XY Piezo Positioning Flexure .XY Piezo Positioning Flexure Stages ... newest release for data sheets

  • View
    219

  • Download
    1

Embed Size (px)

Text of XY Piezo Positioning Flexure .XY Piezo Positioning Flexure Stages ... newest release for data sheets

  • XY Piezo Positioning Flexure StagesNanometer and Picometer Resolution, High Speed & Stability

    FAST

    PREC ISE

    IND IV IDUAL

    W W W . P I . W S

    http://www.piezo.ws

  • XY Piezo Nanopositioning Scanners & Stages

    P-713 XY Piezo Scanner with aperture for imaging etc

    P-915KXYS Low-cost open-loop XY imaging scanner

    P-612.2SL economical XY piezo nanopositioning stage with aperture

    P-734 high-performance low-bow flexure nanopositioning stage with ultra-precise trajectory control

    PIHera XY piezo nanopositioning systems provide travel ranges from 50x50m to 1800x1800 m

    P-611 low cost XY- and XZ-nanopositioning systems, 100 m travel, closed-loop option

    P-363 PicoCube XY and XYZ Scanners for AFM. Closed loop, capacitive feedback. 5m travel, 30 Picometer resolution

    PInano XY and XYZ microscope scanner stage for Super Resolution-microscopy applications

    P-313 PicoCube XY and XYZ Scanners for AFM. Lead-free piezo material provides ultra-high linearity. No servo lag!

    P-733.2DD, high-speed, direct drive nanopositioning scanning stage. Fastest multi-axis piezo stage with large aperture and capacitive feedback (2.2 kHz resonant frequency!)

    P-517 /P-527 nanopositioning stage family provides many options and travel ranges. Up to 6 axes

    The P-541/P-542- nanopositioning stage family. Very low profile (16.5mm), large 80x80mm aperture, highly accurate motion: sub-nanometer resolution

    Click on the Images to Jump to Datasheet

  • P

    hys

    ik In

    stru

    men

    te (

    PI)

    Gm

    bH

    & C

    o. K

    G 2

    008.

    Su

    bje

    ct t

    o c

    han

    ge

    wit

    ho

    ut

    no

    tice

    . All

    dat

    a ar

    e su

    per

    sed

    ed b

    y an

    y n

    ew r

    elea

    se.

    Th

    e n

    ewes

    t re

    leas

    e fo

    r d

    ata

    shee

    ts is

    ava

    ilab

    le f

    or

    do

    wn

    load

    at

    ww

    w.p

    i.ws.

    Cat

    120E

    Insp

    irat

    ion

    s200

    9 08

    /10.

    18

    High-Dynamics Nanoscanner for Scanning Probe Microscopy

    P-363 PicoCube XY(Z) Piezo Scanner

    The P-363 PicoCube XY/XYZis an ultra-high-performanceclosed-loop piezo scanningsystem. Designed for AFM,SPM and nanomanipulationapplications, it combines anultra-low inertia, high-speedXY/XYZ piezo scanner withnon-contact, direct-measuring,parallel-metrology capacitivefeedback capable of 50 pico me-ters resolution. On top of beingextremely precise, thePicoCube system is also verysmall and rugged. Measuring

    only 30 x 30 x 40 mm (withremovable top plate, 30 x 30 x28 mm for XY version), it iseasy to integrate in any scan-ning apparatus.

    SPM, AFM, STM, Nano-lithography, Nanoimprinting,

    Nanometrology

    The PicoCube was specifical-ly developed to overcome thelimitations of the open-loopscanners currently available forSPM, AFM and STM. In addi-tion to these applications, thePicoCube is also the idealscanning and manipulationtool for nanoimprinting, nano-lithography, ultra-high-resolution, near-field, scanningoptical microscopy and nano-surface-metrology applica-tions.

    Higher Precision ThroughParallel-Motion Metrology w/Capacitive Sensors

    The PicoCube is based on aproprietary, ultra-fast, piezo-driven scanner design equip -

    ped with direct-measuring, ca -pacitive position sensors (par -allel metrology). Unlike con-ventional sensors, they meas-ure the actual distance be -tween the fixed frame and themoving part of the stage. Thisresults in higher-motion linear-ity, long-term stability , phasefidelity, andbecause externaldisturbances are seen by thesensor immediatelya stiffer ,faster-responding servo-loop.

    Multi-axis nanopositioningsystems equipped with paralleldirect metrology are able tomeasure the platform positionin all degrees of freedomagainst one fixed reference. Insuch systems, undesirablemotion from one actuator inthe direction of another (cross-talk) is detected immediatelyand act iv ely compensated bythe servo-loops. This ActiveTra jectory Control Concept cankeep deviation from a trajecto-ry to under a few nanometers,even in dynamic operation.

