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Analysis of rectangular ring resonator sensor with photonic crystal microcavity
Hong-Seung Kim*a, Doo-Gun Kim b, Geum-Yoon Oh a, and Young-Wan Choi a
a School of Electrical and Electronics Engineering, Chung-Ang University, 221 Heuksuk-dong, Dongjak-ku, Seoul, 156-756, Korea,
bPhotonics Device Team, Korea Photonics Technology Institute, Gwangju, 500-460, Korea Tel: +82-2-820-5326, Fax: +82-2-822-5326, e-mail:[email protected]
ABSTRACT
In this paper, we propose a novel sensor structure based on the rectangular ring resonator with the photonic crystal microcavity (PCM), and optimize the structure using finite-difference time-domain (FDTD) method. This sensor consists of the rectangular resonator with total internal reflection mirror and the PCM, which can be placed at the nearby optical waveguide of the rectangular ring resonator. The PCM is composed of a defect cavity with different holes on the center of it. The Q-factor of the PCM can be significantly enhanced when the PCM has the resonance wavelength. The PCM can be evanescently coupled to a side waveguide arm of the rectangular ring resonator. The sensitivity of the ring resonator in the presence of gas or biomolecules composition was calculated using the FDTD method. When the injected gas or biomolecules pass through the PCM, the variation of effective index due to their concentration affects the resonance condition of the rectangular ring resonator. We have investigated how the shift of the resonance peak in the resonance wavelengths depends on the gas or biomolecules concentration. We also have optimized the sensor structure for the waveguide width and length, the hole radius, and the number of hole on the PCM. The optimum lattice constants, hole radius, and cavity length are 370, 100, and 580 nm, respectively. The rectangular ring resonator sensor with microcavity significantly enhances the quality factor and the sensitivity compared to the directional coupler sensor with PCM. The change of normalized output power in rectangular ring resonator with PCM is approximately twice larger than the change in directional coupler with PCM.
Keywords: Finite-difference time-domain (FDTD), Microcavity, Optical waveguide, Photonic bandgap, Rectangular ring resonator, Biosensor.
1. INTRODUCTION Recently, bio-chemical sensors using photonic device are actively studied. Though numerous different architectures
have been developed (micro resonator sensors [1], surface plasmon resonance sensors [2], Interferometric sensors [3] and photonic crystals sensors) in nearly all cases detection is based on measuring the change in refractive index that results when solution phase targets bind with complimentary probes that have been predeposited on the surface. Small size photonic crystals sensor is focused by many researchers, because it can make sure of large contact area of bio-material for detection and has high sensitivity. Generally, the primary advantages of optical techniques over analogous mechanical or electrical label free methods [4] are : the relative ease with which devices can be fabricated and the broad range of fluids and environments in which they can be used (e.g. gas, water and serum).
The photonic bandgap theory is suggested by Yablonobich at 1987 [5]. Using the theory, filter characteristic of 1D photonic crystals waveguide are reported [6]. The drawback of these designs is that the large photonic bandgap restricts high sensitivity sensing along the 1D photonic crystals sensor. Nanoscale optofluidic sensor arrays of directional coupler structure using the 1D photonic crystals is suggested [7]. Here, we propose a new scheme to overcome this limitation as using a rectangular ring resonator sensor with photonic crystal microcavity (PCM) for optofluidic sensing. This technique has the high sensitivity without the need for target labeling using the ring resonator
Physics and Simulation of Optoelectronic Devices XVII, edited by Marek Osinski, Bernd Witzigmann, Fritz Henneberger, Yasuhiko Arakawa, Proc. of SPIE Vol. 7211,
72110V · © 2009 SPIE · CCC code: 0277-786X/09/$18 · doi: 10.1117/12.808902
Proc. of SPIE Vol. 7211 72110V-1
having high quality factor. The PCM is located around the ring resonator. Therefore, the Q-factor of the rectangular resonator can be significantly enhanced when the PCM has the resonant wavelength. As such our device can detect rarer targets in a given sample size since a smaller number of them are required to impart a measurable change.
In this paper, we theoretically analyze and design a rectangular ring resonator with PCM. We determine the sensitivity of our devices by observing the shift in the resonant wavelength of the resonators as a function of the change in refractive index of the fluid.
