pa) to

permit the ion-source filament in the spectrometer tube to be energized (there are

actually two filaments-but only one energized at a time).

With the turbo pump started up and the ion-source filament energized, the test object

is placed in for connected to the test port and secured, established a vacuum-tight

seal. Act the Test switch, and the red rough lamp is illumed and this is the ROUGH

position. Whereupon the vent valve and the test valve are closedand the rough valve

is opened. Under these conditions, the mechanical pump is diverted from its primaryfunction (as backing vacuum pump to the turbo pump) long enough to rough-pump

the test object (Fig.2-7B rough). This rough-pumping action may take from several

seconds to several minutes, depending on test object volume and mechanical pump

capacity .When the test port pressure is reduced from atmosphere down to a safe

level (the tolerable test transfer pressure as indicated by the thermocouple gauge and

its associated horizontal bar-graph display), the green test lump is illumed

automatically and this is the TEST position (Fig.2-7c test).In this case, the test valve

is opened and the mechanical pump is again restored to its primary function as

backing vacuum pump, while continuing to pump the test object. Vacuum

communication is now established between the test port and spectrometer tube.

At this point, helium is applied sparingly to the test object, such as from a spray

probe. If there is a leak in the test object, helium entering through the leak will

spread to all parts of the evacuated system. Some of this helium will be exhausted

through the mechanical pump to atmosphere; the rest of the helium will be diffused

through the turbo pump (against of "contra the normal flow) and will reach the

spectrometer tube. The rate at which helium enters the spectrometer tube is indicated

on the associated vertical bar-graph display and can be monitored on an internal

loudspeaker.

As long as helium from the spray probe enters a leak in the test object, the leak rate

will be displayed on the front panel of the leak detector. When the spray probe is

removed, the leak rate will drop rapidly as helium is quickly evacuated from the leak

detector by action of the turbo and mechanical pumps.

The end result is a rise and fall of the leak-rate indication on the display, which is

directly proportional to the leak rate in the test object.

2.3 SPECIFICATIONS

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Minimum measurable leak (for He) 510-11Pam3/s

Response time 3s

Start-up time 8min

Leak indicator range 10-10~10-7

10-9~10-6

10-8~10-5

Filament protection 310-2 Pam3/s

Maximum test port pressure 20Pa

Dimensions 540(W)500(D)950(H)

Weight about 50Kg

2.4 Site requirements

Temperature 5~35

Humidity 80%

Power 220V, 50/60Hz, Single phase

with earth grounded,

maximum 8 ampere

2.5 Basic Unit and Standard Accessories

1. ZQJ-230D Helium Mass Spectrometer Leak Detector 1set

2. ZQJ-230D Helium Mass Spectrometer Leak Detector Operation/Maintenance

Manual 2copy

3. Base plate for leak test and its sealed rubber 1set

4. Helium spray probe 1pc

5. Rubber hose, short tube. Ball bladder and clamp 1set

6. Vacuum grease 1bottle

7. O-ring 1set

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8. Fuse 4pc

9. Short socket for pre-amplifier 1pc

10. FB-150 TMP Operator Manual and duplicate part (heater band) 1copy

11. Mechanical Pump Operation Manual 1copy

12. Certificate of qualification 1copy

13. Packing list 1copy

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SECTION III OPERATING THE ZQJ-230D LEAKDETECTOR

3.1 CONTROLS AND INDICATORS

Before operating your ZQJ-230D, study the functions of the controls and indicators

listed in Table3-1. The physical location of the controls and indicators is indicated in

Figs.2-l and 2-2 respectively.

Table 3-1. Operating Controls and Indicators

Item Control/Indicator Function

1 Testswitch and Vent button Control the test cycle.Press the Test switch

to the ON position when in Vent mode to

automatically advance the ZQJ-230D

through roughing and then into the test state.

Press the Vent button to isolate the test port

from the leak detector vacuum system and

vent the test port to the atmosphere.

2 Roughing Delay switch

If failure to achieve the tolerable test

pressure within the regulated rough time,fore vacuum will get worse, and even may

cause turbo pump faulty. Then flip the

Roughing Delay switch to the Roughing

Delay position for 2~3 seconds and then

back to the Normal State position if the

rough time is close to the permitted time. (In

the High Sensitivity mode (turbo pump low

speed), the rough time should not exceed 5

minutes. In the Low Sensitivity mode (turbo

pump high speed), the rough time should not

exceed 20 minutes.)

3 Transfer Pressure

According to actual application, transfer

pressure should be chose. Usually, small

object should be set at 5 Pa, larger object at

10 Pa, and sniffer test mode at 20 Pa.

4 Test Port Pressure indicator

Bar-graph display to indicate test port

pressure in Pa

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3-1 OPERATING THE ZQJ-230D LEAK DETECTOR

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5 Leak Rate Display

Vertical bar-graph display. Indicates leak rate

in test object in Pam3/s. Over-scale and

under-scale conditions are indicated by LEDsat the top and bottom of this display

respectively. Exponent in window next to

10 marking will be 5,6.7.8,9. or 10

depending on setting of RANGE and

RANGE SELECT switches.

6 Range Switch

Four-position rotary switch to select range

scale. Arcs over switch from right to left, go

from small leak (most sensitive) to large leak(least sensitive) range

7 Fine ZeroPotentiometer used for fine zero adjustmentof leak-rate display.

8 FIL. Indicator

Green LED which lights when spectrometer

tube filament is turned on and emission is

present. This indicates that the leak detector

is ready for testing.

