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3 Nanoimprint lithography process SEM micrograph of a top view of 10 nm minimum diameter and 40 nm period holes imprinted into PMMA (60 nm deep) Source: IWGN (1999/09), Chou et al. 1996, 1997 Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Synthesis, Assembly, and Processing of Nanostructures
Rational YouITRI-IEK-NEMS
2001/08/01
Source: IWGN (1999/09)
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Fullerene nanotubes • ---
Source: IWGN (1999/09)
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Nanoimprint lithography process
• SEM micrograph of a top view of 10 nm minimum diameter and 40 nm period holes imprinted into PMMA (60 nm deep)
Source: IWGN (1999/09), Chou et al. 1996, 1997
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Lithographically Induced Self-Assembly
• AFM image of PMMA LISA pillar array formed under a square pattern
Source: IWGN (1999/09), Chou and Zuang 1999
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
DNA-Directed Assembling (Nanofabrication) on a Chip• ---
Source: IWGN (1999/09), Nanogen, Inc.
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Strain-Directed Assembly • ---
Source: IWGN (1999/09)
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Nano-sized polymers self-assembling into functional structures
• ---
Source: IWGN (1999/09)
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Soft lithographic nanostructure• ---
Source: IWGN (1999/09), J.J. McClelland, NIST
Examples of Current Achievements and Paradigm Shifts
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工業技術研究院產業經濟與資訊服務中心Industrial Technolgy Research InstituteIndustrial Economics & Knowledge Center
Molecular Self-assembly
• A single molecule bridging the gap between two metallic contacts, forming the smallest and ultimate limit of an electronic device.
Source: IWGN (1999/09), Mark Reed (1999)
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