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Lecture 2:

Introduction and Overview to

Micromachining and MEMS

Prof. Eric P. Y. Chiou

EE CM150/CM250A, MAE CM180/280A, BME CM150/CM250A:

Introduction toMicromachining and MEMS

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What We Want Technology To Be

Cheaper So more people can benefit

Faster So it saves time

Smaller So it takes up less space and resources

Safer So it wont harm ourselves or others

Environmentally Friendly So it is sustainable

Smarter Know what you want

More Functions One platform do all

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Technology Surrounds Us

Electronic Smart phones Communications (networks, phones, pages) Entertainment (Wii)

Mechanical Vehicles (zero-emission, space) Biological / Chemical

Chemical Analysis DNA Manipulation

Medical Pharmaceutical Development Neural Prosthetics (implants cure deafness,

blindness, and paralysis in some patients)

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What Technology Can Make All ofthis Happen?

Micro and Nano Machining! A fabrication process similar to that used to

make computer chips (Integrated Circuits)

Capable of High Precision Can Operate at High Volumes Produces Parts at Low Cost

Next Industrial Revolution: Miniaturization! Miniaturize everything else (mechanical, thermal,magnetic, optical, biological, )

MicroElectroMechanical Systems (MEMS)NanoElectroMechanical Systems (NEMS)

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Micromachining can Produce many many devices that are very very small

can range in size: mm (10-3) > m (10-6) > nm (10-9) Produce complex systems of micromachined devices

computer memory, microprocessors, microactuator arrays, Make parts in a batch-fabrication process

the cost to make one device is 99% of the cost to make millions

Source: Intel

Ref: Moore (ISSCC 2003)

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Wafer Size and Chips / Wafer

Increasing wafer size rapidly increases die count IC fabrication moves to 18 wafer. MEMS starts to be mass produced in 8 wafer

Consider 25 200-mm wafers/day and profit $1/chip 100% yield = profit of $5M/year

540 dice (8, 200 mm)328 dice (6, 150 mm)

140 dice(4, 100 mm)

80 dice(3, 75 mm)

32 dice(2, 50 mm)

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28 dice

Die Size and Chips / Wafer

Dice / wafer ~ wafer size / die size increases rapidly as die size shrinks patterning small features enables smaller die size reduce chip size by 2X increases profits by 4X

120 dice 540 dice

diewafer

saw cut

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Scalability of MicromachiningEnables Large-Scale Production

Size of Device

NumberProducible

nm kmm mm m

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Scalability of Micromachining CanEnable Low-CostDevices

Size of Device

C

ostPerDe

vice

nm kmm mm m

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How large is MEMS?

Wafer (10 cm)

Chip (~1 cm)

Virus (~10~100 nm)

Transistor(~1 m)

Molecules(~1 nm)

Hair(~100 m)

Cells (~10 m)

Most MEMS(1 m - 1 mm)

Sandia

1 m 1 mm 1 m 1 nm

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MicroElectroMechanical Systems Micromachined sensors, actuators, and systems Enabled by many transduction mechanisms

electrical, mechanical, magnetic, thermal, optical, fluidic,biological

Sandia National Labs

Electrostatic MicroactuatorPressure Sensor

NovaSensor

500 m

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Texas InstrumentsDigital Micromirror Device

MEMS in Real-World Systems

Digital Mirror Device Individual tilting Al mirrors Electrostatic Forces Microfabricated on CMOS Metal / Polymer MEMS Process

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Other MEMS Products

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MEMS Microphone

The image cannot be displayed. Your computer may not have enough memory to open the image, or the image may have been corrupted. Restart your computer, and thenopen the file again. If the red x still appears, you may have to delete the image and then insert it again.

Figure 4: MEMS forecast by application. (Source:Yole Development.)

The image cannot be displayed. Your computer may not have enough memory to open the image, or the image may have been corrupted. Restartyour computer, and then open the file again. If the red x still appears, you may have to delete the image and then insert it again.

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Take-Home Message

Micromachining and MEMS have the promiseto revolutionize many different technologies:

manufacturing low-cost and large-scale production

(Moores Law)

application Miniaturization and large-scale integration

(Moores Law)

MEMS Products are versatile and arepenetrating into your daily life now and will beeverywhere in your life in the near future.