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Pump Diode Lasers:Applications and Technology
Christoph Harder, Harder&[email protected]
Photonics 2008, Dehli2008 12 13
112/11/2008 Photonics 2008, Dehli
Pump Diode Lasers
1. Photonic Market– Global Photonic Market– High Power Diode Laser Applications– Photonic Manufacturing
2. Applications– Photonic Tools– Power Photonics
3. Narrow Stripe Pump Diode Lasers– Single Mode Devices
4. Broad Area Pump Diode Lasers– Multimode Devices– Optical coupling to fiber– Heat removal
5. Status, Trends, Opportunities– VCSEL
212/11/2008 Photonics 2008, Dehli
Acknowlegement
• OIDA, Michale Lebby• OITDA• EPIC, Tom Pearsall• Bookham: Boris Sverdlov, Nobert Lichtenstein, Susanne Pawlik, Gunnar Stolze, Dominik Jäggi• Intense: John Marsh, Iulian Petrescu-Prahova, Chris Baker, Stewart McDougal, Steve
Gorton, Berthold Schmidt• ILT Aachen: Reinhart Poprawe• JDS Uniphase: Toby Strite, Victor Rossin, Erik Zucker• Trumpf: Friedhelm Dorsch• Trumpf: Friedhelm Dorsch• ETH Zürich: Bernd Witzigmann• Fraunhofer Institut USA – Visotek: Stefan Heinemann• Coherent: David Roh• Laserline: Volker Krause• Newport Spectra: Ed Wolak, Jim Harrison, Michael Atchely• IPG: Alex Ovtchinnikov
Based on Seminar by Berthold Schmidt: “High Power Laser Diodes: Technology and Applications”applications of High Power Semiconductor Lasers, San Diego, California, Oct 6, 2008
Reference: Optical Fiber Telecommunications, Academic Press, A: Components and SubsystemsISBN: 978-0-12-374171-4, chapter 5 “Pump Diode Lasers” by Ch. Harder
312/11/2008 Photonics 2008, Dehli
Global Photonic Market
412/11/2008 Photonics 2008, Dehli
Opportunities – The MarketWorld Market 2005 (production)
Photonics World Market by Sector, 2005
Optical
components &systems
6%
Measurement &automated vision
8%
Defence photonics8%
Productiontechnology
6%
Total: EUR 228 Billion
EPIC, The European Photonics Industry Consortium Activities and Markets in Europe
5
6% 8%8%
Medical techn. &life science
8%
Opticalcommunications
5%
Information
technology21%
Lighting8%
Solar energy4%
Flat panel displays26%
OPTECH CONSULTING - October 2007
Opportunities – The MarketWorld Production by country
World Production Volume by Country, 2005
Total: EUR 228 Billion
The Netherlands2%
Japan
32%
Europe Other
4%
EPIC, The European Photonics Industry Consortium Activities and Markets in Europe
6
France
2%
Germany
7%
Italy
2%
UK
2%
Other (incl. China)
11%North America
15%
Korea
12%
Taiwan
11%
Europe total: 19%OPTECH CONSULTING - October 2007
Projected Market Growth till 2015
7
• Laser diode market in the range of only 1-2% of the overall photonics market
• Biggest Diode Share: Telecom, optical storage (75-90%)
• Gray areas: Value of material processing (system level), defense budget
AHPSL 2008 Seminar #1
Global Photonic Market: Japan
812/11/2008 Photonics 2008, Dehli
Domestic ProductionDomestic Production -- OE vs. ElectronicsOE vs. Electronics
4.92.5
2.4 1.0 ▲1.9
28.9
11.2
▲15.1
2.7
19.92.4
4.34.0
▲0.3
2.1
6.4
兆円
)
対前年度成長率
5
6
7
8
9
10
Optoelectronic Products
Tri
llio
nJP
Y
4.9
▲0.7
0.3
▲12.0 ▲5.6
2.34.6 6.6
6.1
▲10.5
0.59.6
▲18.2▲12.0
7.0
11.49.1
4.39.1 4.0
20.5
2.3
▲3.5
1.86.5 3.1
生産金額
(兆円
0
1
2
3
4
5
Estimate
91 92 93 94 95 96 97 98 99 00 01 02 03 04 05 06 07 08Prospect
Electronics Products (x 1/10)
Tri
llio
nJP
Y
Year
2
3
4
Display
Input / Output Equipment
trillio
nJ
PY
trillio
nJ
PY
Domestic OE Products Trends by FieldDomestic OE Products Trends by Field
Fiscal Year
0
1
91 92 93 94 95 96 97 98 99 00 01 02 03 04 05 06 07 08
Optical Storage
Optical Communication
Laser Processing
Sensing/Measuring
Photovoltaic Cells
trillio
nJ
PY
trillio
nJ
PY
Estimate Prospect
