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2012 PMC ()
(04)23599009 515 [email protected]
2012 PMC ()
PMC*8261
*270*
42
2012 PMC
Machinery Safety DepartmentElectromagnetic Compatibility Department
S E M I Semiconductor Process Equipment Manufacturing System Consulting and Examination
CE Marking Consulting and Examination
Precision Machinery R&D Center
2012 PMC ()
/(CEGB)
IC(SEMI S2)
(ECO)
(FPD LED)
PMC
(94~)()()(LED) 8.5GAMOLED(99~)
tsmcSEMI S2SEMI S2
400
(LED)
RobotAMHS
PMC
2012 PMC ()
(tsmc) SEMI S2
2012 PMC ()
StripperSEMI S2
2012 PMC ()
6
SEMI E6SEMI F5SEMI F14SEMI F15SEMI S1SEMI S3SEMI S6SEMI S7SEMI S8SEMI S10SEMI S12SEMI S13SEMI S14SEMI S22SEMI F47 ANSI/IEEE C95.1
ANSI/RIA R15.06ANSI/ISA S84.01
EN 775EN1050EN1127 IEC 60825-1
IEC 61010-1IEC 61508
DIN V VDE 0801
ISO 10218ISO 13849-1
NFPA 12NFPA 13NFPA 72NFPA 79NFPA 497NFPA 704NFPA 2001
UL 508A
SEMI S2SEMIEN
ANSI
DINUL
ISO
NFPA
IEC
SEMI S2
2012 PMC ()
SEMI S2
Electrical
Safety Circuits
Structural/seismic
Mechanical movement
Robotics and material handlers
Ergonomics
Fire risk and protection
Liquid chemical heating Chemical containment and exposure controlVentilation
Ionizing RadiationNon-ionizing radiationOptical and laser radiation
SEMI S2
2012 PMC ()
SEMI
1. POWER HITESTER
SEMI S2
SEMI S22
ECO
SEMI F47
Tracer gas
LVD
1.2.3.()4.5.
1.
1.2.
1. Sampler and Doser2. Field Gas-Monitor
1.2. RF3.45.6.7.8.
1. 2.
1.2.3.
2012 PMC ()
TAF
2012 PMC
AMHS (Automated Material Handling System)
(Substrate Handlers)
(Cassette Handlers)
() (Industrial Robots (Systems))
(UTV)
AMHS
UTV (Unmanned Transport Vehicle)
2012 PMC
UTV
UTV
Automated Guided Vehicle System (AGV)
Rail Guided Vehicle System (RGV)
Interbay Overhead Transport Vehicle System
Intrabay Overhead Hoist Transport Vehicle(OHT)
1 3
2012 PMC
a)
b)
c)
d)
e)
f)
2012 PMC
:
2012 PMC 14
:()
2012 PMC
()
A 1
B 0.21
C 0.040.2
D 0.020.04
E 0.0020.02
F 0.002
(SEMI S10)1
A1-2
2012 PMC
1.
2.
3.
4.
(SEMI S10)2
2012 PMC
(SEMI S10)3 A1-1
2012 PMC
1
2012 PMC
ISO 13857()
()
a
b
c
-
2012 PMC
(a)
(b)
1000 1200 1400 1600 1800 2000 2200 2400 2500 2700(c)
2700 - - - - - - - - - -2600 900 800 700 600 600 500 400 300 100 -2400 1100 1000 900 800 700 600 400 300 100 -2200 1300 1200 1000 900 800 600 400 300 - -2000 1400 1300 1100 900 800 600 400 - - -1800 1500 1400 1100 900 800 600 - - - -1600 1500 1400 1100 900 800 500 - - - -1400 1500 1400 1100 900 800 - - - - -1200 1500 1400 1100 900 700 - - - - -1000 1500 1400 1000 800 - - - - - -800 1500 1300 900 600 - - - - - -600 1400 1300 800 - - - - - - -400 1400 1200 400 - - - - - - -200 1200 900 - - - - - - - -0 1100 500 -
2012 PMC
2
Interlock
2012 PMC
panel
3
2012 PMC 2013/5/21 23
Safety Mat
Safety Laser Scanner
Safety Light Curtain()
-
2012 PMC
Safety Mat
-
2012 PMC
InterlockGuard Locking Safety-door switch
LockoutTag out
Lockout /Tagout
2012 PMC
EQ
EMS
EMOEMS EMOEMS
EMOEMS EMOEMS
EMO
EMS
STK / Cassette stage
Door2 Door1
Door switch
Door switch
Key SW
HMI
Key SW
EMO
EMS
HMI
Key SW
2012 PMC
AutoTeach
/_
1. message,2. .
2012 PMC
/_
2012 PMC 29
(250 mm/ sec)
AutoTeach
,
BY-PASS
2012 PMC
Teching box
30
12332
2012 PMC
Teching box
2013/5/21 31
1.
2012 PMC
Teching box
a) ; b) ; c); d); e)0 1
;
2013/5/21 32
2.
2012 PMC 33
Robot,
Z
2012 PMC
1.
2. (1)
(2)
3.
2012 PMC
4. (1)()(2) (3) ()
5.
6. (1)
(2)
2012 PMC 2013/5/21 36
a
a
2012 PMC
2013/5/21 37
37
2012 PMC
(04)23599009 515 [email protected]