Planar Lightwave Circuits
Employing Coupled Waveguides in
Aluminum Gallium Arsenide
by
Rajiv Iyer
A thesis submitted in conformity with the requirementsfor the degree of Doctor of Philosophy
Graduate Department of Electrical EngineeringUniversity of Toronto
Copyright c© 2008 by Rajiv Iyer
Abstract
Planar Lightwave Circuits
Employing Coupled Waveguides in
Aluminum Gallium Arsenide
Rajiv Iyer
Doctor of Philosophy
Graduate Department of Electrical Engineering
University of Toronto
2008
This dissertation addresses three research challenges in planar lightwave circuit (PLC)
optical signal processing.
1. Dynamic localization, a relatively new class of quantum phenomena, has not been
demonstrated in any system to date. To address this challenge, the quantum system
was mapped to the optical domain using a set of curved, coupled PLC waveguides in
aluminum gallium arsenide (AlGaAs). The devices demonstrated, for the first time,
exact dynamic localization in any system. These experiments motivate further mappings
of quantum phenomena in the optical domain, leading toward the design of novel optical
signal processing devices using these quantum-analog effects.
2. The PLC microresonator promises to reduce PLC device size and increase optical
signal processing functionality. Microresonators in a parallel cascaded configuration,
called “side coupled integrated spaced sequence of resonators” (SCISSORs), could offer
very interesting dispersion compensation abilities, if a sufficient number of rings is present
to produce fully formed “Bragg” gaps. To date, a SCISSOR with only three rings has
been reported in a high-index material system. In this work, one, two, four and eight-ring
SCISSORs were fabricated in AlGaAs. The eight-ring SCISSOR succeeded in producing
fully formed Bragg peaks, and offers a platform to study interesting linear and nonlinear
ii
phenomena such as dispersion compensators and gap solitons.
3. PLCs are ideal candidates to satisfy the projected performance requirements of
future microchip interconnects. In addition to data routing, these PLCs must provide
over 100-bit switchable delays operating at ∼ 1 Tbit/s. To date, no low loss optical device
has met these requirements. To address this challenge, an ultrafast, low loss, switchable
optically controllable delay line was fabricated in AlGaAs, capable of delaying 126 bits,
with a bit-period of 1.5 ps. This successful demonstrator offers a practical solution for
the incorporation of optics with microelectronics systems.
The three aforementioned projects all employ, in their unique way, the coupling of light
between PLC waveguides in AlGaAs. This central theme is explored in this dissertation
in both its two- and multi-waveguide embodiments.
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Acknowledgements
I first and foremost express my sincere gratitude to Professor J. Stewart Aitchison for
his mentorship over the past 5 years. Furthermore, I thank my research colleagues and
mentors: Professor John E. Sipe, Professor Marc M. Dignam, Professor C. Martijn de
Sterke, Professor Marc Sorel, Professor Peter W. E. Smith, Professor Henry M. van Driel,
Professor Arthur L. Smirl, Dr. Jun Wan, Dr. Alan D. Bristow, Dr. Zhenshan Yang, Dr.
Joachim Meier, Dr. Philip Chak, Dr. Francesca Pozzi and all my fellow students and
staff in the Photonics Research Group.
I also thank NSERC, the Ontario Centres of Excellence, the CCPE/Manulife Finan-
cial, SPIE, and the AAPN for funding my research.
I also thank Dr. Henry Lee and Yimin Zhou from the Emerging Communications
Technology Institute for their assistance in fabricating my devices, and to Battista
Calvieri and Steven Doyle from the Microscopy Imaging Lab for the use of their scanning
electron microscopes. I also thank Andrew Bezinger and Dr. Margaret Buchanan from
the Institute for Microstructural Sciences at the NRC for etching many of my devices.
My thanks also extend to James Pond from Lumerical Inc. whose MODE Solutions
served as an essential tool in my research.
This PhD was only made possible thanks to my wife, Deepa, who supported my
decision to return to school to continue my education. Her patience and friendship has
been an invaluable resource of strength and advice.
My sincere thanks to my parents, my niece, Mira, my nephew, Arjun, their parents,
Tara and Vineet, their grandparents, Mana and Mavi, and all my friends, who helped
me through the tough times, and celebrated with me during the high times. I also must
specifically thank Arjun for helping me download my references, and our new baby who
arrived just before final submission!
Above all, I express my deepest gratitude to my Gurumatha Amma, for her unending
guidance, love and support in all my endeavours.
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Contents
1 Introduction 1
1.1 Planar Lightwave Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1.1 Integrated versus Free-Space Optical Devices . . . . . . . . . . . . 2
1.1.2 PLC Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.3 Chapter Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 PLCs for Spatial Optical Signal Processing: Exact Dynamic Localization 5
1.2.1 Mapping between Quantum and Optical Domains . . . . . . . . . 5
1.2.2 Discrete Diffraction . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2.3 Bloch Oscillations . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2.4 Dynamic Localization . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2.5 The Exact Dynamic Localization Challenge . . . . . . . . . . . . 9
1.2.6 The Exact Dynamic Localization Solution . . . . . . . . . . . . . 9
1.3 PLCs for Spectral Optical Signal Processing: SCISSORs . . . . . . . . . 10
1.3.1 Microresonators . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.3.2 Serial CROWs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.3 Parallel SCISSORs . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.3.4 The SCISSOR Challenge . . . . . . . . . . . . . . . . . . . . . . . 14
1.3.5 The SCISSOR Solution . . . . . . . . . . . . . . . . . . . . . . . . 14
1.4 PLCs for Temporal Optical Signal Processing: Optical Delay Lines . . . 15
1.4.1 PLC Microchip Interconnects . . . . . . . . . . . . . . . . . . . . 15
v
1.4.2 Optical Delays . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.3 PLC optical delays: Resonators versus Differing-Length
Waveguides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.4 Optical Delay Switching . . . . . . . . . . . . . . . . . . . . . . . 18
1.4.5 The Optical Delay Line Challenge . . . . . . . . . . . . . . . . . . 19
1.4.6 The Optical Delay Line Solution . . . . . . . . . . . . . . . . . . . 20
1.5 The Challenges and Solutions: Discussion . . . . . . . . . . . . . . . . . 20
1.6 Light Coupling in Waveguides . . . . . . . . . . . . . . . . . . . . . . . . 21
1.6.1 Light Confinement in a Single Waveguide . . . . . . . . . . . . . . 22
1.6.2 Light Coupling in a Two-Waveguide System . . . . . . . . . . . . 23
1.6.3 Light Coupling in a Multi-Waveguide System . . . . . . . . . . . 25
1.6.4 The Nonlinear Directional Coupler Switch . . . . . . . . . . . . . 25
1.7 Aluminum Gallium Arsenide . . . . . . . . . . . . . . . . . . . . . . . . . 26
1.8 Summary and Thesis Organization . . . . . . . . . . . . . . . . . . . . . 28
2 Light Coupling in Waveguides 29
2.1 Maxwell’s Equations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
2.2 Supermodes of the Directional Coupler . . . . . . . . . . . . . . . . . . . 33
2.3 Hamiltonian Formulation of Coupled Mode Equations . . . . . . . . . . . 36
2.3.1 Eigenmodes in a Restricted Basis . . . . . . . . . . . . . . . . . . 36
2.3.2 Effective Fields and the Coupled Mode Equations . . . . . . . . . 39
2.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
3 Aluminum Gallium Arsenide 42
3.1 AlGaAs Lattice Constant . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.2 AlGaAs Material Index Dispersion . . . . . . . . . . . . . . . . . . . . . 44
3.3 AlGaAs Optical Nonlinearity . . . . . . . . . . . . . . . . . . . . . . . . 45
3.4 AlGaAs Wafers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
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3.4.1 AlGaAs Wafer: 24/18/24 . . . . . . . . . . . . . . . . . . . . . . . 47
3.4.2 AlGaAs Wafer: 70/20/70 . . . . . . . . . . . . . . . . . . . . . . . 47
3.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
4 Exact Dynamic Localization 49
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.2 Dynamic Localization in Curved Coupled Optical Waveguide Arrays . . . 52
4.2.1 Paraxial Complex Vector Wave Equation . . . . . . . . . . . . . . 52
4.2.2 Mapping of the Quantum System to Waveguide Arrays . . . . . . 54
4.2.3 Straight Waveguide Array . . . . . . . . . . . . . . . . . . . . . . 57
4.2.4 Bloch Oscillations . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
4.2.5 EDL in CCOW Arrays . . . . . . . . . . . . . . . . . . . . . . . . 59
4.2.6 EDL CCOW Design . . . . . . . . . . . . . . . . . . . . . . . . . 61
4.3 EDL: Experiment and Results . . . . . . . . . . . . . . . . . . . . . . . . 64
4.3.1 Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
4.3.2 Experimental Setup . . . . . . . . . . . . . . . . . . . . . . . . . . 65
4.3.3 Output Slab Measurement Technique . . . . . . . . . . . . . . . . 66
4.3.4 Staggered Technique for Spatial Mapping . . . . . . . . . . . . . . 67
4.3.5 EDL Measurement Techniques: Validation . . . . . . . . . . . . . 67
4.3.6 EDL: Wavelength Dependence . . . . . . . . . . . . . . . . . . . . 69
4.3.7 EDL: Spatial Map . . . . . . . . . . . . . . . . . . . . . . . . . . 71
4.4 Discussion: EDL Tolerance on Discontinuity Smoothing . . . . . . . . . . 73
4.5 Future Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
4.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
5 Side-Coupled Integrated Spaced Sequence of Resonators 77
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
5.2 The SCISSOR Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
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5.3 Device Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.3.1 Nanowire Design . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
5.3.2 Nanowire Directional Coupler Design . . . . . . . . . . . . . . . . 82
5.3.3 SCISSOR Design . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.4 Device Fabrication and Characterization . . . . . . . . . . . . . . . . . . 85
5.4.1 Nanowire Directional Coupler Characterization . . . . . . . . . . 87
5.4.2 SCISSOR Characterization . . . . . . . . . . . . . . . . . . . . . . 89
5.5 Future Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
5.5.1 Nanowires: Future Work . . . . . . . . . . . . . . . . . . . . . . . 91
5.5.2 SCISSORS: Future Work . . . . . . . . . . . . . . . . . . . . . . . 91
5.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
6 All-Optical Controllable Delay Line 94
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
6.1.1 Nonlinear Directional Coupler Behaviour . . . . . . . . . . . . . . 95
6.2 Optical Delay Line: Design and Fabrication . . . . . . . . . . . . . . . . 97
6.2.1 OCDL Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
6.2.2 Device Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . 100
6.3 Experiment and Results . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
6.3.1 Experimental Setup . . . . . . . . . . . . . . . . . . . . . . . . . . 103
6.3.2 OCDL Measurements . . . . . . . . . . . . . . . . . . . . . . . . . 104
6.3.3 Self Phase Modulation . . . . . . . . . . . . . . . . . . . . . . . . 110
6.4 Future Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
6.4.1 New OCDL Design . . . . . . . . . . . . . . . . . . . . . . . . . . 112
6.5 Extensions and Applications . . . . . . . . . . . . . . . . . . . . . . . . . 113
6.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
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7 Summary and Conclusions 115
7.1 Exact Dynamic Localization . . . . . . . . . . . . . . . . . . . . . . . . . 116
7.1.1 Summary: Exact Dynamic Localization . . . . . . . . . . . . . . . 116
7.1.2 Future Work: Exact Dynamic Localization . . . . . . . . . . . . . 117
7.2 SCISSORs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
7.2.1 Summary: SCISSORs . . . . . . . . . . . . . . . . . . . . . . . . 117
7.2.2 Future Work: SCISSORs . . . . . . . . . . . . . . . . . . . . . . . 118
7.3 Optically Controllable Delay Line . . . . . . . . . . . . . . . . . . . . . . 118
7.3.1 Summary: Optically Controllable Delay Line . . . . . . . . . . . . 119
7.3.2 Future Work: Optically Controllable Delay Line . . . . . . . . . . 119
7.4 Final Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
Appendices 121
A Nonlinear Polarization Density in AlGaAs 121
A.1 Nonlinear Susceptibility and Polarization Density in AlGaAs . . . . . . . 121
A.1.1 Linear Polarization Density . . . . . . . . . . . . . . . . . . . . . 123
A.1.2 Second Order Nonlinear Polarization Density . . . . . . . . . . . . 123
A.1.3 Third Order Nonlinear Polarization Density . . . . . . . . . . . . 124
A.1.4 Polarization Density of AlGaAs . . . . . . . . . . . . . . . . . . . 126
A.2 Kerr nonlinearity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
B AlGaAs Photolithography and Etching 129
B.1 AlGaAs Recipe: Anisotropic . . . . . . . . . . . . . . . . . . . . . . . . . 130
B.1.1 Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
B.1.2 Anisotropic Etch Results . . . . . . . . . . . . . . . . . . . . . . . 132
B.2 AlGaAs Recipe: Isotropic . . . . . . . . . . . . . . . . . . . . . . . . . . 133
B.2.1 Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
B.2.2 Isotropic Etch Results . . . . . . . . . . . . . . . . . . . . . . . . 134
ix
B.3 Photoresist Crosslinking and Hard Baking . . . . . . . . . . . . . . . . . 137
C Microresonator Free Spectral Range 138
Bibliography 140
x
List of Figures
1.1 Schematic example of a PLC used for laser modulation. . . . . . . . . . . 2
1.2 Comparison of two JDSU 100 GHz multiplexer/demultiplexer units. . . . 3
1.3 Mapping between quantum and optical domains in the example of wavepacket
spread and optical discrete diffraction. . . . . . . . . . . . . . . . . . . . 6
1.4 Schematic of a straight waveguide array to demonstrate discrete diffraction. 6
1.5 Mapping between quantum and optical domains in the example of Bloch
oscillations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.6 Schematic of a waveguide array with constant curvature to demonstrate
Bloch oscillations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.7 Schematic of a waveguide array with an ac curvature to demonstrate dy-
namic localization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.8 PLC Microresonator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.9 Cascaded microresonators. . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.10 Measured responses for first-, third-, and 11th-order CROW filters. . . . 12
1.11 Normalized power spectra at the drop-port for 1 and 4 ring SCISSOR. . 13
1.12 Sub-bit delay using the stimulated Brillouin scattering process. . . . . . . 17
1.13 PLCs for optical delays: a comparison. . . . . . . . . . . . . . . . . . . . 18
1.14 Switchable and tunable PLC delay schematic (20 mm x 60 mm chip) using
thermo-optic switches and large ring resonators. . . . . . . . . . . . . . . 19
1.15 A directional coupler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
xi
1.16 Waveguide schematic. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
1.17 Modal confinement within the waveguide. . . . . . . . . . . . . . . . . . . 23
1.18 Power transfer as a function of propagation distance in a directional coupler. 23
1.19 Normalized transmission of the fabricated nanowire directional coupler
used in the SCISSOR experiments. . . . . . . . . . . . . . . . . . . . . . 24
1.20 Discrete diffraction at the output of a linear waveguide array: measured
(solid line) and simulated (dotted line). . . . . . . . . . . . . . . . . . . . 25
1.21 Nonlinear switching through a directional coupler at low and high intensities. 26
2.1 Coupled Waveguides. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
2.2 (a) Single-mode waveguide, and (b) its fundamental spatial mode com-
puted using FDMA (“MODE Solutions”). . . . . . . . . . . . . . . . . . 33
2.3 Two-waveguide system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2.4 Two lowest-order supermodes of a two-waveguide system. . . . . . . . . . 34
2.5 Dispersion relation for the two lowest-order supermodes of the DC used
in the OCDL of Chapter 6. . . . . . . . . . . . . . . . . . . . . . . . . . . 35
2.6 Dispersion relation for the OCDL of Chapter 6. Solid lines are the disper-
sion relation of the two supermodes; the points are the two eigenfrequencies
computed from the restricted basis analysis. . . . . . . . . . . . . . . . . 39
3.1 The primitive cell of a zinc-blende type crystal lattice. . . . . . . . . . . 43
3.2 AlGaAs material dispersion as a function of aluminum content. . . . . . 45
3.3 AlGaAs half bandgap wavelength versus aluminum content. . . . . . . . 46
3.4 The measured AlGaAs values of n2 for TE and TM polarizations. . . . . 46
4.1 Schematic of the CCOW structure . . . . . . . . . . . . . . . . . . . . . . 55
4.2 Simulation of the beam divergence (discrete diffraction) in a straight wave-
guide array. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
xii
4.3 Simulation of Bloch oscillations in a waveguide array with a constant radius
of curvature. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
4.4 Simulation of dynamic localization in a waveguide array with an ac square-
wave curvature profile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
4.5 Simulation of the lowest order TM supermode of a two-waveguide DC
using the CCOW design parameters. . . . . . . . . . . . . . . . . . . . . 61
4.6 (a) 2D BPM simulation and (b) one-band Schrodinger model of EDL in a
four-period non-NNTB CCOW array. . . . . . . . . . . . . . . . . . . . . 63
4.7 One-band Schrodinger model of ADL breakdown in a four-period non-
NNTB CCOW array. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
4.8 SEM of cleaved end-facet of EDL chip. . . . . . . . . . . . . . . . . . . . 65
4.9 Photomask layout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
4.10 Bloch oscillation experiments using the staggered and output-slab mea-
surement techniques to test beam mapping and accurate beam-relocalization
observation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
4.11 Bloch oscillation experiment results. . . . . . . . . . . . . . . . . . . . . . 69
4.12 (a) Measured and (b) simulation results of the EDL wavelength depen-
dence at v/Λ = 4 from 1480 nm to 1600 nm. . . . . . . . . . . . . . . . . 70
4.13 (a) Captured image from one of the 21 experiments (plotted on a linear
scale); (b) Measured and (c) one-band Schrodinger simulations of one full
period around the second EDL plane at 1550 nm. . . . . . . . . . . . . . 72
4.14 Smoothing of square wave. . . . . . . . . . . . . . . . . . . . . . . . . . . 74
4.15 Deviated square-wave ac-field profiles for future EDL demonstrations. . . 75
5.1 Schematic of a five-ring SCISSOR. . . . . . . . . . . . . . . . . . . . . . 78
5.2 Unit cell of SCISSOR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.3 Nanowire loss versus etch depth. . . . . . . . . . . . . . . . . . . . . . . . 81
5.4 Fundamental mode of a 500 nm wide nanowire with a 2.0 µm etch depth. 82
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5.5 Mask design of the 11 µm and 21 µm nanowire directional couplers (wave-
guides are coloured white). . . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.6 Dispersion relation for the SCISSOR. Solid lines are the dispersion relation
of the two supermodes; the points are the two eigenfrequencies computed
from the restricted basis analysis. . . . . . . . . . . . . . . . . . . . . . . 84
5.7 Fundamental mode of a bent 500 nm wide nanowire with a 2.0 µm etch
depth and a 5.25 µm bend radius. . . . . . . . . . . . . . . . . . . . . . . 85
5.8 SEM closeup of one racetrack. . . . . . . . . . . . . . . . . . . . . . . . . 86
5.9 SEM of fabricated eight-ring SCISSOR. . . . . . . . . . . . . . . . . . . . 86
5.10 Effective coupling length of nano-DC in the SCISSOR. . . . . . . . . . . 87
5.11 Lowest order TM supermode of a nanowire directional coupler with 570 nm
wide nanowires, separated by 130 nm. . . . . . . . . . . . . . . . . . . . . 88
5.12 Normalized transmission, TA and TB, of the nanowire directional coupler
with 570 nm wide nanowires, separated by 130 nm. . . . . . . . . . . . . 88
5.13 Measured and simulated reflection spectra of the one-, two-, four- and
eight-ring SCISSOR devices. . . . . . . . . . . . . . . . . . . . . . . . . . 90
5.14 Group velocity dispersion versus nanowire width at 1550 nm, illustrating
region of anomalous dispersion for TE polarization. Solid lines are based
on simulations; circles are experimentally measured data points. . . . . . 92
6.1 Behaviour of a nonlinear directional coupler versus propagation distance. 96
6.2 NLDC switching curve for a half-beat length coupler. . . . . . . . . . . . 97
6.3 Schematic of the undelayed-default OCDL. . . . . . . . . . . . . . . . . . 98
6.4 Schematic of the delayed-default OCDL. . . . . . . . . . . . . . . . . . . 98
6.5 Lowest-order TE supermode of the NLDC. . . . . . . . . . . . . . . . . . 99
6.6 SEM top view of the OCDL’s nonlinear directional coupler. . . . . . . . . 100
6.7 SEM of the OCDL waveguide cross section. . . . . . . . . . . . . . . . . 101
xiv
6.8 Calculated switching curves of the fabricated NLDC and a half-beat length
NLDC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
6.9 The inevitable delay of the low intensity wings of a temporal pulse. . . . 102
6.10 Schematic of the OCDL experimental setup. . . . . . . . . . . . . . . . . 103
6.11 Low-power autocorrelation of the OPO pulse. . . . . . . . . . . . . . . . 104
6.12 Cross-correlation of device output and OPO idler. . . . . . . . . . . . . . 105
6.13 Cross-correlation of 1.5 ps OPO input pulse. . . . . . . . . . . . . . . . . 106
6.14 PD response of 1.5 ps OPO pulse with no device in the optical path. . . 106
6.15 Device output using the PD with a 1550 nm TE launch, 1.5 ps input pulse.108
6.16 OCDL simulations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
6.17 Normalized switching ratios from 1530 nm to 1610 nm. . . . . . . . . . . 109
6.18 Wavelength dependency of the 50% crossover intensity. . . . . . . . . . . 109
6.19 Spectral broadening. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110
6.20 Independent control pulse to reduce spectral broadening. . . . . . . . . . 111
6.21 Switching curves for low-power 150-ps signal pulse, and high-power 800-ps
control pulse. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
6.22 Schematic of the second-generation OCDL. . . . . . . . . . . . . . . . . . 113
A.1 AlGaAs crystal planes. Blue cube is the unit-cell. . . . . . . . . . . . . . 125
B.1 SEM of anisotropic etch in 24/18/24 AlGaAs. . . . . . . . . . . . . . . . 133
B.2 Determination of isotropic etch rate. . . . . . . . . . . . . . . . . . . . . 134
B.3 SEM of isotropic etch in 24/18/24 AlGaAs. . . . . . . . . . . . . . . . . . 135
B.4 SEM of isotropically etched waveguide bend. . . . . . . . . . . . . . . . . 135
B.5 Simulation results of lowest order TE supermode of an isotropically etched
directional coupler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
B.6 Isotropic etch mode around a 2 mm radius bend. . . . . . . . . . . . . . 136
B.7 Hard baked PR with no crosslinking. . . . . . . . . . . . . . . . . . . . . 137
xv
B.8 Hard baked PR with crosslinking. . . . . . . . . . . . . . . . . . . . . . . 137
xvi
List of Tables
1.1 Mapping between the Schrodinger equation and the electromagnetic wave
equation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2 Linear and nonlinear indices of AlGaAs, Si, SiO2 and PMMA polymer. . 28
3.1 AlGaAs Sellmeier Coefficients at T = 296 K . . . . . . . . . . . . . . . . 44
xvii
List of Abbreviations
2D Two Dimensional
3D Three Dimensional
ADL Approximate Dynamic Localization
AlGaAs Aluminum Gallium Arsenide
APF All Pass Filter
AWG Arrayed Waveguide Grating
BBO beta-BaB2O4
BER Bit Error Rate
BO Bloch Oscillation
BPM Beam Propagation Method
CCD Charged Coupled Device
CCOW Curved Coupled Optical Waveguides
CMT Coupled Mode Theory
CROW Coupled Resonator Optical Waveguides
CVWE Complex Vector Wave Equation
CW Continuous Wave
DC Directional Coupler
dB Decibels
DL Dynamic Localization
DSW Deviated Square Wave
DI De-ionized
EDL Exact Dynamic Localization
FDMA Finite Difference Modal Analysis
FDTD Finite Difference Time Domain
FSR Free Spectral Range
FWHM Full Width Half Maximum
HCME Hamiltonian Coupled Mode Equations
HCMT Hamiltonian Coupled Mode Theory
IR Infrared
xviii
ITRS International Technology Roadmap for Semiconductors
JDSU JDS Uniphase Corp.
Lc Half-beat Coupling Length
LHS Left Hand Side
MIT Massachusetts Institute of Technology
MPB Multiple Photonic Bands
nano-DC Nanowire Directional Coupler
NCVWE Nonlinear Complex Vector Wave Equation
NL Nonlinear
NLDC Nonlinear Directional Coupler
NNTB Nearest Neighbour Tight Binding
NRC National Research Council
OCDL Optically Controllable Delay Line
OPL Optical Path Length
OPO Optical Parametric Oscillator
OR Optical Rectification
OSlab Output Slab Waveguide
PBG Photonic Bandgap
PECVD Plasma Enhanced Chemical Vapour Deposition
PD Photodetector
PLC Planar Lightwave Circuit
PMMA Poly(methyl Methacrylate)
PR Photoresist
PWE Paraxial Wave Equation
RF Radio Frequency
RHS Right Hand Side
RIE Reactive Ion Etching
SCISSOR Side Coupled Integrated Spaced Sequence of Resonators
QBO Quasi-Bloch Oscillations
SEM Scanning Electron Microscope
SHG Second Harmonic Generation
TE Transverse Electric
TM Transverse Magnetic
TPA Two Photon Absorption
UV Ultraviolet
WDM Wavelength Division Multiplexing
xix
Chapter 1
Introduction
1.1 Planar Lightwave Circuits
Planar lightwave circuits (PLCs) are optical devices that control and route light-signals
along prescribed pathways through a microchip.