Global Photonic Market: USA
1112/11/2008 Photonics 2008, Dehli
OIDA is broadening optoelectronics with“Green photonics” opportunities
Value Chain
Service
Providers
Systems
Green - Eco-System “Ecomation”Green photonics systems and components
Home display, solar cell, lighting windows/panels
TelecomSystems
TelecomCarriers
Opportunities Active Presence
Wireline/wireless carriers; Lighting architects;Consumer services; media/content providers
OIDA: Optoelectronics Industry Development Association
Technology Breadth
Modules
Components
Sources: OIDA
Telecommodules
TelecomDevices
SensingIndustrialDevices
MilitarySpec
Devices
Medical &High power
lasers
LightingModules
AdvancedMaterials
Nano/BioPackages
SensingIndustrialModules
LightingDevices
Solar &EnergyDevices
DisplayDevices
Solar &Energy
Modules
DefenseSecurityModules
High Powerlaser
modules
Common platforms for Green photonics…
Diode laser revenues by application
Diode laser revenues by segment
3500000
4000000
4500000
Diode Pump Lasers
Other
Optical storage will continue to suffer margin erosion
Diode pump lasers grow 62.8% in 2006 over 2005
Michael Lebby ([email protected])
Where is the new cash cow?
0
500000
1000000
1500000
2000000
2500000
3000000
3500000
2005 2006 2007 2008
Re
ve
nu
es
($k
)
Sensing
Barcode Scanning
Inspection, Measurement, Control
Image Recording
Entertainment
Optical Storage
Telecom
Basic Research
Instrumentation
Medical
Materials Processing
Sources: OIDA, OIDA members, Laser Focus, OIDA consultants
Global Photonic Market: Europe
1412/11/2008 Photonics 2008, Dehli
European Production in a Global Context
EPIC, The European Photonics Industry Consortium Activities and Markets in Europe
15
Production technology
Optical communication
HPL Applications at a glance
• material processing, analysis, measurement
• Data transmission, Optical amplification
• Communication (inter satellite,..), distanceDefence & Aerospace
Information Technology
Medical
• Communication (inter satellite,..), distancemeasurement, countermeasure,target designation, Illumination, LIDAR,...
• Optical storage, printing, marking, display
• Aesthetics (Skin treatment,..), surgery,therapy (PDD -Photodynamic disinfection-,PDT -therapy-,..), ophthalmology, Cancertreatment
16 AHPSL 2008 Seminar #1
High Power Diode Laser Applications:Information Technologies
1712/11/2008 Photonics 2008, Dehli
4.7 GB700 MB
NA
25 GB
Wavelength 780 nm
0.45 0.60 0.85
Capacity
CD DVD
4.7 GB (1 layer)
0.6
mm
1.2
mm
700 MB
NA
0.1
mm
25 GB (1 layer)
Wavelength 780 nm 650 nm 405 nm
0.45 0.60 0.85
Capacity
CD DVD BD
Progress of Optical StorageProgress of Optical Storage
Label surface Label surface Label surface
8.5 GB (2 layers) 50 GB (2 layers)
Blu-rayDisc
Blu-rayDisc
0.6
mm
1.2
mm
0.1
mm
Blu-rayDisc
Blu-rayDisc
Track pitch 1.6 μm 0.74 μm 0.32 μm
High Power Diode Laser Applications:Communication Technologies
1912/11/2008 Photonics 2008, Dehli
Worldwide laser diode market history from 1996
6000
7000
Diode lasers will struggle to grow revenue
Telecom experiencing margin erosion
Optical storage squeezed out by flash
Michael Lebby ([email protected])
0
1000
2000
3000
4000
5000
6000
1996
1997
1998
1999
2000
2001
2002
2003
2004
2005
2006
Reven
ue
($k) Other
Optical Storage
Telecom
total
Telecom and storage entering maturity?
Sources: OIDA, OIDA members, Laser Focus, OIDA consultants
IBM Research Laboratory:980 Diode Laser
Disruptive Technology: Magic Fiber: Erbium doped fiber
21
Today:
A few hundred channels at 10Gb/sover a few thousand km!
Optical Amplifier:
as power supply
We were the only laser supplier forhigh power and high reliability
12/11/2008 Photonics 2008, Dehli
Why High Power 980nm Pumps?
