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3M China Communication
Finishing of Optical Lens using Fixed Diamond
Abrasive Pads Trizact Diamond Tile (TDT)---3M TDT-高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案
Lianbin Zheng, 郑连彬/ Sep.2012
携手创新 缔造未来
Overview
� Fixed Abrasive Technology
� 20um and 9um Trizact Diamond Tile(TDT) Performance on
Glass
� Case sharing of TDT on optical lens
2
© 3M 2012. All Rights Reserved.
� Case sharing of TDT on optical lens
Fixed Abrasive(TDT) – Where It Is Used
Broad Market Applications
Glass Hard Disks
LCD Cells
Optical Glass , Crystal Oscillators
Mobile Device Glass Lens
Pad
3
© 3M 2012. All Rights Reserved. 3M Confidential
ApplicationsCrystal Oscillators
Sapphire Substrates for LED
Raw Silicon Wafers
2.6 mm
Engineered Composite Fixed Abrasive
• Organic (crosslinked polymer)
Trizact™ Diamond Tile Fixed Abrasive
4
© 3M 2012. All Rights Reserved.
Potential Advantages
� Provides coolant flow channels
� Provides consistent cut rates
� Pad change time minimal
� Eliminates lap plate rework
� Consistent results batch-to-batch
� 3M Unique Microreplicated Pattern
� Controlled pad - substrate contact
� PSA backed for easy assembly
� Rigid polycarbonate backing
� Uniform content of abrasive throughout life
of product
Features
• Organic (crosslinked polymer)
• Inorganic (vitrified bonded diamond abrasives)
Lapping Technology Comparison
LappingOperation
Abrasive
Process Liquid Lapping Platen / PadType Material
Loose abrasivelapping
Loose(slurry)
Alumina,SiC, B4C,diamond
Abrasive slurry withcorrosion protection
and suspensionadditives
Cast iron platen (possibly serrated with grooves)
7
© 3M 2012 All Rights Reserved.
Pellet lappingFixed
(metal, vitreous,or resin bonded)
DiamondMachining coolant
with corrosionprotection
Cast iron plates with pelletsbonded to the surface
FixedDiamond Tile
Lapping( 3M TDT)
Structured(resin/diamondcomposite pad)
Diamond
Aqueous basedmachining coolant
with corrosionprotection
Any flat or serrated plate with 3MTrizact™ Diamond Tile pad
bonded to the surface with apressure sensitive adhesive
Typical Display Abrasive Finishing
Rough ShapingGlass fabricationCutting to Shape
Intermediate Finishing
8
© 3M 2012. All Rights Reserved.
Shape or Thickness
Surface Finish
Flatness or Parallelism
Removal of Sub-Surface Damage
Performance Attributes
Intermediate FinishingRough or Fine Grinding
PolishingStock PolishFine Polish
Super Polish
3M TrizactTM
Diamond Tile (TDT)
Applications
Incoming inspection
Cutting material Glass thinning
Typical Glass Thinning Process
9
© 3M 2012. All Rights Reserved.
Intensify bythe chemism
Fine PolishingCleaningQC Inspection
Double Sided Grinding (Lapping)
GlassDisk
BottomPlaten
Double-sided Lapping Machines• Motor (stationary platens)• Motor (moving platens and sun
A
A
11
© 3M 2012. All Rights Reserved.
Cross-section A-A
Glass Disk
Bottom Platen
Top Platen
Carrier
Applied LoadPlaten
Fixed Abrasive Pads
• Motor (moving platens and sun gear)
• Motor (moving platens, sun, & ring gears)
Lapping Configuration w/TdT
Single-sided
Applied Load
Rotation either motor
Head Oscillates or FixedLower Pressure helps to improve flatness and to reduce breakage
12
© 3M 2012. All Rights Reserved.
TdT
Sub Pad
Platen
Glass Disk
Ring
Carrier
Carrier Film
Rotation either motor or friction driven.
