1 Copyright © 2011, Elsevier Inc. All rights Reserved. Chapter 3 Methods for Monitoring and Measuring Cleanliness of Surfaces Rajiv Kohli

Copyright © 2011, Elsevier Inc. All rights Reserved. 1

Chapter 3

Methods for Monitoring and Measuring Cleanliness of

Surfaces

Rajiv Kohli


FIGURE 3.1 Dust tape test kit. Courtesy of Elcometer, U.K.


FIGURE 3.2 Contact angle as an indicator of surface cleanliness. The right figure has a lowcontact angle indicating a clean surface, while the left figure shows a high contact angle ona contaminated surface.


FIGURE 3.3 Schematic diagram of the DOCC system [82].


FIGURE 3.4 MESERAN calibration curve for Krytox fluorinated grease on 304 L stainless steel [88].


FIGURE 3.5 GA-FTIR device on a tripod oriented to analyze the underside of a wing of an A-10aircraft [105].


FIGURE 3.6 Integrated circuit in (a) bright field, (b) dark field, and (c) differential interferencecontrast with reflected light. Courtesy of Nikon, Japan.


FIGURE 3.7 Appearance of TEM asbestos specimens prepared by direct-transfer (left) andindirect-transfer (right) preparation methods from an air filter collected during abrasion ofa gasket. Courtesy of E. Chatfield.


FIGURE 3.8 Schematic arrangement of a hot-electron microcalorimeter system.


FIGURE 3.9 Microcalorimeter EDS spectrum of a tungsten particle on a silicon substrate [176].Courtesy of NIST.


FIGURE 3.10 Schematic diagram of a plasma chromatography-mass spectrometry system for monitoring cleanliness of surfaces [212].


FIGURE 3.11 High-sensitivity depth profiling of phosphorus on a silicon substrate. A sputter ratehigher than 0.5 μm/min and a detection limit of 5 1013 at/ cm3 (1 ppb) were achieved [246].


FIGURE 3.12 Raman image of polystyrene (PS) beads demonstrates the spatial resolution of thetechnique at sub-micrometer scale. Courtesy of Horiba, Japan.


FIGURE 3.13 White contaminant particle found in a factory producing resin identified as a titanium

species by micro-XRF, and TiO2 by Raman microscopy. (a) Optical image. (b) Micro-XRF

image. (c) Raman spectrum of the particle and reference TiO2 spectrum. Courtesy of Horiba, Japan.


FIGURE 3.14 Micro-CT scan of a used filter from a vacuum cleaner with dust particles. (a) SEMsecondary electron image. (b) X-ray image through the sample; (c) 3D rendered front view withthe particles shown in red; (d) semi-transparent 3D rendered side view. Courtesy of SKYSCAN,Kontich, Belgium.


FIGURE 3.15 Hafnium silicate spectrum with Ir–Lα source irradiation. The sample was a 2 nm

hafnium silicate film intentionally contaminated with 5 × 1011 atoms of Ti, Cr, Fe, Ni, and Cu [300].

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1 Copyright © 2011, Elsevier Inc. All rights Reserved. Chapter 3 Methods for Monitoring and Measuring Cleanliness of Surfaces Rajiv Kohli