9 Spectrometer Tube MeterIndicates pressure in spectrometer tube, in

units of Pa. Green band at low end of scale

indicates safe region for operation. If pressure

rises above 310-2Pa, the filament will shut

off automatically

10 Focus Control

Potentiometer for adjusting the focus

plate-to-chamber voltage in the

spectrometer tube. Normally used fortuning the spectrometer tube

11 Ion Control

A 10-turn potentiometer for adjusting the ion

source chamber voltage. Normally used for

tuning the spectrometer tube

12 Coarse Zero Adjustment

Potentiometer used for coarse zero

adjustment of leak-rate display.

13 FIL. Selector Switch

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Toggle switch selects filament No.1or No.2.

It (S1) is located on the main PCB.

14 FIL-Power ON-OFF Switch

Momentary toggle switch for energizing orenergizing tube filament

15 EMIS Control

Screwdriver adjustment for spectrometer

tube emission by varying filament current

(tuning). It (R5l ) is located on the main

PCB

16 Audio Control

Volume control for internal or external

loudspeaker (audible alarm)17 CAL. Control

Calibration potentiometer. Adjusts amplifier

gain to make leak-rate reading agree with

calibration leak.

18 High-Low Sensitivity

Controls turbo pump rotational speed and

thus sensitivity of leak detector. Permits

variation of maximum pressure ratio of

helium. Used to make leak rate reading

agree with calibration leak.

19 Range Select Switch

Three-position toggle switch for selecting

minimum leak rate. Used in conjunction

with RANGE switch. In position 8 single arc

over RANGE switch represents 10-5 range;

two arcs represent 10-8 range; three arcs

represent10-7range; and four arcs represent

10

-8

range. Similar function for positions 9and 10 to represent ranges of:

The location or the main power circuit breaker on the ZQJ-230D Leak Detector is

shown in Fig.2-1.This circuit breaker controls main AC power to both the leak

detector and the mechanical pump.

The leak detector is tuned and calibrated at the factory prior to shipment. All of thecontrols have been preset so that the initial step for the user is to follow the start-up

procedure.

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3.2 START-UP PROCEDURE

This procedure should be followed when first starting up the leak detector (afterinstallation or transporting).

1. Check the mechanical pump connection to the leak detector. Be sure there is a

vacuum-tight seal at both ends.

2. Place a plug in the test port or "valve-off the input so that no air or other gas can

enter the inlet manifold.

3. Verify the switch of Roughing Delay is in the Roughing Delay position and the

transfer pressure is in the 5Pa or 10Pa, and the MAIN POWER switch is in the

OFF position (down).

4. Place the MAIN POWER switch on the leak detector in the ON position, and

make sure the detector in the Roughing Delay state.

5. With main power applied to the leak detector, about 2 seconds, rough valve is

opened automatically (rough valve indicator lamp is illumed). All of the segments on

the bar-graph displays should light for approximately 3 seconds and then go out,

indicating that they are operational. Random readings will appear on the leak-rate bar

graph and can be ignored.

6. Observe the test port pressure from full scale (atmosphere) to 5 Pa, about 20

seconds, indicated mechanical pump normal. At this time, observe the oil level of the

mechanical pump, the oil level should be over middle position.

7. When the test port pressure evacuated down 5 Pa or 10 Pa, (according by transfer

pressure), the test valve is opened automatically (test valve indicator lump is illumed).

You can see the test port pressure instantly up then immediately down and until 50

Pa. The turbo pump power automatically switch on (Notice: the sensitivity

High-Low switch should be Low position), the pump rotated and the same of the fan

under the pump. The frequency reading of the pump power increased constantly.

8. Wait 5 minutes for the turbo pump to reach operating vacuum, (the green READY

in director has been lit for about 5 minutes), and then flip the FIL-switch to the ON

position and release it. The green FIL-indicator on the front panel should light,

indicating that the filament is energized and emitting electrons. (If the

SPECTROMETER TUBE meter pointer goes out of the green band and the FIL

indicator goes out. because of filament outgassing, wait 2 to 5 minutes, then try again.

It may be necessary to repeat this step several times.

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9. With the SPECTROMETER TUBE meter pointer within the green band and with

the FIL-indicator illuminated, the instrument is ready to be tuned and calibrated prior

to leak testing.

3.3 TUNING ADJUSTMENTS AND CALIBRATION CHECK

Before beginning the days testing, and as otherwise scheduled, the spectrometer tube

should be properly tuned so that it is sensitive to helium. This is generally done by

using a standard reference leak of known value, called a calibration leak. KYKY

calibration leaks with a helium reservoir are designed with leak rates in the range of

10-8 and 10-9 Pam3/s

3.3.1 Range Selection

Directly below the horizontal bar graph is a vertical bar graph (With a digital rangeexponent) which displays helium leak rate from 510-11 up to 1010-5 Pam3/s.

These segments are illuminated red. Associated with the leak-rate bar graph are three

sets of direct reading sensitivity ranges comprised of four decades in each range:

10-10 to 10-7------with Range Select at 10



Range selection is determined by the RANGE SELECT switch on the front panel.

Decade selection is determined by the rotary RANGE switch next to the vertical bar

graph. Arcs over the RANGE switch are interpreted as follows:

Four arc (full CCW position) indicates a small leak rate.

Three arcs indicate a leak rate larger by a factor of 10.

Two arcs indicate a leak rate larger by a factor of 100.

One arcs (full CCW position) indicate a leak rate larger by a factor 1000

To illustrate: Assume the RANGE SELECT switch is set at the number 10. With the

RANGE switch CCW to four arc, the full-scale reading on the vertical bar-graph is10

10-10. When the RANGE switch is moved to the three-arc position, the full-scale

reading is 1010-9

.(Thus-a reading of 1010-10

in the four-arc position is the sameas 110-9 in the three-arc position) When the RANGE switch is moved to the

two-arc position: the full-scale reading is 1010-8. and when the RANGE switch is

moved to the full CW one-arc position, the full-scale reading is 1010-7.