Lapping Carrier with Substrate.
Direction of rotation
Direction of rotation
Mineral Material: 1200# SiC Slurry 0.5mic CeO Slurry
Grinding Thickness: 0.8mm�0.66mm 0.66mm�0.60mm
Time: 7 minutes 60 minutes Total: 67 minutes
Final PolishingRough Lapping
Slurry Process
Slurry VS TDT: Total Lapping/Polishing Time
14
© 3M 2012. All Rights Reserved.
3M Trizact Diamond Tile
Save 30% lapping time.
Mineral Material: 9mic TDT 0.5mic CeO Slurry
Grinding Thickness: 0.8mm�0.64mm 0.64mm�0.60mm
Time: 3 minutes 45 minutes Total: 48 minutes
Final PolishingRough Lapping
Overall Advantages of Fixed Arasive (TDT) Process� Throughput Increase
� Reduced polishing time due to reduced sub surface damage
� No lap plate re-grinding – less machine down time
� Cleaner process reduces machine down time
� GREEN process: Environmentally Friendly� Significant reduction in slurry waste disposal (only substrate and
15
� Significant reduction in slurry waste disposal (only substrate and coolant – very little abrasive)
� Reduced part cleaning (less water and reduced chemical usage)
� Reduced shipment costs (3M TDT vs. slurry minerals)
� Lower energy (shorter machine cycle times)
� Reduced Machine Maintenance� Reduced slurry distribution system maintenance
� Reduced part carrier wear
Lapping of Soda Lime & Gorilla™ Glass Parts using 9µm EL Trizact™ Diamond Tile
15
20
25R
emov
al R
ate
( µµ µµm
/min
)Grinding test on 9 µm EL Trizact™ Diamond Tile
Ra = 0.33 µm
16
© 3M 2012. All Rights Reserved.
0
5
10
0 20 40 60 80 100 120
Grinding Time (min)
Rem
oval
Rat
e (
Gorilla(TM) Glass
Soda Lime Glass
Ra = 0.37 µm
Pressure = 105 g/cm2 & speed = 30 rpm
-High removal rates-Persistent removal
Lapping Glass Parts with 20 µm Trizact™ Diamond Tile
30
40
50
60
70
Rem
oval
Rat
e (
µµ µµm/m
in)
Ra = 0.73 µm
Ra = 0.70 µm
17
© 3M 2012. All Rights Reserved.
- Stable removal rates- Equivalent surface finish between glass types
0
10
20
30
0 20 40 60 80 100 120
Grinding Time (min)
Rem
oval
Rat
e (
GorillaTM GlassSoda Lime Glass Grinding tests on 20 µm EL Trizact™ Diamond Tile
Pressure = 105 g/cm2 & speed = 30 rpm
Design of Experiments9µm EL Trizact™ Diamond Tile and Soda Lime Glass
Avg. Ra Avg. Rq Max. Rt
70 30 1.2 2.4 0.37 0.48 5.03
Surface Roughness (µµµµm)Plateau
Removal Rates
(µµµµm/min)
Carrier Speed (rpm)
Platen Speed (rpm)
Pressure
(g/cm2)
18
© 3M 2012. All Rights Reserved.
70 30 1.2 2.4 0.37 0.48 5.03
70 90 3.6 10.8 0.29 0.37 3.82
140 60 2.4 16.3 0.34 0.44 4.49
140 60 2.4 17.0 0.34 0.44 4.64
210 30 1.2 13.4 0.40 0.51 5.14
210 90 3.6 46.5 0.34 0.44 4.19
- Wide range of removal rates- Equivalent surface finish between conditions
Surface Roughness from the 9 µm EL DOE on Soda Lime Glass
0.30
0.40
0.50
0.60
Avg
. Ra
or A
vg. R
q (
µµ µµm)
3.0
4.0
5.0
6.0
Max
imum
Rt (
µµ µµm)
Avg. RaAvg. RqMax. Rt
Soda Lime glass ground with 9 um EL Trizact™ Diamond Tile
19
© 3M 2012. All Rights Reserved.