PLCs are ideally suited for optical signal generation and processing, which employ
optical waveguides to confine and steer light through on-chip processing elements such as
power splitters, interferometers, switches, and modulators [1, 2]. Because of the ability
to amalgamate these components onto a single substrate, PLC technology is also called
integrated optics. To contrast, traditional free-space optics routes and controls light using
bulk optical components such as lenses, gratings, crystals, prisms and mirrors [2, 3].
An example of a PLC device is shown in Fig. 1.1. This simplified PLC telecommuni-
cations transmitter chip modulates the light emitted from an external continuous-wave
(CW) laser and subsequently couples the signal into an optical fiber after a portion of
the light is tapped and redirected to a photodetector for power monitoring purposes.
This example highlights several important features of PLCs: light remains confined in
the waveguide as it propagates through the device, optical-processing components can
be directly fabricated on the chip, and hybridization with other devices is possible.
1
Chapter 1. Introduction 2
Laser
Photodetector
Optical Fiber
PLC
Substrate
Optical
Waveguide
On-chip
Modulator
Power
Tap
Figure 1.1: Schematic example of a PLC used for laser modulation.
1.1.1 Integrated versus Free-Space Optical Devices
In free-space optical systems, operations such as switching, attenuation, and diffraction
are typically performed in the focal and/or collimated planes, where the beam’s wavefront
is planar [2]. The region between these planes, where the propagating beam diverges or
converges, is seldom used for any optical signal processing. To contrast, in integrated-
optics, the light is literally confined into one (or several) modes of the waveguide. Each
mode, as it propagates through the waveguide, retains its shape, its size, and most
importantly, its planar wavefront; hence, the light is in a “processing-receptive” state
along its entire journey through the PLC.
Furthermore, PLCs offer a robust monolithic platform for optical devices because the
routing and functional components are integrated onto the same wafer. Typically PLC
devices require only temperature control and hermetic sealing. Free-space optical de-
vices, in contrast, suffer from the daunting task of assembling all pre-mounted bulk optic
components into a thermally stable and hermetically sealed optomechanical package.
Chapter 1. Introduction 3
8 Channel 100 GHz
Mux/Demux
Free-Space Optics
126 x 93 x 10 mm
40 Channel 100 GHz
Mux/Demux
PLC (AWG)
135 x 65 x 14 mm
(a) (b)
Spherical Mirror
LC/
MEMS
Grating
Front End
Figure 1.2: Comparison of two JDSU 100 GHz multiplexer/demultiplexer units: (a) builtusing PLCs, (b) built using free-space optics.
A comparison of two 100 GHz mutiplexer/demultiplexer units (JDS Uniphase) is
shown in Fig. 1.2, built using (a) arrayed waveguide grating (AWG) PLC technology,
and (b) laser-welded free-space optics. Beneath the picture of the PLC package in figure
(a) is a picture of the actual AWG PLC; beneath the free-space optical package in figure
(b) is a schematic of the bulk components and the beam-paths through the device. While
the dimensions of both packages are similar, the AWG PLC unit is capable of handling 40
WDM channels, while the laser-welded free-space unit is only capable of handling eight.
As illustrated by the above example, integrated optical devices provide a robust plat-
form upon which to perform signal processing, allowing for increased functional density,
reduced device sizes, and improved manufacturability.
Chapter 1. Introduction 4
1.1.2 PLC Applications
PLCs have already found use in many commercial applications, primarily driven by the
growth in the optical telecommunications industry. Although the telecommunications
“bubble-burst” has indeed impeded the deployment of photonics equipment throughout
the world, the need for improved system performance has not abated. In fact, internet
traffic grew 115% per year from 1998 to 2004, and has since grown 45% per year [4].
This growth has pressured telecommunications companies to transition from traditional
free-space optical approaches to integrated architectures, an identical move made decades
ago by the electronics industry: bulk electronic to integrated electronic circuits. These
integrated optic devices have been the focus of intense research and development, result-
ing in practical PLCs now deployed in microchip interconnects, bio and chemical sensing,
microspectroscopy, and medical instrumentation [1]. At the present time, there are many
companies commercially developing PLCs, including JDS Uniphase, Infinera, Gemfire,
IBM, and Intel.
1.1.3 Chapter Overview
In this dissertation, we explore PLC research challenges for spatial, spectral and temporal
optical signal processing. In Section 1.2, we investigate the analog between electromag-
netic and quantum theories to demonstrate the unique spatial optical effect called exact
dynamic localization; in Section 1.3, we look at Bragg-featured microring filters using
sub-micron waveguides; in Section 1.4, we study switchable optical delay lines for micro-
chip interconnects. A summary of these challenges (in Section 1.5) identifies a common
theme: the use of coupled waveguides in the aluminum gallium arsenide material sys-
tem. An overview of coupled waveguides is provided in Section 1.6, and a description of
the benefits of the aluminum gallium arsenide material system for PLCs is presented in
Section 1.7. The chapter concludes with the thesis organization in Section 1.8.
Chapter 1. Introduction 5
1.2 PLCs for Spatial Optical Signal Processing:
Exact Dynamic Localization
1.2.1 Mapping between Quantum and Optical Domains
Analysis of quantum mechanical phenomena is often performed using Schrodinger’s equa-
tion [5], with time as the independent variable. Analysis of electromagnetic wave (optical
beam) propagation through PLC waveguides is often performed using the linear wave
equation, derived from Maxwell’s equations [6], with distance as the independent vari-
able. A comparison of these two formulae reveal a remarkable mathematical correspon-
dence, highlighted in Table 1.1, where the respective parameters can be directly mapped
(via scaling factors) from the quantum domain to the optical domain [7]. This mapping
allows for many interesting quantum effects in periodic superlattices to be demonstrated
in the optical domain using PLCs. This is particularly important in the study of tempo-
rally dynamic quantum systems, which are very difficult to observe empirically because
of electron-electron and electron-phonon interactions (which tend to significantly dete-
riorate the coherence of electron wavepackets [7]), and the necessity of using indirect
measurement techniques (such as four-wave mixing [8, 9] or terahertz emission [10–12]).
Furthermore, the quantum-to-optical analogy gives us new glasses with which to look at
optical phenomena in PLCs.
Table 1.1: Mapping between the Schrodinger equation and the electromagnetic waveequation
Schrodinger’s Equation EM Wave Equation
time to propagation distancepotential well profile (U(u)) to refractive index profile (n(u))
applied electric field (E) to waveguide curvature (1/R)
Chapter 1. Introduction 6
1.2.2 Discrete Diffraction
To illustrate the mapping between the quantum and optical domains, let us consider
the case of an electron initially localized (at t = 0) in one of an array of coupled finite
quantum wells, as shown in Fig. 1.3(a) (where u is the lateral spatial dimension, and
U(u) is the periodic quantum potential). Over time, the wavepacket spreads to occupy
a spatially wider lateral extent. A schematic of the analogous optical system is shown in
Fig. 1.4. Light, originally localized in the central waveguide of a waveguide array, spreads
via a mechanism called discrete diffraction, over the propagation distance, v [13]. This is
illustrated in Fig. 1.3(b), where n(u) is the lateral periodic profile of the array’s material
index. The coupling of waveguides is described in more detail in Section 1.6.
t
Figure 1.3: Mapping between quantum and optical domains in the example of wavepacketspread and optical discrete diffraction.
Figure 1.4: Schematic of a straight waveguide array to demonstrate discrete diffraction.
Chapter 1. Introduction 7
1.2.3 Bloch Oscillations
A static dc electric field applied across the quantum array effectively tilts the band
profile of the potential, U(u), as shown in Fig. 1.5(a), consequently causing the beam
to periodically relocalize in time. This effect, called Bloch oscillations [12, 14], can be
observed in the optical domain by applying a curvature to the waveguides (Table 1.1) [15].
This waveguide curvature conformally maps a tilt in the effective index profile, n(u) [16],
resulting in the relocalizing behaviour (as a function of propagation distance, v) shown in
Fig. 1.5(b). A schematic of the constant-curvature waveguide array is shown in Fig. 1.6.
t
v
Figure 1.5: Mapping between quantum and optical domains in the example of Blochoscillations.
Figure 1.6: Schematic of a waveguide array with constant curvature to demonstrate Blochoscillations.
Chapter 1. Introduction 8
1.2.4 Dynamic Localization
With the application of a periodic alternating (ac) electric field to the quantum system,
the electron wavepacket can also experience periodic relocalizations, called dynamic lo-
calizations (DL) [17]. While Bloch oscillations in the quantum domain have been demon-
strated, quantum observations of DL are extremely challenging because the required ac
fields are very difficult to generate: sub-ps ac periods (i.e., shorter than the decoherence
time of the electron), field amplitudes on the order of 10 kV/cm, and discontinuities at
every sign change (e.g., a square wave field) [7, 18].
Figure 1.7: Schematic of a waveguide array with an ac curvature to demonstrate dynamiclocalization.
A schematic of the equivalent ac system in the optical domain is illustrated in Fig. 1.7,
where the ac electric field is mapped onto a periodic oscillation of the waveguide curvature
along the direction of propagation. While attempts to observe DL in the optical domain
have been recently reported by Longhi et al. in 2006 [19], continuous ac waveguide curva-
tures were used (corresponding to continuous ac fields in the quantum domain), with only
weak waveguide coupling. Dignam et al. have formally stated that in systems without
discontinuities, the beam relocalization formally breaks down after one period (which is
Chapter 1. Introduction 9
clearly seen in systems with strong coupling), thus claiming that the continuous-system
is therefore only an approximation to true, or exact, dynamic localization [18]. Further-
more, the wavelength dependence of Longhi’s device was only qualitatively characterized,
and the spatial mapping of the dynamic localization was not actually performed.
To date, no exact dynamic localization has been reported in any system.
1.2.5 The Exact Dynamic Localization Challenge
The above discussion in Section 1.2.4 addresses a specific technological challenge that is
formally stated here:
Can a PLC be designed to demonstrate the exact quantum dynamic local-
ization (EDL) effect over several relocalization periods? If so, the spatial
mapping of the beam evolution through the device must be performed, along
with the characterization of the wavelength dependence (with significantly
improved resolution compared with Longhi’s earlier work [19]).
1.2.6 The Exact Dynamic Localization Solution
EDL Requirements
To address the EDL challenge, (i.e., in order to ensure that exact dynamic localization
would be observed in the optical domain), the following PLC design requirements were
defined: discontinuous ac waveguide curvature profiles as defined by Dignam [18], a device
spanning multiple periods, and strong waveguide coupling.
EDL in PLCs could be demonstrated, in principle, in any optical material system,
including silicon, glass, polymer, or compound semiconductors.
Chapter 1. Introduction 10
EDL Description
The first empirical performance of EDL in any system (e.g., quantum, atomic, or optical)
is reported. The PLC demonstration employed a discontinuous “square-wave” field to
describe the waveguide curvature, and a strongly coupled waveguide design using an
aluminum gallium arsenide PLC wafer. Using newly developed observation techniques,
the devices’ spatial and spectral dynamics were observed with a fine resolution of 250 µm
and 10 nm, respectively, over four full EDL periods.
The devices demonstrated excellent EDL behaviour over the four periods, and in very
close agreement with design targets and simulations. The EDL design details and device
characterization are presented in Chapter 4.
This work was recently published in Optics Express in 2007 [20]1, and presented at
QELS’07 in Baltimore, MD [21].
1.3 PLCs for Spectral Optical Signal Processing:
SCISSORs
1.3.1 Microresonators
Telecommunication optical signal processing functions, such as filtering, switching, wave-
length conversion, and add-dropping were originally performed using free-space optics or
opto-electro-opto conversions [22–25]. These same functions have been recently demon-
strated in all-optical PLCs using four-port microring resonators, also called microres-
onators [26–29], which are simply waveguides patterned into a loop to provide coherent
feedback, evanescently coupled to two straight waveguides, as illustrated in Fig. 1.8.
Akin to the integrated electronic transistor, microresonators have garnered much
recent attention within the past decade because of their compact size (on the order
1Reprinted with permission from the Optical Society of America. Copyright c© 2007.
Chapter 1. Introduction 11
Figure 1.8: PLC Microresonator.
of tens of microns), their ease of integration with other on-chip components [30–32],
and their cascadability in both parallel and serial configurations. Schematic layouts of
both the parallel configuration (also known as “side coupled integrated spaced sequence
of resonators”, or SCISSORs), and the serial configuration (also known as “coupled
resonator optical waveguides”, or CROWs), are illustrated in Fig. 1.9.
Through
port
Drop portIn port
Through
port
Drop
port
In port
Figure 1.9: Cascaded microresonators: (a) five-ring parallel configuration (SCISSOR),(b) two-ring serial configuration (CROW).
Chapter 1. Introduction 12
1.3.2 Serial CROWs
Serial (CROW) microresonator devices are ideal for high-order filtering, and have been
the focus of intense study over the past decade [32–42]. Because of the resonant prop-
erties of the microresonator, only the off -resonant wavelengths are transmitted via the
through port, while the on-resonant wavelengths are emitted via the drop port. The filter
shape of the CROW device improves as a function of the number of rings, as illustrated
in Fig. 1.10 [41]. As such, the device possesses a set of band-gaps at the resonant wave-
lengths, defined by the refractive index, the waveguide geometry, and the path-length of
each ring resonator.
Figure 1.10: Measured responses for first-, third-, and 11th-order CROW filters. The re-sponses have been normalized to their 3-dB bandwidths. The dashed curve is the theoreticalfit to the 11th-order filter [41].
1.3.3 Parallel SCISSORs
When configured in a parallel (SCISSOR) configuration, the device’s filter spectrum is
affected by both the ring geometry as well as the ring-to-ring spacing. As in the CROW
devices described above, a set of resonator band-gaps created by the ring geometry is
created. With a large number of rings, a second class of band-gaps is evoked in the
Chapter 1. Introduction 13
1555 1560 1565 1570 1575 1580 1585 15900
1
Wavelength (nm)
Norm
aliz
ed D
rop P
ort
Pow
er
.
4 ring SCISSOR1 ring SCISSOR
Formation
of the Bragg
features
Figure 1.11: Normalized power spectra at the drop-port for 1 and 4 ring SCISSOR.
SCISSOR spectrum: the Bragg gaps, which are created by the coherent backscattering
from each ring to the drop port. Fig. 1.11 shows the resonator peaks that are observed in
the drop port spectrum (see Fig. 1.9) of a lossless 1-ring SCISSOR, and the formation of
the Bragg features in a 4-ring SCISSOR. With a sufficient number of rings, the intensity
of the Bragg and resonator peaks would be identical.
Careful design of the interplay between the two classes of band-gap resonances would
be extremely useful for optical dispersion engineering (such as dispersion compensators
and slow-light devices) [43,44]. Furthermore, if fabricated in materials with high optical
nonlinearity, these devices could be used to demonstrate optical switching, limiting, tem-
poral solitons, gap solitons, pulse compression [43,45,46] and optical logic [47].
While a 36-period SCISSOR in an effectively linear polymer has been recently re-
ported [48], SCISSORs in highly nonlinear III-V semiconductors have been limited to a
maximum of only three rings [26, 27] due to extremely tight fabrication tolerances (see
Section 1.4).
Chapter 1. Introduction 14
1.3.4 The SCISSOR Challenge
Can a SCISSOR PLC device with more than three rings be fabricated suc-
cessfully in a highly nonlinear III-V semiconductor? If so, how many rings are
necessary to empirically demonstrate a fully formed Bragg gap (i.e., where
the Bragg and resonator features at the drop port are of equal intensity)?
1.3.5 The SCISSOR Solution
SCISSOR Device Requirements
The multi-ring SCISSOR challenge is primarily a design-and-fabrication effort. High
index-contrast waveguides with sub-micron widths (also known as nanowires) are required
to mitigate bend losses. Substrate leakage losses should be mitigated by an adequately
deep etch. Non-circular rings (e.g., racetracks) could be used to improve the control of
coupling into each ring from the straight bus waveguide [28]. The free-spectral range of
the interlaced Bragg and resonator spectral features should be on the order of tens of nm
to cover as much of the telecommunications band as possible.
Of the many material systems available, aluminum gallium arsenide exhibits both
excellent optical and mechanical properties, well suited for this project. An overview of
these properties is presented in Section 1.7.
SCISSOR Device Description
The nanowire waveguides were designed and fabricated into a set of directional couplers
(i.e., two coupled waveguides) in aluminum gallium arsenide, performing in excellent
agreement with simulations. The SCISSOR devices were designed using one, two, four,
and eight racetrack-shaped ring resonators. The fabricated devices were subsequently
characterized to reveal that eight rings is sufficient for the formation of interlaced Bragg
and resonator peaks in the reflection spectrum of commensurate intensity. The design
Chapter 1. Introduction 15
details and characterization of the nanowire directional couplers and SCISSOR devices
are presented in Chapter 5.
This work was presented at CLEO’06 in Long Beach, CA [49].
1.4 PLCs for Temporal Optical Signal Processing:
Optical Delay Lines
We have seen that PLCs are useful for optical signal processing in both the spatial domain
(Section 1.2), and the frequency domain (Section 1.3). Here, we discuss signal processing
in the temporal domain.
1.4.1 PLC Microchip Interconnects
Computing systems are placing increasingly heavier demands on their supporting technol-
ogy. By 2013, on-chip data rates are projected to reach between 40 Gbit/s to 1 Tbit/s [50,
51]. The International Technology Roadmap for Semiconductors (ITRS) [52] states,
“For the long term, material innovation with traditional scaling will no longer
satisfy performance requirements. Interconnect innovation with optical, ra-
dio frequency, or vertical integration combined with accelerated efforts in
design and packaging will deliver the solution.”
While free-space optical interconnects can address the ∼ 1 to 10 cm distances required
for board-to-board communications [3], integrated-optic PLCs are well suited for inter-
and intra-chip communications. The use of light instead of electrons for data transmission
is anticipated to significantly improve computer processing performance due to its larger
bandwidth, increased transmission speed, decreased power consumption, and immunity
to electromagnetic noise and temperature changes [53].
Chapter 1. Introduction 16
1.4.2 Optical Delays
In order to ensure that the optical data streams are properly synchronized, PLC microchip
interconnects must provide multi-bit-switchable optical delays greater than 100 bits [51].
Furthermore, to compensate timing jitter (within 3% of a clock cycle [52]), PLCs must
also provide continuously tunable delays between 0 and 1 bit.
To address pulse timing issues, optical group velocity reduction experiments in atomic
media and fibers have reported large delays on the order of tens of ns [50,51,54–57]. These
systems, however, (1) are physically too large for microchip communciations, (2) provide
delays on the order of approximately one bit and hence are not useful for switchable
buffering applications, and (3) have spectral bandwidths orders of magnitude too small
for even 40 Gbit/s data rates.
An example of a sub-bit delay using the stimulated Brillouin scattering process in
optical fiber with a 63 ns long input pulse is shown in Fig. 1.12 [56]. As illustrated, small
bit-delays with long pulses (i.e., narrow bandwidth) in a large experimental setup do not
meet the requirements for microchip interconnects.
1.4.3 PLC optical delays: Resonators versus Differing-Length
Waveguides
PLC technology is a natural choice for microchip interconnects. Two methods of on-chip
delays have been proposed: exploiting group-delay effects in microresonators, and routing
the data along waveguides of differing length. Resonant components on planar optical
circuits (e.g., microrings (see Section 1.3), microdisks, and photonic crystal microcavities)
are particularly interesting for optical pulse delays, and have been the focus of intense
study over the past decade [31, 33, 35–37, 40, 41, 49, 58–69]. Xia, in 2006, reported an
excellent comparison of three on-chip optical delay devices: an all pass filter (APF)
with 36 ring resonators (Fig. 1.13(a)), a “coupled resonator optical waveguide” (CROW)
Chapter 1. Introduction 17
Figure 1.12: Sub-bit delay using the stimulated Brillouin scattering process: (a) experi-mental setup; (b) measured delay [56].
configuration with 100 ring resonators (Fig. 1.13(b)), and a simple non-resonant 4 cm
waveguide delay (not shown) [58]. The sub-bit delays achieved from each configuration
for a 1 Gbit/s (i.e., 1 ns) signal are shown in Fig. 1.13(c). The bit error rate (BER) of
each device was measured as a function of data rate, revealing that the CROW device
performed most poorly, while the non-resonant 4 cm waveguide allowed for the highest
data rates below the BER threshold of 10−9 (Fig. 1.13(d)). The poor performance of the
CROW and APF configurations was attributed to attenuation in the rings, producing
device losses over 22 dB, while the 4 cm waveguide approach boasted a device loss of
only 7 dB.
While the resonator-based PLC devices can be made remarkably small (less than
Chapter 1. Introduction 18
CROW
Bent wg
APF
Figure 1.13: PLCs for optical delays: a comparison: (a) 56-ring all pass filter (APF)configuration; (b) 100-ring CROW configuration; (c) Time resolved measured delays com-paring (i) CROW, (ii) 4 cm long waveguide, and (iii) APF configurations; (d) Bit error ratecomparison [58].
∼ 0.1 mm2), their losses limit practical delays to less than 100 bits [51]. Thus, until
microresonator device losses can be reduced significantly, the non-resonator waveguide
approach promises to offer the best solution for large delays (> 100 bits) in interconnects
operating at the 40 Gbit/s to 1 Tbit/s data rates.
1.4.4 Optical Delay Switching
Optical PLCs require the ability to activate the delay only if desired (i.e., delay switch-
ability) with switching times on the order of a bit-length (to minimize data loss and
latency). In microresonator based delays, switching must be accomplished either by the
non-trivial task of shifting the signal wavelength, or by shifting the material index via
thermo-optical, electro-optical or nonlinear effects.
Recently, Rasras et al. reported a PLC demonstration incorporating both tunable
delays (using ring resonators with a 1 mm radius of curvature) and variable switch-
Chapter 1. Introduction 19
able delays (using varying-length curved waveguide delay lines and thermo-optic Mach-
Zehnder switches) (see Fig. 1.14) [70]. The device was fabricated in low index, medium
index-contrast waveguides on a relatively large 20 mm x 60 mm chip. While the device
was capable of performing tunable delays between 0 and 320 ps and switchable delays
up to 2.56 ns, the 1 mm ring radii actually places an upper -limit of only 10 Gbit/s on
the data rate (i.e., a lower limit of 100 ps on the pulse length). The device, therefore,
would be capable of delaying, at most, only ∼ 29 bits. The device’s switching speed was
not reported, but thermal switching is a relatively slow process. For example, a recently
reported thermo-optic switch was limited to switching times of only ∼ 10 ms [71].
Figure 1.14: Switchable and tunable PLC delay schematic (20 mm x 60 mm chip) usingthermo-optic switches and large ring resonators [70].
1.4.5 The Optical Delay Line Challenge
Can an PLC switchable optical delay line be fabricated with the following
specifications: greater than 100-bit delay, capable of handling pulse widths
on the order of 1 ps, a chip size of ∼ 10 mm × 10 mm (i.e. the size of
a standard microelectronics chip), relatively low loss (i.e., much less than
20 dB), and a switching time on the order of 1 ps or less?
Chapter 1. Introduction 20
1.4.6 The Optical Delay Line Solution
Optical Delay Line Device Requirements
Our discussion in Section 1.4.3 stated that the differing-length waveguide approach is,
at present, the best option for low loss optical delays [58]. Ultrafast, low-loss switching
is possible using a material with a strong Kerr nonlinearity [30, 72], while a high-index
material would minimize the size of the PLC [2]; thus, aluminum gallium arsenide is an
ideal material system for this device. This device should easily fit on a 10× 10 mm chip
providing > 100-bit delays for ∼ 1 ps pulses.
The Kerr-based ultrafast switch itself could be implemented using an intensity-dependent
nonlinear directional coupler [73].
Optical Delay Line Device Description
An all-optically self-switchable delay line was built in aluminum gallium arsenide on a
6 mm x 8 mm chip. The device boasted a delay of 126 bits (i.e., a 189-ps delay using
1.5 ps pulses) and losses of only 6.2 dB in the delayed state. The design details and
device characterization are presented in Chapter 6.
This work was presented at OFC’07 in Anaheim CA [74], published in Applied Physics
Letters in 2007 [75]2, and recently highlighted in Nature Photonics in May, 2007 [76].
1.5 The Challenges and Solutions: Discussion
Sections 1.2, 1.3, and 1.4 identified three research challenges in PLC technology for spa-
tial, spectral and temporal optical signal processing, namely exact dynamic localization,
the multi-ring SCISSOR, and the ultrafast, switchable optical delay line, respectively.
