Upload
others
View
3
Download
0
Embed Size (px)
Citation preview
2 . A:: 2 : .
: - C- : . . : .
- - 3 LM . ML 5 MPF B PR RI
/ O RAF 5 3R M 6 6 ORI C O 3 F LMB
6MBMK RCK PR 7I KM M 1PF I T & I M
. 5A3CL C ( 4 AFKCJCO ( / RAFCOC )
2 ORH JJM RCLM 4 C K
6 ML J P OMLMK A J 7 PCOS MOU MD 2 N L MICLB & 6 MU L SCOP U 1 2 ( 6 5 / ) 1 1 1
https://ntrs.nasa.gov/search.jsp?R=20180007498 2020-04-09T05:30:20+00:00Z
L CI E: A A @H : C C : A : C H CH EAC E L
M0 HE A @: : E @ ECA ECAC E C CEC
) ( 11 0 1 ) ( ) ( &
• 2 @ C C E C C@ E C EC C• 8@ A C A @: : C A C: H - @
1( - @ ) A ! E C @ E"1 ( C A HA @ ) A ! ECAC E C "
2
0 : -2 3A @ A A @ CA 2A C A
2
@2A2C
A C 5
5 2 5
2A 3 A 2C A!! - 2
2
5 . C
@ - 21 C 2 5 2 C
• 2 A A 5 2 C A C2 !
• 0 2 A 5 2 5 @C 2C C C 2C C A 52 2 CC 3 A 2C 2@@2A2C !
- 3
( ) 08 2 82 1 = 0 ()) P a (
• F IU EWMR IT MSPI W HI IORSPI W/IH F 8ESE MWL WLI SSO RJ HMJJUE WMR UEWM C5UE ID 223 EPIUE CA 1D
• R HM UR NIW E MR M E H JOM LW RSIUEWMR / WLI A MWIH WEWI
0 8 2 0 0 02 2 8
2 0 2 0 0 8 282 0 8=
T EOO SE IHURR I SLIUM EOHM UE WMR UEWM
OMW PMUURUJJ E[M
=EUEFROM PMUURU
CCDEPIUE
UE PM MRW SI SROEUM]IU
- primary OM LW
+ primary OM LW
SI M 1F RUFE I&HRWLIUPM SOEWI
LI SUMPEU PMUURU 2ROH :MUURU REW
OMW PR MWRU MPE M ESSEUEW 8
:E MJ M RSWM EO WIP MW6 SIUFROM PMUURU JROHIH PMUURU 3JMOWIU
SI WUR RSM SROEUMPIWU =E IOI WL E ()) P JMOWIU
5MIOH RJ M MR )- [ )- EU IUI RO WMR ) EU I SE IMPI M WIU EO %,
E IOI WL : 77 L N OM I ). P5MIOH RJ M MR ) EU I OMW OI WL
UI RO WMR ) EU I SE I % ( P E IOI WL
MPI M WIU EO %) E I SOEWI R I UI RO WMR=ROEUM]EWMRSUI M MR %( EW
)% P
P
4
RWEWME I SOEWI
) ( 1) = a 3:2 =) 1 )/ P
OMW PR MWRU MPE M ESSEUEW SI WUR RSM SROEUMPIWU =
SI M IJOI WM ISROEUM]IU
OMW PMUURURWEWMME I SOEWI
5T EOO SE IHURR I SLIUM EOHM UE WMR UEWM
CCD EPIUE
LI SUMPEU PMUURU 3ROH MUURU REW
)%, P
,P
5
1 2
2F RUFE I&5 HRWLIUPM SOEWI
21 11 1
JJ E[M=EUEFROM PMUURU
+ primary OM LW
- primary OM LW
12 1
E IOI WL 78 : E ()) P6MIOH RJ M MR EU I OMW OI WL
UI RO WMR EU I SE I % ( P E IOI WL
MPI M WIU EO %/ E I SOEWI R I UI RO WMR=ROEUM]EWMRSUI M MR %( EW
E IOI WL : E ()) P JMOWIU6MIOH RJ M MR ,). [ ,). EU IUI RO WMR ) EU I SE IMPI M WIU EO %-
• F IU EWMR IT MSPI W HI IORSPI W0:IH F ESE MWL WLI SSO RJ HMJJUE WMR UEWM C6UE ID 334 EPIUE CA 2D
• R HM UR IW E MR M E H JOM LW RSIUEWMR 0 WLI A MWIH WEWI
( ( ( ( (
E CC C1 E EH A E
, E E , E D
%%A C E
1 E EH A E 0 C C ) E E C
1 E E E H A E 6
( ( ) 2 ( )AC C CC C ( - CC C E
- AE D DE E A C CC C CC C ) E C
DAC D DA C
C E C E
/ I D0 C CC C
CCDC
C D DDE A A C C
- primary E
+ primary E
2 ) ) 2 )2 (
/A D CE C A E
1001-20-01212013
These UV Polarizers utilize nanowire arrays with feature sizes as thin as 10 nm and all non-metallic materials to offer premium polarizers at operating wavelengths from 190-400 nm on a variety of substrates and sizes.
