Univ.Prof.Dr.Günther Leising Organic Electronics and ... · Organic Electronics and Optoelectronics Univ.Prof.Dr.Günther Leising Institute of Nanostructured Materials and Photonics

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Institute of Nanostructured Materials and PhotonicsUniv.Prof.Dr.Günther Leising

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© JOANNEUM RESEARCH Forschungsgesellschaft mbH© JOANNEUM RESEARCH Forschungsgesellschaft mbH

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Nanotechnologiesfor

Organic Electronics and Optoelectronics

Univ.Prof.Dr.Günther Leising

Institute of Nanostructured Materials and PhotonicsJOANNEUM RESEARCH

Weiz, Austria

INTERNATIONAL MATERIALS FORUM 2005

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© JOANNEUM RESEARCH Forschungsgesellschaft mbH

Outline

- JOANNUM RESEARCH Company Profile- Materials- Components- Processes- Packaging- Summary

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Province ofStyria

Problem Solving Training

TransferNetwork

Regional – National –International

Research & Developmentand Consulting

Skilled Employeesfor Trade and Industry

Science – Industry –Politics

15 Institutes 380 employees

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Materials

- organic/inorganic electroactive materials- organic/inorganic dielectric materials- organic/inorganic photoactive materials- organic/inorganic sensoractive materials- organic/inorganic optical materials- inorganic conductors (Cu)- organic/inorganic packaging material

RFID-Module

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supe

rcon

duct

ors

Materials

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TOPDOWN

BOTTOMUP

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Buildingblocks

Discotics

ShapedMolecules

ConjugatedPolymers

•rods•ribbons•cylinders•rings

DendronizedPolymers

Dendrimers

•inorganic core•organic core

•lyotropic•thermotropic

Nanotechnology

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Nanotechnology

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Disorder

hν (POL)

Order

Structure

FunctionElement

‘Circuit’

Macrosystem

Nanoaufbau

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Components

- passive components (R, C, L, antenna)- nonlinear components (diode, Zener, foldback) - active components (FET, LED, laser)- information storage (memory)- sensor components (photodiode, …)- energy storage (battery, …)- optical components (lenses, waveguides, …)- conducting lines and vias

RFID-Module

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oFET - Materials

Gate

Semiconductor

Metal (Au), doped-SC (n++-Si),Conducting polymer, organic

conductor

SourceMetal, doped-SC,

Conducting polymer, organic conductor

DrainMetal, doped-SC,

Conducting polymer, organic conductor

Conjugated polymer, organic semiconductor

semiconductized material

Dielectric- Inorganic

(SiO2, Al2O3, mica,..)- insulating polymer (PMMA)- functional polymer (PVP)- organic layer

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oFET - Structuring

Gate

Semiconductor

- evaporation- spin-coating- ink-jet printing

Source- evaporation- spin-coating- ink-jet printing- nanoimprinting

- evaporation- spin-coating- dip-coating- SAMs- transferprinting- nanolamination

Dielectric- evaporation- spin-coating- dip-coating- SAM

Drain- evaporation- spin-coating- ink-jet printing- nanoimprinting

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Processes

- Soft-LithographyNanoimprintingHot-Embossing

- Thin-Film Growth (PVD)- Ink-Jet Printing- 3D-Structuring (Two-Photon Absorption)

RFID-Module

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Soft Lithography

Hard StampsHard Stamps

EmbossingEmbossingEmbossing PrintingPrintingPrinting

Solvent AssistedMicromolding

Solvent AssistedMicromolding

ReplicaMolding

ReplicaMolding

SoftEmbossing

SoftEmbossing

LiquidEmbossing

LiquidEmbossing

Micro-ContactPrinting

Micro-ContactPrinting

MicrotransferMolding

MicrotransferMolding

MicromoldingIn Capillaries

MicromoldingIn Capillaries

NanoImprinting

NanoImprinting

SOFT Stamps(Soft Lithography)

SOFT Stamps(Soft Lithography)

Thermo-setting Polymer

Thermo-setting Polymer

Flash(UV curable

Polymer)

Flash(UV curable

Polymer)

Soft Stamps(Soft Lithography)


MoldingMoldingMolding



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Nanoimprinting

replicative techniqueHigh resolution (-> 10nm)parallel structuringroom temperature process(UV-Imprinting)direct structuring of flexible, substrates (Hot Embossing)high and low aspect ratiocost effectivehigh volume (-> DVD)

2002

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Imprinted Polymer LaserChristian Doppler Laboratory for Advanced FunctionalMaterials, AT&S, JOANNEUM RESEARCH

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450 500 550 600 650 700

0.0

0.2

0.4

0.6

0.8

1.0 LASER ASE

Nor

m. e

mis

sion

inte

nsity

Wavelength (nm)

0 5 10 15 20 25

Out

put P

ower

(a.u

.)