The three proposed solutions share a common theme: the use of coupled waveguides in
2Reprinted with permission from the American Institute of Physics. Copyright c© 2007.
Chapter 1. Introduction 21
the aluminum gallium arsenide material system.
In the following two sections, we review the concepts behind light coupling in wave-
guides, and explore why aluminum gallium arsenide is an excellent material for PLC
design.
1.6 Light Coupling in Waveguides
We begin our discussion of light coupling in waveguides by looking at a two-waveguide
coupled system, otherwise known as a directional coupler (DC) (see Fig. 1.15). DCs are
ubiquitous devices in which light, initially confined in one waveguide, is transferred into
a second adjacent waveguide. Interestingly, and perhaps non-intuitively, although the
second waveguide does not actually touch the first, 100% power transfer is achievable.
Because of their simplicity and elegance, DCs support a host of higher level optical
functions, such as Mach Zehnder interferometers [77], power distribution [78], power mon-
itoring [79], wavelength division multiplexing [80], filtering [81], and all-optical switch-
ing [73]. In the following subsections, we discuss light confinement in a single waveguide,
the coupling of light from one waveguide to another, coupling in a multi-waveguide sys-
tem, and how, in nonlinear materials, this simple device operates as an all-optical switch.
Figure 1.15: A directional coupler.
Chapter 1. Introduction 22
1.6.1 Light Confinement in a Single Waveguide
We have alluded to the confinement of light in the earlier sections of this chapter and
now investigate this fundamental property of waveguides further.
Fig. 1.16 shows a schematic of a single waveguide. The vertical layer structure (defined
by the layer thicknesses and refractive indices) provides the vertical y-confinement of the
light within the waveguide (in the core layer, surrounded above and below by the cladding
layers), while the ridge width, w, and etch depth, h, provide the horizontal x-confinement.
This two-dimensional confinement can be formally described by Maxwell’s equations [6]
to determine the transverse spatial distributions, or modes, of the light confined within
the waveguide. The two lowest order modes of our waveguide example are shown in
Fig. 1.17, each defined by a unique effective index, n, which is, in effect, a weighted
average of the material indices “seen” by the mode. The number of modes supported by
a waveguide is determined primarily by the ridge width, w, which is typically chosen to
support only the fundamental mode, producing a single-mode waveguide. If there are no
external perturbations, each mode retains its shape and size as it propagates along the
chip.
Lowercladding layer
Core layer
Upper
Cladding layer
Figure 1.16: Waveguide schematic.
Chapter 1. Introduction 23
21
Figure 1.17: Intensity modal confinement within the waveguide: (a) fundamental mode,(b) first higher-order mode.
1.6.2 Light Coupling in a Two-Waveguide System
Consider light initially confined in a solitary, single-mode waveguide, A. The presence
of a second waveguide, B, in close proximity to A (as illustrated in Fig. 1.15), actually
perturbs A’s supported single mode. The effect of this perturbation is a transfer, or
coupling, of energy from waveguide A to waveguide B, as a function of propagation
distance (see Fig. 1.18). If the waveguides are identical, 100% of the initial power in A
will be transferred to B at odd-multiples of the half-beat length, Lc.
0 Lc 2Lc 3Lc
0
0.2
0.4
0.6
0.8
1
z
No
rma
lize
d P
ow
er i
n
Wa
veg
uid
e A
All power
in A
All power
in B
Figure 1.18: Power transfer as a function of propagation distance in a directional coupler.
Chapter 1. Introduction 24
A nanowire DC (nano-DC) was tested at varying lengths for use in the SCISSOR
device. The performance of the nano-DC as a function of propagation distance is shown
in Fig. 1.19. A sub-half-beat length nano-DC was used for the SCISSORs to transfer
28% of the on-resonant light from the straight waveguides to each ring.
Directional Coupler Length ( m)
Norm
aliz
ed T
ransm
issio
n
0 10 20 30 40 50 600.0
0.2
0.4
0.6
0.8
1.0
Channel A (Experimental)
Channel A (Fit)
Channel B (Experimental)
Channel B (Fit)
Figure 1.19: Normalized transmission of the fabricated nanowire directional coupler usedin the SCISSOR experiments.
The coupling between waveguides can be formally described using several different
methods. In Chapter 2, we investigate a classical approach based on Maxwell’s equations
(the supermode ∆k method), and a Hamiltonian formulation of coupled mode theory.
Chapter 1. Introduction 25
1.6.3 Light Coupling in a Multi-Waveguide System
The behaviour of light propagating through a coupled multi-waveguide array (see Fig. 1.4)
is an intuitive extension of the description provided above for the two-waveguide system:
light, initially confined in a given waveguide is allowed couple to its immediate neighbours.
These neighbouring waveguides then couple light to their neighbours, etc. This cascading
coupling effect through the array is called discrete diffraction (see Section 1.2.2) [13].
In preparation for the optical EDL demonstration, the discrete diffraction of a beam
through a linear waveguide array was tested. The beam, initially confined in waveguide
position 0, propagated a total distance of 5.4 mm; the resulting beam spread (measured
and simulation) is shown in Fig. 1.20. The EDL demonstration imposes an ac curvature
onto the waveguide array as a function of propagation distance, offering an added degree
of control on the beam evolution.
Figure 1.20: Discrete diffraction at the output of a linear waveguide array: measured(solid line) and simulated (dotted line).
1.6.4 The Nonlinear Directional Coupler Switch
When fabricated in a nonlinear medium, a directional coupler exhibits power-dependent
switching characteristics [73, 82–88]. Beginning with a half-beat length coupler (i.e.
whose length is precisely Lc), low-intensity light initially coupled into waveguide A will
be completely transferred to waveguide B. As the intensity of the light is increased,
Chapter 1. Introduction 26
an intensity-dependent change of the refractive index is induced, which dephases the
coherent coupling of light into B. With sufficient input intensity, the light coupling into
B can be completely eliminated, such that all the light remains in A. In Fig. 1.21, we see
the operation of the half-beat length nonlinear directional coupler (NLDC) at both low
and high intensities, illustrating its ability to perform as an all-optical switch at L = Lc.
An NLDC switch was used to select either the delayed versus the undelayed path through
the optical delay line device.
0
0.2
0.4
0.6
0.8
1
0 Lc
z
No
rma
lize
d P
ow
er i
n
Wa
veg
uid
e A
Lc / 2
High intensity
Low intensity
All power
in A
All power
in B
Figure 1.21: Nonlinear switching through a directional coupler at low and high intensities.
1.7 Aluminum Gallium Arsenide
PLCs can be manufactured in any optically transparent material: amorphous materials
such as polymer [36], and glass [89], as well as crystalline semiconductors such as sili-
con [58], silicon nitride [90], and indium phosphide [91]. While all PLCs are defined by
the vertical wafer structure and the waveguide geometry (see Section 1.6.1), most mate-
rial systems restrict the designer to a fixed refractive index. If the material’s refractive
index could be varied, the PLC designer would gain an added degree of creative freedom.
Chapter 1. Introduction 27
Aluminum gallium arsenide, AlxGa1−xAs, is a compound III-V cubic zinc-blende crys-
talline semiconductor material system that allows for the replacement of gallium atoms
with aluminum atoms, at an aluminum concentration of x, where 0 ≤ x ≤ 1 [92]. This
atomic replacement has two outstanding features making AlGaAs an ideal PLC mate-
rial: (1) the extremely large dependence of the refractive index with aluminum concen-
tration (∆n = 0.48 at the telecommunications wavelength of 1550 nm [93]) allows for
the selectivity of the wafer layer indices; and (2) over its entire aluminum concentration
range, AlGaAs remains lattice-matched (i.e. the crystalline lattice constant varies only
0.15% [92]), making AlGaAs particularly robust to delamination and cracking. Hence,
PLCs with layers exhibiting a large aluminum contrast can support nearly arbitrary
mode sizes, allowing, for example, improved coupling efficiency with free-space beams or
optical fiber [94].
The optical path length (OPL) traversed by light through a PLC is defined by L×n,
where L is the device length and n is the effective refractive index. For a given OPL,
PLC devices with higher refractive indices require shorter physical lengths. Therefore,
AlGaAs, with its rather large linear index (which can be chosen between 2.89 and 3.37),
is ideal for the design of small PLCs. A comparison of the linear refractive index of
AlGaAs with other commonly used materials (viz. silicon (Si), silica (SiO2), and doped
PMMA polymer) is presented in the second column of Table 1.2.
Furthermore, AlGaAs possesses high optical nonlinearity, which is particularly useful
for active PLCs (such as switches and modulators) [30, 95]. The Kerr nonlinearity, n2
(which is formally introduced in Appendix A), of AlGaAs, Si, SiO2 and doped-PMMA
are compared in the third column of Table 1.2, where we see that AlGaAs outperforms
its competitors by at least a factor of 3.
In this section, we have seen the beneficial properties of aluminum gallium arsenide for
PLC design. Its high linear refractive index minimizes chip sizes; its lattice-matched crys-
talline structure allows for the uninhibited selection of aluminum concentration, (which
Chapter 1. Introduction 28
Table 1.2: Linear and nonlinear indices of AlGaAs [93,96], Si [97], SiO2 [98] and PMMApolymer [99]
Material n0 n2 (m2/W)
AlGaAs 2.89 to 3.37 1.5× 10−17
Si 3.46 4.5× 10−18
SiO2 1.46 3× 10−20
doped PMMA (polymer) 1.42 3× 10−18
varies its material index by an astonishing ∆n = 0.48); and its large nonlinear refractive
index permits all-optical devices to be built with significantly lower operating thresholds
compared with other commonly used PLC materials.
1.8 Summary and Thesis Organization
In this chapter, we have explored planar lightwave circuitry from a bird’s-eye view, iden-
tifying a PLC research challenge in spatial, spectral and temporal optical signal process-
ing. A solution for each challenge was introduced by a requirements statement and an
overview of the proposed device, each using coupled waveguides in the AlGaAs material
system to achieve the desired functionality.
The thesis is organized as follows. Chapter 2 introduces the classical formulation of
light confinement in waveguides, followed by two studies on the coupling between the two
waveguides of a directional coupler: the supermode ∆k approach, and the Hamiltonian
formulation of the coupled mode equations. Chapter 3 presents some of the useful optical
parameters of the AlGaAs material system, including a description of the two wafer
designs used in this dissertation. Following these preliminary chapters, the solution to
the three individual challenges are presented in detail: the exact dynamic localization
demonstration in Chapter 4, the SCISSOR device in Chapter 5, and the optical delay
line in Chapter 6. Chapter 7 concludes the thesis.
Chapter 2
Light Coupling in Waveguides
In this chapter, we study the central theme embodied in the scope of this dissertation:
light coupling in a two-waveguide system, otherwise known as the directional coupler
(Fig. 2.1). We study this phenomenon using two different methods: by computing the
supermodes of the two-waveguide system in Section 2.2, and by following a Hamiltonian
formulation of coupled mode theory as laid out by Chak et al. [100] in Section 2.3.
The analysis commences in Section 2.1 with the introduction of Maxwell’s equations to
describe the so-called master equation for the modes in an arbitrary waveguide system.
Figure 2.1: Coupled Waveguides.
29
Chapter 2. Light Coupling in Waveguides 30
2.1 Maxwell’s Equations
The governing equations describing electromagnetic waves were formulated by Maxwell
in 1865 [6]. The four equations in differential form (in SI units) are
∇× ~E = −∂ ~B
∂t(2.1)
∇× ~H = ~J +∂ ~D
∂t(2.2)
∇ · ~B = 0 (2.3)
∇ · ~D = ρ, (2.4)
where ~E is the electric field vector (in V/m), ~D is the electric displacement flux density
(in C/m2), ~H is the magnetic field vector (in A/m), ~B is the magnetic field density (in
W/m2), ~J is the electric current density (in A/m2), and ρ is the electric charge density
(in C/m3). In our development (following Chak et al. [100]), we consider ~D and ~B as
the fundamental fields, and consider ~E and ~H as derived fields.
The flux densities, ~D and ~B, for nonmagnetic media, are related to their respective
field quantities by
~D = εo~E + ~P (2.5)
~B = µo~H (2.6)
where εo, µo, and ~P are the free-space electric permittivity (8.8542×10−12 F/m), the free-
space magnetic permeability (4π × 10−7 H/m), and the polarization density (in C/m2)
of the medium, respectively. The speed of electromagnetic propagation in a vacuum is
defined as c, which, following Maxwell’s equations, is equal to the quantity 1/√
µoεo. The
five fields described above are functions of both space, ~r, and time, t.
The polarization density, ~P , is often expressed as a function of the electric field, ~E
Chapter 2. Light Coupling in Waveguides 31
(see Appendix A). However, in this development, we define ~P in terms of ~D, which, for
an inhomogeneous, linear, isotropic medium, can be written as
P i(~r, t) = δij
(1− 1
n2(~r)
)Dj(~r, t) (2.7)
where the superscripts represent the Cartesian components which are to be summed over
if repeated, δij is the Kronecker delta function, and real[n(~r)] describes the local index
of refraction. While this has been written for the linear case, an extension to a more
general equation including nonlinearities can be constructed [100].
Manipulating Eqs. (2.1) through (2.7) for an electromagnetic field in a dielectric
medium (where both ~J = 0 and ρ = 0) in a z-invariant (i.e., z-homogeneous) system, we
derive the following master equation describing the eigenmode, ~Bmk(~r):
∇×[∇× ~Bmk(~r)
n2(~r)
]= ∇×
[∇× ~Bmk(~r)
n2(x, y)
]=
(ωmk
c
)2~Bmk(~r). (2.8)
where the subscript m refers to the eigenmode index, n2(~r) = n2(x, y), and k is the wave
number at which the equation is evaluated. The frequency of each eigenmode, ωmk, in
Eq. (2.8), is related to the wave number via
ωmk =c k
nm(k)(2.9)
where nm(k) is the effective index of the mth eigenmode, which describes its phase ve-
locity, c/nm(k), through the waveguide. From the master equation, we can evaluate the
corresponding electric displacement eigenmode field of the waveguide system, ~Dmk(~r),
using Eq. (2.2):
~Dmk(~r) = i · ∇ × ~Bmk(~r)
µoωmk
. (2.10)
Any arbitrary field supported in the waveguide system can be expanded in terms of its
Chapter 2. Light Coupling in Waveguides 32
eigenmodes via
~B(~r, t) =∑m
∫ √~ωmk
2amk
~Bmk(~r)dk + c.c. (2.11)
(and similar for ~D), where amk are the eigenmode amplitudes, and c.c. is the complex
conjugate.
We can describe the eigenmode, ~Bmk(~r), to take the form
~Bmk(~r) =
√1
2π~bmk(x, y)eikz (2.12)
where the spatial mode, ~bmk(x, y), is invariant in z in our z-homogeneous structure, and
bounded in the x and y directions. Identical relations hold for ~Dmk(~r). While this
formulation of the eigenmode is sufficient for our simple z-homogeneous structures, for
periodic photonic crystal waveguides, the reader is asked to follow the development in
Chak et al. [100].
The eigenmode functions satisfy the normalization conditions
∫ ~B∗m′k′(~r) · ~Bmk(~r)
µo
d~r = δmm′δ(k − k′) (2.13)
∫ ~D∗m′k′(~r) · ~Dmk(~r)
εon2(x, y)d~r = δmm′
δ(k − k′) (2.14)
where the integrals are evaluated over all space, and the superscript ∗ refers to the
complex conjugate. From these, the spatial modes, ~bmk(x, y) and ~dmk(x, y), satisfy the
normalization conditions
∫ ~b∗m′k(x, y) ·~bmk(x, y)
µo
dxdy = δmm′(2.15)
∫ ~d∗m′k(x, y) · ~dmk(x, y)
εon2(x, y)dxdy = δmm′
(2.16)
where the integral is evaluated over the entire x-y plane.
Chapter 2. Light Coupling in Waveguides 33
Various numerical methods can be used to compute the spatial modes of the wave-
guide system, including finite difference modal analysis (FDMA), finite element, integral-
equation, and series expansion methods [101]. In the work presented in this thesis, the
modes are computed with FDMA using the commercially available program, “MODE
Solutions” (Lumerical Inc.), which is based on the finite-difference algorithm presented
by Zhu, et al. [102]. An example single-mode waveguide and its only supported (fun-
damental) spatial mode computed using MODE Solutions are illustrated in Figs. 2.2(a)
and (b), respectively.
1
x
y
0
0.4
0.8
0.2
0.6
1
Figure 2.2: (a) Single-mode waveguide, and (b) its fundamental spatial mode computedusing FDMA (“MODE Solutions”).
2.2 Supermodes of the Directional Coupler
By defining the index profile of the two-waveguide system (illustrated in Fig 2.3) to be
n2(x, y), the spatial modal solutions, or supermodes, can be described using the master
equation, Eq. (2.8), and solved using FDMA. These supermodes take the form of symmet-
ric (even) and anti-symmetric (odd) functions with different effective indices, neven and
nodd. The two lowest order TE polarized supermodes (i.e., oriented in the x-direction)
of the directional coupler used in the optically controllable delay line (see Chapter 6 for
the design details) are shown in Fig. 2.4.
Chapter 2. Light Coupling in Waveguides 34
x
y
Figure 2.3: Two-waveguide system.
Because the two supermodes propagate through the DC with different phase veloc-
ities (defined by c/n) at a given frequency, ω, the interfering supermodes beat as they
propagate along z. The half-beat length, Lc, defines the propagation length where the
two supermodes are 180o out of phase. Lc can be computed directly from the difference
between the effective indices of the two supermodes:
∆φ = π = Lc∆k, (2.17)
xneven
nodd
x
Figure 2.4: Two lowest-order supermodes of a two-waveguide system.
Chapter 2. Light Coupling in Waveguides 35
where ∆k = 2π|neven − nodd|/λo. Therefore,
Lc =π
∆k. (2.18)
This direct approach in determining the half-beat length is henceforth referred to as the
“supermode ∆k” approach.
The dispersion relations for the two lowest-order supermodes of the OCDL directional
couplers (see Chapter 6) are plotted in Fig. 2.5, where the ∆k is identified for a particular
frequency, ωref/(2πc) = 6.4516× 105.
1.3206 1.3206 1.3206 1.3207 1.3207 1.3207 1.3207
x 107
6.4508
6.451
6.4512
6.4514
6.4516
6.4518
6.452
6.4522
x 105
Wave number k [m-1
]
Norm
alize
d F
req
uen
cy
/(
2
c)
[m
-1]
ref /(2 c)
k
Figure 2.5: Dispersion relation for the two lowest-order supermodes of the DC used inthe OCDL of Chapter 6.
Chapter 2. Light Coupling in Waveguides 36
2.3 Hamiltonian Formulation of Coupled Mode
Equations
In this section, an overview of the Hamiltonian formulation of the coupled mode equations
(HCME) is presented, following Chak et al. [100]. The HCME describe how the complex
amplitude of a mode in a single waveguide is perturbed by the presence of a neigh-
bouring waveguide. The reasons for pursuing this approach are numerous: a quantum
Hamiltonian approach is considered more fundamental than a classical approach (e.g.,
Maxwellian); the classical CME results can be derived from the HCME; the HCME can
be easily generalized to treat nonlinear problems (e.g., second harmonic generation [103]);
and the HCME can handle purely quantum processes (e.g., spontaneous parametric down
conversion [103]).
2.3.1 Eigenmodes in a Restricted Basis
Before commencing the coupled mode analysis, we need to establish that the modes of a
two-waveguide system can be well described by a restricted basis of only the modes in the
individual parent waveguides (either waveguide A or B in Fig. 2.1). In this development,
we assume that the two parent waveguides each only support one (fundamental) parent
mode at each value of k. Each parent mode satisfies the master equation of Eq. (2.8):
∇×[∇× ~B
(j)k (~r)
[n(j)(x, y)]2
]=
(ω
(j)k
c
)2
~B(j)k (~r) (2.19)
where n(j)(x, y) describes the refractive index profile of the jth parent waveguide. The
corresponding electric displacement field, from Eq. (2.10), is
~D(j)k (~r) = i · ∇ × ~B
(j)k (~r)
µoω(j)k
. (2.20)
Chapter 2. Light Coupling in Waveguides 37
We can normalize the individual parent modes following Eqs. (2.13) and (2.14) as
∫ ~B∗(j)k′ (~r) · ~B
(j)k (~r)
µo
d~r = δ(k − k′) (2.21)
∫ ~D∗(j)k′ (~r) · ~D
(j)k (~r)
εo[n(j)(x, y)]2d~r = δ(k − k′). (2.22)
The spatial parent modes, ~d(j)k (x, y) and ~b
(j)k (x, y) (introduced as in Eq. (2.12)) are nor-
malized following Eqs. (2.15) and (2.16) to be
∫ ~b∗(j)k (x, y) ·~b(j)
k (x, y)
µo
dxdy = 1 (2.23)
∫ ~d∗(j)k (x, y) · ~d
(j)k (x, y)
εo[n(j)(x, y)]2dxdy = 1. (2.24)
The two-waveguide directional coupler is described by its master equation
∇×[∇× ~Bk(~r)
n2(x, y)
]=
(ωk
c
)2~Bk(~r) (2.25)
where n(x, y) describes the index profile of the two-waveguide system. If the gap between
the waveguides is sufficiently large, each supermode (see Section 2.2) can be equated, to
a good approximation, to an expansion in the restricted basis of a superposition of the
parent modes:
~Bk(~r) = η(1)k
~B(1)k (~r) + η
(2)k
~B(2)k (~r) (2.26)
where η(j)k are the scaling coefficients. Substituting Eq. (2.26) into Eq. (2.25), multiplying
that equation by [ ~B(j)k (~r)]∗, integrating over all space, and subsequently using Eq. (2.20),
(2.21), (2.22), and (2.24), we find the following equation
∑j
M ij(k)η(j)(k) =(ωk
c
)2 ∑j
Sij(k)η(j)(k) (2.27)
Chapter 2. Light Coupling in Waveguides 38
with the matrix elements M ij(k) and Sij(k) given by
M ij(k) =ω
(i)k ω
(j)k
c2
∫ ~d∗(i)k (x, y) · ~d
(j)k (x, y)
εo[n(j)(x, y)]2dxdy (2.28)
Sij(k) =
∫ ~b∗(i)k (x, y) ·~b(j)
k (x, y)
µo
dxdy. (2.29)
In matrix form, we have
M(k) · η(k) =(ωk
c
)2
S(k) · η(k), (2.30)
where M(k) and S(k) are 2×2 Hermitian matrices, and η(k) is a 2-element column vector.
We define α(k) ≡ S1/2(k) · η(k), such that the above equation becomes
M · α(k) =(ωk
c
)2
α(k), (2.31)
where the Hermitian matrix M = S−1/2(k) · M(k) · S−1/2(k). Eq. (2.31) is a standard
Hermitian eigenvalue problem whose solution results in a pair of eigenfrequencies, ωmk,
and an associated pair of eigenvectors, αm(k), where m = 1, 2.
To verify that the supermodes can indeed be well approximated by Eq. (2.26), we can
compare the eigenfrequencies with the dispersion relation of the two supermodes of the
two-waveguide structure. In Fig. 2.6, this comparison is performed for the directional
coupler used in the optically controlled delay line (OCDL) (see Chapter 6) where the solid
lines are the dispersion relations for the two supermodes of the two-waveguide structure,
and the points are the two computed eigenfrequencies, evaluated using ωref/(2πc) =
6.4516 × 105 m−1, corresponding to the wavevector, k = 1.3207 × 107 m−1, showing
excellent correspondence (with less than a 0.01% difference).
Chapter 2. Light Coupling in Waveguides 39
1.3206 1.3206 1.3206 1.3207 1.3207 1.3207 1.3207
x 107
6.4508
6.451
6.4512
6.4514
6.4516
6.4518
6.452
6.4522
x 105
Wave number k [m-1
]
Norm
alize
d F
req
uen
cy
/(
2
c)
[m
-1]
ref /(2 c)
k
Figure 2.6: Dispersion relation for the OCDL of Chapter 6. Solid lines are the dispersionrelation of the two supermodes; the points are the two eigenfrequencies computed from therestricted basis analysis.
2.3.2 Effective Fields and the Coupled Mode Equations
Following the development in [100], we introduce a pair of scalar effective fields, g1 and
g2,
gn(z, t) =1√2π
∫bnke
i(k−k)dk (2.32)
where the integral is evaluated over all k, and where the operators bnk are related to the
eigenvectors, αm(k), and the mode amplitudes, amk, (introduced in Eq. (2.11)) via
bnk =∑m
α(n)m (k)amk (2.33)
where α(j)m (k) (from Eq. (2.31)) refers to the jth element of the 2-element eigenvector,
αm(k). These effective fields are essentially a way of defining the slowly varying complex
envelope functions of the parent modes, and can, in fact, be used to construct the original
field in the waveguide system (defined by Eq. (2.11)).