    Ultra-High-Performance Closed-Loop Scanner for AFM/SPM Compact Manipulation Tool for Bio/Nanotechnology Resonant Frequency 9.8 kHz Capacitive Sensors for Highest Accuracy Parallel-Motion Metrology for Automated Compensation

    of Guiding Errors 50 Picometer Resolution 5 x 5 x 5 m Travel Range Vacuum-Compatible Versions

    P-363.2CD and .3CD (background)PicoCube, high-performancepiezo positioning- and scanningsystems or AFM/STM andnanomanipulation. Smart mediacard for size comparison

    Application Examples

    Scanning microscopy(SPM)

    Biotechnology

    Micromanipulation

    Nanopositioning

    Nano-imprinting

    Nanometrology

    Nanolithography

    Ordering Information

    P-363.3CDPicoCube High-Precision XYZNanopositioning System, 5 x 5 x 5 m, Parallel Metrology ,Capacitive Sensors, Sub-DConnector

    P-363.3UDPicoCube High-Precision XYZNanopositioning System, 5 x 5 x 5 m, Parallel Metrology ,Capacitive Sensors, Sub-DConnector, Vacuum Compatible to 10-9 hPa

    P-363.2CDPicoCube High-Precision XYNanopositioning System, 5 x 5 m,Parallel Metrology, CapacitiveSensors, Sub-D Connector

    P-363.2UDPicoCube High-Precision XYNanopositioning System, 5 x 5 m,Parallel Metrology, CapacitiveSensors, Sub-D Connector, VacuumCompatible to 10-9 hPa

    P-363.3CLPicoCube High-Precision XYZNanopositioning System, 5 x 5 x 5 m, Parallel Metrology ,Capacitive Sensors, LEMOConnector

    P-363.2CLPicoCube High-Precision XYNanopositioning System, 5 x 5 m,Parallel Metrology, CapacitiveSensors, LEMO Connector

    300 picometersteps (0.3 nm)performed withthe P-363, meas-ured with anexternal high-resolution,capacitive meas-urement system

    The P-363 settlesto within 1 nm in1 ms (100 nmstep, X and Ymotion; fasterresponse in Z)

  • P-915K Fast XY Piezo ScannerCost-Effective OEM Slide for Imaging

    For Pixel Sub-Stepping to Enhance Image Resolution Compact Design: 40 x 60 x 7 mm Highly Cost-Efficient Open-Loop Design Travel Ranges to 4 x 4 m Parallel Kinematics for Enhanced Dynamics and Better

    Multi-Axis Accuracy

    Model Travel Resolution Load capacity Dimensions

    P-915KXYS 4 x 4 m 0.4 nm 50 g 40 x 60 x 7 mmXY Scanner

    P-915K High-Dynamics XY Piezo ScannerCost-Effective OEM Slide with Large Aperture for Imaging Applications

    Direct Drive for High Dynamics Scanning Stage for Pixel Sub-Stepping:

    Enhances Image Resolution Cost-Efficient Design 15 x 15 m Travel Range Load Capacity to 5 N Clear Aperture 30 x 45 mm

    Model Travel range Resolution Resonant frequency

    P-915KHDS 15 x 15 m 0.1 nm 1850 HzHigh-DynamicsXY Scanner

    Dimensions

    Baseplate85 x 54 mmMoved platform69 x 69 mmClear aperture30 x 45 mm

    P

    hys

    ikIn

    stru

    men

    te(P

    I)G

    mb

    H&

    Co

    .KG

    2008

    .Su

    bje

    ctto

    chan

    ge

    wit

    ho

    ut

    no

    tice

    .All

    dat

    aar

    esu

    per

    sed

    edb

    yan

    yn

    ewre

    leas

    e.T

    he

    new

    est

    rele

    ase

    for

    dat

    ash

    eets

    isav

    aila

    ble

    for

    do

    wn

    load

    atw

    ww

    .pi.w

    s.C

    at12

    0EIn

    spir

    atio

    ns2

    009

    08/1

    0.18

    P-713 XY Piezo Flexure ScannerOEM System with Aperture and low Profile

    Ideal for Pixel Sub-Stepping in Image Enhancement Small Footprint and Low Profile: 45 x 45 x 6 mm with

    Clear Aperture Very Cost-Effective Design Travel Ranges to 20 x 20 m Parallel Kinematics for Better Multi-Axis Accuracy and

    Dynamics

    Settling time for the P-713 at 15 m isin the 2 ms range

    The fast P-915KXYS open-loop XY scanner is ideallysuited for image enhancement e.g. for CCD chips

    The P-915KHDS XY scanning stage is drivenby 4 PICMA piezo actuators to provide high

    stiffness, high dynamics and superior lifetime

  • P

    hys

    ikIn

    stru

    men

    te(P

    I)G

    mb

    H&

    Co

    .KG

    2008

    .Su

    bje

    ctto

    chan

    ge

    wit

    ho

    ut

    no

    tice

    .All

    dat

    aar

    esu

    per

    sed

    edb

    yan

    yn

    ewre

    leas

    e.T

    he

    new

    est

    rele

    ase

    for

    dat

    ash

    eets

    isav

    aila

    ble

    for

    do

    wn

    load

    atw

    ww

    .pi.w

    s.R

    110

    /11/

    08.0

    P-611.XZ P-611.2 XZ & XY NanopositionerCompact 2-Axis Piezo System for Nanopositioning Tasks

    P-611 piezo stages are flexure-guided nanopositioning sys-tems featuring a compact foot-print of only 44 x 44 mm. TheXY- and XZ-versions describedhere are part of a family of posi-tioners available in 1 to 3 axisconfigurations. Despite theirsmall dimensions the systemsprovide up to 120 m travel withsub-nanometer resolution. Theyare ideally suited for planar

    positioning tasks such asopticalpath length correction ininterferometry, sample position-ing in microscopy or scanningapplications, for autofocus andphotonics applications. Bothversions are available with100 m travel per axis. Equippedwith ceramic-encapsulated piezodrives and a stiff, zero-stiction,zero-friction flexure guidingsystem, all P-611 piezo sta-ges combine millisecond re-sponsiveness with nanomet-ric precision and extreme rel