In a similar fashion, if the RANGE SELECT switch is set at the number 9. then the

full scale arc1010-9, 1010-8, 1010-7 and 10l0-6 respectively .When the

RANGE SELECT switch is at number 8, then the full-scale arc readings are 1010-8,

1010-7, 1010-6 and1010-5 respectively. Under scale and over scale LEDs (light

emitting diodes) are located at the ends of the vertical bar graph. If the bar-graph

ZERO control is such that no segments on the vertical bar graph are illuminated .the

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corresponding UNDER scale LED at the bottom of the bar graph will be illuminated,

indicating that the ZERO control should be adjusted so that one segment is lit (with

no helium or leak absent). If the OVER scale LED at the top of the vertical bar graph

is illuminated (along with the 50 bar graph segments), a larger leak range should be

selected.

3.3.2 Using Helium Reservoir Leak for Tuning

The calibration leak can be used for two functions: (1) tuning the spectrometer tube;

and (2)calibrating the leak detector. These two functions are normally performed at

the same time in the sequence indicated.

To tune the spectrometer tube, using a helium reservoir calibration leak, proceed as

follows:

1. Range Selection switch is set at the number 10, Range Band switch is set at the

10-8(Pam3/s).

2. Sensitivity High-Low switch should be High position.

3. Calibration rotary knob clockwise turn to the end.

4. Test switch should be in the Vent position.

5. Unplug the test port, then install the calibration leak and tighten. Open the valve

in the leak. (Note: Reasonable hand-tightness is sufficient to compress the

O-ring and establish a vacuum-tight seal in the test port).

6. Test switch turn to the right side, this is the rough state.When the test portpressure reaches 5 Pa, test valve is opened automatically and the green lump is

lighten. The instrument is in the TEST state. Vacuum communication is now

established between the test port and the spectrometer tube.

7. Observe the leak rate indication on the vertical bar graph. It will probably be

less than that of the calibration leak. Change range selection switch and remain

the illumed display occupied over 1/3 of full scale. Close the valve on the

calibration leak. There will be a decrease in the leak rate when the valve is

closed. This indicated that the device has a response to helium.

8. Reopen the valve on the calibration leak and after the leak display stabilized,adjust the ACCELERATE and FOUCE control respectively (first unlock the

Locking contact) for a maximum peak on the leak rate display. Then gently

adjust the ION control for a maximum peak on the leak-rate display (Note: the

ION control is a 10-turn potentiometer and normally should only have to be

adjusted slightly for maximum peaking on the display.)

9. Close the valve on the calibration leak. There will be a decrease in the leak-rate

when the valve is close. Then this is the helium peak affirmably. Lock tighten

the ACCELERATE and FOUCE control knobs .

10. Adjust the zero point of leak display. Close the valve on the calibration leak,

carefully rotate the fine zero adjustment and the coarse zero adjustment, labeled

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FINE ZERO and COARSE ZERO, to obtain a 0.5 reading on the leak rate

display (in the most sensitive10-10)

11. Open the valve on the calibration leak, the display of the stabilized leak should

exceed the calibration value of the standardized leak. Turn the CAL control

counter clockwise to conform the leak display and the calibration value of thestandardized leak.

12. Place the Test switch in the Vent position, unplug the calibrated leak, then

install the test object to test.

3.4 OPERATING PROCEDURES

3.4.1Normal Test cycle (10Pa or less)

1. Make sure the detector is in the Vent state. Then install the test object and

verify that the seal connection is credible.

2. Act the Test switch in the ON position and rough the test object, the test pore

pressure should be below 10 Pa in several seconds or 5 minutes.

3. When the test port pressure reaches 10 Pa, the test valve is opened

automatically.

4. Apply helium sparingly to the test object. Observe the indication on the leak

rate display or listen the sound of the AUDIO control.5. Turn the RANGE switch and adjust the zero properly, and observe the

different sensitivity selection. When the leak test is complete and the helium

source is removed the leak-rate display should drop to zero if a leak is present,

and the audible alarm should be unnoticeable.

These can verify the leak part and leak magnitude.

3.4.2Testing at Higher Pressures (10~20 Pa)

Test object has large leak or bulk mass, cant evacuate below 20 Pa in 5 minutes,

adopt this model-Testing at Higher Pressures (10~20 Pa), proceed as follows:

1. Set the SENSITIVITY control in LOW position. (At this point, the leak detector

is tuned but not calibrated, and is set for finding larger leaks. Recalibrate the leak

detector, if desired.)

2. Install the test object.

3. Act the test switch to the ON position and this is rough state to the test object.

It should be evacuated below 20 Pa in 20 minutes.

4. When the test port pressure reach under 20 Pa, the test valve is opened, apply

helium spraying and observe the leak-rate indication as in the normal test cycle.

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3.4.3 Prolonged Pumpdown Cycle (Rough delay)

The two situations (3.4.1 and 3.4.2) may not evacuate the test object to the scheduled

vacuum in the scheduled time. If evacuated sequentially, the FIL indicator goes out

and the FIL is protected because of spectrometer tube overpressure and turbo pump

outlet shutdown, proceed as follows:

1. Flip the Roughing Delay switch in the Roughing Delay position and the rough

valve is closed. The mechanical pump will evacuate the turbo pump without venting

the test object for restoration of high vacuum in the spectrometer tube.

2. Closed the rough valve and evacuated the test object sequentially.

These can delay 5 minutes (3.4.1) or 20 minutes (3.4.2). Repeat some times of these

course and largely delay the rough time. Once the test object is evacuated the

scheduled vacuum value, you can test the object.

NOTICE

If the test port pressure can reach below 20 Pa, you can close the Rough Delay

switch, and the Test switch is in the Vent position, unplug the test object.