Chapter 2. Light Coupling in Waveguides 40
The effective fields are based on a canonical formulation of the electromagnetic fields,
which implies that the Hamiltonian and its symmetries are available for studying the
system. Expanding the Hamiltonian of the system defined using the restricted basis (see
Chak et al. [100] for the development details), the following coupled differential equations
result:
∂g1,2
∂t+ vg
∂g1,2
∂z= −iωself(k)g1,2(z, t)− iωcross(k)g2,1(z, t) (2.34)
where the group velocity, vg = ∂ωself(k)/∂(k), evaluated at k = nωref/c, and
ωself = ~−1ωrefk
(1 + ∆1kα
(1)1 (k)[α
(1)1 (k)]∗ + ∆2kα
(1)2 (k)[α
(1)2 (k)]∗
)(2.35)
ωcross = ~−1ωrefk
(∆1kα
(1)1 (k)[α
(2)1 (k)]∗ + ∆2kα
(1)2 (k)[α
(2)2 (k)]∗
)(2.36)
where
∆mk ≡ ωmk − ωrefk
ωrefk
. (2.37)
We can find the half-beat coupling length by finding a stationary solution to Eq. (2.34)
of the form
g1,2(z, t) = g1,2(z)e−iωself(k)t, (2.38)
and finding that when light is input only into one of the two waveguides (i.e., g2(0) = 0),
we have
|g1(z)|2 = |g1(0)|2cos2(κz) ≡ |g1(0)|2σ2 (2.39)
|g2(z)|2 = |g1(0)|2sin2(κz) ≡ |g1(0)|2ϕ2 (2.40)
where
κ ≡ ωcross(k)/vg (2.41)
σ ≡ cos
(ωcross(k)z
vg
)(2.42)
Chapter 2. Light Coupling in Waveguides 41
ϕ ≡ sin
(ωcross(k)z
vg
). (2.43)
where we have introduced the unitless amplitude through- and cross-coupling coeffi-
cients, σ and ϕ, which are seen to be sinusoidally varying functions – as expected for a
two-waveguide directional coupler. The half-beat coupling length, Lc, can therefore be
expressed as
Lc =π
2 |κ| =πvg
2|ωcross| . (2.44)
2.4 Conclusion
In this chapter, the nature of light coupling in waveguides was studied. Using Maxwell’s
equations, the master equation was derived describing the propagation of light through
an arbitrary waveguide structure. The half-beat length of a two-waveguide directional
coupler (i.e., the length at which 100% of the light is transferred between waveguides)
was computed in two ways: (1) from the system’s two lowest-order supermodes, and (2)
using the Hamiltonian formulation of coupled mode equations.
The three projects described in this thesis each employ coupled waveguides in their
unique way. Prior to studying the design, simulation, and characterization of each, an
overview of the aluminum gallium arsenide material system is presented in the next
chapter.
Chapter 3
Aluminum Gallium Arsenide
In this chapter, we discuss the benefits of the aluminum gallium arsenide (AlGaAs)
material system for use in planar lightwave circuits. These benefits were listed in the
Introduction, and are presented again here:
• The high linear refractive index minimizes PLC chip sizes.
• Its crystalline structure remains lattice-matched across the aluminum (Al) concen-
tration range (between 0 and 100%).
• The material index can be varied (via Al concentration) by ∆n = 0.48 (at λ =
1550 nm).
• Its large nonlinear refractive index is well suited for all-optically controlled devices.
• Mature processes have been developed for PLC fabrication in AlGaAs.
In this chapter, we first take a look at the AlGaAs crystalline structure in Section 3.1.
Section 3.2 describes the material refractive index of the five different AlGaAs compo-
sitions used in this thesis in terms of Sellmeier coefficients. Section 3.3 presents a brief
discussion on the half bandgap and Kerr nonlinearity of AlGaAs. The final section, Sec-
tion 3.4, describes the AlGaAs wafer layer designs used in the three projects described
in this dissertation.
42
Chapter 3. Aluminum Gallium Arsenide 43
3.1 AlGaAs Lattice Constant
At normal pressure, AlGaAs crystallizes in the linearly-isotropic, non-centrosymmetric
zinc-blende structure (point group 43m(Td)). The lattice constant, a0, for a zinc-blende
crystal is defined by the length of the face-centred cube edge, as illustrated in Fig. 3.1 [92].
At a temperature of 300 K, the stress-free lattice constant, as a function of aluminum
concentration, x, can be written as
a0 = 5.65330 + 0.00809x. (3.1)
The difference in lattice constants between GaAs and AlAs is only 0.14%, making het-
erojunctions comprised of different AlGaAs compositions particularly robust against de-
lamination and cracking.
0
Figure 3.1: The primitive cell of a zinc-blende type crystal lattice: arsenic = white atoms;gallium/aluminum = red atoms.
Chapter 3. Aluminum Gallium Arsenide 44
3.2 AlGaAs Material Index Dispersion
The Gehrsitz model provides an excellent description of the refractive index of AlxGa1−xAs
over temperature, aluminum concentration, and wavelength (below the band-gap) [93].
However, because of its complexity, the model is difficult to use in commercial mode
solvers. As such, it was evaluated at room temperature (T = 296 K), and fit to the
following simplified Sellmeier formula:
n2(λ) = A1 +B1λ
2
λ2 − C1
(3.2)
where the coefficients, A1, B1, and C1, are dependent on the aluminum concentration, x.
The Sellmeier coefficients for the five different AlGaAs compositions used in the projects
described in this dissertation are listed in Table 3.1 (valid between 880 nm and 2100 nm
wavelengths), and the respective dispersion curves are plotted in Fig. 3.2. The results
using these coefficients in the simplified Sellmeier formula were accurate (compared to the
results from the Gehrsitz model) to within a (reduced chi-squared) statistical deviation
of 0.0003.
Table 3.1: AlGaAs Sellmeier Coefficients at T = 296 K
x: 0 0.18 0.20 0.24 0.70A1 7.95747 4.57905 4.41592 4.13405 1.61115B1 2.96499 5.72297 5.82425 5.98733 7.25265C1 0.32166 0.16821 0.16219 0.15176 0.08675
The room-temperature refractive index of GaAs (i.e., x = 0) and AlAs (i.e., x = 1) at
1550 nm evaluates to 3.374 and 2.893, respectively; these large index values (in compari-
son with the ∼ 1.5 indices typically found in glasses) minimize the size of planar lightwave
circuits. The temperature dependence of the refractive index is 2.415×10−4/K [93]. Fur-
thermore, the large variation in the index allows for an added degree of freedom in the
design of the wafer layer structures.
Chapter 3. Aluminum Gallium Arsenide 45
1000 1200 1400 1600 1800 20003
3.1
3.2
3.3
3.4
3.5
.
3.6
x = 0
x = 0.18
x = 0.20
x = 0.24
x = 0.70
Figure 3.2: AlGaAs material dispersion as a function of aluminum content, x (%).
3.3 AlGaAs Optical Nonlinearity
A material’s electronic bandgap is defined by the energy difference between its valence
and conduction bands. Photons with energies greater than the bandgap will be absorbed
by carriers excited from the valence to the conduction band. A similar effect called two-
photon absorption (TPA) occurs with large optical intensities, whereby the energy of two
photons can excite a carrier to the conduction band. For optical devices, any form of
absorption is detrimental, and should be eliminated, if possible [104].
Fortunately, the bandgap of AlGaAs is a function of the aluminum concentration. The
half bandgap wavelength of AlGaAs versus aluminum content, x, is plotted in Fig. 3.3,
which reveals that the aluminum content at 1550 nm must be greater than x = 0.14 to
reduce TPA to a level where it can be ignored. This minimum limit was respected in the
AlGaAs wafer designs used in this dissertation (see Section 3.4).
Chapter 3. Aluminum Gallium Arsenide 46
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0800
900
1000
1100
1200
1300
1400
1500
1600
1700
1800
Half B
andgap W
avele
ngth
(nm
)
Aluminum Content, x
Figure 3.3: AlGaAs half bandgap wavelength versus aluminum content.
The Kerr effect originates from the nonlinear polarization generated in a medium,
instantaneously modifying its refractive index (see Appendix A). The Kerr nonlinear
refractive index, n2, was measured for a 5 µm-wide waveguide fabricated in a commonly
used low-index contrast wafer (see Section 3.4.1 for the description of the 24/18/24 wafer).
The wavelength dependence of n2 is plotted in Fig. 3.4 [96]. Because of its instantaneous
nonlinear response, the Kerr effect can be used in the fabrication of ultrafast devices [95].
Figure 3.4: The measured AlGaAs values of n2 for TE (solid circles) and TM (solidtriangles) polarizations [96].
Chapter 3. Aluminum Gallium Arsenide 47
3.4 AlGaAs Wafers
The AlGaAs wafers used in the projects described in this dissertation were grown using
molecular beam epitaxy with aluminum content greater than x = 0.14 (see Section 3.3).
3.4.1 AlGaAs Wafer: 24/18/24
The “24/18/24” AlGaAs wafer was used for the lower index contrast PLCs, whose wave-
guide dimensions were on the order of a few microns. The projects that used this wafer
were the EDL simulator (Chapter 4) and the optically controllable delay line (Chapter 6).
The wafer structure consisted of a 1.5 µm Al0.18Ga0.82As core layer, surrounded by
Al0.24Ga0.76As cladding layers (1.5 µm above, and 4.0 µm below), grown on a GaAs
substrate [105].
3.4.2 AlGaAs Wafer: 70/20/70
The “70/20/70” AlGaAs wafer was used for the high index contrast PLCs, whose wave-
guide dimensions were on the order of 0.5 µm. The SCISSOR device used this wafer to
achieve the tight modal confinement required for the nanowires.
The wafer structure consisted of a 10 nm top layer of GaAs (to prevent aluminum oxi-
dation), a 300 nm top cladding layer of Al0.7Ga0.3As, a 500 nm core layer of Al0.2Ga0.8As,
followed by a 3000 nm lower cladding of Al0.7Ga0.3As, grown on a GaAs substrate [106].
A 300 nm layer of PECVD grown SiO2 was deposited atop the AlGaAs wafer for use as
a hardmask in the e-beam lithography and etching process.
Chapter 3. Aluminum Gallium Arsenide 48
3.5 Conclusion
In this chapter, we quantified the excellent lattice matching properties of AlGaAs at
room temperature. A Sellmeier formulation was presented to compute the wavelength-
dependent refractive index for the five AlGaAs compositions used in this dissertation.
The minimum aluminum concentration required to minimize two-photon absorption at
1550 nm was found to be x = 0.14, and the wavelength dependence of the Kerr nonlinear
index was presented. Finally, the 24/18/24 and 70/20/70 wafer designs used in this
disseration were described.
Chapter 4
Exact Dynamic Localization
In this chapter, we will look into optical signal processing in PLCs using the mathematical
parallels between quantum and optical theory. By successfully employing this parallel to
demonstrate optical exact dynamic localization, we pave the road for PLC devices with
improved and/or new optical functionality, based on a foundation of quantum theory.
4.1 Introduction
The evolution of an electron wavepacket in a one-dimensional periodic spatial potential
under the influence of a time-dependent, periodic electric field has attracted a great deal
of attention over the last 20 years [10,11,17,18,107–109]. Much of the interest arises from
the subtle interplay between the periodic potential and the electric field, which, under
some circumstances, can counteract the tendency of the wavepacket to spread. For cases
when the wavepacket returns to its original localized state, dynamic localization (DL)
occurs, a phenomenon that is particularly interesting, for neither the periodic potential
nor the electric field on their own can inhibit the wavepacket’s delocalization.
Dynamic localization is closely related to Bloch oscillations (BOs) [14, 110], which
occur when the applied field, Fdc, is constant in time, rather than periodic. In a spatially
periodic potential, a localized wavepacket in such a field initially spreads but subsequently
49
Chapter 4. Exact Dynamic Localization 50
reconverges, so that the wavepacket returns to its original state. This motion is periodic
in time, with a Bloch period , τB, that scales as F−1dc . This type of electron localization was
proposed more than 50 years ago by James [111], and was first experimentally verified in
optically-excited semiconductor superlattices in 1992 [8].
The behavior of a wavepacket undergoing DL is similar to BOs: for an ac field with
an appropriately chosen shape, period, and amplitude [18], the wave packet returns to
its initial state. DL was first theoretically shown to arise for sinusoidally varying elec-
tric fields [17, 107]; however, it has been shown that DL can only occur with sinusoidal
fields (or any continuous periodic ac fields) in systems where adjacent spatial wells are
weakly coupled (so that the bandstructure is well described by the nearest-neighbor tight-
binding, NNTB, approximation) [18]. In this approximate dynamic localization (ADL),
the maximum beam divergence (i.e. oscillation amplitude) is small, and the beam does
not relocalize in general (e.g., non-NNTB) structures. In contrast, it has been theoreti-
cally shown that exact dynamic localization (EDL) can occur in these general structures
only if the electric field is discontinuous [18], allowing for rigorous relocalizations, and
with much larger oscillation amplitudes – a phenomenon that has not yet been experi-
mentally demonstrated.
The experimental observation of EDL in electronic systems is very difficult. Large
amplitude, discontinuous ac fields (on the order of 10 kV/cm) in the THz frequency
range (such that the period is shorter than electron decoherence times of ∼ 1 ps) are
extremely difficult to generate. Electronic systems have the additional problem that
electron-electron and electron-phonon interactions significantly alter the dynamics of the
wavepacket evolution. As well, indirect measurement techniques must be used (e.g.,
four-wave mixing [8,9] or terahertz emission [10–12]), since direct imaging of the electron
wavepacket is not possible.
To overcome the difficulties of observing DL in electronic systems, two alternative sys-
tems have been considered to empirically simulate the effect: cooled atomic arrays [112],
Chapter 4. Exact Dynamic Localization 51
and curved coupled optical waveguide (CCOW) arrays [7, 15, 19, 113, 114], the second of
which is investigated in the work presented in this chapter. The spatial propagation of
light in optical waveguide arrays is directly analogous to the temporal evolution of an
electron wavepacket in a superlattice. The effect of the applied electric field on the super-
lattice is obtained in the waveguide structure by inducing a transverse refractive index
gradient across the array (obtained, for example, by a temperature [115], or structural
gradient [105]). Of note, CCOW structures do not suffer the drawbacks of electronic
systems: the 1 − 10 mm period necessary for the waveguide curvature, and the curva-
ture discontinuities are easily patterned using standard photolithographic techniques; the
electron-electron and electron-phonon interactions have no direct linear optical analog;
and the CCOW system permits the spatial monitoring of the evolution of the beam using
standard optical detection methods.
Longhi et al. [19] recently presented the first experimental observations of DL in a
sinusoidally-shaped NNTB CCOW array. However, this was truly only a demonstration
of ADL, because of the continuously varying curvatures employed. At the current time,
there has been no reports of exact dynamic localization in any system.
The challenge: Can a PLC be designed to demonstrate the exact quantum dynamic
localization (EDL) effect over several relocalization periods? If so, the spatial mapping
of the beam evolution through the device must be performed, along with the character-
ization of the wavelength dependence (with significantly improved resolution compared
with Longhi’s earlier work [19]).
In the work presented here, the index gradient was created using CCOW arrays [15,
114], in which the periodically varying waveguide curvature profile served as the optical
analog of the ac electric field. The first experimental demonstration of EDL in CCOWs
with discontinuous waveguide curvature profiles is demonstrated – this being the first
demonstration of EDL in any system. Excellent correspondence of the experimental
results with theory is reported for both DL evolution and wavelength dependence.
Chapter 4. Exact Dynamic Localization 52
This chapter is structured as follows: an overview on the theory of DL in CCOWs,
and details of the device parameters are presented in Section 4.2. Section 4.3 presents the
experimental results, including the wavelength dependence of the beam at the four-period
EDL plane, and spatial field evolution of the beam around the two-period EDL plane.
Section 4.4 discusses the EDL tolerance on discontinuity-smoothing of the fabricated
waveguide curvatures. Discussions of future work and final conclusions are presented in
Sections 4.5 and 4.6, respectively.
4.2 Dynamic Localization in Curved Coupled Optical
Waveguide Arrays
4.2.1 Paraxial Complex Vector Wave Equation
Manipulating Maxwell’s equations, (Eqs. (2.1), (2.2) and (2.6)), for an electromagnetic
field in a dielectric medium (where both ~J = 0 and ρ = 0), the complex vector wave
equation (CVWE) for modes with electric fields tangential to material discontinuities
(such that the electric fields are continuous in space) can be derived as follows [2]:
∇×(∇× ~E
)= −∇× µ
∂
∂t~H (4.1)
= −µ∂
∂t
(∇× ~H
)(4.2)
= −µ∂2
∂t2~D (4.3)
Substituting Eqs. (2.5) and (A.24) into Eq. (4.3), and using the identity ∇×(∇× ~E
)=
∇(∇ · ~E
)−∇2 ~E, the linear CVWE becomes
∇(∇ · ~E
)−∇2 ~E = −µ
∂2
∂t2
[εo
~E + εoχ(1) ~E
](4.4)
Chapter 4. Exact Dynamic Localization 53
which, for complex time-harmonic monochromatic waves (described in Eq. (A.6)) is
∇(∇ · ~Ec
)−∇2 ~Ec = µεoω
2[~Ec + χ(1) ~Ec
](4.5)
= k2o~Ec
(1 + χ(1)
)(4.6)
= k2oεr
~Ec (4.7)
where ~Ec is the complex representation of the electric field (see Appendix A), ko = 2π/λo
is the free-space propagation constant, λo is the free-space wavelength, ω = 2πc/λo, and
εr = 1 + χ(1) (see Eq. (A.25)).
For a dielectric medium with no free-charge density (ρ = 0), Eq. (2.4) can be expanded
as follows:
0 = ∇ · ~Dc (4.8)
0 = ∇ ·(εo
~Ec + ~Pc
)(4.9)
0 = ∇ ·(εo
~Ec + εoχe~Ec
). (4.10)
where the polarization density is defined in Eq. (A.22) as ~Pc = εoχe~Ec. Employing the
identity ∇ ·(α~Ec
)= α∇ · ~Ec + ~Ec · ∇α, we obtain
0 = (1 + χe)∇ · ~Ec + ~Ec · ∇χe. (4.11)
Isolating for ∇ · ~Ec,
∇ · ~Ec =− ~Ec · ∇χe
1 + χe
=− ~Ec · ∇χ(1)
1 + χ(1). (4.12)
We can now rewrite the CVWE as follows:
∇2 ~Ec +∇(
~Ec · ∇εr
εr
)+ k2
oεr~Ec = 0. (4.13)
Chapter 4. Exact Dynamic Localization 54
A 3D waveguide system whose cross-sectional relative electric permittivity profile is
defined as εr(x, y) can be reduced to a 2D system with a cross-sectional permittivity
profile, εr(x), via the effective index method [116, 117]. Applying a mode with fields
oriented in the y-direction (i.e., out of the plane, and hence, tangential with the index
discontinuities) renders the second term of Eq. (4.13) to zero, and reduces the CVWE to
∇2 ~Ec + k2oεr
~Ec = 0. (4.14)
4.2.2 Mapping of the Quantum System to Waveguide Arrays
The CCOW system is a periodic array of curved waveguides. The structure is shown
schematically in Fig. 4.1. The width of the individual waveguides, dw, and the transverse
period of the array, d, are kept constant, while the array as a whole is curved, with a
radius of curvature, R (v) that depends on the propagation distance, v, along the centre
of the central waveguide.
To describe the beam propagation through a curved waveguide array, we assume the
solution to the CVWE (Eq. (4.14)), takes the form
~Ecm = ~Etm(x, y, z)e+jβmz m = 0, 1, 2 · · · . (4.15)
Each ~Etm describes the mth transverse complex spatial supermode of the waveguide
array. The propagation constant, βm, of the mth mode (i.e., its eigenvalue) is defined as
βm = 2πnm/λo, where nm is the effective index of each supermode. Note that the ‘+’
convention is used for the phase term for these equations. Substituting Eq. (4.15) into
the CVWE, we obtain
∇2t~Ecm + 2jβm
∂ ~Ecm
∂z+ (k2
oεr − β2m) ~Ecm = 0, (4.16)
Chapter 4. Exact Dynamic Localization 55
Al24Ga76As
Al18Ga82As
Al24Ga76As
+Ro
-Ro
Fundamental Mode Launch in Central Waveguide
z
Waveguide number: 0 1-1-2-3 Cleaved
end-facet
Cleaved
front-facet
ddw
y
x
Figure 4.1: Schematic of the CCOW structure. The central waveguide is highlighted,defining the origin of the coordinate system, (u, v). Note the dependence of the waveguideradius of curvature, R(v), with respect to the propagation distance, v, where R(v) =+Ro for 1
4Λ < v ≤ 34Λ; R (v) = −Ro for 3
4Λ < v ≤ 54Λ. Also note that u and v are not
drawn to the same scale.
where ∇2t is the transverse Laplacian operator.
Heiblum, et al. [114] have provided the equations to transform a curved waveguide in
the x-z plane with radius, R, to a straight waveguide (in the u-v co-ordinate system) by
a transformation of its relative electric permittivity profile,
ε curvedr (x) = ε straight
r (u)e−2u/R, (4.17)
which can be simplified to a first-order using Taylor expansion to
ε curvedr (x) = ε straight
r (u)
(1− 2u
R
). (4.18)
This first-order approximation is valid for 2u/R < 10−3. For ∼ 4 µm wide waveguides,
Chapter 4. Exact Dynamic Localization 56
the bend-radii must be greater than ∼ 200 µm. As we will see later in this chapter, the
radius required for our device is ∼ 35 mm.
Therefore, the CVWE for a 2D curved waveguide in the u-v co-ordinate system can
be rewritten as
j∂ ~Ecm
∂v=
−1
2kon
∂2 ~Ecm
∂u2+
ko
2n
[−δn2(u) +
2n2
R(v)u
]~Ecm , (4.19)
where δn2 (u) = ε straightr (u) − n2, n is the effective index of the fundamental mode in
a single waveguide, and where we have made the generally valid approximation that
ε straightr ' n2. Eq. (4.19) is the paraxial wave equation (PWE) for a curved waveguide
system.
The PWE, Eq. (4.19), maps onto the 1D time-dependent Schrodinger equation,
j~∂Ψ
∂t=−~2m∗
∂2Ψ
∂u2+ U(u)Ψ. (4.20)
for an electron with mass, m∗, in a potential U(u), in the presence of a time-varying
electric field, F (t), via
t = v/c, m∗ =hn
cλ, U(u) = −hc
δn2(u)
2nλ, eF (t) = hc
n
λR(v),
(4.21)
where t is time, c is the speed of light in a vacuum, h is Planck’s constant, e is the
magnitude of the charge on an electron, and λ is the free space wavelength in the optical
system [7]. The mapping of t onto v, and F (t) onto R (v), allows us to design the CCOW
analog of the quantum system in which DL should arise, where the periodic index profile,
δn2 (u), in the optical domain is constructed by an array of waveguides (corresponding
to the periodic potential, U(u), in the quantum system described by the Kronig-Penney
model [118]), leading to the formation of photonic bands.
Chapter 4. Exact Dynamic Localization 57
4.2.3 Straight Waveguide Array
It is useful to characterize the properties of a CCOW system by first considering an array
with straight waveguides (i.e., the case corresponding to an electronic system with no
external field present). In such a straight waveguide array, the beam diverges uniformly
via discrete diffraction [13], demonstrating that no beam (or electronic wavepacket) relo-
calization occurs in the absence of waveguide curvature (or electric field in the electronic
system). A simulation of the beam divergence through a straight waveguide array is
presented in Fig. 4.2, where the effective index profile is plotted as a function of u/d.
In an array consisting of N single-mode waveguides, there exists a finite number of
N supermodes (per polarization). The initially localized light in the u = 0 waveguide is,
in actuality, a superposition of a weighted sum of these N supermodes. Similar to the
evolution of the light in a two-waveguide directional coupler (as discussed in Chapter 2),
each of the N excited supermodes propagates at a unique phase velocity through the
PLC, thereby producing an evolving superposition at each position along v.
0
2
4
-4
-2
Figure 4.2: Simulation of the beam divergence (discrete diffraction) in a straight wave-guide array.
Chapter 4. Exact Dynamic Localization 58
4.2.4 Bloch Oscillations
As mentioned in Section 4.1, Bloch oscillations (BO) occur in an electronic system under
the influence of a dc electric field [8,111]. We see from Eqs. (4.21), a dc field corresponds
to a constant radius of curvature of the optical waveguide array, which inhibits the beam
divergence and forces the beam to relocalize periodically in space, every optical Bloch
period, ΛB (mapped from the temporal Bloch period, τB, in the electronic system).
This behavior is illustrated in Fig. 4.3, where the curved waveguide array is conformally
mapped to a straight waveguide array by a linear tilt of the index profile [16, 114] (in
direct analogy with the tilting of the band structure of a periodic lattice in the presence
of a dc electric field).
