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Common PQ Issues and Solutions

Mark Stephens, PE, CEM, CP EnMS Senior Project Manager

Industrial PQ and Energy EfficiencyElectric Power Research Institute

Phone 865.218.8022 [email protected]

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2© 2013 Electric Power Research Institute, Inc. All rights reserved.

NYSDPS Power Quality Technical Conference 12/12/2013

EPRI Semiconductor PQ Experience

Semiconductor Plant PQ Audits1. Albany Nanotech, Albany, NY2. Asahi Kasei Microsystems, Japan3. AUO, Hsinchu, Taiwan4. Chartered Semiconductor, Singapore5. ChiMei Optoelectronics Corp, Tainan, Taiwan6. Confidential Semiconductor Site, Chandler, AZ7. Confidential Semiconductor Site, Philippines8. HP, Singapore9. IBM, Burlington, VT10. IBM, East Fishkill, NY11. International Rectifier, Temecula12. Kyocera,Kagoshima,Japan13. Lucent Technologies, Allen Town, PA14. LSI Logic, Colorado15. Freescale/Motorola, Ed Bluestien, Austin, TX

16. Freescale/Motorola, Oak Hill , Austin, TX

17. Motorola, Irvine, CA

18. Motorola, Mesa, AZ 19. Philips Semiconductor, San Antonio

20. Qimonda, Sandston, VA

21. Sony Semiconductor, San Antonio, TX

22. SSMC, Singapore 23. ST Microelectronics, San Diego

24. ST Microelectronics, Singapore

25. Winbond Semiconductor Plant, Hsinchu, Taiwan

OEMs (SEMI F47 Testing)1. ABB Robotics2. Accent Optical3. Advanced Energy4. Alcatel5. Rockwell Automation6. Applied Materials7. ASM8. ASML9. Axcelis10. Carrier11. CFM Technologies12. CTI13. Densei-Lambda14. Durr Automation15. ESI16. Fanuc Robotics17. FSI International18. Ibis19. Johnson Controls20. Johnson Controls, York, PA21. KLA-Tencor22. Kuka Robotics23. Lambda EMI24. Mattson Technologies25. McQuay International26. Meiden Power Solutions

OEMs (SEMI F47 Testing)27. Mitsubishi28. Novellus29. Phoenix Contact30. Powertron31. PULS Power32. Reliability, Inc.33. Rudolph Technologies34. Schlumberger35 Schneider Electric35. SCP Global Technologies36. SEMATECH37. Semitool38. Siemens39. SVG Lithography40. SVG Thermco41 Tokyo Electron Austin (TEA)42. Tokyo Electron Kyushu (TKL)43. Tokyo Electron Massachusetts

(TEM)44. Trane45. Varian Semiconductor Equipment

Associates, Inc.46. York



Importance of Power Quality

•What happens to this Ion Implanter process when a power quality problem occurs?•Who is to blame?•How do we work together to fix the problems?



Interrelated Processes

Air Compressor

PowerSource

ProcessExhaust

PCWPump

PowerProcess

Mechanical

AutomatedProcess

InterlockedAutomated

Process

Is CompressedAir Present?

Is ProcessCooling Water

Present?

Are the ExahaustSystems Running?

Is PowerPresent?

Is InterlockedProcess Running?

Ok to RunAutomated

Process

CONTINUALLYREPEATED

StopAutomated

Process

NO

YES

NO

NO

NO

NO

YES

YES

YES

YES



Outage or Sag ?

Utility Substation

Customer A

Customer B

Fault

Sag

Outage



Typical Recloser Schemes

TD 1 TD 2

Initial Fault

Reclose Attempt 2

TD 3

Reclose Attempt 3

Reclose Attempt 1

Time

RM

S Vo

ltage

TD 1 TD 2

From Initial Fault Reclose Attempt 2

TD 3

Reclose Attempt 3

Reclose Attempt 1

Sag Event Sag Event Sag Event Sag Event

Time

RM

S Vo

ltage

Customer “A” Feeder

Customer “B” Feeder



Targeting by Cause

One Phase

68%

Two Phases

19%

Three

Phases

13%

Source: EPRI Distribution Power Quality Study





Is it the Plant Equipment’s Fault?