3.4.4Testing at Higher pressures (above 20 Pa)

If it is not possible to reach a test port pressure of 20Pa in the rough state, unplug the

test object. There are two possibilities:

1. Test object has small bulk and seal connection is out of question, that it is

obviously a large leak on the test object.

2. Test object has not large leak, but has bulk mass and has the more bleed gas. It is

very difficult to rough by mechanical pump self.

The two situations upwards can test with the connection model of the auxiliary

mechanical pump and leak detector.

3.4.5 Testing with Sniffer

1. Vent the KYKY ZQJ-230D and insert the sniffer into the test port. Closed the flow

valve of the sniffer and set the Transfer Pressure at the 20 Pa.

2. Place the Test switch in the ON position and the detector is in the Test state.

3. Adjust gently the flow valve of sniffer, and observe the test port pressure. When

the pressure reaches about 10 Pa, test can begin.

Now, the object to be tested should be filled with about helium at the desired test

pressure and the probe is moved over its surface. Some of the helium escaping from

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a leak is captured through the probe and enters the leak detector, thus locating the

leak.

Sensitivity of this type of testing is limited to about 510-8 Pam3/s, since most of

the escaping helium diffuses into the surrounding atmosphere. The sensitivity is also

surrounding atmosphere. The sensitivity is also limited by operator technique and

variation in ambient helium concentration in the vicinity of the testing.

CAUTION

In the test state (spraying or sniffer model), if the roughing valve is closed for

abrupt change of test port pressure, Test switch should be push to the Vent

position. Deal with trouble and carry on.

3.5 SHUTDOWN AND RESTARTING PROCEDURES

3.5.l General

When leak Testing is completed at the end of a leak test, it is general practice to leave

the instrument in a standby condition, ready for operation the next leak test.

If the leak detector is not going to be used for the day, then it is advisable to performa complete shutdown in the interest of saving energy.

The following paragraphs describe the procedure for handling each of the above

shutdown conditions.

3.5.2Shutdown for Overnight or Weekend (Standby)

With the mechanical pump running and the test port plugged (or valve off), turn

the test switch to the TEST or VENT position. Flip the FIL-switch to OFF (green

FIL-indicator should go out). Set the SENSITIVITY control in HIGH position.

3.5.3Complete Shutdown

In general, the leak detector can be left running with the test switch in the TEST or

VENT position, and the spectrometer filament energized. However, if it is desired to

completely shut down the leak detector, proceed as follows:

1. Act the test switch to the VENT position and vent the test port.

2. Flip the FIL-switch to OFF position (green FIL-indicator should go out)

3. Turn the test switch to the ON position, then quickly set the MAINPOWER

switch to the OFF position (down).

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4-1 MAINTENANCE

SECTION IV. MAINTENANCE

4.1 INTRODUCTION

Like other quality test equipment, a mass spectrometer leak detector requires

periodic maintenance to ensure continued reliable operation. After prolonged use, the

leak detector accumulates contaminants from even the cleanest of products tested.

These contaminants eventually impair operation. A thorough disassembly and

cleaning of the entire vacuum system, which includes the valve block and

spectrometer tube, restores normal operation. For heavy production use, more

frequent overhauls may be needed. Conversely, lighter use may permit a long period

between overhauls. In most cases, this work is done by user maintenance personnel,

but it may also be done by KYKY Technology Development LTD.

This maintenance section does not cover overhaul of the entire vacuum system. It

does cover maintenance that may have to be performed on a daily or as-required

basis or, if the item has not required maintenance, on an annual preventive basis.

If you ZQJ-230D leak detector required service that is not covered in this section,

contact KYKY Technology Development LTD. Customer Service at0086-010-62565522 or mail to [email protected].

For simplicity, the maintenance functions in this section are grouped by

recommended frequency, as shown in Table 4-1, based on assumed everyday use.

This table also serves as an index.

Most of these functions are self-explanatory. All of them can be carried out at routine

intervals as indicated. The sensitivity should always be checked at least once a day.

However, other functions may be carried out either more or less often as shown,

depending upon the extent of use of the leak detector.
mailto:[email protected]:[email protected]

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4-2 MAINTENANCE

Table 4-1. Scheduled Maintenance

Paragraph Description Time/Common symptom

4.2.1 Calibration check and tuning

adjustments

Daily

4.3.1 Check the mechanical pump

oil level

Weekly

4.4.1 Change the mechanical pump

oil

Semiyearly

4.4.2 Turbo pump filling lubricant

oil

Yearly

4.4.2 Turbo pump cleaning Does not reach operating

vacuum

4.5.2 Spectrometer tube cleaning Loss of sensitivity or

increase in background

4.5.4 Ion source replacement Filament failure(whenever

convenient after second

filament is in use)

4.5.3 Valve block assembly cleaning Leak

Maintenance functions related to the mechanical assemblies are covered in

paragraphs 4.2 to 4.5.

Maintenance functions related to the electrical or electronic assemblies are covered

in paragraph 4.6. Paragraph 4.7 tells how to check the leak detector itself for possible

leaks.

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4-3 MAINTENANCE

NOTE

When serving the leak detector or any vacuum equipment, cleanliness is vital.

There are some techniques more important in leak detector servicing than in general

vacuum work. They are:

1. Do not use silicon oil or silicon grease. (Although these products are generally

excellent for vacuum systems. they cause loss of sensitivity in mass spectrometer

leak detectors through build-up of invisible insulating layers in the spectrometer

tube)

2. Wipe all O-rings clean before installation to ensure that no foreign matter is

present to impair the seal. Normally it is unnecessary to use vacuum grease.

4.2 DAILY MAINTENCE4.2.1 Leak Detector Sensitivity Check

1. Perform calibration check and tuning adjustments as described in paragraph 3.3.2. If specification cannot be met, refer to Section V Troubleshooting.