The slight u-asymmetry of the BO is due to two independent effects: on the inner
side of the curvature (i.e., for u > 0), the nature of the diverging beam is to tend toward
the higher index, thereby arresting its divergence and “reflecting” the beam back toward
u = 0; on the outer side of the curvature (i.e., for u < 0), the diverging beam encounters
a transverse Bragg grating which reflects the beam back toward u = 0 [15].
0
2
4
-4
-2
0 41 32
Figure 4.3: Simulation of Bloch oscillations in a waveguide array with a constant radiusof curvature.
Chapter 4. Exact Dynamic Localization 59
4.2.5 EDL in CCOW Arrays
It has been shown that DL of any kind can only occur in the one-band approxima-
tion [119], (i.e., where only the lowest band is considered), and when coupling to ra-
diation modes (i.e., bend loss) is small; the coupling to radiation modes in CCOWs is
analogous to Zener tunneling to higher bands in an electronic system. As mentioned in
Section 4.1, ADL occurs in CCOW structures with continuous curvature profiles only if
the system is weakly coupled (i.e., NNTB) [18]. Longhi, et al. [19] have experimentally
demonstrated ADL in a CCOW structure with continuously varying, sinusoidally-shaped
waveguides, indicating that their structure could be well described using the NNTB ap-
proximation. Experimental investigations on multiband effects in CCOWs under various
excitation geometries have been conducted in a related work [19].
In general CCOW structures (e.g., non-NNTB structures), rigorous DL (i.e., EDL)
is only possible if the radius of curvature profile, R(v), satisfies a number of conditions.
Two important (but not sufficient) conditions are that R(v) must be discontinuous at
every sign change, and R(v) must satisfy
∫ v2
v1
1
R(v)dv =
QλR
nd, (4.22)
where v1 and v2 are locations of adjacent discontinuities, and Q is a positive integer.
Because the mapping from the electric field, F (t), to waveguide radius of curvature,
R(v), depends explicitly on the wavelength (Eq. (4.21)), EDL in the CCOW system only
occurs at resonant wavelengths, λR. This idea has been proposed for use in the design of
optical filters [7, 18].
Of the many different curvature profiles that can produce EDL [7], the simplest is the
Chapter 4. Exact Dynamic Localization 60
square-wave field, with curvature period, Λ, and radius of curvature profile,
R (v) =
+Ro for(m + 1
4
)Λ < v ≤ (
m + 34
)Λ
−Ro for(m + 3
4
)Λ < v ≤ (
m + 54
)Λ
. (4.23)
where m is an integer. The required radius of curvature amplitude, Ro, using Eq. (4.22),
is found to be
Ro =Λnd
2QλR
. (4.24)
In the structures that are investigated in this work, Q = 1 was chosen in order to
maximize Ro and thereby minimize the coupling to radiation modes. The EDL in this
Q = 1 square-wave case is understood by recognizing that the beam experiences a series of
alternating constant-curvature Bloch regions, contributing to the periodic relocalization
behaviour, as illustrated by the simulation results (for Q = 1) in Fig. 4.4.
The measure of the delocalization between relocalization points is defined as the
oscillation amplitude, ΨDL, (in units of transverse periods, d). Therefore, in order to
observe relatively large, unambiguous oscillation amplitudes (i.e., ΨDL ≥ 3d), systems
with strong coupling are required (which, by definition, cannot be described by the NNTB
0
2
4
-4
-2
0 41 32
DL
Figure 4.4: Simulation of dynamic localization in a waveguide array with an ac square-wave curvature profile.
Chapter 4. Exact Dynamic Localization 61
approximation). For this reason, in this work, rigorous EDL in a non-NNTB system was
designed using the discontinuous square-wave curvature profile. Details of the design are
presented in the next subsection.
4.2.6 EDL CCOW Design
The EDL structures were designed using the 24/18/24 AlGaAs wafer (described in Chap-
ter 3; see also Fig. 4.1). The in-plane confinement was achieved by defining waveguides
with an etch depth of h = 1.35 µm and width of dw = 4.0 µm. The waveguides were
designed to be single-mode and polarization independent at 1550 nm, with an effective
refractive index (for both TE and TM polarizations) calculated to be n = 3.261. A two-
waveguide DC using this design was found to have a coupling coefficient, κ = 0.971 mm−1;
the lowest order TM supermode of this DC (computed using full vectorial finite differ-
ence analysis) is shown in Fig. 4.5 for comparison with other DCs presented in this
dissertation.
The structure was designed to satisfy the following two criteria: that (1) the coupling
was strong enough to create a relatively a large oscillation amplitude, such that DL would
not occur with continuous curvature waveguide profiles, and (2) the radius of curvature
was large enough such that radiation loss (i.e., the coupling to higher-band radiation
modes) would be relatively small [7].
0
0.4
0.8
0.2
0.6
1
Figure 4.5: Simulation of the lowest order TM supermode of a two-waveguide DC usingthe CCOW design parameters.
Chapter 4. Exact Dynamic Localization 62
To demonstrate EDL, the square-wave curvature profile was used (Eqs. (4.23) and
(4.24)), with a DL period, Λ = 5 mm, and an amplitude, Ro = 35.24 mm, at the resonant
wavelength, λR = 1550 nm. The spatial evolution of the beam over four periods through
the CCOW structure was calculated using (a) a 2D Beam Propagation Method (BPM)
simulation [120], and (b) Eqs. (4.21) to map the beam evolution onto the Schrodinger
equation and solving the dynamics using an expansion in the basis of the Wannier func-
tions of the lowest band [7,18]. This second method explicitly omits any coupling between
bands and is henceforth referred to as the one-band Schrodinger model. The results are
plotted in Fig. 4.6 on a dB scale (to observe low-intensity features of the beam evolu-
tion) in the (u, v) coordinate system. The relocalized beam profile at v/Λ = 4 is shown
adjacent to both spatial maps. From these simulations, the following observations are
made: (1) DL in the system occurs every v = mΛ (where m is an integer), (2) the DL
persists for a span of ∆vDL ' 300 µm about each localization plane, (3) the oscillation
amplitude, ΨDL = 4d, and (4) the beam propagation is slightly asymmetric in the u
dimension. The radiation modes seen in Fig. 4.6(a) introduce less than 5% loss per DL
period, and create the ripples seen between relocalizations due to interference with the
light still confined in the array. These radiation modes (and ripples) do not appear in
the Schrodinger simulation results (Fig. 4.6(b)), because the higher photonic bands and
Zener tunneling are excluded in the one-band model. Because EDL can only formally
occur in the one-band approximation [119], the one-band Schrodinger model was used to
produce the theoretical results in the remainder of the chapter.
To verify that the CCOW array was designed with sufficiently strong coupling to
render to NNTB approximation (necessary for ADL) invalid, a simulation with con-
tinuous sinusoidal curvature profiles was conducted with a curvature profile R (v) =
1/ (RA sin (2πv/Λ)). It has been shown that for such a curvature profile, DL would
break down for strongly-coupled systems [17, 107, 121, 122]. In Fig. 4.7, the beam evolu-
tion through the continuous CCOW array was modeled using the one-band Schrodinger
Chapter 4. Exact Dynamic Localization 63
0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
0
2
4
6
-8
-6
-4
-2
8
0
2
4
6
-8
-6
-4
-2
8
0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
DL
DL
-25 dB
-15 dB
-5 dB
-20 dB
-10 dB
0 dB
Figure 4.6: (a) 2D BPM simulation and (b) one-band Schrodinger model of EDL ina four-period non-NNTB CCOW array. The beam profiles at v/Λ = 4 show excellentrelocalization. Both spatial maps are plotted on a dB scale, while the beam profiles areplotted on a linear scale.
model. The beam has relocalized reasonably well at v/Λ = 1; however, in this non-NNTB
structure, DL clearly has broken down, the beam evolution has lost its periodicity, and
at v/Λ = 4, the beam has spread to a width of ± ∼ 4d (plotted in the beam profile to
the right of the spatial map).
While other continuous curvature profiles (besides sinusoidal) may lead to improved
ADL performance, true DL cannot be observed without curvature discontinuities, as
previously mentioned [122]. Hence, in the structures presented in this work, discontin-
uous square-wave curvature profiles were employed to demonstrate EDL performance
unambiguously.
Chapter 4. Exact Dynamic Localization 64
0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
0
-2
-4
-6
8
6
4
2
-8
-25 dB
-15 dB
-5 dB
-20 dB
-10 dB
0 dB
Figure 4.7: One-band Schrodinger model of ADL breakdown in a four-period non-NNTBCCOW array. The beam profile at v/Λ = 4 clearly shows DL breakdown. The spatial mapis plotted on a dB scale, while the beam profile is plotted on a linear scale.
4.3 EDL: Experiment and Results
4.3.1 Fabrication
Fabrication of the optical chips was conducted following the recipe outlined in Ap-
pendix B. Once etched, the chips’ front- and end-facets were cleaved using using stan-
dard diamond scribing techniques. The etch depth was found to hit the design target
of h = 1.35 ± 0.05 µm; the post-etch waveguide width was found to hit the target of
dw = 4.00 ± 0.05 µm; and the waveguide separation was measured to hit the target of
d = 6.70 µm ± 0.05 µm. A scanning electron micrograph of the cross-section of the
cleaved end-facet is shown in Fig. 4.8. Layouts of the photomask designs (which are de-
scribed in detail in the next two subsections) are presented in Fig. 4.9. In these figures,
the waveguide curvature of the arrays is barely visible, because the lateral amplitude of
the curved waveguide path (in the u dimension) is only 22 µm; the curved propagation
distance, v, is therefore effectively equivalent to the linear distance, z, to within 0.02%
(see Fig. 4.1).
Chapter 4. Exact Dynamic Localization 65
dw
d
h
Figure 4.8: SEM of cleaved end-facet of EDL chip.
4.3.2 Experimental Setup
The experimental setup consisted of a collimated CW beam (from a JDSU SWS 15101
tunable laser source) focused into the front-facet of each chip using a Newport FL40B
coupling lens. A half-waveplate + polarizer combination was used to select TM polarized
light for the launch. The beam from the chip’s end-facet was captured using a traditional
waveguide imaging system, using a Hamamatsu C2741 IR camera and a New Focus 5723-
BH aspheric lens for optimal image quality.
An independent single-mode waveguide coupled to the central waveguide of each
51-waveguide CCOW array guaranteed a localized input mode for every experiment (see
Fig. 4.9(a)). A polarization characterization of the experiments revealed that the CCOW
design was polarization independent, as expected (Section 4.2.6). Therefore, only exper-
imental and simulation results for the TM launch are presented below.
Chapter 4. Exact Dynamic Localization 66
Zlen
Figure 4.9: Photomask layout. (a) Launch geometry of the CCOW array consisting of51 waveguides from a single mode waveguide. (b) The four-period EDL CCOW array,terminated on an output slab waveguide. (c) The 21 EDL CCOW experiments, each witha length of 3 DL periods, and offset by ∆z = 250 µm. The aspect ratio is 1 : 1 in all figures.
4.3.3 Output Slab Measurement Technique
Observations of the actual EDL plane for confirmation of relocalization must be done
within the propagation span of ∆vDL ' 300 µm. Since achieving a cleaving tolerance
less than ±0.5 mm is difficult using standard cleaving procedures, a new technique was
proposed, called the output-slab technique that allows the chip to be cleaved at an arbi-
trary z-plane, while still allowing the imaging of any output plane to within an accuracy
of 1 µm.
An example of the output-slab technique is illustrated in the four-period EDL struc-
ture in Fig. 4.9(b): a sufficiently long and wide output-slab waveguide (OSlab), is pho-
tolithographically defined originating at the termination of the desired EDL observation
plane. The width of the OSlab needs to be sufficiently large to avoid reflections from its
side walls, and consequently, multimode interference.
Chapter 4. Exact Dynamic Localization 67
Upon cleaving the chip through the OSlab at an arbitrary z position, the EDL plane
can be brought into transverse focus (in the u dimension) by literally imaging through
the OSlab; whatever beam profile appears at the output of the CCOW array is allowed to
propagate through the OSlab without lateral confinement, as if in a block of transparent
material (with an index equal to the OSlab’s effective-index, nslab). The resulting post-
cleaved length of the OSlab is defined to be Zlen. The imaging system, initially focussed
on the end-facet (i.e., at the output of the OSlab) must be brought closer to the chip
by a travel distance of Zfocus = Zlen/nslab to bring the desired EDL plane into lateral
focus. Zlen must be kept as small as possible to minimize the effect of spherical aberration
on the beam. This imaging scheme allows for the observation of the EDL plane to an
accuracy of ' 1 µm (achievable by photolithography), and limited only by the z-travel
resolution of the imaging system. The results from a test of the output-slab technique
are presented below in Section 4.3.5.
4.3.4 Staggered Technique for Spatial Mapping
To capture the beam progression through the EDL CCOW structures, a staggered multi-
experiment technique was proposed [105], where a number of identical experiments are
deployed side-by-side and staggered by an offset of ∆z with respect to its preceding
neighbor. An example of the staggered technique is shown in the mask layout of a two-
period EDL experiment in Fig. 4.9(c). With an adequate number of experiments, this
staggered approach can sample the beam propagation over an entire DL period. The
results from a test of the staggered multi-experiment technique is presented the next
subsection.
4.3.5 EDL Measurement Techniques: Validation
To validate the performance of both the staggered multi-experiment and the output-
slab measurement techniques, four Bloch oscillation experiments were designed with a
Chapter 4. Exact Dynamic Localization 68
Imaging
System
Imaging
System
Zlen
ab
cd
ab
cd
Zlen
nslab
Figure 4.10: Bloch oscillation experiments using the staggered and output-slab measure-ment techniques to test beam mapping and accurate beam-relocalization observation.
stagger of ∆z = 250 µm, each terminated on the same OSlab waveguide, as shown
in Fig. 4.10. The first (and shortest) experiment, labeled a, was designed to observe
the point of maximum divergence of the beam through the structure; the last (and
longest) experiment, labeled d, was designed to observe the point of Bloch relocalization.
The results are shown in Fig. 4.11, where the convergence of the beam is observed,
thereby validating both the staggered approach (for beam mapping) and the output-slab
technique for accurate observation of the desired dynamic localization plane. Because
the beam remains confined as it propagates within the OSlab, the image obtained at the
focused EDL object plane is necessarily out-of-focus in the vertical dimension.
Chapter 4. Exact Dynamic Localization 69
a
b
c
d
Figure 4.11: Bloch oscillation experiment results: (a) beam at maximum divergence, (b)beam at 2/3rd maximum divergence, (c) beam at 1/3rd maximum divergence, (d) beam atthe Bloch relocalization plane.
4.3.6 EDL: Wavelength Dependence
The wavelength dependence of the four-period EDL CCOW structure using the output
slab technique was characterized between 1480 and 1600 nm. Gaussian beam analy-
sis [123] was used to determine that a 3 mm wide OSlab was required to ensure no side-
wall reflections. After performing the chip’s output-facet cleave, the length of the OSlab,
Zlen, was measured to be approximately 1 mm, resulting in a Zfocus ' 300 microns.
The photomask layout of the four-period wavelength dependence experiment is shown in
Fig. 4.9(b).
As described in Section 4.2.6, dynamic localization in the CCOW device was designed
to occur at λR = 1550 nm. The output images taken over the wavelength range were
combined and expanded using cubic interpolation to provide the data plot shown in
Fig. 4.12(a). Notably, the actual resonant wavelength is seen to be 1555 nm (identified by
the white dashed line), +0.32% higher than the target λR = 1550 nm. Upon performing a
back calculation of Eq. (4.24), the actual waveguide effective-index was found to be 3.271
(+0.32% higher than the target n = 3.261). This effective-index deviation is within the
Chapter 4. Exact Dynamic Localization 70
(c)
1555 nm
Wavelength (nm)
14
80
14
90
15
00
15
10
15
20
15
30
15
40
15
50
15
60
15
70
15
80
15
90
16
00
u/d
u/d
0
2
4
-4
-2
0
2
4
-4
-2
(b) Simulation
(a) Measured Data
Inte
nsity
u/d-6 -5 -4 -3 -2 -1 0 1 2 3 4 5 6
R = 1555 nm cross section plotted below in (c)
Simulation
Measured
-25 dB
-15 dB
-5 dB
-20 dB
-10 dB
0 dB
0
1
Figure 4.12: (a) Measured and (b) simulation results of the EDL wavelength dependenceat v/Λ = 4 from 1480 nm to 1600 nm. (c) Measured and one-band Schrodinger simulationat 1555 nm of the beam at v/Λ = 4. Both figures (a) and (b) are plotted on a dB scale,while figure (c) is plotted on a linear scale.
cumulative tolerances of its defining parameters: the aluminum percentage of the cladding
and core layers (±0.5%), the thickness of the cladding and core layers (±10 nm), the etch
depth (±0.02 µm), and the waveguide width (±0.05 µm) (see Section 4.3.1).
Chapter 4. Exact Dynamic Localization 71
The simulation results obtained from the one-band Schrodinger model (using the
experimentally obtained values for d, dw, n, and h) are presented in Fig. 4.12(b) (with
the cross-section at λR = 1555 nm identified by the white dashed line). There is excellent
correspondence of the performance of the device with theory, particularly in the spreading
of the beam to ±3d at 1480 nm, and to ±2d at 1600 nm. Both the measurement and
simulation results at 1555 nm (i.e., the cross-sections identified by the white dashed lines
in Figs. 4.12(a) and (b)) are shown in Fig. 4.12(c) revealing excellent dynamic localization
of the beam at the fourth EDL plane in the device.
4.3.7 EDL: Spatial Map
CCD cameras have been used to directly image the beam evolution of optical Bloch os-
cillations through a constant-curvature waveguide array fabricated in Er:Yb doped phos-
phate glass [124]; however, this approach was not applicable for imaging the waveguides
used for the CCOW devices because AlGaAs does not fluoresce, and the waveguides did
not produce enough observable scattered light. Instead, a traditional end-facet imaging
system was employed to capture the light emitted from 21 staggered 3Λ EDL CCOW
experiments (as described in Section 4.3.4).
Each staggered experiment was offset by ∆z = 250 µm with respect to its previous
neighbour. Upon performing the end-facet cleave roughly through the two-period plane of
the middle (i.e. the 11th) experiment, at v/Λ ' 2, 21 cutbacks of the identical experiment
remained at incrementally varying lengths, covering a total span of 5 mm, i.e., one full
EDL period. The capture of the relocalized mode was assured, since the stagger, ∆z,
was less than the predicted DL propagation length ∆vDL ' 300 µm (see Section 4.2.6).
The experiment was conducted at λ = 1550 nm. Vertical slices from each of the 21
output images (e.g., Fig. 4.13(a)) were stacked to produce a single 21-pixel wide image
that was subsequently expanded using cubic interpolation. The resulting plot is shown
in Fig. 4.13(b); the vertical dashed line represents the data slice from Fig. 4.13(a).
Chapter 4. Exact Dynamic Localization 72
v/
u
(b)
u/d 0
1
2
3
-3
-2
-1
-4
4
(c)
u/d 0
1
2
3
-3
-2
-1
-4
4
21.91.81.71.6 2.42.32.22.1 2.5
5
-5
-5
5
2.6
vDL
DL
(a)
-25 dB
-15 dB
-5 dB
-20 dB
-10 dB
0 dB
-25 dB
-15 dB
-5 dB
-20 dB
-10 dB
0 dB
y
Figure 4.13: (a) Captured image from one of the 21 experiments (plotted on a linearscale); (b) Measured and (c) one-band Schrodinger simulations of one full period aroundthe second EDL plane at 1550 nm. Figure (a) is plotted on a linear scale, while both figures(b) and (c) are plotted on a dB scale.
To validate the performance of the CCOW design, the simulation result from the
one-band Schrodinger model over one full period around the 2Λ EDL plane is shown in
Fig. 4.13(c) (using the experimentally obtained parameters listed in Section 4.3.6). Apart
from the presence of some low-intensity scattered and radiated light (neither of which
would appear in the simulation results), the experimental results agree very well with
Chapter 4. Exact Dynamic Localization 73
the theoretical predictions: (1) DL is clearly observed, (2) the measured DL propagation
span is ∆vDL ' 300 nm, (3) the oscillation amplitude, ΨDL ' 4d, and (4) the beam
propagation is seen to be slightly asymmetric in the u dimension.
force space
4.4 Discussion: EDL Tolerance on Discontinuity
Smoothing
As discussed in Section 4.2.5, one of the necessary conditions for EDL is that the ac field
have discontinuities at every sign change. However, since discontinuities are impossible
to create experimentally, EDL is not actually achievable.
For true EDL, no light appears in other than the localized waveguide (u = 0) at
v/Λ = m (where m is a positive integer). This is equivalent in the quantum system of
stating that the probability of finding the electron in other than the u = 0 quantum well
is zero, i.e., Pnot EDL = 0.
Domachuk, et al., have studied the EDL tolerance on the discontinuity-smoothing [122],
where an analytic formula of Pnot EDL is provided for smoothed square-wave fields. The
function f(v, a), describing the smoothing at the zero-crossings, is defined as
f(v, a) = sin( πv
2Λa
), (0 < v/Λ < a) (4.25)
where a (0 < a < 0.25) measures the degree of smoothing as a fraction of the ac period,
Λ. The smoothed square-wave is shown in Fig. 4.14. The reader is encouraged to follow
the derivation of Pnot EDL in [122]. Here, only the resulting formula is provided:
Pnot EDL = 2∑p>1
[βpmΛ32π2I(p2 − 1)a3
]2, (4.26)
Chapter 4. Exact Dynamic Localization 74
10.50 a
0.5 - a 0.5 + a
1 - a
v /
R(v
) /
Ro f (v,a)
1
0
-1
Smoothed
“square”
wave
Square
wave
Figure 4.14: Smoothing of square wave.
where mΛ is the total length of the device, I ' 0.0586 for f(v, a) = sin(
πv2Λa
), and where
βp are the Fourier expansion coefficients of the lowest-band’s propagation constant, β,
defined as
β(ku) =2πn
λ+
∞∑p=−∞
βpejpkud, (4.27)
where p is an integer, and ku is the Bloch wavevector of the mode (−π/d < ku <
π/d) [125]. The band structure is calculated from the solutions to the 1D paraxial
wave equation, Eq. (4.19), using Bloch’s theorem [118]. For the EDL device described
in this chapter, the lowest band’s first five Fourier coefficients were β1 = −9.70 cm−1,
β2 = 1.06 cm−1, β3 = −0.190 cm−1, β4 = 0.04 cm−1, and β5 = −0.01 cm−1.
In the EDL CCOW device presented here, the tolerance of achieving a discontinuous
break in the R (v) curvature profile is limited by the accuracy of PLC fabrication using
photolithography, which is on the order of ∼ 1 µm. Setting a = 1 µm (which is 0.02% of
one period, Λ = 5 mm), Pnot EDL = 3.5× 10−20 for a four-period (m = 4) structure, and
Pnot EDL = 2.2× 10−3 for a one-billion-period (m = 109) structure.
Hence, the nearly-discontinuous ac curvature profiles used in the CCOW devices,
while not truly discontinuous, do effectively demonstrate EDL to an excellent degree.
Chapter 4. Exact Dynamic Localization 75
4.5 Future Work
While the demonstration of exact dynamic localization using an ac square-wave was
indeed a successful first step, more complex discontinuous ac curvature functions should
now be studied. A set of “deviated square-wave” (DSW) ac profiles satisfying the EDL
requirement defined in Eq. (4.22) has been proposed by Wan [126]:
R (v) =
Ro
2
√(1− α)2 + 16αv/Λ for 0 ≤ v ≤ Λ/4
Ro
2
√(1− α)2 + 16α (0.5− v/Λ) for Λ/4 ≤ v ≤ Λ/2
, (4.28)
where Ro is defined in Eq.(4.24). This family of curves is illustrated in Fig. 4.15 for both
positive and negative values of α.
0.0 0.5 1.0
0
-R0/2
R0/2
R
= 0
(square-wave)
= 0.52
= -0.52
0.0 0.5 1.0
0
-R0/2
R0/2
R
= 0
(square-wave)
= 0.52
= -0.52
0.0 0.5 1.0
0
-R0/2
R0/2
R
= 0 (square-wave)
= 0.52
= -0.52
Figure 4.15: Deviated square-wave ac-field profiles for future EDL demonstrations.
Wan has also proposed a set of combined ac+dc fields to produce so-called quasi-
Bloch oscillations (QBO), promising very interesting results in a new class of optical and
quantum behaviour. The DSW and the QBO experiments have not yet been published.
Further work on the optical filtering characteristics of these CCOW devices should
also be investigated. Specifically, preliminary theoretical investigations of finite wave-
Chapter 4. Exact Dynamic Localization 76
guide arrays have shown to improve the performance of traditional straight-waveguide
directional couplers for power tapping and WDM filtering, leading to interesting optical
signal processing devices in the linear and nonlinear regimes.
