-
Present by
Varian E500 Extraction Manipulator OverhaulVarian E500
Extraction Manipulator Overhaul
-
Varian E500 Extraction Manipulator OverhaulVarian E500
Extraction Manipulator Overhaul
Before After
-
1. 1. Product InformationProduct Information
2. 2. ((Parts Clean)Parts Clean)
3. 3. Function TestFunction Test
Contents
Varian E500 Extraction Manipulator OverhaulVarian E500
Extraction Manipulator Overhaul
-
Product Information- ExtractionExtraction
Extraction Manipulator ( Varian E500 series)
8 Implanter Equipment (Varian P/N:E11037754 )
-
Product Information- ExtractionExtraction
Extraction Manipulator ComponentsWhole Set
Assembly
Whole Set Disassembly
Key-Parts
-
Warranty: 6 months, after installed assembly
Delivery: 2 Weeks
Ability: All Extraction ass`y
Kits Replacement (by condition or test result)- manipulator
bellows (
) / manipulator bellows (
)
- O-ring 1.984, 3ID, 4.734, 9.984, 0.676, 1-3/4 etc-
Manip-rotary Arm- Ring,rtng,int.901hs- Motor Altered manipulator-
Gear,Mod Y-AXS 72/45- slip clutcg mod 1.25- minipulator lead screw-
Resistor 10K 10 turns
(To see more for detail in Varian parts guide)
Product Information- ExtractionExtraction
-
Product Information- ExtractionExtraction
General Flow Chart
1.
1.
2.
& 2.
&
5.
&
5.
&
4.
4.
6.
6.
7.
7.
8.
8.
3. &
3. &
-
(Parts Clean)
Roplat Overhaul Flow Chart Parts Clean
Block DiagramBlock Diagram DescriptionDescription
SpecificationSpecification
Remove Electric Part- Motor, Resistor- Cable Disassemble all
components
Physical Cleaning
Tightly controlled Procedure Safe and Clean Area
H2O2 dip few minutes than Maintain constant water temperature
(Hot Water) Use solvent
DI Rinse(use Ultra sonic) DI Shower
Bake Oven Air Blower
Duration of purge is key(must purge for enough time) Metallic
Parts Only
Ensure no damage
No residue No stains
Remove all Moisture
-
(Parts Clean)
Roplat Overhaul Flow Rebuild Produce
Block DiagramBlock Diagram DescriptionDescription
SpecificationSpecification
Assembly 1
Check all parts are correct type and have normal function
Assemble mechanical parts
Replace with Brand New PartsBrand New Parts for ifor i ssued
componentsssued components
Vacuum leak check
X/Y/Z Axis Calibration
Spread the grease evenly
If parts function failed
use new one
Assemble Electrical components Rotation Motor & each
Resistor Installation the remaining
components
Fill out Check List
Packing
Assembly 2
Packing
Confirm wire connection
Smooth Rotation Use Test Device Leak Rate < 5.0e-8 mT/min
Inspection Sheet
Standard Packing
Function Test
Record
-
Leak Check
Function Test Leak & Impedance Check
Impedance Check1. Torque Strength of Motor > 2kg2. Coil
Resistance < 10 3. Isolation Impedance >
20M/250V
-
Function Test Offline Controller
Control Panel AC 110VWin Chester
Extraction On-line
Control Panel 3Jig Calibration ToolExtraction Graph
PM
-
Function Test X/Y/Z Calibration
14=1 424
25=2 546
36=3 560
1
3
2
AXIS
()
-
Thank You !Thank You !
, =>
1 2 3 4 5 6 7 8 9 10 11 12 13