Input
DispersionCompensating
Fiber
Coupler
Isolator & filter
ErbiumDoped Fiber
GainFlattening
Filter
Coupler Isolator
Output
ErbiumDoped Fiber
ErbiumDoped Fiber
Typical 3-stage EDFA
www.bookham.com Page 22
1480 Pumps (now 980nm !):• Advantage:
• higher optical conversion efficiency
• Disadvantage• Increased noise figure• More expensive coupler• High heat load, expensive cooling
980 Pumps:• Advantage:
• Low noise figure (3 level)• Low heat load• High laser efficiency• Low cost coupler• Un-cooled operation
•Disadvantage• Lower optical powerconversion efficiency High power 980 pumps enable low cost EDFAs
AHPSL 2008 Seminar #1
High Power Diode Laser Applications:Production Technologies
2312/11/2008 Photonics 2008, Dehli
Domestic Output of Laser ProcessingDomestic Output of Laser Processing
300
400
500
600
Oscillators
Other Laser Processing Equipment
Eximer Laser Material Processing
Do
mesti
cP
rod
ucti
on(
bil
lio
nY
en)
0
100
200
300
03 04 05 06 07 08
Eximer Laser Material Processing
Solid-State Laser Material Processing
CO2 Laser Material Processing
Medical Laser Equipment
Fiscal YearEstimate Prospect
Do
mesti
cP
rod
ucti
on
Electronics
Light weight structuresAutomotive
Sheet Metal
102
100
10-2
Drilling
EngravingTuningMarkingMicro joining
Cutting
Welding
Semi finishedProducts
Micro welding
Forming
Surface Technology
FunctionalSurfaces
Typ
ical
Dim
en
sio
n[m
]
Ship Building
Remote
Hybrid
SelectiveLaserMelting
Production Technologies:Geometric scaling of material processing
EUV/13nm
Computer chips
ElectronicsMicroelectronics
Electronics
1970 1980 1990 2000 2010Year
10-4
10-6
10-8
HardMaterials
Micro joining Surfaces
Micro processing
CommunicationData Processing
Optical Memories
OptoelectronicsMicro Lithography
Typ
ical
Dim
en
sio
n[m
]
Melting
Polishing
Bio-photonicsLIBS
Which Laser for which Application?
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
25 AHPSL 2008 Seminar #1
Production Technologies:Welding
2612/11/2008 Photonics 2008, Dehli
Developing trends for Lasersand their applications
Beam
Para
mete
rP
roductB
PP
[mm
mra
d]
10
100
1.000
plasticswelding
solderingselective
laser powderremelting
transformationhardening
melting,cleaning
brazing
F#4 focusingoptics (NA 0,12)
metalsheet
deep penetrationwelding metals
2008
f
2w0
2003
Diode lasers(2003)
AL-welding (DDL system)
BPP = q · w0
Laser Power P [W]
Beam
Para
mete
rP
roductB
PP
[mm
mra
d]
1 10 100 1.000 10.0000.1
1
10
Printingtherm. marking
sheetcutting
CO2-laser
DPSSL
lamp pumpedNd:YAG-laser
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
27 AHPSL 2008 Seminar #1
Foils-Polypropylen (PP)transparent and blackthickness 100 µm
Microfluidic device- PMMA or PP sealing
Application example: welding of thin foils
- PMMA or PP sealingfoil (75 µm)
P= 1,4 – 5,9 Wv= 50 to 250 mm/sd0= 70 µmdweld seam= 150 to 500 µm
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
28 AHPSL 2008 Seminar #1
Double sided butt joint 30kW
2” stainless steel
P=20 kW, v= 0,8 m/min
18 11/10/2008 IPG Photonics Confidential
P=30 kW, v= 2,0 m/min
Single Mode Welding
Power: 3kWStainless Steel
v=0.5m/minDepth=1 3mmWidth≈1mm
21 11/10/2008 IPG Photonics Confidential
v=10m/minDepth=6mmWidth≈0.2mm !!!