2. THEORETICAL ANALYSIS Photonic crystal is a structure, in which the atoms or molecules are replaced by macroscopic media with differing
dielectric constants, and the periodic potential is replaced by a dielectric function (or, equivalent, a periodic index of refraction). If the dielectric constants of the materials in the crystal are sufficiently different and if the absorption of light by the materials is minimal, then the refractions and reflections of light from all of the various interfaces can produce many of the same phenomena for photons (light modes) that the atomic potential produces for electrons. One solution to the problem of optical control and manipulation is thus a photonic crystal, a low-loss periodic dielectric medium. In particular, we can design and construct photonic crystals with photonic band gaps, preventing light from propagating in certain directions with specified frequencies.
Photonic band gap structures are calculated by transfer matrix method [6]. Assume that the transfer matrix functions M is given by
(1)
Tracking the complex amplitudes of the forward and backward waves through the boundary of a multilayered medium is facilitated by use of matrix method. Consider two arbitrary planes within a given optical system, denoted plane 1 and plane 2. The amplitudes of the forward and backward collected waves at plane 1, U1
(+) and U1(-) , respectively, are
represented by a column matrix of dimension 2, and similarly for plane 2. These two column matrices are related by matrix equation (1). The matrix M, whose elements are A, B, C, and D, is called the wave-transfer matrix (or transmission matrix). It depends on the optical properties of the layered medium between the two planes.
A multilayered medium is conveniently divided into a concatenation of basic elements described by known wave-transfer matrices, say M1, M2, …, MN. The amplitudes of the forward and backward collected waves at the two ends of the overall medium are then related by a single matrix that is the matrix product,
M= M1M2 … MN (2)
where the elements 1, 2, …, N are number of medium.
Consider a grating comprising a stack of N identical generic segments, each described by a unimodular wave-transfer matrix Mx satisfying the conservation relations for a lossless, reciprocal system, so that
1/ * /* / * 1/x
t r tM
r t t⎡ ⎤
= ⎢ ⎥⎣ ⎦
(3)
2 2 1, / ( / )*, arg{ } arg{ } / 2t r t r t r t r π+ = = − − = ± (4)
( ) ( ) ( )2 1 1
( ) ( ) ( )2 1 1
U U UA BM
C DU U U
+ + +
− − −
⎡ ⎤ ⎡ ⎤ ⎡ ⎤⎡ ⎤= =⎢ ⎥ ⎢ ⎥ ⎢ ⎥⎢ ⎥⎣ ⎦⎢ ⎥ ⎢ ⎥ ⎢ ⎥⎣ ⎦ ⎣ ⎦ ⎣ ⎦
Proc. of SPIE Vol. 7211 72110V-2
rLatticeConstal
Cavitylngth /
its
3i sub
where t an2tΤ = and
The extent measure [7]. more useful cthe frequencyIf the system
Suppose thIf either the bands is appr
This quantidimensional c
Defects main the gap, thebehave like frmode has mo
3.1 Single w
Figure 1 illhigh index Si
nd r are compl
d 2R r= ar
t of a photoni If the cryst
characterizatioy at the middlis scaled up o
hat the two madielectric conoximately
ifies our previcrystal.
ay permit locaen it must exprequency-spec
ore space to os
3. OPTIM
waveguide w
lustrates a silii waveguide h
lex amplitude
re the correspo
ic band gap ctal were expanon, which is ile of the gap, or down, all of
aterials in a mntrast is weak
ious statement
alized modes tponentially decific mirrors. scillate. It oper
MIZATION
with PCM
Fig.
con waveguidelps to confin
e transmittance
onding intensi
can be characnded by a facindependent o
we define thf the frequenc
multilayer filmk or the thickn
m
wwΔ
w
t that even an
o exist, with fcay once it en As the defecrates like the F
OF RECTA
1 Structure of S
de with PCM.ne the light wit
e and reflectan
ity transmittan
cterized by itsctor s, the cor
of the scale ofe gap-midgapies scale acco
m have dielectness d/a is sm
sin(w εεΔ
≈ ⋅
1 2
1 24mn nw
n n+
= ⋅
arbitrarily we
frequencies innters the crystact thickness isFabry-Perot e
ANGULAR
Si based optical
The low indthin the waveg
nce satisfying
nce and reflec
s frequency wrresponding b
f the crystals, p ratio as ∆ω/ordingly, but th
tric constants mall, then the
( / )d aππ
2 caπ
⋅
eak periodicity
nside photonical. The mults increased, thtalon [6].