5 Year Data Example Fed from

Dedicated SubstationFrom Transmission

Network

4 Year Data Example Fed from

Dedicated DistributionNetwork



Important Realization

• Utilities Share Responsibility– Tree Trimming, Lighting Arrestors, Grounding,

Maintenance, Provide PQ information to industrials, etc– Understand PQ Environment of Grid

• Industrials Share Responsibility– Understanding Equipment Vulnerability, PQ Specifications,

Power Conditioning, Proper Wiring/Grounding, etc– Understand PQ Environment at Site

• Most effective solutions are reached when both sides work together to see what can be done

Protecting Processes Against Voltage Sags



Protecting Equipment Against Voltage SagsInstalled Process Equipment

• The goal of improving installed process equipment is to improve the overall voltage sag tolerance of the machine

• Four common approaches have been proven to to be effective at protecting installed process equipment

• Facility Level• Panel Level• Equipment/Machine Level• Control Level



Protecting Equipment Against Voltage SagsInstalled Process Equipment

Economics Drive the Approach



Protecting Equipment Against Voltage SagsInstalled Process Equipment• Facility-level Solutions are targeted at protecting an entire

facility and can be very costly ($500k - $$M+)

Dynamic Voltage RestorerLarge FlywheelLarge UPS



Protecting Equipment Against Voltage SagsInstalled Process Equipment• Panel-level Solutions are targeted at protecting loads fed from

a common circuit (Panel or Branch) $100k - $500+



Protecting Equipment Against Voltage SagsInstalled Process Equipment• Machine-level Solutions are targeted at protecting one

machine ($20k - $200k)



Protecting Equipment Against Voltage SagsInstalled Process Equipment• Control-level solutions are targeted at protecting only the

most sensitive components, most cost effective solution ($100 - $5,000)



Generalized Example: Control Level to Equipment/Machine Level Cost vs. Coverage

+

+

Embedding the Solution



Techniques to Improve Voltage Sag Tolerance of Process Equipment

New Equipment in Design Phase• Specify Compliance to PQ Standards (such as SEMI F47)• Design with DC Power • Use Sag-Tolerant Components • Select Appropriate Trip Curves for Circuit Breakers Existing Equipment• Provide Conditioned Power for AC Control Circuits • Provide Backup Power for DC Buses Either Existing or New Equipment• Apply Custom Programming Techniques • Drive Configuration Settings



Specify Voltage Sag Standards in Purchase Specs ( such as SEMI F47)



Design with DC Power

• Utilize SEMI F47 compliant DC Power Supplies.• Whereas control power transformers (CPTs) and AC components do not

have inherent energy storage to help them ride through voltage sags.



Design with DC Power

• One of the best methods of increasing the tolerance of control circuits is to use direct current (DC) instead of alternating current (AC) to power control circuits, controllers, input/output devices (I/O), and sensors.

• DC power supplies have a “built-in” tolerance to voltage sags due to their ripple-correction capacitors, whereas control power transformers (CPTs) and AC components do not have inherent energy storage to help them ride through voltage sags

• Many OEMs are moving in this direction to harden their equipment designs

DC Powered Emergency Off Circuit

DC Powered PLC Circuit



Use Sag-Tolerant Components

• Require that all electrical components and subsystems meet SEMI F47 or other recognized voltage-sag standards



Ride-Through Adjustments on AC Drives

• Depending on the setting of the drive’s undervoltage trip point and the severity of the sag, the drive may trip after the DC bus decreases below the undervoltage trip point.

• Sometimes, the voltage-sag tolerance of drives can be increased through parameter settings, including restart options

• Example AC Drive Parameters that could improve ride-through are;

• Automatic Reset and Restart Functions

• Motor- Load Control Functions (Flying Restart)

• Phase-Loss and DC Bus Undervoltage Functions

• Acceleration / Deceleration / Current / Torque - Limits



Reported Approaches for Semiconductor Plant Voltage Sag Mitigation Strategies

• Facility Wide – Centralized UPS for critical loads in the fab.

• Distributed Approach - mitigate voltage sags on a tool-by-tool basis. Local UPS ranging from of 30 to 80kVA.

• Control Level Approach - This approach requires that the OEM/fab conditions the sensitive circuits that need power conditioning within each tool or subsystem.

• No Organized Approach – No plan. • Partnership with Utility - key to

making iterative improvements.

REF: Impact of SEMI F47 on Utilities and Their Customers, EPRI, Palo Alto, CA: 2004. 1002284.



Summary• It’s a team effort to solve these problems, the utility, industrial/commercial, and sometimes consultants need to come together.

• Understanding why your equipment is vulnerable is paramount. You can’t fix a problem without understanding the true cause.

• Moving forward (sometimes with some simple modifications) you can make production systems more robust.

• Don’t forget including PQ standards in your purchase specs.

• Don’t assume battery based systems are required.



For More Information Contact

Mark Stephens, PE, CEM, CP EnMSEPRI | Senior Project Manager

Industrial PQ & Energy Efficiency942 Corridor Park Blvd, Knoxville, TN 37932

Desk: 865-218-8022 Mobile: 865-773-3631

www.epri.com http://f47testing.epri.com

http://mypq.epri.com

[email protected]

mailto:[email protected]