0.00
0.10
0.20
0.30
70-30 70-90 140-60 #1 140-60 #2 210 - 30 210 - 90
Pressure (g/cm 2) - Speed (rpm)
Avg
. Ra
or A
vg. R
q (
0.0
1.0
2.0
3.0
Max
imum
Rt (
2.4 10.8 16.3 17.0 13.4 46.5PlateauRemovalRate (µm/min)
DOE Analysis for 9 EL Trizact™ Diamond Tile and Soda Lime Glass
21014070
30
25
20
15
10
906030
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Average Removal RateData Means
AB
B
A
50403020100
Term
Standardized Effect
12.71
A Pressure
B Platen Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Average Removal Rate, Alpha = 0.05)
a b
c d21014070
30
25
20
15
10
906030
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Average Removal RateData Means
AB
B
A
50403020100
Term
Standardized Effect
12.71
A Pressure
B Platen Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Average Removal Rate, Alpha = 0.05)
21014070
30
25
20
15
10
906030
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Average Removal RateData Means
AB
B
A
50403020100
Term
Standardized Effect
12.71
A Pressure
B Platen Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Average Removal Rate, Alpha = 0.05)
a b
c d
20
© 3M 2012. All Rights Reserved.
90
30
21070
Platen Speed
Pressure
16.65
46.50
13.402.40
10.80
Centerpoint
Factorial Point
Cube Plot (data means) for Average Removal Rate
906030
50
40
30
20
10
0
Platen Speed
Mean
70 Corner
140 Center
210 Corner
Pressure Point Type
Interaction Plot for Average Removal RateData Means
c d
90
30
21070
Platen Speed
Pressure
16.65
46.50
13.402.40
10.80
Centerpoint
Factorial Point
Cube Plot (data means) for Average Removal Rate
906030
50
40
30
20
10
0
Platen Speed
Mean
70 Corner
140 Center
210 Corner
Pressure Point Type
Interaction Plot for Average Removal RateData Means
90
30
21070
Platen Speed
Pressure
16.65
46.50
13.402.40
10.80
Centerpoint
Factorial Point
Cube Plot (data means) for Average Removal Rate
906030
50
40
30
20
10
0
Platen Speed
Mean
70 Corner
140 Center
210 Corner
Pressure Point Type
Interaction Plot for Average Removal RateData Means
c d
Statistically Significant Factors-Pressure greatest effect-Larger effect of speed at higher pressure
Design of Experiments20µ EL Trizact Diamond Tile and Gorilla™ Glass
Avg. Ra Avg. Rq Max. Rt46 30 1.2 38.4 0.76 0.98 9.73
Surface Roughness (µµµµm)
Pressure
(g/cm2)
Platen Speed (rpm)
Carrier Speed (rpm)
Avg. Removal
Rates (µµµµm/min)
21
© 3M 2012. All Rights Reserved.
46 30 1.2 38.4 0.76 0.98 9.7346 90 3.6 111.5 0.84 1.08 10.8791 60 2.4 109.0 0.85 1.11 10.8191 60 2.4 112.1 0.79 1.02 8.56137 30 1.2 78.7 0.86 1.10 9.21137 90 3.6 239.3 0.77 1.00 9.31
-Wide range of removal rates- Removal even at low pressure- Equivalent surface finish between conditions
Surface Roughness from the 20 mm EL DOE on Gorilla™ Glass
0.6
0.8
1.0
1.2
Ave
rage
Ra
or R
q (
µµ µµm)
6.0
8.0
10.0
12.0
Max
imum
Rt (
µµ µµm)
Avg. RaAvg. RqMax. Rt
GorillaTM glass ground with 20 µm EL Trizact™ Diamond Tile
22
© 3M 2012. All Rights Reserved.