RING RES
l waveguide wit
dex silicon dioguide core, pr
g the condition
ctance.
width ∆ω, butband gap wouis the gap-mi
/ωm, generally he gap-midgap
ε and ε+∆ε, gap-midgap
y gives rise to
band gap. Itilayer films o
he frequency w
SONATOR W
th PCM
oxide (SiO2) lreventing opti
ns set forth in
t this is not auld have a wiidgap ratio.
expressed asap ratio remain
and thicknessratio between
a band gap in
If a mode has on both sides owill decrease, b
WITH PCM
layer which liecal losses into
Eqns. (4), and
a really usefuidth ∆ω/s. ALetting ωm be a percentage
ns the same.
ses a-d and dn the first two
(5
(6
n a one-
a frequency of the defect because the
M
es beneath theo the lower
d
ul A e e.
d. o
)
)
e
Proc. of SPIE Vol. 7211 72110V-3
substrate. The silicon waveguide locates on the SiO2 layer. These holes symmetrically locate on the silicon waveguide. The defect mode of cavity exist middle of holes. The lattice constant (a) is the period of holes. The cavity length is the central defect size.
(a) (b)
(c)
Fig. 2 Transmittance for changes of hole radius, lattice constants, and cavity length
These results are calculated by the finite difference time domain (FDTD) method. The resonance is occurred at central defect state by Fabry-Perot mode. The figure 2 (a) shows simulation results of transmittance by the change of hole radius. As the hole radius changed +0.01 μm, resonance wavelength is -40 nm shifted. The sensitivity, ∆λ/∆R (Radius) results are very linear. The figure 2 (b) shows simulation results of transmittance by the change of lattice constants. As lattice constants is changed +0.01 μm, resonance wavelength is +32.5 nm shifted. The figure 2 (c) illustrates simulation results of transmittance by the change of cavity length. When cavity length is changed +0.01 μm, resonance wavelength is +18.3 nm shifted. ∆λ/∆x (cavity length) variation is also very linear. These phenomena can be explained by equation (5) and (6). As the lattice constant is increased, center frequency of photonic bandgap is decreased. So, resonant wavelength is red shifted. As the hole radius is increased, resonant frequency is increased. Because the cavity length is decreased by hole radius increase in fitted the lattice constants.
As a result, the optimized result of optical waveguide with PCM for 1550 nm wavelength is shown in Fig. 3(a). The waveguide width, hole radius, lattice constants, and cavity length are 470, 100, 370, and 580 nm, respectively. The wavelength to satisfied resonance condition propagates during traveling the waveguide, because other frequencies belong to the photonic bandgap region of hole arrays. The table 1 shows the summary for various parameter changes.
1.40 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.800.0
0.2
0.4
0.6
0.8
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
Wavelength [μm]
Hole radius [μm] 0.08 0.1 0.12 0.14 0.16
1.40 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.800.0
0.2
0.4
0.6
0.8
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
Wavelength [μm]
Lattice constants [μm] 0.37 0.39 0.41
1.40 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.800.0
0.2
0.4
0.6
0.8
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
Wavelength [μm]
Cavity length [μm] 0.15 0.18 0.21 0.24
Proc. of SPIE Vol. 7211 72110V-4
Table 1 Summary for various parameter changes
Parameter Shift by the increase of the parameters ∆λ/∆x (nm/nm)
Hole radius Blue shift - 40 / 10
Lattice constants Red shift + 32.5 / 10
Cavity length Red shift +18.5 / 10 The 1550 nm wavelength can propagate in the medium but 1500 nm wave cannot propagate, because the normalized
transmission power is nearly zero shown in Fig. 3 (a).
1.40 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.800.0
0.2
0.4
0.6
0.8
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
]
Wavelength [μm]
Number of holes 2 4 6 8 10 12 14 16
(a) (b)
Fig. 3 (a) Simulation results of optimized waveguide with PCM at 1500 nm wavelength (b) Simulation results of number of hole change
The sharpness is the very important parameter for high quality factor. The sharpness of resonance peak is determined by number of holes. These results are shown in Fig. 3 (b). As the number of hole is increased, sharpness is increased. This is because the hole in the waveguide roles as a mirror. The normalized transmission power is decreased because many holes cause high loss. The optimized number of hole for low loss and high transmission power is 8 at 1550 nm wavelength.