4.3 WEEKLY MAINTENANCE4.3.1 Oil LevelCheck sight glass. If oil level is low add fresh mechanical pump oil until the level is

between the marks in the sight glass, when the pump is not running.

4.4 SEMI-ANNUAL MAINTENANCE

4.4.1 Mechanical Pump Oil Change-Complete Shutdown

Use these instructions for the mechanical pump oil change. It is necessary to change

the mechanical pump oil every six months or if unable to pump below 5 Pa because

of oil contamination.

Proceed as follows:

1. Drain the mechanical pump oil, as follows:

a. Place drain pan under drain plug, then turn on mechanical pumpb. Remove the drain plug

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4-4 MAINTENANCE

c .Place palm of hand over mechanical pump air outlet hole. This will force oil

out of the pump

d. When oil has been completely removed, shut off the mechanical pump

2. Reinstall drain plug and add one cup of fresh oil through fill plug

3. Repeat steps 2 and 3 above until oil runs clean

4 .With drain plug reinstalled, refill pump with fresh clean oil. Fill until oil level is

in middle of sight glass when pump is running. Reinstall fill plug.

5. With test port plugged, turn on mechanical pump.

4.4.2 Turbo pump filling lubricant oil

See FB-150 TMP Operator manual.

4.5 ANNUAL MAINTENANCE (or as-required maintenance)

4.5.1 General

Spectrometer tube overhaul consists of removing, cleaning, and re-installing the

ZQJ-230D spectrometer Tube. There are four basic sub-assemblies in the

spectrometer tube. Remove instruction follow in the order below:

1. Thermocouple Button (TC)

2. Ion Source

3. Preamplifier

4. Magnetic Assembly

The following tools and parts are required during overhaul:

Tools: Screwdrivers, open-end wrench.

Parts: O-ring Kit

Apiezon Grease

Ion Source

O-rings (for spectrometer tube elements)

Freon, methanol, lint--free cloth

Fine abrasive paper, emery cloth

4.5.2Removing, Cleaning, and Reinstalling Spectrometer Tube

The spectrometer tube operates at a very high vacuum produced by the turbo pump.

Service of the spectrometer tube requires that this vacuum be vented to the

atmosphere.

Tools: screwdriver.

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4-5 MAINTENANCE

Parts: Emery cloth, Freon TF, methanol, lint-free cloth, ion source, four O-rings

1. Set the MAIN POWER Switch to the OFF position.

2. Loose plug of ion source power and preamplifier power, and cutting-out plug in

the preamplifier.

3. Remove KF flange on spectrometer tube and break vacuum connection

4. Remove spectrometer tube from the manifold.

5. Remove three mounting screws and take off magnet assembly (Fig.2-5)

CAUTION

Do not disassemble the magnet assembly. Also avoid placing the magnet on a

steel or iron surface to prevent weakening the magnetic field.

6. Remove four screws on each side of spectrometer tube body and slip out both pole

pieces. Discard O-rings.

7. Remove four screws and take down the total ion monitor, ion source and

preamplifier.

8. Using fine emery cloth, remove heavy deposits from all surfaces of baffle, ground

slit plate, until bare metal surfaces are exposed. (NOTE: Do not use crocus cloth, as

it leaves a residue.)

CAUTION

Under no circumstance should a chemical cleaner be used, especially strong

detergents or alkaline cleaners. Do Not Use Alcohol or a similar type detergent.

9. Rinse spectrometer tube body, pole pieces, ground slit plate, and total ion monitor

in a Freon-type solvent (DuPont Freon TF or equivalent).

10. If foreign matter or stubborn stains remain, rub them with a Plastic scouring pad

such as Bear-Tex or Scotch-BriteTM (very fine grade)

11. Rinse again in Freon-Type solvent.

12. Use warm air to dry all parts13. Reassemble pole pieces (using new O-rings), and magnet assembly. Pole pieces

are interchangeable.

14. Install ground slit plate. (When installing ground slit plate be sure that the prongs

are facing up. Align slits at 90with sidewalls of spectrometer tube and /or

concentrically align circular hole in plate with smaller guide hole in bottom of ion

source cavity.) See Fig.4-1

15. Wipe new o-ting and mating surfaces with clean lint-free cloth and place new ion

source in cavity. Locating pin should be approximately in center of guide hole. Be

sure pin and 8 arc parallel to the sidewall of the spectrometer tube (Fig.4-2) Tighten

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hold-down flange evenly and firmly.(A straight edge held against pins l and 8 of both

octal arrays is a convenient way to assure parallelism .)

16. Install Preamplifier using new O-rings. Tighten clamps evenly and securely

17. Install total ion monitor. (See Fig2-4)

18. Install spectrometer tube in manifold, using flange and O-ring.

19. To evacuate spectrometer tube, act operating switch to the 0 position and leave

the Leak Detector is in the Rough stage. .

Fig.4-1 Ground slit Alignment

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4-6 MAINTENANCE

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4-7 MAINTENANCE

Fig.4-2 Ion Source Alignment

4.5.3 Valve Block Cleaning

1. DISASSEMBLY (Discard all O-rings if new ones are available).

a. Relieve the electromagnetic valve plug.

b. Remove the two corrugated pipes which linked the mechanical pump and the

turbo pump.

c. Remove the thermocouple gauge, vent valve and the test port.

d .Remove the test valve spool. Notice: Dont lose the four balls of the spool.

e. Remove the rough valve as the same way.

f. Remove the four screws which linked the assembly valve body and theframework, take away it from the framework.

2. Cleaning Valve Block

Wash all parts, except thermocouple gauge, in Freon (or Acetone and Gasoline) to

remove all foreign matter and residual Apiezon grease. Dry thoroughly in

cleanliness circumstance.

NOTICE

Dont clean the O-ring with the acetone !