Source:
21 11/10/2008 IPG Photonics Confidential
Thick Section Welding YLR20000
2 inch =50.8 mm
10 11/10/2008 IPG Photonics Confidential10 11/10/2008 IPG Photonics Confidential
Butt joint 2 inches (50.8 mm)Double sided weldingStainless steel 1.4301
Overlap joint 2x 15 mmStainless steel 1.4301
Thick Sheet Welding
-Tube fabrication (5 – 20 mm)
-Pipeline Welding (10 – 20 mm)
-Power plants (up to more the 50 mm)
-Chemical reactors
-Shipbuilding and Offshore technology
4 11/10/2008 IPG Photonics Confidential
Laser-HybridLaser X70
t = 12 mm
PL = 10.5 kWvS = 2.2 m/min
Scanner und KUKA RoboScan - Scanner and KUKA RoboScan
Bewertungskriterien:Versatzgeschwindigkeit - Schweißgeschwindigkeit - Taktzeit - Linienkonzept - Komponentenflexibilität - Arbeitsabstand - fixe und
variable Kosten - Zugänglichkeit - Nahtgeometrie - Bauteilflexibilität - Lasernutzung - Schweißqualität
RoboScan - ZoomoptikKUKA Systems GmbH | Prozesstechnik | Dr. Rippl | 05.11.2008 | Seite 3 www.kuka-systems.com
RoboScan - ZoomoptikKUKA Systems GmbH | Prozesstechnik | Dr. Rippl | 05.11.2008 | Seite 3 www.kuka-systems.com
Assessment criteria:cross velocity - welding speed - cycle time - line concepts - flexibility of components - working distance - fix and variable costs -
accessibility - seam geometry options - part flexibility - efficiency of laser source usage - weld quality
Production Technologies:Surface Finish
3412/11/2008 Photonics 2008, Dehli
Materials: 1.2343, 1.2344, 1.2316
Initial state:milled, eroded,grinded
1 mm
Sharp edgemaintained
2002 2008
Application example: laser polishing
Results:from Ra = 1 - 3 µmto Ra = 0,09 - 0,3 µm
Processing time:1 - 3 min/cm²
polished by Laser (Ra=0,24µm)
milled (Ra=1,7µm)
1 mm10
µm
2002 2008Ra = 0,35 µm Ra = 0,09 µm
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
35 AHPSL 2008 Seminar #1
Information technology:optical storage, printing, display
CTP Printing - Computer to plate (CTP)Printing
- Digital printing
- Display (RGB) technology
- Rear projection TV
36 AHPSL 2008 Seminar #1
Production Technologies:Rapid Prototyping
3712/11/2008 Photonics 2008, Dehli
Application Example SLM of ZrO2-based Ceramics
• Zirconium oxide (ZrO2):max. bending strength,resistance to wear andtensile strength
• Principle of SelectiveLaser Melting (SLM):Ceramic powder is fullymolten (no sintering)molten (no sintering)
• Potential Application:Production of full-ceramicdental prostheses
10 mm
SLM demo parts
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
38 AHPSL 2008 Seminar #1
Production Technologies:Cutting
3912/11/2008 Photonics 2008, Dehli
CO2
4012/11/2008 Photonics 2008, Dehli
Medical applications:
Ophtalmology
Hair removal
- Acne treatment
- Photodynamic Therapy (PDT)
- Photodynamic Disinfection(PDD)
- Dental
Before After
Skin Treatment: Tattoo / Hair Removal
Surgery Before After
41 AHPSL 2008 Seminar #1
Laser countermeasure systemagainst heat-seeking missilesExample: Directional Infrared Countermeasure
Defence and homeland security applications:slowly evolving
Distance measurement,Example: Directional Infrared Countermeasure(DIRCM) from Northrop Grumman (publicInformation)
Laser area defence system(LADS from Raytheon)(public Information)
Distance measurement,
Target designation
- Laser fuses
- Illumination
- Detection of chemicals
42 AHPSL 2008 Seminar #1
Photonic Tools:
4312/11/2008 Photonics 2008, Dehli
600
800
1.000
1.200
1.400T
ota
lT
urn
Aro
un
d World Market 2007
Extrapolation of currenttrends to 2010
Including new
Laser Market Development by Laser Type
0
200
400
600
CO2
LPYAG
DP
YAGFi
ber
HPDL
Excim
er
Laser Type
To
talT
urn
Aro
un
d
Including newapplications / markets2010
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
44 AHPSL 2008 Seminar #1
Photonic Tools:Overview
4512/11/2008 Photonics 2008, Dehli
Laser system design principles
t ransversallypumpedrodlaser
INNOSLAB laser
f ibre laserend-pumped
All based on the samedesign principle requiring
• Mirrors (Cavity)
• Gain medium
Source: Prof. Dr. Reinhart Poprawe, ILT (AKL 2008)
thindisk laser
f ibre laser“ Y” -pumped
46
• Gain medium
• Pump source
Extension...amplifier technology
AHPSL 2008 Seminar #1
Photonic Tools:Disk Laser
4712/11/2008 Photonics 2008, Dehli
1
End-mirror
Disk
Bending prisma
Parabolic Mirror
Pump- Beam
1
Pumping of a Disk
48
Disk
Cavity
1
2
34
5
8
6
7
Outcoupler
Laser beam
1
Actually: 20 passes of the pump light through the disk!
