給水工程 葉宣顯. 土木工程系 Civil Engineering 結構工程組 道路工程組...

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給水工程

葉宣顯

土木工程系Civil Engineering

結構工程組道路工程組水利工程組衛生工程組測量工程組

衛生工程Sanitary Engineering

給水工程

污水工程

自來水工程簡史1804 Paisley, Scotland 將過濾之水送至用戶家中1807 Glasgow, Scotland 將水以管線送至用戶1810 England, Water Closet (W.C.)1832 London, Typhoid 流行1847 London, Typhoid 流行1848 London, Cholera 流行1849 Cholera 14,600 deaths1854 Cholera 10,675 deaths Dr. John Snow

歷史迴顧• 1839 年,在倫敦約有一半之喪禮係為小於10 歲之孩童所舉行,許多死於傳染性疾病。

• 1847 年,約有 50 萬倫敦人 (全部人口之 ¼)得到傷寒,主要因衛生條件差。

• 19 世紀中葉,倫敦人之平均壽命 27 歲,勞工階級只有 22 歲。

日本 Cholera 死亡人口1879( 明治 12 年 ) 105,7861882( 明治 15 年 ) 33,7841886( 明治 19 年 ) 108,405

1850 Chlorination of water on emergency basis

1902 Continuous chlorination,

Middelkerke, Belgium

1904 Continuous chlorination, England

1910 Continuous chlorination, U.S.A.

自來水工程簡史 (continuous)

From A.E. Gorman & A. Wolman, J. Am. Water Works Assoc., February 1939.

二十世紀最偉大的工程成就• 2000 年,美國國家工程學院 (National Academy of Engineering) 評選二十世紀最偉大的工程成就,『水處理技術及消毒』名列第四,於電氣化、汽車、飛機之後。

World Water Distribution

Volume 1012 m3 % of total

Land areas

Freshwater lakes 125 0.009

Saline lakes & inland seas 104 0.008

Rivers 1.25 0.0001

Soil moisture 67 0.005

Groundwater 8,350 0.61

Ice cups & glaciers 29,200 2.14

Total land area 37,800 2.8

Atmosphere( water vapor) 13 0.001

Oceans 1,320,000 97.3

Total all locations 1,360,000 100

Highlights• Like oil in the 20th century, water could

well be the essential commodity on which the 21st century will turn

• Over a billion people lack access to clean drinking water

• Over 2 billion people live without adequate sanitation

• Each year 5 million people die, mostly children, from preventable waterborne disease

Percentage of Population Served by

Public Water System

858687888990919293

1994 1996 1998 2000 2002 2004 2006 2008

Year

Per

cent

age

(%)

Water Supply Engineering

• Water source (intake) 取水工程• Water transmission 導水工程• Water treatment (water purification) 淨水工程• Water distribution 配水工程

Water Supply Engineering

• Water source (intake) 取水工程• Water transmission 導水工程• Water treatment (water purification) 淨水工程• Water distribution 配水工程

水源• 表面水

河川直接取水湖庫

• 地下水• 雨水• 海水• 污廢水

水源• 表面水

河川直接取水湖庫

• 地下水• 雨水• 海水• 污廢水

Water Resources

• Mean annual rainfall about 2500 mm• Distinct dry and wet seasons.

Drought in dry season, and flooding in typhoon season are quite common.

• Rivers are short and steep Reservoirs are usually required

• Source water for public water supply 64.3% reservoirs, 21.7% direct surface water, 14% groundwater.

• Owing to environment consideration, building new dam is quite difficult nowadays.

Water Resources

• Mean annual rainfall about 2500 mm• Distinct dry and wet seasons.

Drought in dry season, and flooding in typhoon season are quite common.

• Rivers are short and steep Reservoirs are usually required

• Source water for public water supply 64.3% reservoirs, 21.7% direct surface water, 14% groundwater.

• Owing to environment consideration, building new dam is quite difficult nowadays.

Water Resources

• Mean annual rainfall about 2500 mm• Distinct dry and wet seasons.

Drought in dry season, and flooding in typhoon season are quite common.

• Rivers are short and steep Reservoirs are generally required

• Source water for public water supply 64.3% reservoirs, 21.7 direct surface water, 14% groundwater.

• Owing to environment consideration, building new dam is quite difficult nowadays.

Feitsui ReservoirTe-Chi Reservoir

Sun-Moon Lake

Wu-San-To Reservoir

Shihmen Reservoir

Nanhua Reservoir

Water Resources

• Mean annual rainfall about 2500 mm• Distinct dry and wet seasons.

Drought in dry season, and flooding in typhoon season are quite common.

• Rivers are short and steep Reservoirs are usually required

• Source water for public water supply 64.3% reservoirs, 21.7 direct surface water, 14% groundwater.

• Owing to environment consideration, building new dam is quite difficult nowadays.

Water Resources

• Mean annual rainfall about 2500 mm• Distinct dry and wet seasons.

Drought in dry season, and flooding in typhoon season are quite common.

• Rivers are short and steep Reservoirs are usually required

• Source water for public water supply 64.3% reservoirs, 21.7% direct surface water, 14% groundwater.