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4-8 MAINTENANCE

3. Reassembling Valve Block

a. Check the assembly valve body whether it is be cleaned and the sealing face

cannot have radial scratches.

b. Moisten all new O-rings with Apiezon vacuum grease until they are shiny.

c. Mount the assembly valve body in the framework. Fix the test valve, rough

valve according to the disassembly order. First fix the spool then fix the valve cap

body, and last fix the coil and the enclosure. Insert the power plug.

NOTICE

The four screws which linked the valve cap and the assembly valve body must

be over spring and screws down evenly.

d. Assemble thermocouple gauge, vent valve and test port.

e. Linked the corrugated pipe and fix the framework panel.

4.5.4 Ion Source Replacement

The ion source has two filaments. The spare is turned on by the filament selector

switch (FIL.1.2) located on the Main PCB(S1). Slight returning may be necessary to

obtain maximum sensitivity. It is recommended that the ion source be replaced as

soon as convenient after the spare has been put into use. (Replacement takes about 3

minutes.)

1. Turn off the main power switch located on the profile of the ZQJ-230D leak

detector.

2. Remove the ion source connector at the spectrometer tube.

3. Remove four screws that secure clamp (Fig.4-2) .then gently slide ion source out

of spectrometer tube body. Discard ion source.

3. Inspect ground slit plate and ion source cavity to verify that they are clean. If not,

follow applicable instructions in steps 3~15 in paragraph 4.5.2 to clean the

Spectrometer body and ground slit plate.

4.6 ELECTRONICS SYSTEM

4.6.1 General

This manual is intended for user operation and maintenance and, as such, is limited

to electronic adjustments and replacement at the printed-circuit (PC) board level.

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4-9 MAINTENANCE

Fault isolation to a specific electronic component, such as a resistor or an integrated

circuit, is covered in a separate service manual. The service manual also contains

detailed instructions for adjustments that must be made after one or more

components is replaced.

The following adjustments are associated with the electronics in the ZQJ-30D Leak

Detector and should be made by the user when necessary (See Fig.4-4).

1. Emission control adjustment

2. Adjustment of ion source voltages

3. Adjustment of thermocouple gauge

4. Overpressure protection adjustment

5. Display amplifier adjustment (leak rate)

For all of the adjustments below, it is assumed that the leak detector has been

previously started up as described in paragraph 3.2 . It is also assumed that there is a

calibration or tuning leak in the test port.

4.6.2Emission Control Adjustment

This screwdriver adjustment on the Main PCB (R51) should be made after ion source

replacement or whenever the user cannot achieve maximum sensitivity previously

attainable. It may also be used to lower sensitivity significantly.1. Follow the same tuning procedure as in paragraph 3.3.2 or 3.3.3 to adjust the

FOCUS and ION controls.

2. Adjust the EMIS. control for a maximum peak on the leak-rate display, but the

voltage between test points E-E on the front panel will remain in 0.8~1.1V.

3. Complete the rest of the tuning procedure.

4.6.3 Adjustment of Ion Source Voltages

It is sometimes important to know if the ion source tuning voltages have sufficient

span or are in the correct range. This is especially true after ion source replacement

or when it is not possible to tune the spectrometer tube so that it is sensitive to

helium. Comparison with the table below will indicate if the voltages are in the

correct range. Proceed as follows:

1. Set the ION and FOCUS controls fully counterclockwise (ccw).

2. Using a voltmeter with an input impedance of at least 100, 000 ohms/volt,

measure the ion voltage between test points I(+)and G (-)on the front panel. Then

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4-10 MAINTENANCE

rotate the ION control fully clockwise and measure the voltage. The following

readings should be obtained(10 percent):

I Ion Voltage ccw = 160 vdc

cw= 330 vdc

Leave the ION control in the fully clockwise position.

3. Measure the repeller voltage between R(+)and G (-). The following readings

should be obtained (10 percent):

Repeller Voltage 430 vdc

RUN=430 vdc

4. Measure the focus voltage between F(+)and G (-). Then rotate the FOCUS

control fully clockwise and measure the voltage. The following readings should be

obtained (10percent):

Focus Voltage ccw=250 vdc

cw =310 vdc

If all the voltages are within the designated ranges, the ion source should be working

properly.

It may then be necessary to readjust the ION and FOCUS controls in order to

properly tune the spectrometer tube. If one or more of these voltages remains out of

range, see Section V. Troubleshooting.

4.6.4Adjustment of Thermocouple Gauge

This procedure should be followed if a new thermocouple gauge is installed or if the

thermocouple calibration has drifted. The leak detector should be operating with the

turbo pump running and the thermocouple gauge installed.

1. Remove the cabinet cover and access the main electronics assembly. Then locate

go potentiometer R16.

2. With the operating switch in the TEST position, adjust R16 until the second

segment on the test port pressure display is illuminated. (This will be the second

segment on the left of the horizontal display.) The first segment is on all the time

and will not go out

3. If other adjustments are to be made, leave the main electronics assembly in the

out position. Otherwise, install the cabinet cover.

4.6.5 Overpressure Protection Adjustment

This adjustment is made with the control electronics assemb1y. Proceed as follows:

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4-11 MAINTENANCE

1. High vacuum protection

Fix an adjustable valve in the test port, and adjust the leak of the valve, observe the

indication of the pressure. Adjust control board (C board) R24 potentiometer (U4-3

pin voltage about 1.1V) at the same time, remain the meter pointer on the edge of

the green band threshold (310-2 pa). The FIL. indicated lump goes out.

2. Rough valve protection

Regulated the adjustable valve leak, adjust the electromagnetic valve power DCF

board W2 potentiometer, remain it in the 30Pa and the rough valve shut down.