4.6 Conclusion
This is the first time in any system that (1) the evolution of DL has been spatially
mapped, and (2) exact dynamic localization has been shown experimentally. In this
chapter, optical EDL was demonstrated over four periods in the optical domain, using
non-NNTB CCOW arrays, driven by an ac square-wave field. Novel observation tech-
niques (staggered experiments and the output slab technique) were employed to obtain
the device dynamics demonstrating EDL beam evolution and wavelength dependence at
the two- and four-period planes of the device, respectively. The beam had an oscillation
amplitude of ±4 waveguides, and was resonant at 1555 nm. The devices showed excel-
lent correspondence with theory as predicted by the one-band Schrodinger model, and
in very close agreement with the design targets (within 0.32%). The EDL tolerance of
fabricating the field discontinuities in optical waveguide arrays was within 10−20 for a
four-period device.
Future experiments to extend the scope of this work include deviated square-wave
ac fields for EDL demonstrations, and ac+dc fields for quasi-Bloch oscillation demon-
strations. This work is among a growing body of research aimed toward the use of
quantum theory for the advent of improved and/or brand new optical signal processing
functionality in PLC devices.
Chapter 5
Side-Coupled Integrated Spaced
Sequence of Resonators
5.1 Introduction
Microresonator-based integrated optical devices have attracted much recent attention,
particularly in optical signal processing applications for telecommunications [28]. Config-
ured in a parallel-cascaded array, side-coupled integrated-spaced sequences of resonators
(SCISSORs) have been shown to demonstrate high-order optical filtering [127], and are
promising candidates for fixed and tunable optical delay lines [43, 64]. A schematic of a
SCISSOR is presented in Fig. 5.1, illustrating a series of rings positioned between two
straight bus waveguides. When many rings are present, the behaviour of the SCISSOR
approaches that of an infinite photonic bandgap (PBG) structure. The interplay be-
tween the direct Bragg bandgaps and the indirect resonator bandgaps permit the design
of dispersion compensators and other bandgap-engineered devices [43,44]. Furthermore,
if implemented in materials with high optical nonlinearity, SCISSORs can be used to
demonstrate phenomena such as optical switching, optical limiting, temporal solitons,
gap solitons, pulse compression [43,45,46] and optical logic [47].
77
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 78
Figure 5.1: Schematic of a five-ring SCISSOR.
The fabrication of a many-period SCISSOR would establish “fully” formed Bragg
peaks in the reflection spectrum, with intensities commensurate with the resonator peaks.
Chen et al. recently fabricated a 36-period SCISSOR structure in polymer consisting of
72 rings (2 rings per period) to demonstrate high-order filtering [48]. Similar devices,
with serially coupled rings (called “coupled resonator optical waveguides”, or CROWs),
have been fabricated with up to 100 rings in silicon-on-insulator and polymer (both with
relatively small nonlinearity compared with aluminum gallium arsenide) [36, 58]. To
date, however, experimental demonstrations of microresonator devices in high index and
highly nonlinear III-V semiconductor materials have been limited to a maximum of three
rings [26, 27] due to extremely tight fabrication tolerances and processing limitations.
The challenge: Can a SCISSOR PLC device with more than three rings be fabri-
cated successfully in a highly nonlinear III-V semiconductor? If so, how many rings are
necessary to empirically demonstrate a fully formed Bragg gap (i.e., where the Bragg
and resonator features at the drop port are of equal intensity)?
In this chapter, the performance of one-, two-, four- and eight-ring AlGaAs SCISSORs
are presented. Section 5.2 describes the transfer matrix model used to simulate the
SCISSOR performance. Section 5.3 presents the device design, followed by details of the
device fabrication and characterization in Section 5.4. Future work and conclusions are
presented in Sections 5.5 and 5.6, respectively.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 79
5.2 The SCISSOR Model
The tight bend radii required for the microresonators necessitate the use of high refractive
index contrast waveguides. In order to minimize the number of supported modes in
these waveguides, their widths must be limited to less than 1 µm, and are hence termed
“nanowires”. Because of the SCISSOR’s inherent periodicity, a semi-analytic matrix
approach was used to describe its behaviour, incorporating the Hamiltonian coupled
mode theory approach (described in Chapter 2) to describe the coupling regions.
A racetrack geometry for the microresonator was chosen to relax the fabrication toler-
ances of the gap between the ring and the straight waveguide channel [27]. The SCISSOR
was broken into individual unit cells as shown in Fig. 5.2, where L is the length of each
cell, r is the bend radius of the racetrack, ∆z is the coupling length of the parallel
directional coupler regions, g is the coupling gap, ϕ is the (unitless) amplitude cross-
coupling coefficient, and σ is the (unitless) amplitude through-coupling coefficient (such
that ϕ2 + σ2 = 1) (see Chapter 2). Using these parameters, the relationship between the
electric fields at the upper and lower right side of the cell can be written as a function of
the electric fields at the upper and lower left side of the cell, and expressed in the form
of a 2× 2 transfer matrix, M :
E+low,right
E−up,right
= M ×
E+low,left
E−up,left
. (5.1)
For a system with N periods, the overall transfer function of the system is MN .
Using the Hamiltonian formulas (Eqs. (2.43)) to describe the coupling region between
the straight channel and the racetracks, the final transfer matrix (Eq. (5.1)) of the unit
cell becomes
M =1
2iσsin(
πωωR
)
A ϕ2
−ϕ2 D
(5.2)
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 80
E-up,rightE
-up,left
E+
low,left E+
low,right
r
z
L
g
Figure 5.2: Unit cell of SCISSOR.
where
A = eiπωωB
(e
iπωωR − σ2e
−iπωωR
), (5.3)
D = e−iπωωB
(σ2e
iπωωR − e
−iπωωR
), (5.4)
ωB =πc
Lnb(ω), ωR =
πc
nb(ω)Lr/2, (5.5)
where Lr is the circumference of the racetrack, nb is the frequency dependent effective
index of the spatial mode in one waveguide, and ωB and ωR are the Bragg and ring
resonance frequencies, respectively.
5.3 Device Design
In this section, the design details of the SCISSOR devices are presented: the nanowire
design based on FDMA simulations in Section 5.3.1; the nanowire directional couplers
(between each resonator and the bus nanowires) in Section 5.3.2; and the SCISSOR
devices themselves in Section 5.3.3.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 81
5.3.1 Nanowire Design
The computed losses (FDMA) for nanowires (in 70/20/70 AlGaAs, Section 3.4) of varying
widths are plotted against etch depth in Fig. 5.3. As the nanowire width is reduced, the
mode is squeezed downwards into the substrate, resulting in higher losses due to substrate
leakage. For nanowire widths smaller than 500 nm, an etch depth greater than 2.5 µm
is required to keep losses smaller than 1 dB/mm, while for widths 500 nm and larger, an
etch depth of 2.0 µm is sufficient. While these theoretical simulations predict satisfactory
nanowire performance, the nanowire sidewall surface roughness was expected to introduce
much higher losses (on the order of 10s of dB/mm) [106].
The nanowire design selected for the SCISSORs was chosen to have a width of 500 nm,
and a 2.0 µm etch depth. The computed fundamental mode (using FDMA) of this
nanowire is shown in Figs. 5.4(a) and (b) (linear and dB scale, respectively). The dB
plot highlights the energy residing beneath the ridge giving rise to the substrate leakage
losses plotted in Fig. 5.3.
1.4 1.5 1.6 1.7 1.8 1.9 2.0 2.1 2.2 2.3 2.4 2.5 2.6
0
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
34
Loss (
dB
/mm
)
Etch Depth (microns)
573 nm width
500 nm width
350 nm width
250 nm width
Figure 5.3: Nanowire loss versus etch depth.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 82
0
-40
-80
-120
-20
-60
-100
0
0.4
0.8
0.2
0.6
1(a) (b)
Figure 5.4: Fundamental mode of a 500 nm wide nanowire with a 2.0 µm etch depth: (a)linear scale, (b) dB scale.
5.3.2 Nanowire Directional Coupler Design
The design of stand-alone nanowire directional couplers (employed twice in each SCIS-
SOR racetrack cell) is described in this section. A set of six independent nano-DCs with
varying lengths were designed using the 70/20/70 AlGaAs wafer. The target design pa-
rameters were as follows: waveguide width = 500 nm, etch depth = 2.0 µm, coupling gap
= 200 nm, and coupling lengths ranging from 11 µm to 61 µm in increments of 10 µm.
Fig. 5.5 shows the mask layout of the 11 µm and 21 µm nano-DCs, where the white
regions within the coloured borders define the two adjacent coupled waveguides. Note
the wide 2.5 µm input and output waveguides for improved coupling efficiency with the
free-space focused beam, and the 30 µm long linear adiabatic tapers leading into and
out of the nanowire device region. This taper length (which was computed to have a
transmission efficiency of 74.5% using FDTD (Lumerical Inc. “FDTD Solutions”)) was
chosen to minimize the overall device loss: a compromise between transmission efficiency
and overall device length. The performance of the nano-DC is presented in Section 5.4.1.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 83
11 m
21 m
2.5 m
Directional Coupler
Regions
Linear taper
Input
Waveguide
Input
Waveguide
Waveguide
A
Waveguide
B
Waveguide
A
Waveguide
B
Linear taper
Figure 5.5: Mask design of the 11 µm and 21 µm nanowire directional couplers (wave-guides are coloured white).
Validation of the HCME using a Restricted Basis
To ensure that the supermodes of the nano-DC can indeed be well approximated by
the restricted Hamiltonian basis modes of the individual single waveguides (as outlined
in Section 2.3), we plot in Fig. 5.6 the eigenfrequencies computed using Eq. (2.26) with
respect to k, and compare them with the dispersion relation of the two supermodes of the
two-waveguide structure. In this plot, we observe that the two computed eigenfrequencies
(the points) evaluated at 1585 nm are situated within 0.1% of the dispersion curves of
the two supermodes, showing excellent correspondence with the two-waveguide system.
Using both the supermode ∆k method (Section 2.2) and the HCME (Section 5.3.2),
the half-beat coupling length of the nano-DC was computed to be 22.0 µm.
5.3.3 SCISSOR Design
The target design parameters of the SCISSOR racetracks (see Fig. 5.2) were as follows:
waveguide width = 500 nm, etch depth = 2.0 µm, coupling gap, g = 200 nm, ring radius,
r = 5.25 µm, and a coupling length, ∆z = 5 µm. The resulting resonator circumference
was Lr = 43.0 µm.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 84
1.14 1.15 1.16 1.17 1.18 1.19 1.2 1.21 1.22
x 107
6.2
6.25
6.3
6.35
6.4
6.45
6.5x 10
5
Wave number k [m-1
]
Norm
alize
d F
req
uen
cy
/(
2
c)
[m
-1]
Figure 5.6: Dispersion relation for the SCISSOR. Solid lines are the dispersion relation ofthe two supermodes; the points are the two eigenfrequencies computed from the restrictedbasis analysis.
The separation between the racetracks, L, was 21.65 µm to produce interlaced Bragg
peaks with approximately the same free-spectral-range (FSR) as the ring resonance,
around the 1550 nm telecommunications band (see Appendix C). While the actual
500 nm nanowire width exceeds the single-mode cutoff width of 250 nm, the higher order
modes experience over 41× greater theoretical loss than the fundamental mode due to
substrate leakage and bend losses (computed using FDMA). Etching through the core
layer provides sufficient index contrast to effectively reduce the radiation losses around
the r = 5.25 µm bend to less than 0.001 dB/90o (computed using FDMA). The confined
mode in the bent waveguide is shown in Fig 5.7.
Sets of one-, two-, four-, and eight-ring devices were patterned in the 70/20/70 wafer.
TM polarization was chosen because of low field intensities at the air-AlGaAs boundaries
(not the case for TE polarization), resulting in lower scattering losses arising from sidewall
roughness. Details of the SCISSOR performance are presented in Section 5.4.2.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 85
0
0.4
0.8
0.2
0.6
1
Figure 5.7: Fundamental mode of a bent 500 nm wide nanowire with a 2.0 µm etch depthand a 5.25 µm bend radius.
5.4 Device Fabrication and Characterization
The devices were first patterned into PMMA resist, using e-beam lithography, and sub-
sequently etched (using C2F6) into a 300 nm thick layer of PECVD silica that served as
a hard mask. The pattern was then etched into the AlGaAs wafer using SiCl4. The chips
were fabricated by colleagues at the James Watt Nanofabrication Centre at the University
of Glasgow, Scotland, UK. Due to photoresist adhesion issues, the patterns were slightly
underdeveloped, resulting in larger waveguide widths, and consequently smaller coupling
gaps. The measured post-etch waveguide width, coupling gap and etch depth were found
to be 570±10 nm, 130±10 nm, and 1.83±0.06 µm, respectively. The measurements were
performed from SEM images using the scale defined by the centre-to-centre separation
of the waveguides (i.e. 700 nm). An SEM closeup of one of the SCISSOR rings, and an
SEM of the eight-ring SCISSOR device are shown in Figs. 5.8 and 5.9, respectively.
Using the post-etch measurements, the effective and group indices of the fundamental
TM mode at 1580 nm were computed to be 2.952 and 3.524, respectively, for a straight
channel, and 2.960 and 3.547, respectively, for a 5.25 µm radius bend. The post-cleaved
chip length was measured to be 1.39 ± 0.01 mm. The group index of the wider and
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 86
Figure 5.8: SEM closeup of one racetrack.
21.65 mIN
REFLECTION (R)
TRANSMISSION (T)
Figure 5.9: SEM of fabricated eight-ring SCISSOR.
significantly longer input and output waveguides was computed to be 3.419. Based on
these group indices, the average group index of the 180 µm-long eight-ring SCISSOR
device was expected to be 3.431.
Numerical simulations of the z-dependent coupling in the nano-DC using coupled
mode theory show that the effective coupling length was 8.1 µm, (or 62% larger than the
5 µm straight section, as illustrated in Fig. 5.10). This increased effective coupling length
results in a cross-coupling coefficient of ϕ2 = 0.25. Theoretical analyses of z-dependent
coupling through DCs can be found in the following references: [128], [129] and [130],
while experimental observations can be found in [89,130].
The experimental setup consisted of a collimated wavelength-tunable CW beam fo-
cused into the front-facet of each chip using a 60x microscope objective lens. A half-
waveplate + polarizer combination was used to select TM polarized light for the launch.
The beam from the chip’s end-facet was captured using a 40x microscope objective and
imaged onto a the active area of a power meter. Care was taken to factor out the losses
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 87
Figure 5.10: Effective coupling length of nano-DC in the SCISSOR.
and wavelength dependence of the experimental system. An iris mounted on a translation
stage was used to select the desired output (i.e., either channel A or B of the nano-DC,
or either transmission or reflection port of the SCISSOR).
5.4.1 Nanowire Directional Coupler Characterization
The TM supermodes of the nano-DC were computed using the post-etched geometries
listed above (Section 5.4); the lowest order TM supermode is shown in Fig. 5.11. Note
the sloping post-etched floor, resulting in a reduced etch depth between the waveguides.
The normalized transmission, TA,B, at the output ports, A and B, of each directional
coupler (see Fig. 5.5) is plotted in Fig. 5.12: TA = PA/(PA + PB), and TB = PB/(PA + PB),
where PA and PB are the powers measured at ports A and B, respectively. Sinusoidal and
cosinusoidal curve-fits illustrate excellent performance of the nanowire directional cou-
pler, whose measured half-beat coupling length was determined to be 21.4 µm (within
2.6% from the predicted value of 22.0 µm).
The average propagation loss (over the chip length, including the wide input and
output waveguides, tapers, and nanowire DC region) was 2.4 ± 0.5 dB/mm, calculated
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 88
0
0.4
0.8
0.2
0.6
1
Figure 5.11: Lowest order TM supermode of a nanowire directional coupler with 570 nmwide nanowires, separated by 130 nm.
from the Fabry Perot fringes (not shown in Fig. 5.12) that were established between the
uncoated facets of the 1.39± 0.01 mm long chip [131].
TB TA
Directional Coupler Length ( m)
Norm
aliz
ed T
ransm
issio
n
0 10 20 30 40 50 600.0
0.2
0.4
0.6
0.8
1.0
Channel A (Experimental)
Channel A (Fit)
Channel B (Experimental)
Channel B (Fit)
Figure 5.12: Normalized transmission, TA and TB, of the nanowire directional couplerwith 570 nm wide nanowires, separated by 130 nm.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 89
5.4.2 SCISSOR Characterization
The measured and simulated reflection spectra of the one-, two-, four- and eight-ring
SCISSOR devices are shown in Fig. 5.13, where the coupling loss (estimated to be 60.1%
using Gaussian beam analysis [123]) and Fresnel losses (28% per surface over the wave-
length range used in the experiment) have been factored out. The HCMT-based matrix
model (Section 5.2) was used to simulate the devices, taking into account the reflections
from the chip’s input and output facets. In each device, the resonator peaks at 1595 nm
and 1612 nm are clearly distinguished. As the number of rings is increased from one
to eight, the Bragg peaks emerge and grow at 1587 nm, 1603 nm, and 1620 nm, with
a reduction in the overall throughput because of increased propagation losses through
the longer structures. Note that the height of the Bragg peak at 1620 nm is larger than
the resonator peaks for the eight-ring SCISSOR, achieving the desired goal of producing
Bragg and resonator peaks of “equal” intensity.
Analyzing the eight-ring SCISSOR spectra, both resonator and Bragg resonances are
seen to have an FSR of 17±0.5 nm. The high frequency ripple was caused by the Fabry-
Perot cavity established between the chip’s uncoated facets, and used to determine the
average group index of the waveguides to be 3.428 (−0.4%), as expected. The reader
is directed to Appendix C for the relationship of a filter’s spectrum with its group and
effective indices.
The measured Bragg and ring spectral features agree very well with the spectrum
generated using the HCMT matrix model. Adjusting the parameters of the model to
fit the data, the actual effective index of the straight channels at 1586 nm was found to
be 2.931 ± 0.001 (−0.7%), the effective index of the ring waveguides was 2.934 ± 0.001
(−0.6%), and the cross-coupling constant, ϕ2, was 0.28±0.05 (+12%). The parenthetical
percentage values describe the difference of the measurements with respect to the design
targets. The large discrepancy between the measured and expected cross-coupling con-
stant, ϕ2, is attributed to the model’s inaccurate assumption that the 130 nm gap of the
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 90
1580 1590 1600 1610 1620 16300
2
4
6
8
10
Th
rou
gh
pu
t (%
)
Wavelength (nm)
4-Ring SCISSOR
Th
rou
gh
pu
t (%
)
Wavelength (nm)
1580 1590 1600 1610 1620 16300
1
2
3
4
5
6
7
Th
rou
gh
pu
t (%
)
Wavelength (nm)
8-Ring SCISSORT
hro
ug
hp
ut
(%)
Wavelength (nm)
1580 1590 1600 1610 1620 16300
2
4
6
8
10
12
Th
rou
gh
pu
t (%
)
Wavelength (nm)
1-Ring SCISSOR
Th
rou
gh
pu
t (%
)
Wavelength (nm)
1580 1590 1600 1610 1620 16300
2
4
6
8
10
12
Thro
ug
hp
ut
(%)
Wavelength (nm)
2-Ring SCISSOR
Th
rou
gh
pu
t (%
)
Wavelength (nm)
Measurement
HCMT Matrix Model
Figure 5.13: Measured and simulated reflection spectra of the one-, two-, four- and eight-ring SCISSOR devices.
nano-DC is large enough that the sum of the two lowest-order supermodes is equivalent
to the mode in an individual waveguide (see Section 2.2).
The loss parameters for the straight channel and ring were 6.5 ± 0.3 dB/mm and
12.2±0.3 dB/mm, respectively. The higher ring loss was attributed to sidewall-roughness
scattering from the spatial mode’s off-centre centroid around the bend. The straight chan-
nel loss was 22% lower than previous reports conducted in the same 70/20/70 AlGaAs
wafer [106]. New equipment and improved processes have yielded losses in straight chan-
nels of less than 1 dB/mm since the fabrication of the devices presented here.
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 91
The devices performed significantly better with TM polarization than with TE, as
expected. The simulation runtime using the HCMT was approximately 2 seconds (on a
2 GHz PC with 1 GB of memory), significantly shorter than ∼ 10 hours for an equivalent
2D FDTD simulation.
5.5 Future Work
5.5.1 Nanowires: Future Work
While the work presented in this chapter has dealt primarily with SCISSOR, a set of
detailed experiments should be carried out on the performance of nanowires. A list of
topics are listed below:
• While linear tapers were used in the reported devices, an optimization on taper
shape and length should be experimentally characterized.
• A recent study of nanowire behaviour has discovered a regime of anomalous group
velocity dispersion for the TE polarization for nanowire widths between 290 nm to
670 nm (see Fig. 5.14). This work, which has not yet been published, encourages
further research in the generation of nanowire guiding temporal solitons [106, 132]
and wavelength converters based on four-wave mixing.
• Studies on solitons in nano-DCs should also be conducted.
• Spatial solitons in nanowire waveguide arrays, as well as WDM filtering using
CCOWs (Chapter 4) should also be a rich field for investigation.
5.5.2 SCISSORS: Future Work
Measurements of the group delay, group velocity, and group velocity dispersion of the
SCISSOR structures using an externally-modulated tunable laser and an RF lock-in
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 92
0.2 0.4 0.6 0.8 1.0 1.8 2.0-6
-5
-4
-3
-2
-1
0
1
2
3
" [p
s2 m
-1]
Waveguide Width [µm]
TM00
TE00
Region of
anomalous
dispersion
Figure 5.14: Group velocity dispersion versus nanowire width at 1550 nm, illustratingregion of anomalous dispersion for TE polarization. Solid lines are based on simulations;circles are experimentally measured data points.
amplifier [133] are currently underway. The temporal linear and nonlinear response of the
nano-DC and SCISSOR devices will soon be characterized with a long pulse (∼ 100 ps)
laser.
The reduction in losses of all nanowire based devices should be one of the primary
goals in this field. In parallel, SCISSORs built in gain media should be investigated for
the study of micro/nano lasers and other active devices.
5.6 Conclusion
This chapter described the the first report of the fabrication and characterization of an
eight-ring SCISSOR in a highly nonlinear III-V material system, namely AlGaAs. At
least eight rings were found to be necessary to fully form the Bragg gap in a SCISSOR
structure. A matrix-based Hamiltonian coupled mode theory model was used, and found
to be a fast and useful design tool in modeling high-index contrast nanowire structures,
predicting the behaviour of the devices in excellent agreement with experiments. Further
Chapter 5. Side-Coupled Integrated Spaced Sequence of Resonators 93
investigation is required to reduce the losses of the device.
The eight-ring SCISSOR presented here is a significant step towards the goal of ob-
serving PBG phenomena in both the linear and nonlinear regime.
Chapter 6
All-Optical Controllable Delay Line
6.1 Introduction
Planar lightwave circuits are ideal candidates to address the issues currently faced by
electronics in microchip data communications [52] due to their small size, wide band-
width, increased transmission speed, decreased power consumption, and immunity to
electromagnetic noise and temperature changes [53]. In order for these PLC intercon-
nects to successfully integrate with their electronic counterparts, they must provide both
multi-bit switchable optical buffering capabilities greater than 100 bits (for packet syn-
chronization) and greater than several hundreds of bits (for packet switching) [51], as
well as continuous sub-bit delay tunability [52].
Novel schemes have been proposed to demonstrate slow light pulse propagation by
changing the effective optical path length at (or near) material resonances or by engineer-
ing the dispersion characteristics of the system [50, 51, 57, 59, 64, 65, 134–137]. Typically,
delays of only several bits have been achieved by these techniques. Alternatively, very
large delays (on the order of 100000s of bits) can be attained by employing optical
switches and long physical path lengths, such as those used in fiber-based buffering ap-
plications [138–140]. These latter systems are both very large (∼ 100 m), and sensitive
94
Chapter 6. All-Optical Controllable Delay Line 95
to thermal effects – rendering them unsuitable for microchip interconnects.
On-chip planar lightwave circuitry provides a stable integrated platform for inter-
mediate delays, ranging from sub-bit to 100s of bits. Microresonators have been stud-
ied to provide on-chip delays, but suffer from narrow bandwidths and extremely high
losses [31, 33, 35–37, 40, 41, 49, 58–69]. An alternative approach using simple differing-
length waveguides has already promised to offer much lower losses with significantly
higher bandwidths [58]. A switchable PLC delay was recently reported with switching
times only on the order of a few ms [70], and thus incapable of handling the next-
generation data rates of 40 Gbit/s to 1 Tbit/s [50, 51].
The challenge: Can an PLC switchable optical delay line be fabricated with the
following specifications: greater than 100-bit delay, capable of handling pulse widths
on the order of 1 ps, a chip size of ∼ 10 mm × 10 mm (i.e. the size of a standard
microelectronics chip), relatively low loss (i.e., much less than 20 dB), and a switching
time on the order of 1 ps or less?
In this chapter, the design and performance of a low-loss all-optical controllable delay
line PLC in AlGaAs is described that uses an ultrafast nonlinear optical switch to select
between a 0-bit or a 126-bit delay, operating at room temperature, over telecommunica-
tion wavelengths, with a bit-length of 1.5 ps.