3.2. Directional coupler with PCM
Fig. 4 Structure of directional coupler with PCM
1.40 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.800.0
0.2
0.4
0.6
0.8
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
Wavelength [μm]
Proc. of SPIE Vol. 7211 72110V-5
I reflected wavehR mlrrc
mary interfai
L
4
As previouA directionalmicrocavity owith PCM. and low loss (a). This isphenomenon.condition.
The figure sharpness of rMany mirrorimportance oof waveguideside waveguid
According 7×10-5, in cas
3.3 Rectan
The generaring resonator
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
usly mentionedl coupler locof side wavegA gap betweelevel. Optims diametricall. However,
5 (b) showsresonance pears caused reff sharpness an
e length. 10 de determined
to reference [se the structur
ngular ring re
al ring resonatr for using the
1.40 1.450.6
0.7
0.8
0.9
1.0
d, optical wavates the side
guide on the sen waveguide
mization of gaply opposed to1550 nm wa
(a)
Fig. 5 (a(b) Simulati
s results of nak is increasedflection efficnd loss is expholes have hig
d 0.15 μm gap
[7], the directie is arranged b
esonator with
or can derive e flat wavegui
(a)
Fig. 6 (a) R
1.50 1.55
Wavelength [μ
veguide with mof this wav
satisfied reson and side wavp length is 0.1o single wavavelength is
a) Transmissionion results of nu
number of hold. The numbiency increas
plained at 3.1.gh coupling e
p and 10 holes
ional coupler by 1×5.
h PCM
a transfer funide. The flat
Rectangular ring
1.60 1.65
μm]
microcavity sheguide. The
nance conditioveguide is 0.1515 μm. The veguide with coupled to th
0.5
0.6
0.6
0.7
0.7
0.8
0.8
0.9
0.9
1.0
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
n power of direumber of holes
les change inber of holes isse. So, trap
However, cfficiency and
s.
with PCM ca
nction for the st waveguide is
g resonator (b) S
1.70
hows the resone wave propaon. The figu5 μm. The 0transmission pPCM. 1500
he defect of
1.50 1.51 1.52 155
60
65
70
75
80
85
90
95
00
ctional coupler change on the s
n the side ress same to the npping of powcoupling loss low loss leve
an detect the c
single-ring ress necessary for
(b)
Scheme of imag
nant phenomeagated in the ure 4 shows im0.15 μm gap hpower of this 0 nm waveleside wavegu
1.53 1.54 1.55 1.
Wavelength [μ
(b)
with PCM side waveguide
sonator. If nnumber of mirwer to microis also increal. Directiona
change of refr
sonator [5]. r construction
ginary interface
ena at 1550 nmwaveguide i
mage of direchas high couplstructure is sh
ength don’t auide by satisf
.56 1.57 1.58 1.5
m]
Number of ho 2 4 6 8 10 12 14 16
e
number of horrors in the sidcavity is inc
ased by the sidal coupler wit
ractive index i
We designed n of directiona
e
m wavelengths coupled the
ctional couplerling efficiencyhown as Fig. 5arise couplingfied resonance
59 1.60
oles
oles increasedde waveguidecreased. Thede lengtheningth PCM on the
in the order o
rectangular al coupler.
h. e r y 5 g e
d, e. e g e
f
Proc. of SPIE Vol. 7211 72110V-6
2.0
0
-2
-4
-6
-8
-10
-12
-14
16-020 -0.15 -0.
-0.57dB
1.4 1.(
ye index of the mir
1.8
ror plane [RI]
0.05 0.10 0.15
Pow
er lo
ss o
f T
IR m
irro
r [d
B]
4-
-O.57d
10 -0.05 0.00
Offset [sm
0 12Refracli
As figure 6planes refractreflection is phenomenon.resonator is tfor imaginarythe offset is -by refractive loss is also 0of rectangular
Fig.
0
0
0
0
0
Tran
smis
sion
pow
er [a
.u.]