(U2-3pin about 0.4-0.6V)

4.6.6 Display Amplifier Adjustment (Leak Rate)

There are two amplifiers associated with the spectrometer tube and the vertical

leak-rate display: a preamplifier module in the spectrometer tube body and a 2-stage

operational amplifier (U8.U10) on the main electronics assembly. If the second-stage

amplifier needs zeroing (because of preamplifier replacement ). Proceed as follows:

1. Set the RANGE switch to the rightmost position, then rotate the CAL control

fully clockwise. Set the MAIN POWER switch to the OFF position.

2. Unplug the preamplifier connector and place a clip lead or other short across pins

7 and3.thereby shorting input of U8.3. Set the MAIN POWER switch to the ON position.

4. Locate R65 on the main electronics assembly. Adjust R65 for a value as close as

possible to zero (first bar segment) on the leak-rate display.

5. Set the MAIN POWER switch to the OFF position. Remove the clip lead and

reconnect to the preamplifier.

6. Set the MAIN POWER switch to the ON position and cycle the leak detector to

TEST.

7. Adjust the ZERO control on the front panel approximately five turns from either

end

8. Re-zero the leak-rate display using the COARSE ZERO control. The pointer on

this control should now lie between the 9 o'clock and "6 o'clock positions. If it

does not, readjust R65.

4.6.7 Turbo Pump Start-Up Adjustment

1. Set the MAIN POWER switch to ON.

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4-12 MAINTENANCE

2. Measure the voltage of the midpoint of R11 on the control PCB with a voltmeterand adjust it to 0.3 vdc.

4.6.8Residual Background Check

Once testing is complete and helium is no longer entering the leak detector through a

leak, the vacuum system rapidly removes the remaining helium. However, a small

residual amount is usually present, called background. Normally, this background is

steady and can be cancelled by zeroing the leak-rate display. It is sometimes useful to

measure background as an indication of a dirty system which needs cleaning or

overhaul. Proceed as follows:

1. Verify that the leak detector is tuned and calibrated.

2. Install the test port plug or valve-off the inlet manifold.

3. Proceed with normal cycle to TEST status.

4. Turn the RANGE switch to the rightmost position.

5. Flip the Filament switch to OFF

6. Adjust the ZERO control until the leak-rate display indicates zero, then flip the

Filament switch to the ON position. The resulting reading is background

7. Re-zero the leak rate display before using the leak detector. At the time of

shipment, background is about 510-10 pam3/S or less. If the background rises

above510-9

Pa m/S, the vacuum system may be contaminated or it may havea leak. In this case, refer to Section V Troubleshooting.

4.7 LEAK DETECTOR SELF-TEST

Accuracy, reliability and stability of my mass spectrometer leak detector depend

upon the leak-free integrity of its own vacuum system. Inherent helium background

and its effect on sensitivity demands elimination of all detectable leak. If

performance degrades during operation or after some part of the vacuum system is

opened for switch, a methodical leak check will eliminate the possibility of a leak as

the cause

1. The leak detector has tuned and calibrated. See 3.3.2 and 3.3.3

2. Install the test port plug, and the test valve is opened.

3. When spraying suspected leak locations, always apply helium sparingly, starting

at the highest points first. Once found the large leak, ought to mend immediately

and then check the suspect places.

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5-1 TROUBLESHOOTING

SECTION V. TROUBLESHOOTING

Careful maintenance will ensure proper operation of your KYKY ZQJ-230D Test

leak Detector, but occasionally a problem will arise. The following table lists the

symptoms with appropriate corrective measures by number. See Table 5-1 for the

actual corrective measures. First verify that the ZQJ-230D is plugged into an

appropriate AC power receptacle which is properly earth grounded (to water pipe).

Verify that all plugs and connectors within the leak detector are firmly seated

(spectrometer tube cables, turbo pump, etc.)

Potentiometer adjustments that may be necessary when troubleshooting the leak

detector, or after board replacement, are listed in Table 5-2.

Symptom Corrective Measure No. See

Table 5-1

SWITCHES

1. MAIN POWER switch is ON: fan does not run, test

port pressure indicator does not respond. 1, 2, 3

2. Flip the FiL. switch to the ON, but no action is observed

in HIGH VACUUM meter 4PUMPS

1. Mechanical pump emits gurgling sound after pumping

for a full minute or longer. 5, 6, 7

2. Turbo pump does not start-up when operating switch is

in the Test position and test port pressure is reach the value

that transfer pressure is set in advance 3.8

3. HIGH VACUUM Fault red indicator lit when operating

switch is in the Test position 55

TEST PORT PRESSURE INDICATOR

1. No display: MAIN POWER switch is ON and mechanical

pump is operating 9.10

2. Pressure drops slowly and/or does not reach normal transfer

point 11.12.13

3. Pressure does not rise to ATM (full-scale) when operating

switch is in the VENT position 14

FILAMENT INDICATOR

1. Will not light when FIL. power switch is flipped to ON 15.16

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5-2 TROUBLESHOOTING

2. Will not stay lit when FIL. power switch is released 17,18,19,29,21,16

3. Stays lit when spectrometer tube pressure rises above

green band 17,22

4. Stay lit when FIL. power switch is flipped to OFF 23,24

5. Suddenly goes out 18, 20,15,21,16

LEAK RATE DISPLAY

1. Low or no sensitivity to helium (Operating switch is in

the Test position, display responds to Zero adjustment.) 25, 26, 27,28,29,30

2. Unusually high sensitivity to helium 31, 26

3. High helium background 32, 33,34

4. Display insensitive to Zero control 10,37,35,36,38

5. Display remains below zero point (despite Zero and Coarse

Zero adjustments) 10,37,38

6. Display reads full scale when it should not 37,39,36

7. Display veryunstable 40,41,39,36

8. Display fluctuates slightly 40,41,39

9. Display drifts pscale 40,39,41,34

10. Leak rate indication does not agree between range scales 42

AUDIBLE ALARM

1. No audible signal (Leak Rate display indicating) 44,45

2. Audio threshold cannot be set 46,47SPECTROMETER TUBE HIGH VACUUM METER

1. Pointer does not drop into green band 32,33,31

2. Meter does not indicate 48,33,10

3 .Meter fluctuates 33,41

4. When pressure rises above green band, FIL. lamp remains lit 17,22

5. Pressure rises when operating switch is in the Rough position 49,50

6. Pressure rises above green band when operating switch is

in the Test position 50

7. Pressure rises above green band when operating switch

is in the Vent position 51

TUNING

1. Helium peak at or near 10 on ION tuning control 54

2. Low or no voltage at G-I, G-F, G-R 27,52,53

3. No Coarse Zero or Zero control 10,37,35,36,38

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Table 5-1 Corrective Measures