AHPSL 2008 Seminar #1
12/11/2008Photonics 2008, Dehli
Design of a disklaser (8 kW)
ResonatorResonator
49
AHPSL 2008 Seminar #1
12/11/2008Photonics 2008, Dehli
Disklaser: TruDisk
50
TruDisk 1000 TruDisk 8002
AHPSL 2008 Seminar #1
12/11/2008Photonics 2008, Dehli
> 5 kW Output Power per Disk
4000
5000
6000
Ou
tpu
tP
ow
er
PL
(W)
40
50
60
70
op
t.E
ffe
icie
nc
yη
op
t.-o
pt.
(%)
51
0
1000
2000
3000
0 2000 4000 6000 8000
Ou
tpu
tP
ow
er
Pump Power Pp (W)
0
10
20
30
40
op
t.E
ffe
icie
nc
y
AHPSL 2008 Seminar #1
12/11/2008Photonics 2008, Dehli
TruDisk 10003 – 4 disk resonator
8000
10000
12000
14000
40%
50%
60%
70%O
utp
ut
Po
we
rP
L[W
]
Op
tic
ale
ffic
ien
cy
op
t.-o
pt.
52
0
2000
4000
6000
8000
0 5000 10000 15000 20000
0%
10%
20%
30%
40%
Ou
tpu
tP
ow
er
P
Op
tic
ale
ffic
ien
cy
Pump Power Pp [W]12/11/2008Photonics 2008, Dehli
Power Photonics
5312/11/2008 Photonics 2008, Dehli
Fiber combinerFused and Proximity
Fused: (6+1)*1 Proximity: (2+1)*1
Fused can be extended to beyond 20 inputs
Proximity needs high brightness pumps
Fiber NA
Signal input HI 1060
Pump Ports 6*105um 0.22
Output 20um/400um 0.06/0.46
5412/11/2008 Photonics 2008, Dehli
Yb fiber wavelength: 9xx bands
Yb: Glass fiber absorption and emission spectrum
Wide pump band: 870nm to 980nm
Blue band (915nm): Good absorption, wideband– Preferred for lower power, high gain stage
Green band (940nm..960nm): Lowest absorption, wideband, high optical conversion– Preferred for very high power stage
Red band (976nm): Highest absorption, narrow width– Preferred for high gain amplifiers and q-switched lasers with short fiber (SBS)– Pump diode challenge: Diode wavelength control (+/-2nm) necessary
5512/11/2008 Photonics 2008, Dehli
Fiber Laser: MOPA
Seed laser
Pump Diode
Dual Clad Yb
MMPMFPMF
• Seed laser– Fiber laser: Good spectral control
Need external modulators (Pockels Cell)– Diode laser: Excellent dynamic control
FP laser have poor spectral control, of no concern DFB have excellent spectral and dynamic control
• Pumplaser– Single emitter broad area MM diode
Seed laserPump Diode
5612/11/2008 Photonics 2008, Dehli
Photonic Tools:Fiber Laser
5712/11/2008 Photonics 2008, Dehli
directly modulated
Laser Diode
SPI G3 Yb doped Pulsed Fibre Laser 1 064nm wavelength
MOPA (Master Oscillator Power Amplifier) architecture
Yb fiber laser
Amplifier Chain(GTWave Technology)
SeedLaser
Average Power: 20W Spot size: 40um with x3 Beam Expander, 9mm input beam diameter
Pulse width: 10-70ns FWHM
Peak Power: 14kW per pulse Power density: up to 1GW/cm2 for 40um spot size
Pulse Energy: 0.8mJ max
Pulse frequency: up to 500KHz, 25 preset pulse waveforms
Pre-Amp Post-Amp
Status and Development of Single ModeFiber Lasers
Comerical SM-Lasers
10000W(under development)
12000
10000
8000
19 11/10/2008 IPG Photonics Confidential19 11/10/2008 IPG Photonics Confidential
100W 500W50W35W
1000W
3W 10W 20W
5000W
3000W2000W
0
1992 1994 1996 1998 2000 2002 2004 2006 2008 2010
6000
4000
2000
Release
High Power Fiber Lasers - History
Power development of Low Order Mode Fiber Lasers
60000
50000
40000
30000
50.000W
36.000W
3 11/10/2008 IPG Photonics Confidential3 11/10/2008 IPG Photonics Confidential
2001 2002 2003 2004 2005 2006 2007 2008 2009
Introduction in Industrial Market
30000
20000
10000
0
17.000W
7.000W
700W 4.000W
Aktivitäten im FüLas-Projekt - FüLas project activities
100µm
Laserleistung 8 kWBPP ~ 4.5 mm*mrad
200 µm
BS
A
RoboScan - ZoomoptikKUKA Systems GmbH | Prozesstechnik | Dr. Rippl | 05.11.2008 | Seite 8 www.kuka-systems.com
RoboScan - ZoomoptikKUKASystems GmbH | Prozesstechnik | Dr. Rippl | 05.11.2008 | Seite 8 www.kuka-systems.com
Laser power 8 kWBPP ~ 4.5 mm*mrad
Large distance between laserand beam switch respectively
production cell
Große Abstände zwischenLaser und Strahlweiche bzw.