The rectangrectangular ri8 (a) shows ccharacteristicPCM. Side Therefore, qu
6 (a) illustratestive index havdeeper than r. The practicthe structure oy interface off-0.09 μm, TIRindex variatio.57 dB. Recr resonator is
7 (a) Mirror los
1.40 1.450.0
0.2
0.4
0.6
0.8
1.0
(b) C
gular ring resoing resonator. haracteristic c
c curve of rectwaveguide w
uality factor of
s, cross point ve refractive inreal mirror plcal wave that of TIR mirrorfset. Plus offR mirror has mon of mirror sctangular reson2.28 dB.
(a
ss of corner refl
1.50 1.55
Wavelength
(a)
Fig. 8 (a) TraComparison of tr
onator has cha We get enh
curve of rectanangular ring r
with PCM is fitf rectangular r
of waveguidendex of air (n=lane as shown
don’t considr interpositionffset is outer dminimum losssurface. Whenator has four
a)
lector by offset
1.60 1.65
[μm]
TE mode without cavity
ansmission powransmission po
aracteristic of hanced resonanngular ring reresonator withtted at 1510 nmring resonator
es are wet etch=1.0) for usingn in Fig. 6(b)ered Goos-Hä
n between wavdirection and ms 0.57 dB. Inen mirror surfr mirrors. If
change (b) M
1.70
y
Nom
alliz
ed tr
ansm
issi
on p
ower
[a.u
.]
wer of rectangulwer with PCM
filter with shant peak using sonator witho
hout PCM andm. We can gr sensor with P
hed for total ing mirrors. W) [8]. So, deänchen shift hveguides. Thminus offset in addition, as face is air conf waveguide p
Mirror loss of co
1.48 1.490.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
lar ring resonatoand transmissi
arp peak. Ththe structure o
out PCM. Thd characteristicget the sharp pPCM is enhan
nternal reflectWhen a light pesign of TIR has loss at TIRhe figure 7 (as inner directiFig. 7 (b) sho
ndition, minimpropagation lo
(b)
orner reflector b
1.50
Wavelength
(b)
or without PCMon power witho
he PCM is addof rectangular
he figure 8 (b)c curve of rectpeak than peak
nced by sharp p
tion (TIR) mirpropagates in t
mirrors mustR mirror. Tha) shows calcuion of mirror ows, mirror lo
mum loss is ocoss is almost z
by mirror index
1.51 1.52
[μm]
W/O With
M out PCM
ded to side war ring resonato) shows the cotangular ring rk of directionpeak.
rrors. Etchedthe TIR mirrort consider thishe rectangularulation of lossfacet. When
oss is changedccurred. Thiszero, total loss
x change
1.53
O cavityh cavity
aveguide of or. The figureomparison of resonator withal coupler.
d r, s r s n d s s
h
Proc. of SPIE Vol. 7211 72110V-7
-4 -3 -2
X(um)-1
*-3 -2
x (lAm)
)molecule,lecule binder
=00C===0C=
F-4
Bk
The biosensmicro-cavity pass through rectangular ribiomolecules
Figure 10 sh
resonance at proposed in FPCM structur
4. BIOSE
sor proposed ithat lies adjacthe PCM, the
ing resonator. s concentration
Fig. 10
hows light wa1510 nm wav
Fig. 9 by the rire, because PC
ENSOR USI
Fig. 9 Stru
in this study iscent to the wavvariation of e The shift of
n.
(a)
0 Wave propa
ave propagatioelength. Liging resonator
CM structure o
NG RECTA
ucture of biosen
s shown in Figveguide of receffective indexf the resonanc
gation results
on results. Tght of 1510 nmand PCM struonly had the r
ANGULAR
nsor using recta
g. 9. It consictangular ringx due to their ce peak in the
(a) 1490 nm w
The rectangulam wavelength ucture. Lightesonance con
RING RES
angular resonato
ists of a silicog resonator. Wconcentrationresonance wa
wavelength (b
ar ring resonatis happened at of 1490 nm wdition around
ONATOR W
or with PCM
on waveguide When the inje
n affects the reavelengths dep
(b)
b) 1510 nm w
tor and PCM ha double resonwavelength d1510 nm wav
WITH PCM
with a 1D phoected gas or biesonance condpends on the g
avelength
have the charanance in the stoesn’t couple velength.