0.0
0.2
0.4
0.6
46-30 46-90 92-60 #1 92-60 #2 138 - 30 138 - 90
Pressure (g/cm 2) - Platen Speed (rpm)
Ave
rage
Ra
or R
q (
0.0
2.0
4.0
6.0
Max
imum
Rt (
38.4 111.5 109.0 112.1 78.7 239.3AverageRemovalRate (µm/min)
DOE Analysis for 20µ EL Trizact™ Diamond Tile and Gorilla™ Glass
175
150
125
100
75
50
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Avg. RateData Means
AB
A
B
6050403020100
Term
12.71
A Pressure
B P laten Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Avg. Rate, Alpha = 0.05)
a b
175
150
125
100
75
50
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Avg. RateData Means
AB
A
B
6050403020100
Term
12.71
A Pressure
B P laten Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Avg. Rate, Alpha = 0.05)
175
150
125
100
75
50
Pressure
Mean
Platen SpeedCorner
Center
Point Type
Main Effects Plot for Avg. RateData Means
AB
A
B
6050403020100
Term
12.71
A Pressure
B P laten Speed
Factor Name
Pareto Chart of the Standardized Effects(response is Avg. Rate, Alpha = 0.05)
a ba b
23
© 3M 2012. All Rights Reserved.
Statistically SignificantFactors
- Speed greatest effect- Larger effect of speed at higher pressure
1389246
50
906030
90
30
13846
Platen Speed
Pressure
110.55
239.30
78.7038.40
111.50
Centerpoint
Factorial Point
Cube Plot (data means) for Avg. Rate
6050403020100
Standardized Effect
906030
250
200
150
100
50
Platen Speed
Mean
46 Corner
92 Center
138 Corner
Pressure Point Type
Interaction Plot for Avg. RateData Means
c d1389246
50
906030
90
30
13846
Platen Speed
Pressure
110.55
239.30
78.7038.40
111.50
Centerpoint
Factorial Point
Cube Plot (data means) for Avg. Rate
6050403020100
Standardized Effect
906030
250
200
150
100
50
Platen Speed
Mean
46 Corner
92 Center
138 Corner
Pressure Point Type
Interaction Plot for Avg. RateData Means
1389246
50
906030
90
30
13846
Platen Speed
Pressure
110.55
239.30
78.7038.40
111.50
Centerpoint
Factorial Point
Cube Plot (data means) for Avg. Rate
6050403020100
Standardized Effect
906030
250
200
150
100
50
Platen Speed
Mean
46 Corner
92 Center
138 Corner
Pressure Point Type
Interaction Plot for Avg. RateData Means
c dc d
2mic TDT Applications Investigation
Testing Roughess(um) after 2um TDTRa Rz Rmax
Batch 1 10min lapping 0.08 0.52 0.69
Ra Rz RmaxBatch 3 10min lapping 0.08 0.59 0.76
Ra Rz RmaxBatch 5 10min lapping 0.08 0.5 0.68
24
© 3M 2012. All Rights Reserved.
Laser MicroscopeVK-2700 (X500)
2mic 4s-4mic 9mic
20mic 1200# SiC Slurry
客户客户客户客户测试时测试时测试时测试时间间间间 测试产品测试产品测试产品测试产品 工艺要求工艺要求工艺要求工艺要求
测试结果测试结果测试结果测试结果
G2011年6月
1号
光学玻璃(光盘母盘
,TDT 9mic)
产生牛顿光圈(且不能是马蹄形),光圈
数<30
不仅有良好的光圈出现,且与现有碳化硅工艺相比:平行度改善
一倍,平面度改善两倍
H2011年6月
8号
光学玻璃(投线仪窗口玻璃,TDT
平行度<5"
1.光学性能优于客户现有SLURRY工艺,RR为37.5um/min( 现有工
艺3倍)
TDT在不同光学客户测试
27
H8号 玻璃,TDT
9mic)
平行度<5" 艺3倍)2.最后抛光时间从1个半小时减
少到25分钟
K2011年7月
22号
盖板玻璃,光学玻璃(TDT TDT 9mic)
右图为未经抛光,玻璃的牛顿光圈)
光圈形状和数量完全满足客户要求1.平均RR可达现有碳化硅工艺2倍;2可将抛光时间从现有100分
钟减少为40分钟
D2011年8月
30号
光学玻璃(TDT 9mic)单面减薄
1.减薄后表面粗糙度小于0.8微米 2.表面平整度小于
3微米
RR比客户现有工艺提高一倍,且将客户3步减薄工艺简化为1步
TDT减薄
© 3M 2012. All Rights Reserved.