The design and fabrication of the device is presented in Section 6.2, followed by the
experimental results in Section 6.3. Section 6.4 discusses the design of an improved
second-generation delay line device. Section 6.5 offers a discussion on extending the
PLC delay-line for both discretely-tunable and continuously tunable delays, followed by
concluding statements in Section 6.6.
6.1.1 Nonlinear Directional Coupler Behaviour
The description of the nonlinear behaviour of a two-waveguide directional coupler is
presented in this section, following Jensen [82].
Chapter 6. All-Optical Controllable Delay Line 96
0
0.2
0.4
0.6
0.8
1
Pin = 0.1 Pc
Pin = Pc
Pin = 5 Pc
z
No
rma
lize
d P
ow
er i
n
Wa
veg
uid
e A
Lc 2Lc 3Lc
All power
in A
All power
in B
Figure 6.1: Behaviour of a nonlinear directional coupler versus propagation distance.
The behaviour of the DC is plotted versus propagation length, z, in Fig. 6.1, at three
power levels: 0.1Pc, Pc, and 5Pc. The three curves are normalized to their respective
input powers, and are referenced to the half-beat length, Lc, on the abscissa. At low
powers (i.e. in the linear regime), the DC is seen to efficiently transfer energy completely
from one channel to the other; at the so-called critical power, Pc, the power transfer
asymptotically approaches 50%; and at high powers, the energy remains confined in the
input waveguide, and exhibits only low-amplitude high-frequency oscillations incurred by
dephasing Kerr effects in the input waveguide. The definition of the critical power (in SI
units) is [82],
Pc =κλoAeff
πn2
. (6.1)
The switching curve of a half-beat length NLDC is shown in Fig. 6.2, where the output
versus the input intensity is plotted with respect to the input power (normalized to the
critical power, Pc). At low powers, all the light emerges from waveguide B, while at
sufficiently high powers, all the light emerges from waveguide A.
Chapter 6. All-Optical Controllable Delay Line 97
0 1 2 3 4 50
0.2
0.4
0.6
0.8
1
Pin / Pc
All power
in A
All power
in B
No
rma
lize
d P
ow
er
in W
ave
gu
ide
A
Figure 6.2: NLDC switching curve for a half-beat length coupler.
6.2 Optical Delay Line: Design and Fabrication
The self-switched all-optically controllable delay line (OCDL) was implemented using a
nonlinear directional coupler (NLDC) switch, in which a pulse, depending on its intensity,
traverses either the delayed or undelayed path through the chip. The default path tra-
versed by the low-intensity pulses is layout specific; schematic examples of an undelayed-
and delayed-default device are illustrated in Fig. 6.3 and Fig. 6.4, respectively. In both
schematics, the NLDC is a half-beat length coupler (see Section 6.1.1).
For the first-generation device, the delayed-default layout (Fig. 6.4) was chosen to
minimize wafer real-estate. The device functions as follows: at low intensities, the light
fully couples from the straight-channel bus waveguide into the delay-racetrack through
the half-beat length directional coupler. Upon one full cycle through the delay line,
the light fully couples back into the bus, thereby incurring the fixed-time delay. At
high intensities, the instantaneous nonlinear index change induced in the bus waveguide
switches the directional coupler such that the pulse exits the structure undelayed.
Chapter 6. All-Optical Controllable Delay Line 98
NLDC
NLDC Delay Line
Figure 6.3: Schematic of the undelayed-default OCDL.
6.2.1 OCDL Design
The delayed-default OCDL was designed using the 24/18/24 AlGaAs wafer (Section 3.4),
and patterned to produce the straight bus channel (serving as the chip’s input and out-
put), and the racetrack delay line, coupled together using the NLDC. Because of the
instantaneous response of the Kerr nonlinearity in AlGaAs, this device is considered an
ultrafast switch, capable of switching on timescales much shorter than 1 ps. The NLDC
was designed to have a half-beat coupling length, Lc = 2.0 mm. The racetrack, was de-
signed with 2.0 mm straight sections and 2.0 mm bend radii, resulting in a circumference
of L = 16.57 mm.
NLDC
Delay Line
Figure 6.4: Schematic of the delayed-default OCDL.
Chapter 6. All-Optical Controllable Delay Line 99
The single-mode waveguides were designed at a wavelength of 1550 nm. The in-
plane confinement was achieved by photolithography and dry etching of 3.65 µm wide
waveguides. Full vectorial finite difference modal analysis (FDMA) was used to determine
that a 2.0 µm deep etch was required to limit radiation losses around the 2.0 mm radius
racetracks to 0.62 dB per roundtrip. The resulting fundamental mode had a third-order
effective area of 6.25 µm2 [96], an effective refractive index of 3.258, and a group index
of ng = 3.423 (for both TE and TM polarizations). With this waveguide structure, the
target NLDC centre-to-centre waveguide separation was 4.9 µm (i.e., a waveguide gap
of 1.25 µm). Transition losses (incurred from the modal mismatch between the straight
and curved portions of the racetrack), calculated to be only 0.12 dB per transition, were
not compensated in this first-generation device. The lowest order linear TE supermode
of the NLDC is shown in Fig. 6.5. Based on the racetrack-geometry and the computed
group index, the estimated pulse delay was expected to be Lng/c = 189 ps at 1550 nm.
The dependence of group index with respect to wavelength introduces only a ±0.6 ps
variation in the delay.
Because the etch extends 0.5 µm into the wafer’s core layer, a slight polarization
dependence was expected. From the supermode ∆k method (Section 2.2), the half-beat
coupling lengths were determined to be LcTE= 1.85 mm, and LcTM
= 2.11 mm, for
0
0.4
0.8
0.2
0.6
1
Figure 6.5: Lowest-order TE supermode of the NLDC.
Chapter 6. All-Optical Controllable Delay Line 100
the two polarizations, respectively. This corresponds to linear coupling coefficients of
κTE = 0.84 mm−1 and κTM = 0.74 mm−1, respectively.
6.2.2 Device Fabrication
The devices were patterned onto an 8 mm × 6 mm 24/18/24 AlGaAs chip using stan-
dard photolithographic techniques with hard-contact mask alignment (see Appendix B).
The post-etched device geometry parameters were measured using scanning electron mi-
crographs (see Figs. 6.6 and 6.7): waveguide width = 3.63 ± 0.05 µm, waveguide gap
= 1.28 ± 0.05 µm, and etch depth (to the wall-floor corner) = 2.00 ± 0.05 µm. Be-
cause of the floor-tilt, the actual etch depth was slightly deeper, resulting in stronger
confinement, consequently increasing the actual half-beat length of the coupler. The
post-etched device was then remodeled to determine the actual third-order effective area
to be Aeff = 6.05 µm2, and the actual half-beat lengths for TE and TM polarizations to
be LcTE= 2.38 mm and LcTM
= 2.71 mm, respectively. TE polarization was therefore
chosen, since the LcTEwas closer to the target Lc = 2.0 mm.
Because the fabricated half-beat coupling length was longer than the 2.0 mm cou-
pling length defined by the mask layout, the NLDC was actually undercoupled, allowing
only 90% of the light into the delay line. Following Jensen [82] (whose analysis describes
Figure 6.6: SEM top view of the OCDL’s nonlinear directional coupler.
Chapter 6. All-Optical Controllable Delay Line 101
Figure 6.7: SEM of the OCDL waveguide cross section.
continuous-wave light), this undercoupling resulted in a modified switching curve (com-
pared with a half-beat length NLDC), as illustrated in Fig. 6.8. The NLDC critical power
was computed to be Pc = 224 W for TE polarization.
For temporally Gaussian pulses, the OCDL device performance would suffer because
the low-intensity wings of the optical pulses would be inevitably coupled through the di-
rectional coupler into the delay racetrack, as illustrated in Fig. 6.9. This “temporal-wing”
effect consequently reduces the achievable contrast between the switched and unswitched
states, if measured on a time-averaging photodetector [73].
Chapter 6. All-Optical Controllable Delay Line 102
in c
ou
tin
1.8
Figure 6.8: Calculated switching curves of the fabricated NLDC and a half-beat lengthNLDC.
Figure 6.9: The inevitable delay of the low intensity wings of a temporal pulse.
Chapter 6. All-Optical Controllable Delay Line 103
6.3 Experiment and Results
6.3.1 Experimental Setup
The experimental setup is shown in Fig. 6.10. A Ti:sapphire pumped optical parametric
oscillator (OPO) laser at a repetition rate of 78.8 MHz produced nearly transform-limited
pulses, whose centre wavelength was tunable from 1530 to 1610 nm, with a spectral width
of 2 nm. An autocorrelation [141] of the laser pulses is plotted in Fig. 6.11, with a full-
width half-maximum (FWHM) width of ∆τFWHMauto = 2.17 ps. The actual FWHM width
of the pulses (assuming a Gaussian profile) is ∆τFWHM = ∆τFWHMauto /1.41 = 1.54 ps.
The launch power was varied using a motorized continuously rotatable half-waveplate
+ polarizer combination. The pulses were launched into and out of the bus waveguide
using x40 microscope objective lenses (with a focal length of 4.5 mm). Care was taken
to properly factor out the losses and wavelength dependence of the experimental setup.
Fresnel reflection losses of 28% at the front cleaved facet of the chip and a 70% mode
overlap resulted in a 50.4% coupling efficiency into the chip; the maximum average power
launched into the chip (i.e., just inside the front facet) was Pave = 51.7 mW.
NLDC
Racetrack
25 GHz
Photodetector
Data Analyzer
Lens Lens
Delayed &
Undelayed
Output
PulsesHalf-waveplate
Polarizer
OPO
Figure 6.10: Schematic of the OCDL experimental setup.
Chapter 6. All-Optical Controllable Delay Line 104
Figure 6.11: Low-power autocorrelation of the OPO pulse.
Peak Power versus Average Power
The peak power of the light entering the device, Ppeak, is extracted from the measured
average power, Pave, using the following formula (assuming a Gaussian temporal pulse
profile in the form e−t2/τ2):
Ppeak =Pave
τ√
πf(6.2)
where f is the repetition rate (78.8 MHz), and τ is the 1/e temporal half-width of
the Gaussian pulse: τ = ∆τFWHM/1.665 = 0.92 ps [72]. From this calculation, the
peak power that was launched into the device was Ppeak = 402 W, which is 1.8 × Pc
(Pc = 224.1 W). With the post-fabrication effective area, Aeff = 6.05 µm2, the peak
intensity within the waveguide (inside the front facet of the chip) was therefore, Ipeak =
Ppeak/Aeff = 6.65 GW/cm2.
6.3.2 OCDL Measurements
The device was found to perform slightly better for TE polarization launch as expected
(see Section 6.2.2). The linear loss in the waveguides was measured to be 2.6 dB/cm using
Chapter 6. All-Optical Controllable Delay Line 105
the cutback method – on the same order of previous reports using the same 24/18/24
AlGaAs wafer [105]. Thus, the device loss in the delayed state (delay line length, L =
16.57 mm, plus the 8 mm chip length) was 6.4 dB.
To measure the time-resolved response of the OCDL, a BBO-crystal cross-correlator
was built (using the OPO idler pulse, ∆τFWHM = 1.15 ps, as the reference) [141]. The
device output is plotted in Fig. 6.12 at two different input powers, where the undelayed
pulse is used as the time marker, t = 0.
Because the cross-correlator was found to be impractically slow in gathering the re-
quired data, a New Focus 25-GHz InGaAs photodetector (PD) (connected to a digital
data analyzer) was used instead. Measurements of the OPO signal pulse (1.5 ps FWHM)
using the cross-correlator and the PD are compared in Fig. 6.13, revealing that the time
response of the PD broadens the pulse by ∼ 100 ps, and produces a tail extending well
past 300 ps (from its peak). Nonetheless, the PD was acceptable in resolving the rela-
tively large 189-ps delay from the OCDL device. The PD’s response scales linearly, and
exhibits a slight time slip, as a function of power, shown in Fig. 6.14.
0
1
2
3
x 10
-3
2
2
Figure 6.12: Cross-correlation of device output and OPO idler.
Chapter 6. All-Optical Controllable Delay Line 106
-100 0 100 200 3000.0
0.2
0.4
0.6
0.8
1.0
No
rma
lize
d
Inte
nsity (
GW
/cm
2)
Time (ps)
Figure 6.13: Cross-correlation of 1.5 ps OPO input pulse (solid magenta line) comparedwith its impulse response measured on the fast photodetector (dashed blue line).
0 200 400 600
Inte
nsity (
arb
. u
nits)
Time (ps)
Increasing Intensityfrom 0.55 GW/cm2 to
6.65 GW/cm2
Figure 6.14: PD response of 1.5 ps OPO pulse with no device in the optical path.
Chapter 6. All-Optical Controllable Delay Line 107
Because both the delayed and undelayed pulses are detected sequentially by the PD,
the measured response would result in the temporal broadening of both, and a heightening
of the delayed pulse. The measured device response with a 1550-nm TE launch using
the PD is shown in Fig. 6.15, with peak intensities (inside the front surface of the chip)
ranging from 0.55 to 6.65 GW/cm2. For comparison, simulations following Jensen’s
approach [82] are shown in Fig. 6.16 (which incorporate the time response of the PD),
showing very good agreement with the measurements. The simulations included the
temporal-wing effect of the Gaussian pulses (discussed in Section 6.2.2), but did not
include the time slip exhibited by the PD response (Fig. 6.14).
The PD easily resolved the peaks of the two broadened pulses, as expected. In order
to extract the actual peak heights of the undelayed (fast) and delayed (slow) pulses,
(Af and As, respectively) from the measured peak heights (Pf and Ps, respectively), a
deconvolution of the PD response (Fig. 6.14) was required. The normalized switching
ratios, Tf,s = Af,s/(Af + As), were characterized over a wavelength range of 1530 to
1610 nm (plotted in Fig. 6.17). As expected, the switching contrast was limited because
of the temporal-wing effect (see Section 6.2.2). The 50% crossover intensity decreases as
a function of wavelength, as illustrated in Fig. 6.18, due to the wavelength dependence of
the critical power, NLDC half-beat coupling length, coupling efficiency, and losses around
the racetrack.
Chapter 6. All-Optical Controllable Delay Line 108
2
2
Fast
Channel
Slow
Channel
Pf
Ps
Figure 6.15: Device output using the PD with a 1550 nm TE launch, 1.5 ps input pulse.
2
2
Fast
Channel
Slow
Channel
Figure 6.16: OCDL simulations.
Chapter 6. All-Optical Controllable Delay Line 109
0 1 2 30.2
0.3
0.4
0.5
0.6
0.7
0.8
Intensity (GW/cm2)
Norm
aliz
ed S
witchin
g
Ra
tio
1530 nm
1530 nm
1610 nm
1610 nm
Tf
Ts
50% crossover intensity @ 1530 nm
1 2 30 5 64
Figure 6.17: Normalized switching ratios Ts (solid line) and Tf (dashed line) from 1530 nmto 1610 nm.
1530 1550 1570 1590 16100.5
1
1.5
2
2.5
3
3.5
Figure 6.18: Wavelength dependency of the 50% crossover intensity.
Chapter 6. All-Optical Controllable Delay Line 110
6.3.3 Self Phase Modulation
The self phase modulation (SPM) of the waveguide was characterized for a stand-alone,
8 mm long waveguide. The spectral distribution over the power range is plotted in
Fig. 6.19, revealing a phase shift of ∼ 3.5π due to SPM at the maximum peak input
power of 402 W. These results agree well with previous reports of NLDC devices built
in the same 24/18/24 AlGaAs wafer [73].
Because both self- and cross-phase modulation are a function of the temporal shape of
the high-intensity pulse propagating through the waveguide [72], the spectral broadening
of the data signal can be significantly reduced by using an independent control pulse
with a temporal width larger than the signal’s [142]. Following the work presented by
Villeneuve [143], if the short signal pulse temporally lies within the slowly varying high-
power control pulse (as illustrated in Fig. 6.20), the signal pulse would incur minimal
cross-phase modulation as it propagates through the NLDC, and switch almost com-
pletely. Measurements of Villeneuve’s improved switching ratios are shown in Fig. 6.21.
0.5 5 50
1550
1570
1590
1580
1560
1540
1600
Figure 6.19: Spectral broadening.
Chapter 6. All-Optical Controllable Delay Line 111
High intensity
Control pulse
Low intensity
Signal pulse
time
No
rmaliz
ed P
ow
er
Figure 6.20: Independent control pulse to reduce spectral broadening.
Figure 6.21: Switching curves for low-power 150-ps signal pulse, and high-power 800-pscontrol pulse [143].
6.4 Future Work
Further work in this project should focus on both functional and performance improve-
ments:
• Reduce the NLDC critical power by increasing the DC half-beat coupling length.
• Delay only the switched pulse (i.e., default operation: undelayed).
• Bring the NLDC to the PLC input to maximize the power entering the switch.
Chapter 6. All-Optical Controllable Delay Line 112
• Employ an independent control pulse.
• Decrease the polarization dependence of the device.
• Decrease losses by incorporating transitional offsets between bent and straight re-
gions of all waveguide paths [144].
• Improve the NLDC switching-contrast by employing square pulses [145] or soli-
tons [146].
6.4.1 New OCDL Design
The formula for critical power, Eq. (6.1), is rewritten here for convenience:
Pc =κλoAeff
πn2
. (6.1)
In the new OCDL design, the half-beat coupling length was increased from 2 mm to
be 10 mm, which corresponds to a decrease in the linear coupling coefficient, κ, (and
consequently Pc), by a factor of 5. An independent control pulse, operating at 1500 nm,
further reduces the critical power by an additional 19.4%, noting that the Kerr nonlinear
index is a decreasing function of wavelength (see Section 3.3). With these improvements,
the newly designed critical power is expected to be only PGen2c = 36.1 W – i.e., only
0.16× PGen1c .
A schematic of the new OCDL design is shown in Fig. 6.22. Independent waveguides
couple the signal and control pulses into the two input branches of the NLDC. The new
device is configured to pass the signal through the chip undelayed, by default; only upon
the application of the control pulse will the signal be routed through the arbitrarily long
delay line. A control pulse with a temporal duration longer than the signal would reduce
spectral broadening (incurred from cross-phase modulation) and improve the switching
contrast of the device. An efficient Y-branch at the back-end combines the delayed and
Chapter 6. All-Optical Controllable Delay Line 113
the undelayed pulses onto the same output waveguide (with a 3 dB penalty). Alterna-
tively, an output switch would ensure that the signal is always emitted from the same
port with only minimal switch losses (typically less than 1 dB).
24 microns
10 mm
Radius2 mm
Signal
Control
Delay Section
Y-branchNLDC
Figure 6.22: Schematic of the second-generation OCDL.
Maximum Achievable Delay
The maximum delay achievable in our device is limited on the tolerable loss penalty (in
addition to coupling and reflection losses). Using a spiral waveguide design with a gap
between waveguides of 20 µm to maximize the PLC real-estate, an estimate of the bit-
delay (assuming a 1.5 ps bit-length) can be calculated. For a 3 dB tolerable loss penalty,
the achievable bit delay is 1181 bits, while for a 6.8 dB tolerable loss penalty, the bit
delay is 2573 bits.
6.5 Extensions and Applications
Applications such as packet control, mid-range buffering, or optical control of phased
array antennas require discretely tunable delays [147]. By cascading N OCDL stages in
series, each with an independent control, and with delays following a binary sequence
(i.e., D, 2D, 4D, 8D, ...), then any discrete delay (in increments of D) from 0 to (2N−1)D
is achievable.
Chapter 6. All-Optical Controllable Delay Line 114
For timing-jitter compensation, a device that is capable of producing continuously
tunable delays up to ∼ 1 bit-length is required. Independent temperature or electro-
optic tuning of the delay line can provide the necessary control required for the delay
adjustment. For the current device, a tunability of 1.5 ps (i.e., the bit-length) can be
achieved by a temperature change of +112o C (see Section 3.2). While this temperature
change can be achieved using local heaters on the PLC device, the tuning speed would
be limited to timescales much longer than the pulse duration. Studies on the speed of
electro-optic tuning should be conducted for faster jitter control.
6.6 Conclusion
An ultrafast self-switched all-optical AlGaAs PLC racetrack delay line was demonstrated
over the telecommunication bands at room temperature. This proof-of-principle device
achieved a delay of 126 bits using 1.5 ps, with a device loss of only 6.2 dB, on a chip size
of 8 mm × 6 mm. To date, this is the lowest loss and fastest switchable delay reported.
Alternative design layouts would permit the low intensity light to preferentially exit
the device undelayed with or without an independent control, while providing delays
spanning sub-bit to greater than 1000-bits, limited only by device losses.
Chapter 7
Summary and Conclusions
The work presented in this dissertation studied the use of coupled waveguides in three
planar lightwave circuit devices built in the aluminum gallium arsenide material system.
In Chapter 2, light confinement in optical waveguides was investigated, followed by
a study of light coupling in a two-waveguide system using two approaches: (1) the “su-
permode ∆k” method, which analyzes the two-waveguide system as a whole, and (2) the
Hamiltonian formulation of coupled mode theory. The three projects presented herein
employed different methodologies, each specifically suited to the project at hand.
Chapter 3 reviewed the optical and mechanical properties of aluminum gallium ar-
senide, making it an excellent material for planar lightwave circuits:
• The high linear refractive index minimizes PLC chip sizes.
• Its crystalline structure remains lattice-matched across the aluminum concentration
range, x (from 0 and 1).
• The material index can be varied by ∆n = 0.48.
• Its large nonlinear refractive index is well suited for all-optically controlled devices.
• Mature processes have been developed for PLC fabrication in AlGaAs.
115
Chapter 7. Summary and Conclusions 116
To minimize the detrimental effects of two-photon absorption, a lower aluminum concen-
tration limit of 14% (at 1550 nm) was respected in the two AlGaAs wafer designs used
in this work.
The work presented in this dissertation targeted optical signal processing in the spa-
tial, spectral and temporal domains. In the following three sections, a summary is pre-
sented of the solution to an identified research challenge for each project.
7.1 Exact Dynamic Localization
Because of the mathematical equivalence between the paraxial wave equation and the
Schrodinger equation, we can (a) use quantum theory to provide new insight into the
design of novel optical processing devices, and (b) use planar lightwave circuits in the
study of certain quantum effects, especially those too difficult to observe directly in the
quantum domain. One such effect, called exact dynamic localization (EDL), had not yet
been demonstrated in any system.
7.1.1 Summary: Exact Dynamic Localization
In Chapter 4, the one-band Schrodinger model was used to design an optical EDL demon-
stration using a strongly coupled curved optical waveguide array with an effectively dis-
continuous ac square-wave curvature profile.
Exact dynamic localization was experimentally demonstrated for the first time (in
any system) over four periods. Introduction of a new observation technique to accurately
image the desired waveguide plane successfully served to characterize the device’s wave-
length dependence, while a staggered-experiment approach spatially mapped the beam
evolution through the structure – the first-ever beam mapping of exact dynamic local-
ization. The devices performed in very close agreement with the design targets, and in
excellent correspondence with theory.
Chapter 7. Summary and Conclusions 117
7.1.2 Future Work: Exact Dynamic Localization
Further work in this area should investigate the empirical performance in PLCs of: (1)
EDL generated using “deviated square-wave” curvature profiles; (2) quasi-Bloch oscilla-
tions comprised of alternating plus constant field curvatures – an effect not yet demon-
strated in any system; and (3) broadband filtering, power tapping, and other optical
processing phenomena using infinite and finite curved waveguide arrays.
The impact of this work is extremely exciting in that it offers optical engineers a
completely new way to approach PLC design, promising improved and/or brand new
optical signal processing functionality.
7.2 SCISSORs
Optical signal processing (such as filtering, switching, and add-dropping) have been per-
formed in PLCs using microresonators. By cascading these microresonators in either
serial (CROW) or parallel (SCISSOR) configurations, slow-light and dispersion control
can be demonstrated. Furthermore, if fabricated in a nonlinear material system, optical
devices can be built to show functionality such as soliton formation and optical logic.
In a SCISSOR configuration, a sufficiently large number of rings would create a fully
formed Bragg gap, with peak intensities of equal strength to the resonator peaks in the
drop spectrum. The interplay between the resonator and Bragg gaps can be engineered to
produce a number of interesting effects in the dispersion characteristics of the device. To
date, however, SCISSORs in highly nonlinear materials had been limited to a maximum
of only three rings due to extremely tight fabrication tolerances.
7.2.1 Summary: SCISSORs
In Chapter 5, the design, fabrication and characterization of a multi-ring SCISSOR de-
vice in AlGaAs were described. A matrix-based Hamiltonian formulation of coupled
Chapter 7. Summary and Conclusions 118
mode theory was used to design the SCISSOR structures in one-, two-, four- and eight-
ring configurations. The design of the high-index contrast sub-micron waveguides (or
nanowires) were described; these nanowires were used for the SCISSOR’s directional
couplers (called nano-DCs). The individual nano-DCs demonstrated sinusoidal power
transfer characteristics, as expected.
