TECHNISCHE FAKULTÄT DERCHRISTIAN-ALBRECHTS-UNIVERSITÄTZU KIEL

Not necessary but nice

All comments will appear in

this cloud

In-Situ Assessment of Macropore Growthin Low-Doped n-Type Silicon

 J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll

University Kiel; Germany

2. Persistent Pore Problems

3. Multi-Mode in-situ FFT IS

4. Theory and Results

1. Introduction

5. Conclusions

What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You

Good

In-Situ Assessment of Macropore Growthin Low-Doped n-Type Silicon

 J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll

University Kiel; Germany

2. Persistent Pore Problems

3. Multi-Mode in-situ FFT IS

4. Theory and Results

1. Introduction

5. Conclusions

What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You

Not so good!

Note change in

title!

1. Introduction

1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores”(while trying to characterize solar Si)

“SCR theory” Lehmann Model

n-macro(fsi. aqu) “Pores”

This picture started it all!

Good

1. Introduction

1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores”(while trying to characterize solar Si)

“SCR theory” Lehmann Model

n-macro(fsi. aqu) “Pores”

This picture started it all!

Not so good

1. Introduction

1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” “SCR theory” Prediction: n-macro(aqu, bsi, litho) pores

Lehmann model

works !!!

First SiMacropores

Note trick with “veiled” text from

before and full picture

from before

1. Introduction

1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” “SCR theory”

Lehmann model

works??

532 µm325 min

Only up to a point

„Mode Transition“ Talk „Fast Pore Growth“ Talkn-macro(aq, bsi) pores

Lead up to the high point!

1. Introduction

Lehmann Model: Main parameter for pore growth is hole supply

Limitations: Model does not address:

Chemistry: n-macro(org. electrolytes)n-macro(HAc. Electrolyte)

Crystallography: <100> and <113> Pores “Curro” Pores

Mode Transitions: Crysto - Curro transitionSelf-Organization: Diameter oscillationsCurrent response: Diameter, transitions

Depth(t): Growth mode transitions

Here going point by point makes

sense- Leads up to major point at the

end

1. Introduction

Lehmann Model: Main parameter for pore growth is hole supply

Limitations: Model does not address:

Chemistry: n-macro(org. electrolytes)n-macro(HAc. Electrolyte)

Crystallography: <100> and <113> Pores “Curro” Pores

Mode Transitions: Crysto - Curro transitionSelf-Organization: Diameter oscillationsCurrent response: Diameter, transitions

Depth(t): Growth mode transitions

Too much now, because you are spending time on each item. You will now

loose your audience. They are all trying to figure out what all the

text might mean.

Where are the promised products ?

2. The Problems

Electrodes for Micro Fuel Cells

Lead filaments

X-ray filter

Note change in color in the title part.Takes up the color from introduction. Not important, but helps to organize

your thoughts.

Provoke!Provoke!See how annoying these “moving-in”

options are?

5. Conclusion

• Multi-Mode in-situ FFT IS works

• Modelling allows to extract a wealth of data relevant for pore growth

• Scrutinizing and interpreting these data will lead to a better understanding of pore growth in semiconductors

Conclusion=

The Message!