Corrective Measure

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No

1. Check that blower is plugged in and operating

2. Check for poor connection in wiring to the fan

3. Check for shorted or overloaded power circuit and correct

4. Check the FIl. switch and the meter are OK. Check the total ion monitor for

shorted to ground

5. Check for large leak in system. See paragraph 4.7

6. Check oil level in pump. Fill pump to level between two lines sight glass

7. Check that all ports are plugged.

8. Check for poor connection in wiring to turbo pump and fuses on the rear panel of

FB110 Power supply

9. Thermocouple vacuum gauge defective

10. Check for faulty display: if necessary, replace display board

11 .Roughing pump oil low or contaminated

12. Check for leak in roughing system or test port assembly. See paragraph 4.7

13. Check for defective mechanical pump. Repair or replace as necessary

14. Defective vent valve

15. Check for faulty FIL. indicator: if necessary, replace display board16. Check emission circuit

17. Check adjustment of overpressure set-point circuit (R42). See paragraph 4.6.5

18. Check for burned out filament .Switch to other filament. If both filaments are

burned out replace ion source (See paragraph 4.5.4)

19. Check that EMIS. control is clockwise to at least mid-position

20. Check that spectrometer tube pressure is in green band

21. Check T.P (test point) E-E for pressure of between 0.8 and 1.1 volts, indicating

that the filament is energized

22. Check for failure of overpressure set-point circuit

23. Check switch S2 (should be OK)

24. If S2 is OK, replace main electronics assembly or U2 on the M PCB

25. Verify that the filament is on and emission is present (voltage between E-E of

T.P)

26. Try retuning leak detector: readjust calibration to match standard leak.

27. Check for a shorted ion source: While monitoring test point voltages per

paragraph 4.6.3 unplug the ion source. Or check voltages at ion source plug (See

Fig.5-1) If voltage change replace ion source

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28. Check for misalignment of ion source in spectrometer tube. See Fig. 4-2

29. Replace ion source

30. Standard leak void of helium (extremely rare). Remove leak install port plug with

human hair across O-ring to keep test port pressure high and utilize helium

naturally present in the air.

31. The Range Select switch position is not correct

32. Check for leak in vacuum system. Refer to paragraph 4.7

33. Pre-amp. is defective

34. Standard leak does not shut off completely. Recheck with plug in test port

35. Check for open circuit

36. Check leak rate meter amplifier offset adjustment procedure. See paragraph 4.6.6

37. Check that preamplifier is plugged in: check voltages at preamplifier plug (see

Fig.5-2) If problem persists replace preamplifier.

CAUTION

TURN ELECTRONICS OFF BEFORE DISCONNECTING PRE-AMP PLUG

38. Check for defective Zero or Coarse Zero potentiometer

39. Check for loose or poor connector at preamplifier and associated cabling. Try

pressing lightly on each of these to see of better contact can be made

Fig. 5-1 Voltages at Ion Source Plug

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5-4 TROUBLESHOOTING

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Fig.5-2 Voltages at Pre-amp Plug

40. Flip the FIL. Switch to the OFF. If instability or drift decreases, trouble is

contamination or leaking in the vacuum system. If instability or drift remains the

same, trouble is in the electronics.

41. Check for leak in or near spectrometer tube

42. Check Zero setting of meter amplifier (see paragraph 4.6.6)

43. Check for open speaker44. Check for the audible circuit (Q4, U1 and R66 on the M PCB)

45. Check loudspeaker and audio circuit. If necessary, replace loudspeaker or main

electronics assembly.

46. Check AUDIO control. If necessary, replace main electronics assembly

47. Replace main electronics assembly

48. Spectrometer tube is at atmospheric pressure. Recheck start-up procedure

(paragraph 3.2)

49. Leak across test valve seat.

50. Test port pressure is too high

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51. Leak across rough valve seat

52. Cheak Zener diodes in ion source power supply on main electronics assembly. If

necessary, replace main electronics assembly

53. Check for defective potentiometer

54. Clean the total ion monitor. (Contaminants here can pick up positive charges

from heavy ion bombardment. These charge deflect the helium ion beam, requiring

higher ion voltages and a higher number on the ion dial.)

Table 5-2 Adjustments

These adjustments are generally made after initial startup, with the MAIN POWER

switch in the ON position:

1. In the thermocouple circuit, measure the voltage between J2. pin 6(-) and test point

TP 8. Adjust R4 for a reading of +280 mvdc.

2. With the test port vented to the atmosphere, measure the voltage at J5. pin 14(+)

referenced to ground (-). Adjust R40 for a reading of +2.6 vdc , R16 may also have to

be adjusted to achieve this reading.

3. With RANGE SELECT switch on number 9 and RANGE switch on least sensitive

range, connect voltmeter between J4. pin 1 and ground Adjust the Coarse Zero

control for 0.05mv.

4. With RANGE SELECT switch on number 8, measure the output of U8 pin 6.

Adjust R65 for a reading of 0.05mv.

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