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Ultrasonic Motor, Piezo Motors, Ultrasonic Piezo Motor ... · PDF filePI Ultrasonic piezomotors are based on a novel, patented ultrasonic drive developed by PI. At the heart of the

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  • Ultrasonic Motorsfor Fast and Precise Positioning

    p i e z o n a n o p o s i t i o n i n g | w w w. p i . w s

    Latest Catalogs: www.pi.ws

    www.Ultrasonic-Motor.com

    http://www.Ultrasonic-Motor.comhttp://www.pi.wshttp://www.p

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    M O T I O N | P O S I T I O N I N G

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    m o t i o n | p o s i t i o n i n g

    PILine Linear Positioning stages

    PILine rotation stages

    Motion control

    U-521Compact Linear Stage

    Fast PILine Direct Drive, Incremental Encoder

    U-622Miniature Rotation Stage

    20 mm Side Length, Integrated Encoder

    U-624Fast Miniature Rotation Stage

    With Ultrasonic Piezomotor

    U-628Fast Rotation Stage with Small Footprint

    With Ultrasonic Piezomotor

    C-877PILine Motion Controller

    For Ultrasonic Piezomotors, Cost-Effi cient and Compact

    U-651 Rotation Stage with Low-Profi le Design

    Fast PILine Direct Drive

    C-867UPILine Motion Controller

    For Ultrasonic Piezomotors, 1 and 2 Axes

  • Ultrasonic Motor Applications

    Nanotechnology, Nanofabrication,NanoAutomation

    Precision positioning of components(linear and rotation)Precision actuationMicrogrippersManipulators

    Semiconductor Technology

    Long-range placement and positioning

    www.ultrasonic-motor.comp i e z o n a n o p o s i t i o n i n g | w w w. p i . w s

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    Microscopy/Imaging

    Fast sample positioningXY-stagesLong range scanning

    Biotechnology, Life Science

    MicrodosingDispensingNano/microliter pumpsFast positioningBio-handling

    Medical Design, Medical Technology

    ScreeningFast positioningCell penetration, microdosingHandlingNon-magnetic actuators

    PILine motors act on an annular runner, producing a rapid rotary motion, e.g. for this Leica TS30 total station for auto-mated angle and distance measurement at high accuracy and reliability (Image: Leica Geosystems)

    http://www.p

  • PI Ultrasonic piezomotors arebased on a novel, patentedultrasonic drive developed byPI. At the heart of the system isa rectangular monolithic piezo-ceramic plate (the stator), seg-mented on one side by twoelectrodes. Depending on thedesired direction of motion, theleft or right electrode of thepiezoceramic plate is excited toproduce high-frequency eigen-mode oscillations at tens tohundreds of kilohertz. An alu-mina friction tip (pusher)attached to the plate movesalong an inclined linear path atthe eigenmode frequency.Through its contact with thefriction bar , it provides micro-impulses that drive the movingpart of the mechanics (slider ,turntable, etc.) forward or back-wards. With each oscillatorycycle, the mechanics executesa step of a few nanometers; themacroscopic result is smoothmotion with a virtually unlimit-ed travel range. The drivingforce is taken from the energyin the longitudinal oscillationcomponent. The transversecomponent serves to increase /decrease the pressure of thefriction tip against the frictionbar. The transverse oscillationenergy determines the maxi-mum frictional force and hencethe holding and driving force ofthe motor . State-of-the-artultrasonic motors can produce

    PILine Ultrasonic Piezomotors

    accelerations to 10 g and veloc-ities to 500 mm/s. Ultrasonic motors cannot pro-vide the unlimited resolution oflinear piezo actuators and flex-ure-guided piezo positioningstages. These motors transfermotion through friction, whichis why their repeatability is lim-ited to about 50 nm. Muchhigher resolution and holdingforces can be achieved withPiezoWalk piezomotors / dri-ves.

    PILine Levels of Integration

    PILine ultrasonic drive prod-ucts are offered in three differ-ent levels of integration. Thedrive electronics and controllercan be chosen accordingly. P-661 and P-664 OEM motors

    require the greatest amountof care at the customers site.Motor and friction bar thelength depends on the travelrange have to be integratedinto a mechanical setup.Operation requires preloadof the motor against the fric-tion bar , guiding and, ifnecessary, the servo-loop.

    RodDrives can replaceclassical drive elements likerotary motor / leadscrewassemblies, or magneticlinear drives integrated intoa micropositioner or hand-ling device. Integrationrequires guiding and ifnecessary the servo-loop.