Energydensity (µJ/cm2)

Imprinted Polymer Laser

Christian Doppler Laboratory for Advanced FunctionalMaterials, AT&S, JOANNEUM RESEARCH

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Hot-Embossing

Mask-Aligning

2004 2004

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Microimprint Lithographie

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foil, glass

1. Substrate and Gate-contact

2. Gate-Dielectric

OrganicOrganic dielectricdielectric

Spin-on Crosslinking

heat

3. Imprint-resistSpin-on

4. Hot-embossing (EVG 520)

Stampheat

pressure

heat

separation

NanoimprintNanoimprint--LithographyLithography 11

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6. Source- und Drain-contacts

Spin-on evaporation

Source- and Drain-Material

Lift-off

7. Organic semiconductor

Organic Semiconductor

5. EtchingReactive Ionetching

NanoimprintNanoimprint--LithographyLithography 2 2

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Engineering of thin film growth

- substrate (surface energy, roughness,…) and substrate treatment (etching steps, chemicalprocesses,...)

- substrate temperature during evaporation- deposition rate- film thickness

50 nm pentacene on different substrates, 5x5µm-AFM heightimages Au PMMA PVCi PVP

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grainsize – carrier mobility

0

0,05

0,1

0,15

0,2

0,25

0,3

0,35

0,4

0,45

0 1 2 3 4 5 6 7Grain Size (µm)

Mob

ility

(cm

2 /Vs)

SiO2

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All-organic FET

50nm Pentacen auf PMMA mit S/D-Kontakten aus Panipol

-8,0E-07

-7,0E-07

-6,0E-07

-5,0E-07

-4,0E-07

-3,0E-07

-2,0E-07

-1,0E-07

0,0E+00-100-90-80-70-60-50-40-30-20-100

V_DRAIN[V]

I_D

RA

IN[A

]

VG[V]: 0 FORWARDVG[V]: 0 REVERSEVG[V]: -10 FORWARDVG[V]: -10 REVERSEVG[V]: -20 FORWARDVG[V]: -20 REVERSEVG[V]: -30 FORWARDVG[V]: -30 REVERSEVG[V]: -40 FORWARDVG[V]: -40 REVERSEVG[V]: -50 FORWARDVG[V]: -50 REVERSE

50µm

Ink-jet printed polymer electrodes

on 50nm pentacene on PMMA

Output Characteristics

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3D-StructuringTwo Photon Absorption (TPA)

Two-Photon-Absorption (TPA)

Non linear process (prop. I²)Absorption via virtualintermediate stateHigh laser intensity requireddue to short life time of intermediate level

1 photon process

2 photon process

Ground state

Excited state

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Typical setup for TPA

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Characteristics of polymer laserprocessing

Laser direct writing by means of multi photon absorption

True 3D technique in transparent media with µm and sub-µm resolutionmaskless methodSingle writing stepWell suited for small series or rapid prototyping

Structuring by means of non-linearabsorption (2P photopolymerization)Lateral resolution and depthresolution depends on

Velocity, sample feedratewavelengthnumerical apertureIntensity

resolution < 50nm

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Scheme of TPA-Setup @ NMP

Ultrafast Ti:S Laser

PC Control and CAD

BeamAnalysis

Shutter/Attenuator

Stage

MachineVision

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Optical Waveguides

3D Structuring with Two-photon absorption (TPA)

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PackagingOrganic photodiode an newspaper

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Packaging

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Summary- ALL-ORGANIC - > appealing approach- every-day life substrates (paper, textiles) - cost and reliability decide about materials and

processes- replicative processes for high volume

manufacturing –> Nanolithography –nanoimprinting

- packaging strategy open- Integrated organic electronics

-> disruptive technology

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ThankThank youyou !!


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Documents

Univ.Prof.Dr.Günther Leising Organic Electronics and ... · Organic Electronics and Optoelectronics Univ.Prof.Dr.Günther Leising Institute of Nanostructured Materials and Photonics