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PACS: 51.50.+v, 52.20.Hv, 52.65.−y

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Ô n Æ � Acta Phys. Sin. Vol. 61, No. 16 (2012) 165101

í�>´�Ç�p��4m>ÖÌ��> (PSC) �ª; , >?3�Ç�$�Ò4m>ÖÌ��> (NSC) �ª. ©z [11] æ^ PIC {é¶é¡6^í�>L§?1

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Ô n Æ � Acta Phys. Sin. Vol. 61, No. 16 (2012) 165101

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Ô n Æ � Acta Phys. Sin. Vol. 61, No. 16 (2012) 165101

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Ô n Æ � Acta Phys. Sin. Vol. 61, No. 16 (2012) 165101

3.2.2 q¡>6�Oq¡>6Ý j(r) = qniυi , ª¥, q ü >

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[1] Shon C H, Lee J K 2002 Appl. Surf. Sci. 192 258[2] Kolev I, Bogaerts A 2009 J. Vac. Sci. Technol. A 27 20[3] Li Y P, Liu Z T, Zhao H L, Liu W T, Yan F 2007 Acta Phys. Sin. 56

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(Berlin: Springer Publishing) p130

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Ô n Æ � Acta Phys. Sin. Vol. 61, No. 16 (2012) 165101

Computer simulation of the glow dischargecharacteristics in magnetron sputtering∗

Shen Xiang-Qian Xie Quan† Xiao Qing-Quan Chen Qian Feng Yun

( Institute of Advanced Optoelectronic Materials and Technology, College of Science, Guizhou University, Guiyang 550025, China )

( Received 23 June 2011; revised manuscript received 4 February 2012 )

Abstract

In this paper, the process of glow discharge in magnetron sputtering is studied by the particle-in-cell with Monte Carlo collision

method. The proposed model is a two-dimensional and self-consistent approach. The results show that the discharge mode transits from

the negative space-charge-dominated mode to positive space-charge-dominated mode with working pressure increasing or magnetic

field weakening. At the transition state, working pressure and magnetic field are 0.67 Pa and 0.05 T, respectively. Discharge current

increases as the cathode voltage increases. When pressure increases, discharge current first increases and then tends to balance. When

the pressure is higher than 2.5 Pa, current begins to decreases with the increase of the pressure.

Keywords: magnetron sputtering, glow discharge, computer simulation, state distributionPACS: 51.50.+v, 52.20.Hv, 52.65.−y

* Project supported by the National Natural Science Foundation of China (Grant No. 60766002), the Special Foundation for International Cooper-

ation of the Ministry of Science and Technology of China (Grant No. 2008DFA52210), the Science and Technology Research Project of Guizhou

Province, China (Grant No. [2011] 3015), the Special Fund for Construction of Sci-Tech Innovative Talents Team of Guizhou Province, China

(Grant No. [2011] 4002), and the Fund for International Sci-Tech Cooperation of Guizhou Province, China (Grant Nos. [2012] 7004, [2009]

700113).

† E-mail: qxie@gzu.edu.com

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