Bearbeitungszelle
A
200 µm
BPP ~ 8 mm*mrad
B
Single Mode
• Single Mode Fiber Pump Module• Pump Diode Beam• Pump Diode Beam: Slow axis• Ridge waveguide• Shift Kink• Vertical epitaxial structure• Length Scaling• Length Scaling• Spectral stabilization• Passivation• Packaging• Reliability
• Literature
12/11/2008 62Photonics 2008, Dehli
Majority of diode based laser systemshave common design requirements:
• Efficient coupling into
passive optics elements or
an optical fiber (with low NA)
System Design Requirements
• High wall plug efficiency (low power consumption)
• Good system reliability
• Cost competitive
• Simple to use (cooling, turn on time, robustness,…)
From a diode perspective this relates to various designobjectives….
63 AHPSL 2008 Seminar #1
Common design requirements for high power laser(HPL) diodes:
• High output power
• High brightness
Laser diode design targets
• High brightness
• High wall-plug and coupling efficiency(low power consumption)
• High reliability + robust
• Design capable for high volume manufacturing
64 AHPSL 2008 Seminar #1
Single Mode Fiber Pump Module
• 600 mW Power at 1 A operating current• Wavelength locked by FBG over 70 K with high side lobe suppression ratio
12/11/2008 65Photonics 2008, Dehli
Single Mode Fiber Pump Module
• Fully monolithic planar AlN substrate– Extremely low mechanical creep– Cost effective automation– Excellent thermal properties
• Used in Butterfly packages and coolerless MiniDIL– i.e. 400 mW Submarine MiniDIL, 600mW Butterfly
12/11/2008 Page 66Photonics 2008, Dehli
BFM
Thermistor
Laser
Carrier
Fiberfixing
Pump Diode Beam
Single Mode Fiber: NA=0.12
1 um 4 um
Laser Diode:
– In slow axis: NA=0.12, matched to NAof fiber
– In fast axis: NA=0.5, polish lens onfiber tip
Coupling
– At distance of 4um: Profiles matchProf. Unlü, Boston
0 um
12/11/2008 67Photonics 2008, Dehli
Pump Diode Beam
Single Mode Fiber: NA=0.12
CW operationT = 25 °C
~ 1200 mW
~ 900 mW
~ 600 mW
~ 1200 mW
~ 900 mW
~ 600 mW~ 7.5° ~ 19°
lateral far-field vertical far-field
NA=0.12
Coupling: NA matching
– Laser diode in slow axis:NA=0.12, matched to NA of fiber
– Laser diode in fast axis: NA=0.5,polish lens on fiber tip
Coupling: Amplitude matching
– At distance of 4um: Profilesmatch
NA=sin(angle)~angle
Slow axis: NA=0.12 ~7deg
Fast axis: NA=0.5~30deg
angle (°)
-40 -20 0 20 40
~ 300 mW
-20 -10 0 10 20
~ 300 mW
angle (°)
NA=0.5
12/11/2008 68Photonics 2008, Dehli
Pump Diode Beam: Slow axis
Pump Diode is dielectric waveguide- Low loss through total internal reflection- Can be decomposed in slow axis and fast axis- Each a dielectric slab waveguide with
dn=1/2*(NA/n)2
For NA=0.12 and n=3.6 ->dn=5*10-4
12/11/2008 69Photonics 2008, Dehli
∆=dn=n1-n2
Pump Diode Beam: Slow axis
For slow axis: Need waveguide with small dn=5*10-4 n
How can this be achieved?By weak waveguide such as
n2 n1 n2 n2 n1 n2
Ridge Waveguide Disordered waveguide
12/11/2008 70Photonics 2008, Dehli
dn=n1-n2
Pump Diode Beam: Slow axisEffective Index approach
dn=n1-n2
n2 n1 n2
n2 n1 n2
• Effective Index approach– Calculate effective index of
planar waveguides (centerand outside)
12/11/2008 71Photonics 2008, Dehli
n1 n2
Ridge waveguide
• Ridge Waveguide
– One growth step, simple process• Built in reliability
• InGaAlAs for best material properties
– Confinement• Index guided mode: High linear power and excellent coupling
to fiber
• Temperature insensitive current confinement
– Scalability• Increase power by making chip longer
12/11/2008 72Photonics 2008, Dehli
‘Shift’ Kink: Observation
• Observation (1991)– Sudden kinks in fiber coupled power
• Farfield observation– Still single ‘humped’, but shifted during kink. Still single mode? (no!)