T2011年9月
6号
光学玻璃(石英玻璃,B270玻璃,蓝色滤光片,TDT 9mic)
产生牛顿光圈(且不能是马蹄形),光圈
数<8
1.在石英玻璃上RR为10um/min@40RPM.,B270 上
20um@40RPM,滤光片上15um/min@5RPM,36um/min@10RPM
力2.光学性能良好:平均光圈数3-6
个
M2011年9月
22号光学玻璃
(TDT 9mic)
产生牛顿光圈(不能是马蹄形),光圈数
<6
1.能产生良好的光圈 2.比现有碳化硅工艺减薄效率提高1.5-2
倍以上
转速30RPM RR:2.3um/min@30g/cm2,4.8um/min@50g/cm2,7.2um/min@100g/cm
TDT在不同光学客户测试
28
S2011年10月 13号
TDT 45mic 减薄2”蓝宝石
wafer
in@50g/cm2,7.2um/min@100g/cm2,>27.4um/min@150g/cm2 Bow:-0.28um(1A),-0.113um(2A),-0.582(2B) Warp:2.573um(1A),5.886um(1B),1.746um(2A),2.716um(2B) Ra:0.78um(1A),0.685um(1B),0.632um(2A),0.776um(2B) Warp和Bow检测均超过行业标准要求
p2011年10月19号
光学玻璃(TDT 9mic)
光圈形状及数量满足客户要求,客户现有slurry工艺RR=3.7um/min,TDT 9mic lapping RR可达12.5um/min@30RPM Slurry Lapped Glass Ra=0.23μm >TDT lapped Glass Ra=0.12μm 最后抛光时间减少到5小时(客户现有工艺下需10小时)
© 3M 2012. All Rights Reserved.
A2012年2月
16号光学玻璃(TDT 9mic)
测试材质:水晶 Ra:0.15um(TDT lapped )<0.232um(slurry lapped) RR从1.4um/10 circles到7.0um/10circles之间漂移,另外,有部分出现局部雾状B270:相对比较稳定,11um/min左右
P2012年2月
15号
光学玻璃(TDT 9mic)单
面减薄
产生牛顿光圈(不能是马蹄形),光圈数<4
材质:FS7980 Ra:0.166um (TDT lapped)<0.242um(W10 lapped)牛顿环数: 2 (<4)减少20%的减薄时间和 20%抛光时间
TDT在不同光学客户测试
29
C2012年2月
17号
光学玻璃(TDT 9mic)单
面减薄Flatness<2um
测试材质K9: RR:6.5um/min(added 7kg weight)Flatness:2um (customers’spec≦2um)
X2012年3月
5号
光学玻璃(TDT 9mic)单
面减薄
RR:1)13um/min@1.1psi,40RPM 2)8.5um/min@1.1psi,40RPM 3)11.5um/min@1.48psi,40RPM 推荐客户使用更优化的参数,现已量产
S2012年3月
14号
光学玻璃(TDT 9mic)单
面减薄
测试材质为青板玻璃,TDT与客户现有slurry工艺对比: 1.任意五点Ra平均值:0.376um(TDT)<0.441um(W10 slurry),TDT磨后的玻璃表面已相当于W10 slurry磨后抛光30分钟2.RR:5um/60rpm,5kg weight © 3M 2012. All Rights Reserved.
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