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Plasma Etchingmost of the information here was gathered off the web and no copyright violation is intended
Overview● Difference between plasma deposition and
etching● Plasma etching mechanisms● Anisotropic and isotropic etching● Redeposition and self-passivation● DRIE● Application examples
Plasma etching summary● Plasma has ions and excited species of
reactive gases● Reactive ions are directed to the surface by
electric fields● Chemical reactions take place at the surface
and eat away the material● Sputtering can also etch away material● Reaction products are removed in gas form● DRY ETCHING: reactants are gaseous and
solid
Halogens
Examples
Examples
Examples
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