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Threestage Roots high vacuum pumpR. Fukutome, J. Aikawa, and C. Hayashi Citation: Journal of Vacuum Science & Technology 13, 630 (1976); doi: 10.1116/1.569047 View online: http://dx.doi.org/10.1116/1.569047 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvst/13/2?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Three-stage light-gas gun with a preheating stage Rev. Sci. Instrum. 75, 537 (2004); 10.1063/1.1641155 Performance of the three-stage light-gas gun with a preheating stage AIP Conf. Proc. 505, 1167 (2000); 10.1063/1.1303671 A trial of the three-stage light-gas gun with a preheating stage AIP Conf. Proc. 370, 1193 (1996); 10.1063/1.50695 High throughput pumping of dangerous gases with a multistage roots vacuum pump J. Vac. Sci. Technol. 20, 1023 (1982); 10.1116/1.571533 Design of a threestage alkali beam source Rev. Sci. Instrum. 48, 131 (1977); 10.1063/1.1134993
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 137.189.170.231 On: Sat, 20 Dec 2014 09:18:08
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 137.189.170.231 On: Sat, 20 Dec 2014 09:18:08
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 137.189.170.231 On: Sat, 20 Dec 2014 09:18:08
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 137.189.170.231 On: Sat, 20 Dec 2014 09:18:08
Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 137.189.170.231 On: Sat, 20 Dec 2014 09:18:08