• Standard countermeasure:– Increasing loss for higher order modes (to keep them below threshold): Does not work
12/11/2008 73Photonics 2008, Dehli
Shift Kink: Lateral Mode Locking
Index moving up withtemperatureprofile (drive current)
Round
trip
conditio
n
• Waveguide– Index increases with local heating– Waveguide becomes multimode
• Dispersion characteristics of waveguide– Phase lasing condition (integer number of wavelengths in one roundtrip) can be meet for one frequency
(u0 = u1 ) for fundamental and higher order modes at the same time
Round
trip
conditio
n
For u1 = u0
Coherent coupling
12/11/2008 74Photonics 2008, Dehli
Shift Kink: Coherent Coupling
1st resonantcoupling coupling
Farfield
F R F R F R F0th asymmtric
f
h
f
h
• Small asymmetry (e.g. at front mirror) couples power from fundamental tohigher order mode
• Phasematch condition given at special dispersion point (temperatureprofile,i.e. drive current):– ‘lateral mode locking’ at this current > Coherent Supermode
0th asymmtricelement
0th and 1st: Same frequency one roundtrip0th. N wavelengths1st: N-1 wavelengths
12/11/2008 75Photonics 2008, Dehli
Shift Kink: Lateral Mode Locking
Coherent Supermode:
Introduction of loss for higher order modes just reduces overall efficiency
Interference within waveguide
Achtenhagen, Hardy and Harder, JQE Vol24 pp2225
12/11/2008 76Photonics 2008, Dehli
Epitaxial structure
• Fast axis NA:– As long as NA<=0.5: No concern
• Of concern– High efficiency– Low loss, low series resistance– Controlled, low overlap with gain, low gamma– Controlled, low overlap with gain, low gamma
12/11/2008 77Photonics 2008, Dehli
Epitaxial Structure
PVIout
VI
P
1
seshFeFhfV RRV
IEE
eVhE
eV
111
I
I
I
I leakthI 1
Resitivity:
Bandgap discontinuitiesThermal and vertical leakageInjection barriers
Material limits: Even after optimized mirror losses (Sf , Rf , Rb ) and low threshold current.– Due to limited mobility and carrier mass there are always trade-offs in
doping levels (series resistance Rs vs free carrier absorption) and Bandgap discontinuities (leakage losses vs injection barriers)
Today’s approach:– InGaAlAs material system, Electrons with low mass– Asymmetric (thin p-region), low aluminum, low confinement LOC, low doping levels
Electrons have low mass (high mobility and low density of states).