• Owing to environment consideration, building new dam is quite difficult nowadays.

High Turbidity Source Waters• During the summer months of 2004 and 2005, the turbi

dity of the source water from Shihmen Reservoirs have been over 100,000 NTU

• The public water supply of the Taoyuan area was suspended for 19 days, affecting the daily life of millions people.

• Estimated economic loss about NT$5 billions.

High Turbidity Source Waters• Kaoping River Weir

Turbidity has been reached 25,000 NTU in July,

2005.

In the past, several thousands NTU were quite common during typhoon seasons.

No major reservoirs in Kaohsiung area.

Drought and Flooding

• On August 6, 2009, drought warning was issued.

• On August 8, Typhoon Morakot came with total precipitation of 2965 mm.

• The source water turbidity of Nanhua Reservoir over 70000 NTU.

• Water supply to parts of Tainan and Kaohsiung area was suspended for about a week.

南化淨水場原水濁度

Date (y/m)

2004/1 2004/7 2005/1 2005/7 2006/1 2006/7 2007/1 2007/7 2008/1 2008/7 2009/1

¿B«× (NTU)

0

200

400

800

1000

泰利颱風

5800 NTU 卡玫基 颱風59000 TU

2009/08

莫拉克颱風70000 NTU

水源• 表面水

河川直接取水湖庫

• 地下水• 雨水• 海水• 污廢水

Overpumping of Groundwater

• Land subsidence

• Seawater intrusion

Water Supply Engineering

• Water source (intake) 取水工程• Water transmission 導水工程• Water treatment (water purification) 淨水工程• Water distribution 配水工程

曾文水庫越域引水工程

曾文水庫越域引水工程

Water Supply Engineering

• Water source (intake) 取水工程• Water transmission 導水工程• Water treatment (water purification) 淨水工程• Water distribution 配水工程

澎湖之海水淡化廠

NEWater SingaporeSec. Eff.→ MF→RO→UV Disinf. Currently 5 NEWater plants pro

vide 30% of national water needs(→50% in 2060)

Mainly for non-potable uses

Wafer fabrication & others Indirect potable usage

Mixing with raw water in the reservoirs

From METCALF & EDDY

Groundwater Replenishment System,Orange County, California

• Advanced Water Treatment Facility (265 X 103 CMD)

• The product water is percolated into the groundwater aquifers → drinking water supply source

• A portion is injected into salt water intrusion barrier wells along the Pacific coastline

Hydrogen peroxide

Water Supply Engineering

• Water source (intake) 取水工程• Water transmission 導水工程• Water treatment (water purification) 淨水工程• Water distribution 配水工程

家戶蓄水池

Pressure in Distribution System

City Pressure (bar)

Munich 4 ~ 6

Amsterdam 2.5 ~ 3.85

Vienna 4 ~ 6

Paris Ave. 5

Lisbon 3~ 6

Madrid Ave. 6

Frankfurt 3.5 ~ 6

Taipei Ave. 1.6

Water Demand is Still Increasingespecially in high-tech industries

Tu

rnov

er in

Sci

ence

Par

k

(

Bil

lion

NT

dol

lars

)

Water Usage for Wafer Manufacture

Wafer size (in)

UPW usage (m3/per wafer)

6 1

8 2.5 ~ 3

12 10 ~ 15

報告人 :UMC FOC/FE12A 吳江平 日期 :93/11/09

UMC FAB12A 節水輔導簡報

•員工人數:1,200人•主要產品月生產量: 12吋晶圓38,000片 (滿載 ) •設廠日期: 2002年12月完工•廠區面積: 51,800m2

UMC FAB12A 廠簡介

1

瀚宇彩晶股份有限公司瀚宇彩晶股份有限公司三廠節水措施說明三廠節水措施說明

12 吋晶圓代工製程簡介

2

參數 濃度

Conductivity (25 ) (μs/cm) 0.055℃Bacteria (Col./100mL) 0

Temperature ( ) 22 ± 1℃Dissolved Oxygen (μg/L) 5≦TOC (μg/L) 5≦Silica (as SiO2) (μg/L) 3 ≦

Ions

Calcium (μg/L) 0.1≦Sodium (μg/L) 0.1 ≦Iron (μg/L) 0.1 ≦Chloride (μg/L) 0.1 ≦Sulfate (μg/L) 0.1≦Nitrate (μg/L) 0.1≦

參數 濃度

Conductivity (25 ) (μs/cm) 312.8℃pH 7.1

Temperature ( ) 15-30℃Free-O2 (μg/L) 2000-3000

TOC (μg/L) <2500

Silica (as SiO2) (μg/L) 8600

Ions

Calcium (μg/L) 46120

Sodium (μg/L) 18430

Iron (μg/L) 500

Chloride (μg/L) 6030

Sulfate (μg/L) 72040

Nitrate (μg/L) 2000

自來水 水質 純水 水質規格

TOC level for Semiconductor Industry

Year DRAM (bits) TOC (ppb)

1985 256 K 50 -100

1988 1 – 4 M 10 - 30

1991 16 M 1 - 5

ASTM D 5127-99 (1999) (Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry)

Type E-1.2 less than 1 ppb

晶圓廠超純水製造流程圖

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