Sensor Actuator 08

8/19/2019 Sensor Actuator 08

1/20

MEMS: Invention to Market

• Invention->Market – Creation of a new market is slow.

• Market->Invention (easier)

– What is the existing cometition! – Imact " will it take over the market!

• Man#fact#ring

• Sales

• Mo$eling as in this co#rse: %nal&sis of otions'erformance' rice. lanning of *+' ,#sinesslan.


2/20

+evice Categories

• echnolog& +emonstrations – est $evice concet

– est fa,rication technolog&

– Small of $evices/low &iel$ ok

• esearch ools – Small of $evices' often c#stom.

• Commercial ro$#cts – 0arge of $evices' high &iel$' low cost'

ackaging all critical.


3/20

rans$#cers' Sensors' an$%ct#ators

• rans$#cers: 1enerall& convert oneform of energ& to another. (2otgenerall& conserving energ&.)

– Co#l$ ,e a sensor or an act#ator.• Sensors meas#re something an$

rovi$e an o#t#t signal. 3s#all&electrical' ,#t sometimes otical or

mechanical.• %ct#ators move something. (4#t what

wo#l$ an 0E+ ,e!)


4/20

+omains

• hermal (temerat#re' heat' heat 5ow)• Mechanical (force' ress#re' velocit&'

acceleration' osition)

• Chemical (concentration' comosition'reaction rate)• Magnetic (magnetic 6el$ intensit&'

magneti7ation)

• a$ient (intensit&' wavelength'olari7ation' hase)• Electrical (voltage' c#rrent' charge'

resistance)


5/20

Examles of Sensors an$%ct#ators

• osition Sensors

– esistive strain sensor. ($imensions change'8ρl/%)

– ie7oresistive strain sensor. ($imensions an$ ρ change)

Sensitivit& meas#re$ ,& the ga#ge factor

198relative resistance change/strain8(∆/)/

(∆0/0)8∆/ε198; for metals (mostl& geometr&' someie7oresistance)

198


6/20

– ie7oelectric materials (C#ries' strain ($eformation)

• olari7ation ?-> stress• Sensor/%ct#ator

• In &o#r watch' @#art7 (,#t this is changingAA(Si ime))

• %lso &roelectric materials have

temerat#re?->olari7ation.


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12/20

• Magnetostrictive %ct#ators

– Materials exan$/contract with magnetic6el$

– Similar to ie7oelectric eBect

– erfenol-+ ,=.;C+&=.CD9e strain of ;F


13/20

• 9 MEMS " Switching or changing

caacitance or ,#il$ing

micromachine$ 9 comonents.


14/20

Also ink jets!


15/20


16/20

• 4iological %ct#ators " 9#t#re' nano'research stage.

• 4iome$ical Sensors an$ %ct#ators – 2e#ral ro,es

– %rti6cial retinas

– Hearing rosthetics (in #se) – 0iving cells as sensors (chis for

c#lt#ring an$ meas#ring cell roerties(see ovaks' for examle)

• Chemical %ct#ators " Electrochemicalact#ators #sing ol&&rrole.


17/20

• Chemical Sensors " man& t&esA

– Chemireisistors (organic an$ inorganic)

– Chemicaacitors – Micromachine$ Calorimeter (com,#sti,le

gasses or exlosive articles)

– Micro hot late (() for several materials.

– Chem 9Es

• Can $o the same thing with man& ion sensitivemem,ranes.

Pd – Sensitive to hydrogen at 10 ppm

Problem: Drift


18/20

• #ms

– Mechanical

– Electrohoretic/Electroosmotic' #se$ insearations of +2% an$ rotein fragments.

" " " " " " "

#e$trals dragged along by

mobile ions% &lo' nearly

(onstant velo(ity a(ross

(hannel%

immobile ions

mobile "ions


19/20

• Jtical rans$#cers

– M%2K t&esA

– Jverla ,etween commercial electronics an$ MEMS.

– hermal (4olometers)• 0ight heats element' ca#ses resistance change.

– 9a,r& erot etalon t&e $evices (interference) forchanging re5ection. 0ike microsectrometer shownrevio#sl&.

– E-ink $isla&s (MEMS!)

– hermoco#le

– 1ola& cell• 0ight -> heat -> exan$ing gas -> moves something -> signal.

– Sectrometers

– +iBractive sensors.


20/20

roLect).

Caacitive %ccelerometer' . '

Sent#ria.• 9a,rication echnolog& " sets limits onstr#ct#res.

• 0#me$ element mo$eling in $iBerent $omains.

• Caacitive trans$#cer/act#ator• Elasticit&' contact mechanics' stiction

• Str#ct#res " srings/,eams.

• 9l#i$s " sN#ee7e 6lm $aming

• Electronics' fee$,ack

• S&stem $&namics

• 2oise

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Sensor Actuator 08