Quantitative Auger microanalysis of the silicon–oxygen–nitrogen system

Quantitative Auger microanalysis of the silicon–oxygen–nitrogen systemA. van Oostrom, L. Augustus, F. H. P. M. Habraken, and A. E. T. Kuiper Citation: Journal of Vacuum Science & Technology 20, 953 (1982); doi: 10.1116/1.571651 View online: http://dx.doi.org/10.1116/1.571651 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/20/4?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Effects of nitrogen on oxygen precipitation in silicon J. Appl. Phys. 71, 3760 (1992); 10.1063/1.350886 Quantitative microanalysis of oxygen in zirconium by Auger electron spectroscopy J. Vac. Sci. Technol. A 9, 1237 (1991); 10.1116/1.577605 Role of oxygen and nitrogen in the titaniumsilicon reaction J. Appl. Phys. 61, 1891 (1987); 10.1063/1.338034 Nitrogen effect on oxygen precipitation in Czochralski silicon Appl. Phys. Lett. 48, 224 (1986); 10.1063/1.96564 Application of Monte Carlo calculations to quantitative microanalysis of alloy systems J. Appl. Phys. 43, 3889 (1972); 10.1063/1.1661834

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 131.193.242.21 On: Thu, 27 Nov 2014 17:14:01

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 131.193.242.21 On: Thu, 27 Nov 2014 17:14:01

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 131.193.242.21 On: Thu, 27 Nov 2014 17:14:01

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 131.193.242.21 On: Thu, 27 Nov 2014 17:14:01

Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 131.193.242.21 On: Thu, 27 Nov 2014 17:14:01