    Linear positioning stagesrepresent the highest level ofmanufacturer integration.The piezomotor is integratedcompletely in a high-qualitymechanical setup inlcudingif necessary the servo-loopwith direct-metrology linearencoders.

    PILine ultrasonic motors are based on a simple construc-tion allowing for the design of low-cost drive units and extremely com-pact, high-speed micro-positioning stages smaller than a matchbox.

    PILine levels of integration: OEM motor, RodDrive, linear positioning stage.

    Variety of PILine ultrasonic piezomotors,translation stages and motion controllers.

    Ultrasonic Motor Principle

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  • Features and Advantagesof PILine UltrasonicPiezomotors

    Compact Size: the direct-drive principle allows the de-sign of ultra-compact trans-lation stages. The M-662, forexample, provides 20 mmtravel in a 28 x 28 x 8 mmpackage.

    Low inertia, high accelera-tion, speed and resolution:PILine drives achieve veloci-ties to 500 mm/s and accele-rations to 10 g. They are alsovery stiff, a prerequisite fortheir fast step-and-settletimes on the order of a fewmilliseconds and provideresolution to 0.05 m. Thelack of a leadscrew meansno lubricant flow or materialrelaxation to cause submi-cron creep. There is also norotational inertia to limitacceleration and decelera-tion.

    Excellent Power -to-WeightRatio: PILine drives are opti-mized for high performancein a minimum package. Nocomparable drive can offerthe same combination ofacceleration, speed and pre-cision.

    Safe: The minimum inertia ofthe moving platform toget-her with the slip clutcheffect of the friction driveprovide better protection ofprecision fixtures / devicesthan leadscrew-driven sta-ges. Despite the high speedsand accelerations, there is amuch lower risk of pinchingfingers or other injuries thanwith conventional drives.This means users may notneed interlocks, light cur-tains or other measures tokeep them safe.

    Self-Locking Feature: PILine drives create a braking forcewhen not energized withoutthe position shift commonwith conventional mechani-cal brakes. Other benefits ofthe self-locking are the elimi-nation of servo dither and

    steady-state heat dissipa-tion.

    Vacuum Compatibility: Vacu-um compatible versions ofPILine drives are available.

    Negligible EMI: PILine dri-ves do not create magneticfields nor are they influencedby them, a decisive advanta-ge in many applications.

    Custom Solutions / Flexibili-ty for OEMs: PILine drivesare available in open-loopand closed-loop translationstages and as OEM compo-nents. PI develops and ma-nufactures all piezo ceramiccomponents in-house. Thisgives us the flexibility to pro-vide custom motors (size,force, environmental condi-tions) for OEM and researchapplications.

    Quality, Lifetime, Experien-ce: Based on PIs 30+ years ofexperience with piezo nano-positioning technology ,PILine drives offer exceptio-nal precision and reliabilitywith an MTBF of >20,000hours. Rotating componentssuch as gears, shafts andmoving cables that are proneto failure in conventionalmotion systems, are not partof the PILine design.

    Settling behavior of a PILine M-663 linear stage, 100 m step. A stable position towithin 0.1 m can be reached in only 10 ms.

    Principle .design of a PILine ultrasonic piezomotor-driven translation stage.

    Custom high-force ultrasonicpiezo motors can provide

    forces to 50N.

    Ultrasonic Motor Principle

    www.ultrasonic-motor.comp i e z o n a n o p o s i t i o n i n g | w w w. p i . w s

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    http://www.p

  • w w w. p i . w sw w w . p i . w s

    compact Linear stagefa s t p i l i n e d i r e C t d r i V e , i n C r e m e n ta l e n C o d e r

    U-521 Only 35 mm wide and 10 mm high

    Integrated, direct-measuring incremental encoder with up to100 nm resolution

    Up to 0.3 m minimum incremen-tal motion

    Travel range 18 mm

    Velocity 200 mm/s

    Feed force 2 N

    Versions vacuum-compatible to 10-6 hPa

    Precision-class micropositioning stagePiezoelectric ultrasonic direct drive for high velocities and small design. Centered ball bearings. The piezomotor drive principle and the electrical operation are cost-effi -cient and can be customized

    Direct-measuring principleIntegrated, direct-measuring incremental encoder. Reso-lution depending on version, 400 nm or 100 nm. Optical reference point switch

    PILine ultrasonic piezo