KEY
FEAT
URES
AND
BEN
EFIT
S
UV POLARIZER PRODUCT BRIEF
Optical Performance x Transmissions tunable based on wave-
length and Contrast ratio x Contrast ratios 50:1 to 500:1 and higher x Customized versions available x Versions include 240-300 nm, 313nm and
365nm x Transparent in the visible range
High Damage Thresholds
x Non-metallic structure allow for high levels of incident laser power
x Better environmental performance versus metal wire grid polarizers
Substrate Capability
x Large substrate sizes available x Full wafer sizes to custom diced parts
Operating temperature range
x -40°C to high temperature x Accepts exposure temperatures >400oC
Applications
x DUV lithography and metrology x Laser optics x Imaging applications x Surface polarimetry x Liquid crystal alignment x Popular wavelengths 193, 254, 266, 313, and 365nm
Introducing Deep UV Polarizers based on proprietary frequency doubling technology and Atomic Layer Deposition (ALD). This product can be customized to specific demanding requirements in UV applications.
UV Polarizer 240-300 nm Version
Dielectric Nanowire
Polarization Solutions
◻+ II II
=FMB DMF H>MF BM M (- I 2BMDBM B >H% ( (
4S F @ F M> F .08 M PMNPF D M > F
P F MIF % NEF >R> B >H% ( + ( ,
8D5( => BHB D E H> BW () 1 (- I
% NEF >R> B >H% ( )
> F N BB PN R>MB P > B BPNB BR B BH IB
%
• 6FDE EM PDE P• 8F FIPI PI BM
BHBIB N• 6FDE MB HB@ F
@ > F D• FIPH > B PN
IB>NPMBIB RM E D >H H>MF > F
• : H>MF > F @>HF M> FBN
% 1 ( 0 0 ) 0 .
7
@F B HFDE EB @>NB
H>MF > F
> F DR> B H> B : H>MF BM 3B B@ M
> F > DHB EB R> B H> B
) (, ) (- ) (. ) (/) (
3 1@PFXR M
AJ W 0 C@
AJ W 0 @638RWJLUFWNSR S FYNSRN "
8RWJLUFWNSR AJ W 0 1 9
TWN FP FPNLR JRWTSPFUN FWNSR FP 5W "
@MNT JRW WS B@
1 JTWJIG 1@1
1 JTWJI G8@1@ & 91D1
6FGUN FWNSR S 6J NLR AJ W NWM 5
!
3 1@ )PFXR M
• @WFUWNRL IJYJPST JRW X NRL XPWNTPJ J WJURFPXRI N JINFWJP F WJU 3 1@ PFXR M• 8@1@ 8RWJURFWNSRFP OSNRW N NSR 7UFRW 8R1NI SU @ NJRWN N J JFU M @" 2" 1 99SNRW UJ JFU M FRI IJYJPST JRW JW
• 1ISTWJI F 91D1 SPFU SG JUYFWNSR FPPFPJ TUSLUF WSLJWMJU NWM @B 8@5
GFPPSSR J TJUN JRW US 6E ) (-• 3XUUJRWP TJU SU FR J JYFPXFWNSR WJ W N WS
PN F 8
9
����������
���� ���
(-
29 9 9 9 E 9 8CA9 79 A 9 9• ( 203 , 31
203 , 31
-
)
4 9 9 A9 9 9C7 A9
86 A 6A 8 @ 8@
10
) @ 8@ @ 2- 8 8 & @) F 8@ @ 8
HI :CI I : GG G I :G I C I :G 8I C <G I C<
1 3 E A G I CHE:8IG :I:G C I :
I:HI HI C
) @ 8@ H . A AH 6 A 8@ 8 A < I G 8I C <G I C< C GG G
HI :CI
2 A@ 8 A @8HF6 F 8 @ @8H
8 8 A 6 8 8 8@( )3)
6 8 A6F F 8@ @ 6FF
E I <G M . , 8 :G (2 G H ) :F :HI A :( )
C A HE I <G
3 :CI:G: I :G 8 :I I : A < I H G8: AA L 8 I : A E
2 <C M C< EI 8 A HMHI: C I
A < I G 8I C <G I C<
(6 ) 0 6 0 0 6 6 6
11
0)2
(
/< @EIJ8JI41 <8 HEEC HEE JE
41 <8 HEEC
0 0 0 ( C H< <IJ)
.L8 8J< E C : J < 2 @I <J<:J< N << @ HEC J < J< <I:E < < JH8 :<
< <I:E < 8 I <:JHEI:E <8H< :EC @ < 8 IJEH< @
J < HE:A<J J <
/%
/
) ) ) ) ) ( !
CA
4 ) L C E C H A D D HAH HA C HAP H MA D D H
C E
0.- C D
4 A E M LC
. HAD AE L H(( Q (
1C
AE
AEA
E
+ C E ME C HAP A E E AEL A C HAP A E H HA A
HL A E LA
2 C HAP H D D H
C E
2 C HAP A E CA H A E H,0+52( 2 C HAP A E H
,/
,/(
12
Summary
-1, (• 0L 9AE L 9 IMA F A A9 F A E L :M L 9NA L A A A F 9 A 9LA F L
9 MF AF C L P AE FL
: N9LA F IMA E FL N E FL• / A L E M LA F 9 E: LA 99 M LE FL E LA F
• 9N 9 A 9LA F 9 A: 9LA F L L 9F L M MLN9 M9LA F L L 9L (
/MLM 9F• (& ) N E: A L , , 2 /- ! ,• (& AF 9MF AF L FAL L9L 8 AL 9F
9MF AL
13