Upload
lamduong
View
227
Download
5
Embed Size (px)
Citation preview
SiAlBP
Na Ca
Na Ca
TEL FAX
Cleaning Technology of Glass
Kaoru Owada, Teruo TsunodaBunka Womens University
Top Bottom
Top Bottom
Bottom
Top
SiOH
Top Bottom
Bottom
Bottom
XPS
SIMS
XPS SIMS
TopBottom SiOH
Top
Bottom
Top a Bottomb
bottomfacetop face
NEW GLASS VolNo
NaCaMg
Na Ca
Na Ca
SEMAES IR
NEW GLASS VolNo
SIMS
XPS
Na
CaSiC
Sip
eVNaseVCapeV
CseVn
XPS
Top Bottom
Topd Bottoma
bc eVeV
eV
eV
Bottom
n
TOFSIMS
TOFSIMS
amuatomic mass
unit
amuSiCH amu
SiCHOSiCH amu SiCH
OSiCHOSiCH
Top Bottom CIS
abc : Bottom d : Top
NEW GLASS VolNo
UV/O
Top Bot-
tom
SiOH
RbKNaHg
In mN
mmNm
NEW GLASS VolNo
NEW GLASS VolNo
m
m
CMP
TFT
NEW GLASS VolNo
pH
NEW GLASS VolNo
SP SP
SP
SP
pHORP
SP
NEW GLASS VolNo
SP
SP
KB
KKHz
s Km/hr
W/cm
m
mK
f
=C/f C
cm/sec
K mmf M mmKKHz
IJ/m
fHzAm kg/m
IfA AmfMHzkg/m
NEW GLASS VolNo
I IKcal/m
HOH
cm H
OH
Kcal/molH
H
OH
HO
HO O
Ocm
N
NH
N
OH
OeV
KHzMHz
m
UVO
nmnm
CC
KJ/molCHKJ
/molCOKJ/mol
E E=hC/hCnm
KJ/
mol
nm
OOOOOO
Onm
O
OOOOOO
OO
nm
NEW GLASS VolNo
Clnm
ClCl + Cl
M
MClx MClx
Al Fe
HF Si
Si
COLD JETCFOLD
JET INC
NEW GLASS VolNo
HFE
C
TFTLCD
No
No
No
No
DAOlsenATOsterass : JphysChem
STakadaMFukawaYHayashiKMatsu-
moto : Thin Solid Films
JSSieger : JNonCrystSolids
KFEWilliamsMFThomasCEJohonson
BPTilleyJGreengrassJAJonson : Found
Glass SciTechnolp
JCeramic SocJapan
No
JPRyndAKRastogi : Surface Science
CGPantanoJrDBDoveGYOnoda
JrJ : NonCrystSolids
No
DEClarkELYenBower : SurfSci
HASchaefferJMechaJSteinmann : JAm
CeramSoc
No
DouglasAOlsenAJeanOsteraas:JphysChem
No
ECO INDUSTRYNo
ECO INDUSTRYNo
TOsakaTHattori : IEEE TransSemiconductor
manufacturing
NO
p
TECNOFRONTIER
L
NEW GLASS VolNo
TECHNOp
TECNOFRONTIER
L
No
KMitsumori : Proceeding of ECSFall Meet-
ing
LSI/PDP
p
p
JICC
No
p
No
No
p
No
p
p
p
TECNOFRONTIER
L
NEW GLASS
No
NEW GLASS VolNo