A SCISSOR with more than three rings in AlGaAs has been demonstrated for the
first time, revealing that at least eight rings are necessary to create fully-formed Bragg
peaks. The work presented here is a significant step towards the goal of observing linear
and nonlinear photonic bandgap phenomena on PLCs.
7.2.2 Future Work: SCISSORs
A full dispersion characterization must be completed on the fabricated SCISSOR struc-
tures (including group delay, group velocity, and group velocity dispersion measure-
ments). Tests in both the linear and nonlinear regime will soon be performed using a
long pulsed laser system. Further improvements to microresonator losses is of paramount
importance for the successful evolution of these devices.
7.3 Optically Controllable Delay Line
The International Technology Roadmap for Semiconductors [52] states that optics should
be investigated to provide the necessary bandwidth and isolation required for next-
generation microchip interconnects approaching data rates of 1 Tbit/s (i.e., bit lengths
on the order of 1 ps) [52]. Based on size alone, PLCs seem best suited to accomplish
the task of data routing, as well as providing the switchable > 100-bit optical delays
needed for data synchronization. To date, no low-loss, fast, switchable PLC delay has
been reported capable of delaying more than a few bit-lengths.
While much current investigation in PLC optical delays is being conducted using
Chapter 7. Summary and Conclusions 119
microresonators, large losses (on the order of 20 dB) prohibit their practicality. Differing-
length waveguides, therefore, promise a low-loss alternative.
7.3.1 Summary: Optically Controllable Delay Line
Chapter 6 presented the design details of an optically controllable delay line built in
AlGaAs. An ultrafast nonlinear directional coupler (described in Chapter 2) was used to
switch the optical data stream (with 1.5 ps pulse-lengths) between two paths of differing
lengths. The high AlGaAs index (∼ 3) kept the device size to only 8 mm × 6 mm. The
device was capable of producing a 126-bit delay, and suffered only 6.2 dB of propagation
losses through the delay path.
This is the first report of an > 100-bit ultrafast swithcable optical delay PLC with
losses less than 7 dB.
7.3.2 Future Work: Optically Controllable Delay Line
The requirements for a second-generation device are rewritten here (from Section 6.4):
• Reduce the NLDC critical power by increasing the DC half-beat coupling length.
• Delay only the switched pulse (i.e., default operation: undelayed).
• Bring the NLDC to the PLC’s input to maximize the power entering the switch.
• Employ an independent control pulse.
• Decrease the polarization dependence of the device.
• Decrease losses by incorporating transitional offsets between bent and straight re-
gions of all waveguide paths.
• Improve the NLDC switching-contrast by employing square pulses or solitons.
Chapter 7. Summary and Conclusions 120
Further extensions of this device should be investigated, including discretely tun-
able delays using a cascade of binary-sequenced stages, and sub-bit continuously tunable
delays for jitter compensation.
7.4 Final Comments
The goal of this dissertation was to demonstrate the versatility of planar lightwave cir-
cuits for optical signal processing. The three projects described herein examined optical
signal processing in the spatial, spectral and temporal domains, addressing a specific
technological need.
While the scope of the projects was indeed widespread, the commonalities between
them bridged barriers. The contributions presented in this work, both theoretical and
empirical, are extensive and essential to all technological areas that currently use, or may
one day use, planar lightwave circuitry.
Appendix A
Nonlinear Polarization Density in
AlGaAs
In this Appendix, we investigate the nature of the polarization density in AlGaAs. We
begin by defining the polarization density in terms of the electric susceptibility, noting
that for AlGaAs, the linear and nonlinear susceptibility terms reduce to scalars. We then
expand the polarization density in terms of the complex representation of the electric
field. We conclude by relating the third-order nonlinear electric susceptibility to the
Kerr nonlinear refractive index.
A.1 Nonlinear Susceptibility and Polarization
Density in AlGaAs
The (unitless) nonlinear electric susceptibility is a measure of how easily the medium
electrically polarizes in the presence of electric fields, and is defined as
χe = χ(1) + χ(2) ~E + χ(3) ~E ~E + ... (A.1)
121
Appendix A. Nonlinear Polarization Density in AlGaAs 122
where χ(1) is the linear electric susceptibility, and χ(2), χ(3), etc. describe the second,
third, and higher order nonlinear susceptibilities, respectively.
The polarization density, ~P , induced in the medium by the presence of an electric
field, ~E, is defined as
~P = εoχ(1) ~E + εoχ
(2)T : ~E ~E + εoχ
(3)T
... ~E ~E ~E + · · · (A.2)
= ~P (1) + ~P (2) + ~P (3) + · · · (A.3)
where χ(1) is the scalar linear electric susceptibility, χ(2)T , χ
(3)T , etc. are the tensorial
nonlinear electric susceptibilities, and where ~P (1) = εoχ(1) ~E is the linear polarization
density, ~P (2) = εoχ(2)T : ~E ~E, and ~P (3) = εoχ
(3)T
... ~E ~E ~E, are the second and third order
nonlinear polarization densities, respectively. For the purposes of our development, we
shall only include nonlinearities of significant strength found in AlGaAs: up to and
including the third order [96].
The real-valued, monochromatic, time-harmonic electric field, ~Er, can be defined
in terms of its complex representation, ~Ec = ~Eoejωt, and its complex conjugate (c.c.),
~E∗c = ~E∗
oe−jωt,
~E = ~Er (A.4)
= 12
(~Ec + ~E∗
c
)(A.5)
= 12
(~Eoe
jωt + ~E∗oe−jωt
), (A.6)
where ~Eo = ~Ao(x, y, z)e−jkz is the complex spatial electric field, with amplitude, ~Ao(x, y, z).
We will consider linearly-polarized fields: TE polarization where ~Ao = Axx, or TM po-
larization where ~Ao = Ayy, (where x and y are the unit vectors along the x and y axes,
respectively).
The polarization density, ~P , (which is a physically measurable quantity, and hence
Appendix A. Nonlinear Polarization Density in AlGaAs 123
real-valued), can also be defined in terms of its complex representation, ~P = 12
(~Pc + ~P ∗
c
).
A.1.1 Linear Polarization Density
The linear polarization density in complex form, ~P(1)c , can be expanded as
~P (1)c = εoχ
(1) ~Ec. (A.7)
A.1.2 Second Order Nonlinear Polarization Density
Second order nonlinearities, defined by ~P (2) = εoχ(2)T : ~E ~E, can only occur in crystals with
no inversion symmetry (non-centrosymmetric), such as AlGaAs. Because of the quadratic
relationship of ~P (2) with ~E, a reversal in the direction of the electric field, ~E → − ~E,
would not change the direction of the polarization density vector ( ~P → ~P ). However, in
centrosymmetric crystals, a change in the direction of the electric field must result in a
change in direction of the polarization vector, by virtue of the physical symmetry. Thus,
χ(2) must be zero in centrosymmetric media to resolve this contradiction [148].
From Eq. (A.2), the second order nonlinear polarization density in complex form,
~P(2)c , for a single frequency can be expanded using Eq. (A.6) as
~P (2)c = 1
2εoχ
(2)T :
(~Eo
~Eoej2ωt + | ~Eo|2
). (A.8)
We see that the second order polarization is comprised of a 2ω term leading to second
harmonic generation (SHG), and a zero-frequency term leading to optical rectification
(OR). The OR term creates a static electric field in the material, and hence, does not lead
to the generation of electromagnetic radiation [148]. If no phase-matching schemes are
intentionally implemented in the PLC design (which is the case for the devices presented
in this thesis), the SHG term is very inefficient [148, 149]. Therefore, for most AlGaAs
Appendix A. Nonlinear Polarization Density in AlGaAs 124
PLCs, second order nonlinear effects can be neglected from the analysis, i.e.,
~P (2)c ' 0. (A.9)
A.1.3 Third Order Nonlinear Polarization Density
From Eq. (A.2), the third order nonlinear polarization density in complex form, ~P(3)c , for
a single frequency can be expanded using Eq. (A.6) as
~P (3)c = 1
4εoχ
(3)T
...(
~Eo~Eo
~Eoej3ωt + 3 ~Eo| ~Eo|2ejωt
). (A.10)
Here, we see that the third order polarization is comprised of a 3ω term leading to
third harmonic generation (THG) and a 1ω term that is proportional to the nonlinear
contribution to the refractive index, described in more detail in the next section. As is
the case for SHG, the inefficient THG term can be neglected in the analysis of non phase-
matched devices [72,149].
AlGaAs wafers are normally grown in the [001] direction, and have (110) cleavage
planes (i.e., the input and output facets of the PLC) as shown in Fig. A.1 [150]. Note
that the crystallographic cartesian coordinates, (x, y, z), are oriented differently from the
(x, y, z) coordinates typically used in optics, where the z direction is used to define the
direction of propagation. TM (y-polarized) and TE (x-polarized) light incident normally
upon the (110) plane are defined in the crystallographic coordinate system as ~ETM = zEz,
and ~ETE = xEx/√
2 + yEy/√
2 (|Ex| = |Ey|), respectively.
Confining this discussion to a single frequency, the third-order nonlinear susceptibility
tensor, χ(3)T , for AlGaAs (and all 43mTd crystals), has the following non-zero tensor
Appendix A. Nonlinear Polarization Density in AlGaAs 125
z
y
= [001] direction
(110) cleavage plane
(i.e., input and output facets)
Incident light
Directed along the [110] direction
x
z
y
x
Figure A.1: AlGaAs crystal planes. Blue cube is the unit-cell.
elements (where the tetragonal symmetries are explicitly equated) [148]:
I : χ(3)xxxx = χ
(3)yyyy = χ
(3)zzzz
II : χ(3)xxyy = χ
(3)xxzz = χ
(3)yyxx = χ
(3)yyzz = χ
(3)zzxx = χ
(3)zzyy
III : χ(3)xyxy = χ
(3)xzxz = χ
(3)yxyx = χ
(3)yzyz = χ
(3)zxzx = χ
(3)zyzy.
From Boyd [148],the third-order nonlinear polarization can be expressed as
P(3)i = εo
∑
jkl
χ(3)ijklEjEkEl (A.11)
where the indices ijkl refer to the cartesian components of the fields. Applying the
nonzero elements of χ(3)T to Eq. (A.11), we obtain:
P (3)x /εo = χ(3)
xxxxE3x + χ(3)
xxzzExE2z + χ(3)
xxyyExE2y + χ(3)
xzxzExE2z + χ(3)
xyxyExE2y (A.12)
P (3)y /εo = χ(3)
yyyyE3y + χ(3)
yyzzEyE2z + χ(3)
yyxxEyE2x + χ(3)
yzyzEyE2z + χ(3)
yxyxEyE2x (A.13)
P (3)z /εo = χ(3)
zzzzE3z + χ(3)
zzyyEzE2y + χ(3)
zzxxEzE2x + χ(3)
zyzyEzE2y + χ(3)
zxzxEzE2x. (A.14)
Appendix A. Nonlinear Polarization Density in AlGaAs 126
Substituting ~ETE = xEx/√
2 + yEy/√
2 (|Ex| = |Ey|) for TE polarization, we obtain:
P (3)xTE
= P (3)yTE
= εoE3x
(χ(3)
xxxx + χ(3)xxyy + χ(3)
xyxy
)= εoE
3xχ
(3)TE eff (A.15)
P (3)zTE
= 0. (A.16)
For TM polarization,
P (3)xTM
= P (3)yTM
= 0 (A.17)
P (3)zTM
= εoE3zχ
(3)zzzz = εoE
3zχ
(3)TM eff . (A.18)
Eq. (A.15) to (A.18) show that the tensorial third-order nonlinear susceptibility for
AlGaAs can be reduced to effective scalar values for TE and TM polarizations, where
χ(3)TE eff = χ
(3)xxxx + χ
(3)xxyy + χ
(3)xyxy, and χ
(3)TM eff = χ
(3)zzzz. Below, we’ll simply use χ(3) to
designate the scalar effective third-order susceptibility, keeping in mind that this is valid
for either TE or TM polarizations. We can rewrite Eq. (A.10), neglecting the THG term
as
~P (3)c = 3
4εoχ
(3) ~Eo| ~Eo|2ejωt = 34εoχ
(3) ~Ec| ~Ec|2. (A.19)
A.1.4 Polarization Density of AlGaAs
Combining Eqs. (A.7), (A.9), and (A.19), the overall polarization density for AlGaAs
may now be written as
~Pc = ~P (1)c + ~P (2)
c + ~P (3)c (A.20)
= εoχ(1) ~Ec + 3
4εoχ
(3)| ~Ec|2 ~Ec (A.21)
= εoχe~Ec, (A.22)
Appendix A. Nonlinear Polarization Density in AlGaAs 127
where the electric susceptibility, χe, is
χe = χ(1) + 34χ(3)| ~Ec|2 (A.23)
= χ(1) + χNL (A.24)
where χNL = 34χ(3)| ~Ec|2.
A.2 Kerr nonlinearity
The complex refractive index of the medium, n, is defined to be
n2 = 1 + χe
= 1 + χ(1) + 34χ(3)| ~E|2
= n2o + 3
4χ(3)| ~E|2
= n2o
(1 +
3
4
χ(3)
n2o
| ~E|2)
(A.25)
where n2o = 1 + χ(1) = εr is the complex linear relative electric permittivity. To a
first order approximation, the overall refractive index of the polarizing medium can be
simplified to
n ' no +3
8
χ(3)
no
| ~E|2. (A.26)
The Kerr nonlinear refractive index, n2, is defined as the nonlinear contribution to n,
n = no + n2I (A.27)
where the intensity of the electromagnetic field is I = | ~E|2/η, and η =√
µ/ε =√
µ/(εrεo). Therefore,
n2 =3
8
χ(3)
no
η (A.28)
Appendix A. Nonlinear Polarization Density in AlGaAs 128
and
χ(3) =8
3
n2no
η. (A.29)
Appendix B
AlGaAs Photolithography and
Etching
PLCs are fabricated using the same tools and processes used in the manufacture of mi-
croelectronic circuits. Photo or electron-beam (e-beam) lithographic techniques literally
pattern the desired planar designs onto the surface of a semiconductor, polymer or glass
microchip. The patterns are then transferred into the chip using either dry or wet etching.
The AlGaAs PLCs presented in this dissertation were etched using dry anisotropic
reactive-ion etching (RIE) to produce (nearly) vertical sidewalls. The patterning method
is chosen based on the dimensions of the waveguides: photolithography is chosen for
waveguides widths on the order of a several microns (with tolerances of ±0.5 µm), while
e-beam lithography is chosen for waveguide widths < 1 µm (with tolerances on the
order of several 10s of nm). Specifically, the EDL and OCDL structures, presented
in Chapters 4 and 6, were patterned using photolithography, while the nanowire and
SCISSOR experiments presented in Chapter 5 were patterned using e-beam lithography.
Section B.1 presents the recipe used in the photolithography and RIE of the 24/18/24
AlGaAs wafer (Section 3). Section B.2 includes some interesting preliminary results of
isotropic (wet) etching to investigate modal confinement, directional coupling and im-
129
Appendix B. AlGaAs Photolithography and Etching 130
proved sidewall roughness. The final section (Section B.3) presents details of a newly
implemented photoresist crosslinking step. Details of the e-beam lithography and etch-
ing of the nanowires and SCISSOR structures, fabricated by fellow researchers at the
University of Glasgow, are not presented in this appendix.
B.1 AlGaAs Recipe: Anisotropic
The photolithography of the 24/18/24 AlGaAs wafer used in the OCDL and EDL devices
were performed at the Emerging Communications Technology Institute at the University
of Toronto, Canada. The etching was performed at the Institute for Microstructural
Sciences at the National Research Council of Canada. The recipe was optimized for
anisotropic reactive-ion-etching.
B.1.1 Recipe
1. Mask Design
◦ Design chrome-on-quartz mask using L-Edit by Tanner EDA.
◦ Get mask plates fabricated (Compugraphics, Inc.).
2. Preparation
◦ At least four hours prior to procedure, thaw a fresh amount of Shipley SPR511Apositive photoresist dispensed in a small brown bottle (using a 0.2 micron fil-ter).
3. Three-Part Cleaning
◦ Soak all glassware, tools, and samples with acetone for 1 minute.
◦ Blow dry with Ni gun.
◦ Rinse each item with Methanol.
◦ Blow dry with Ni gun.
◦ Rinse each item with Isopropanol.
◦ Blow dry with Ni gun.
◦ Bake out the solvents on a hotplate set at 120o C for 5 to 10 minutes.
Appendix B. AlGaAs Photolithography and Etching 131
◦ Remove oxide from AlGaAs sample using a 30 sec dip in 1:1 solution of HCL+ water.
4. Spinner Preparation
◦ Set program on the spinner to 6000 rpm (ACL = 005, rpm = 410) for 45seconds.
◦ Ensure that the spinner table is tightly screwed to its axle.
5. Sample Spin
◦ Place the sample on the spinner and set vacuum on.
◦ Dispense HMDS P20 primer onto sample surface using a plastic pipette.
◦ Spin.
◦ Using another plastic pipette, extract SPR511A photoresist from bottle with-out touching the bottle rim.
◦ Dispense SPR511A onto sample surface (no bubbles) in a continuous flow.
◦ Spin.
◦ Perform 0.5 mm edge-bead removal with a semi-dry acetone swab.
◦ Clean interior of spinner with acetone once complete.
6. Soft Bake
◦ Place samples on a hotplate set at 90o C for 3 minutes.
7. Exposure
◦ Follow mask aligner (Karl Suss MA6) setup procedure.
◦ Set mask program to Hard Contact, for 5.0 seconds.
◦ Look away during actual UV exposure.
◦ Need to clean mask with AZ300T and DI water before re-exposing same pat-tern on the mask plate.
8. Development
◦ Fill large sized beaker with DI water.
◦ Fill medium sized beaker with MF-321 developer.
◦ Immerse and swirl sample in developer with tweezers for 45 seconds.
◦ Immediately remove sample from developer, immerse and swirl in DI waterfor 20 seconds.
◦ Blow dry with Ni gun.
9. Inspect
Appendix B. AlGaAs Photolithography and Etching 132
◦ Ensure UV filter is set in microscope (to prevent further exposure).
◦ Inspect sample.
◦ Perform further development if required.
10. Crosslinking and Hard Bake
◦ Place samples in UV oven (270 nm, 500 W lamp) for 15 minutes.
◦ Hard bake samples on hotplate set at 100o C.
◦ Again place samples in UV oven for 15 minutes.
◦ Again hard bake samples on hotplate set at 120o C.
11. Etch: Anisotropic
◦ Follow reactive-ion etcher (Trion MiniLock, or Oxford Plasmalab System100)setup instructions.
◦ Open chamber, insert samples, close chamber, run etch recipe (proprietaryrecipe with BCl3+ and Ar+ plasmas).
12. Post-Etch Clean
◦ Bring samples to wetbench.
◦ Put ultrasonic cleaner in wetbench, and turn on heater.
◦ Set hotplate to 80o C.
◦ Fill a medium-sized beaker with DI water.
◦ Pour AZ-300T photoresist stripper into petri dish.
◦ Keep wetbench sash down (for rest of procedure).
◦ Put samples into AZ-300T petri dish (corner first, to break surface tension).
◦ Place petri dish on hotplate set at 80o C for 30 minutes.
◦ Place petri dish into ultrosonic cleaner for 8 minutes.
◦ Remove samples from petri dish, and swirl in DI water for 1 minute.
◦ Dry samples using Ni gun.
13. Inspection
◦ Inspect samples under microscope.
◦ Samples should be free of all photoresist, with clean patterns.
B.1.2 Anisotropic Etch Results
An example of an anisotropic etch using the recipe listed in the previous subsection is
shown in Fig. B.1. The crosslinked and hard baked photoresist is seen sitting atop the
etched waveguides.
Appendix B. AlGaAs Photolithography and Etching 133
Figure B.1: SEM of anisotropic etch in 24/18/24 AlGaAs.
B.2 AlGaAs Recipe: Isotropic
A brief set of isotropic etch tests on the 24/18/24 AlGaAs wafer were conducted to
investigate modal confinement, directional coupling and improved sidewall roughness.
B.2.1 Recipe
The only difference in the isotropic recipe compared with the anisotropic recipe presented
in Section B.1 is step 11:
11. Etch: Isotropic
◦ Prepare a 2:1:1 solution of 48% hydrobromic acid, glacial acetic acid, and
potassium dichromate powder.
◦ Immerse samples in solution for desired time, based on etch rate (see Sec-
tion B.2.2).
◦ Rinse in DI water for 20 seconds.
◦ Dry samples using Ni gun.
Appendix B. AlGaAs Photolithography and Etching 134
B.2.2 Isotropic Etch Results
The isotropic etch rate was determined by conducing three measurements in 10 second
increments. The resulting etch rate was was found to be 0.066 µm/s (or 4.0 µm/min).
The results are plotted in Fig. B.2.
The isotropically etched waveguides exhibit excellent sidewall smoothness, as shown
in Fig. B.3. Additionally, waveguide bends seem to etch quite well, as illustrated in
Fig. B.4.
As with the anisotropic etches, modal confinement is very sensitive to etch depth
(i.e., the duration of the isotropic etch), as well as the actual cross-sectional curvature
profile of the waveguide sidewalls. The lowest-order TE supermode of the DC shown in
Fig. B.3 (with centre-to-centre spacing of 6.3 µm) is shown in Fig. B.5, with a calculated
half-beat coupling length of 5.23 mm. Because the fabricated DC was integrated into a
more complex circuit, it could not be independently measured and compared with the
simulations.
The modal confinement of a 1.95 µm deeply etched waveguide around a 2 mm radius
0 5 10 15 20 25 30
0.0
0.5
1.0
1.5
2.0
Etc
h D
ep
th (
mic
ron
s)
Time (seconds)
Figure B.2: Determination of isotropic etch rate.
Appendix B. AlGaAs Photolithography and Etching 135
Figure B.3: SEM of isotropic etch in 24/18/24 AlGaAs.
Figure B.4: SEM of isotropically etched waveguide bend.
Appendix B. AlGaAs Photolithography and Etching 136
0
0.4
0.8
0.2
0.6
1
Figure B.5: Simulation results of lowest order TE supermode of an isotropically etcheddirectional coupler.
bend was modeled, shown in Fig. B.6. The radiation losses were calculated to be less
than 0.18 dB/90o bend.
0
0.4
0.8
0.2
0.6
1
Figure B.6: Isotropic etch mode around a 2 mm radius bend.
The isotropic etching of AlGaAs seems to be a very promising approach in producing
high quality, low loss waveguides with extremely smooth sidewalls. More work is needed
to characterize the process.
This work was conducted in collaboration with Dr. Alan Bristow, from the Depart-
ment of Physics, University of Toronto, Canada.
Appendix B. AlGaAs Photolithography and Etching 137
B.3 Photoresist Crosslinking and Hard Baking
The UV crosslinking described in line 10 of the AlGaAs recipe (Section B.1) improves
the photoresist cross-section from curved (Fig. B.7) to nearly vertical (Fig. B.8). The
ripples seen in the PR sidewall is caused by UV standing waves during the crosslinking
process.
Figure B.7: Hard baked PR with no crosslinking.
Figure B.8: Hard baked PR with crosslinking.
Appendix C
Microresonator Free Spectral Range
The relationship between the free spectral range and the group index of a microresonator
(or other type of) filter is presented in this appendix.
We denote the effective (phase) index and the group index as n and ng, respectively.
It is well known that
ng = n + ωdn
dω. (C.1)
The cavity modes are determined by the effective index through
n (ωm)ωm
cL = 2πm (C.2)
n (ωm+1)ωm+1
cL = 2π (m + 1) . (C.3)
Assuming that ∆ω = ωm+1 − ωm is small and n (ωm+1) can be approximated as
n (ωm+1) = n (ωm) +dn
dω
∣∣∣∣ωm
∆ω, (C.4)
then Eq. (C.3) can be rewritten as
[n (ωm) +
dn
dω
∣∣∣∣ωm
∆ω
]ωm + ∆ω
cL = 2π (m + 1) . (C.5)
138
Appendix C. Microresonator Free Spectral Range 139
Keeping only terms up to first order in ∆ω on the left of Eq. (C.5),
n (ωm)ωm
cL + n (ωm)
∆ω
cL +
dn
dω
∣∣∣∣ωm
ωm∆ω
cL = 2π (m + 1) , (C.6)
which can be rewritten as
n (ωm)∆ω
cL +
dn
dω
∣∣∣∣ωm
ωm∆ω
cL = 2π (m + 1)− n (ωm)
ωm
cL. (C.7)
Substituting Eq. (C.2) and Eq. (C.1), we obtain
[n (ωm) +
dn
dω
∣∣∣∣ωm
ωm
]∆ω
cL = 2π (m + 1)− 2πm = 2π
ng (ωm)∆ω
cL = 2π. (C.8)
Therefore,
∆ω =2π
ng (ωm)
c
L
∆ν =∆ω
2π=
c
ng (ωm) L. (C.9)
Thus we see that the spectral positions of the modes are determined by the effective
index (Eqs. (C.2) and (C.3)), while the free spectral range is determined by the group
index (Eq. (C.9)).
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