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    POLYGENERATION OF ELECTRICITY, HEATand ULTRA PURE WATER forSEMICONDUCTOR INDUSTRY

    Chuanfeng Liu

    Supervisors: Andrew Martin EGI KTH

    Aapo Ssk Xzero ABHenrik Dolfe Xzero AB

    Heat and Power Technology, Stockholm, Sweden

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    Content

    Heat and Power Technology, Stockholm, Sweden

    1. Objectives of thesis

    2. Current UPW system in semiconductor industry

    3. Principle of air gap membrane distillation

    4. Xzero test facility of Air Gap Membrane Distillation

    5. Integrated MD in cogeneration cycle

    6. Conclusion

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    Objectives

    Integrate MD technology into traditional heat and power

    cogeneration cycle to produce UPW for semiconductor industry

    Theoretical study of membrane distillation

    Experimental study of air gap membrane distillation

    Economic analysis

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    UPW Consumption in Semiconductor

    Industry

    Heat and Power Technology, Stockholm, Sweden

    50% of total UPW market worldwide.

    More than 6000 liters UPW for one eight-inch wafer

    1.4-4.8 million liters UPW per dayThe cost of a UPW system in a fab is more than $10

    million.

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    Present UPW Production System

    Heat and Power Technology, Stockholm, Sweden

    Reverse osmosis (RO) and Electro-deionization (EDI)

    10-20 KWH per cubic meter UPW

    2-3MW-- 6% of total fab energy consumption

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    Make-up Section

    Raw

    Water

    Tank

    Multi

    Media

    Filter

    Carbon

    FilterHeat

    ExchangerCartridge

    Filter

    Reverse

    Osmosis

    and EDI

    Break

    Tank with

    Nitrogen

    Blanket

    Degas

    Primary

    Mixed

    Bed

    Exchange

    UV

    System

    Cartridge

    Filter

    RejectTo Polishing Loop Section

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    Principle of Membrane Distillation

    Membrane

    Hot

    S

    ide

    Coldside

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    Advantages of MD

    Heat and Power Technology, Stockholm, Sweden

    100% (theoretical) rejection of non-volatile matters

    lower operating temperatures

    lower operating pressure

    reduced chemical interaction

    reduced vapor spaces compared distillation processes

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    Flow Diagram Of Xzero TestFacility

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    Computer Simulation of MembraneDistillation

    Hot side

    Membrane

    Cold Side

    Ultra Pure Water

    Feed wat er in

    Feed water out

    Cold water in

    Coldwater out

    Heat exchanger

    Heat E xchanger

    Expansion tank

    Water_tank

    H e a ti n

    H e

    o u

    Module emplyed in

    Aspen Utilites

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    Integrated Cogeneration of MD in the

    Semiconductor Industry

    The power requirement of one typical semiconductor

    fabrication plant is equal to what 7500 single-family

    homes consume.

    The average power consumption for the fab is 2.18

    KW/m2, and the average cooling load is 1.53 KW/m2.

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    Combined Heat Recovery Chiller

    With MD Units

    P

    Compressor

    Expansion Valve

    CondenserEvaperator

    Air conditioner systemMD Water P urification

    H e a t r e c o v e r y c h i l l e r

    Waste Heat

    From Fab

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    Combined MD With Waste Heat

    From Fab

    Total 35-40 MW

    Air conditioner system 4-5MW

    Condenser side 12 MW 20,000 l/hour possible with readily available waste heat

    sources

    About 1/3 of fab UPW requirement

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    Integrated MD With PowerProduction

    HTCA

    JW

    LO

    LTCA

    Membrane Module:

    Gas Engine

    heat recorvery

    JWheat exchanger

    LOheat exchanger

    MDunit: AGMD,XzeroLayout NO.1 with flue gas heat recovery

    S

    T

    A

    GE

    1

    S

    T

    A

    GE

    2

    S

    T

    A

    G

    E

    3S

    T

    A

    G

    E

    4S

    TAG

    E

    5

    S

    T

    A

    G

    E

    6

    Pure Water

    Cooling water in

    Coolin water out

    H e a t R e c o v e r y

    C o o l i n g

    W a t e r O u

    36 Mwei (fab electricity demand

    covered )

    48,000 L/hr (2/3 UPW demand)

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    Conclusion

    Polygeneration is promising in semiconductor

    industry.

    With CHP and waste heat utilization , up to 65 m3/hr

    UPW possible for a fab with 5000 wafers production

    per week.

    Capital cost is around $3 per cubic meter UPW.