M
otonic crystal iomolecules dition of the gas or
acteristic of tructure with the
Proc. of SPIE Vol. 7211 72110V-8
1.00 1.01 1.02 1.03 1.04 1.050.000
0.005
0.010
0.015
0.020
0.025
0.030
Cha
nge
of n
orm
aliz
ed p
ower
[|Δ
p|]
Effective index in holes [RI]
Directional coupler with PCM Rectangular ring resonator with PCM
Fig. 11 Change of output power by the effective index change
The change of refractive index can be confirmed by detection of output power variation as Fig. 11. These results are shown for the comparison of directional coupler with PCM and rectangular ring resonator with PCM. Figure 11 present that the rectangular ring resonator with PCM is more sensitive than directional coupler with PCM. The change of normalized output power in rectangular ring resonator with PCM is larger than the change in directional coupler with PCM, because the structure rectangular ring resonator with PCM had additional resonance by PCM structure. The broad filter characteristic of directional coupler is advanced by using the sharp filter characteristic of rectangular ring resonator with PCM. Therefore, the sensitivity for detection of biomolecules is improved compared to the directional coupler with PCM. Here, if we use the array of PCM resonator, the sensitivity can be significantly increased [7].
5. CONCLUSION
In this paper, a new biosensor structure, which we refer to as rectangular resonator with PCM, has been optimized and
characterized. This device comprise of a waveguide with evanescently coupled defect mode on the side waveguide. The broad filter characteristic of directional waveguides with microcavity is improved by sharp filter characteristic of rectangular resonator. The rectangular ring resonator sensor with microcavity enhanced quality factor and sensitivity for using sensor than directional coupler sensor with PCM. The change of normalized output power in rectangular ring resonator with PCM is approximately twice larger than change in directional coupler with PCM. The sensitivity of directional coupler with PCM is 0.003 output power change, but the sensitivity of rectangular resonator with PCM is 0.006 output power change. These with values can be significantly enhanced by using the array of PCM resonator. Single TIR mirror in rectangular resonator is designed 0.57 dB loss using the mirror offset by Goos-Hänchen shift. The offset depth is – 0.09 μm. Such optimization of rectangular resonator with PCM enables bio sensor with small size portable modules with very high sensitivity.
6. ACKNOWLEDGEMENT
This work was supported by “Seoul R&BD program (10544)”
Proc. of SPIE Vol. 7211 72110V-9
REFERENCES
[1] Katrien De Vos, Irene Bartolozzi, Etienne Schacht, Peter Bienstman, and Roel Baets., “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Optics express, 15(12), 2007
[2] J. Homola., “Present and future of surface Plasmon resonance biosensors,” Anal. Bioanal Chem., 377, 528-539, 2003
[3] David Hradetzky, Claas Mueller, and Holger Reinecke., “Interferometric label-free biomolecular detection system,” J. Optics A: Pure Appl. Opt., 8, S360-S364, 2006
[4] D. Erickson, Sudeep Mandal, Allen H. J. Yang, and Bernardo Cordovez., “Nanobiosensors: optofluidc, electrical and mechanical approaches to biomorelcular detection at the nanoscale,” Microfluidics and Nanofluidics, 4, 33-52, 2008
[5] E. Yablonvitch, “Photonic band-gap structures,” OSA. B, 10(2), 1993 [6] J. S. Foresi, P.R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C.
Kimerling, Henry I. Smith, and E. P. Ippen., “Photonic-bandgap microcavities in optical waveguides,” Nature, 390(13), 1997
[7] Sudeep Mandal and David Erickson, “Nanoscale optofluidic sensor arrays,” Optics Express, 16(3), 2008 [8] Saleh and Teich, [Fundamental of photonics], Wiley-interscience, 243-279, 2007 [9] John D. Joannopoulos, Steven G. Johnson, Hoshua N. Winn, and Robert D. Meade., [Photonic crystals :
moding the flow of light], Princeton university press, 44-65, 2008 [10] Doo Gun Kim, Young Wan Choi, Jong Chang Yi, Youngchul Chung, Cem Ozturk, and Nadir Dagli., “Total
internal reflection mirrors based ring resonators,” IEEE, 17(9), 2005 [11] F. Goos and H. Hänchen., “Ein neuer und fundamentaler Versuch zur Totalreflexion” Ann. Phys, 1,333-346,
1947
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