– Relatively low barriers for high mobility and good injection (some thermal and vertical leakage)
)ln(2
)ln(
)ln(1
1
ff
bf
P
R
L
R
RS
Resitivity:
Series resistanceDensity of States:
Free carrier absorption
12/11/2008 78Photonics 2008, Dehli
Epitaxial Structure
Bandgap design to optimize
Doping design to optimize
Highly asymmetric physical parameters:Electron mobility: hole mobility
Resitivity:Series resistance
Density of States:Free carrier absorption
Bandgap discontinuitiesThermal and vertical leakageInjection barriers
Highly asymmetric physical parameters:Electron mobility: hole mobility
Free carrier absorption: ap = 7 - 1410-18p an = 3 - 610-18n-> Use asymmetric epitaxial structure
12/11/2008 79Photonics 2008, Dehli
Epitaxial Structure
Free carrier absorption in p material is higher than in n material:- higher absorption cross section;- higher doping for comparable conductivity required;=> The design idea is to shift optical mode from p- to n-type material
Asymmetric waveguides
Mode maximum shifted from the QW position: lower FC absorption in QWValues of aFC as low as 0.4 cm-1 were reported
M. Buda et al., JSTQE, v.3, p.173 (1997) C.M. Stikley et al., SPIE Proc., v.6104, (2006)
In addition higher order modes can be suppressed
80 AHPSL 2008 Seminar #1
Epi structureswith low G
Asymmetric, with optical trap on nside
81
side
1.7 times decrease in G (from 1 to 2)by using the trap
G is changed by only changing thetrap width (2 & 3) – easy execution
Advantages: Lower attenuation coefficient
Lower thermal resistance
Narrow FF
Photonics 2008, Dehli
Epitaxial structures (Rsoft)
• At 5kA/cm2(calculated with Mode from Rsoft)
12/11/2008 82Photonics 2008, Dehli
Epitaxial structures (Rsoft)
• Heating due to absorption
12/11/2008 83Photonics 2008, Dehli
• Free carrier absorption Joule heating
vertical section
refr
acti
ve
ind
ex p-S
CH
ac
tiv
e
n-S
CH
bu
ffe
r
su
bs
tra
te
n-c
lad
din
g
p-c
lad
din
gGaN SiC Al2O3
Strain % 0.0 3.4 16
Refr. Index 2.52 2.75 1.78
GaN-Substrate, dtot = 100m
SNOM
Optical Waveguide & Substrate modes: GaN* laser diode
…
vertical section
Potential Impact ofSubstrate Modes:
- optical loss- gain oscillations
Simulation
*Source: Prof. B. Witzigmann et al., IEEE JQE 2007
84 AHPSL 2008 Seminar #1
Length Scaling
12/11/2008 85Photonics 2008, Dehli
Length Scaling
• Increase power: Have to make laser longer to better remove the heat.• Most important laser parameters:
– Gain(G), efficincy(h), photon lifetime (tph), internal power ratio (Pr) as function of absorption(a), lenght(L), confinemnet (G), front mirror refelctivity R (for
backmirrror reflectivity=1.
• Scaling law: Keep internal power ratio constant• Scaling rule for L
• Need low loss and low confinement waveguide
12/11/2008 86Photonics 2008, Dehli
980nm Single Mode Pump Diode:Length Scaling
800
1000
1200
1400
1600 G08 (2004): 3.6mm
G07 (2002)
G05 (1999)
G06 (2000)
face
tlig
ht
ou
tpu
tp
ow
er
(mW
)P-side up mountedCW-operation @ 25 °C
Improve performance by making laser chip longer
1. Low loss waveguide
2. Need facets which can sustain high powers
0 500 1000 1500 2000 2500-200
0
200
400
600
G03 (1996)
G05 (1999)
ex-f
acet
ligh
to
utp
ut
po
we
r(m
W)
injected current (mA)
G01 (1990):0.6mm
Courtesy Bookham12/11/2008 87Photonics 2008, Dehli
0.5
1
1.5
2
Lig
ht
ou
tpu
tp
ow
er
(W)
T = 5 °C
T = 25 °C
T = 50 °C
T = 75 °C
980nm single mode pump chip: 2004
T0 ~ 165 KIth ~ 45 mA @ 25°C
150MW/cm2
www.bookham.comwww.bookham.com
0
0 0.5 1 1.5 2 2.5 3
Injection current (A)
P-side up mountedCW - operation
• Reliability
– Better than 500FIT (0.5%/year) at Pop=850mW
• Wallplug Efficiency
– >60% peak, >50% up to 800mW
• Beam
– Single lateral mode beyond 1200mW, shift kink: solved
– Emission spot: 0.7um*2um
Page 88
980nm Single Mode Pump Diode:Evolution
980nm Pump Diode LasersEvolution of 980nm Single Mode Power
1000
1250
1500
1750
2000
Po
we
r[m
W] , Roll-over Power
SM FBG Fiber Power(<500FIT)
Price Reduction $/mW
Factor of 100
250
500
750
1000
1985 1990 1995 2000 2005 2010Year
Po
we
r[m
W]
(<500FIT)
980nm Pump Diode Lasers: Matured-> Power has reached plateau at 600mW .. 650mW-> Cost reduction done: Assembly in China, One platfrom for various devices-> Spectral stability and noise: Done-> High efficiency: Done (Uncooled MiniDIL)
12/11/2008 89Photonics 2008, Dehli
Spectral stability
12/11/2008 90Photonics 2008, Dehli
FBG stabilized
FFR, CE RG, G,CL, POL
Laser Fiber FBG
,
Wavelength stability
www.bookham.com
17nm Free Running Wavelength Shift
for 25mA - 500mA & 10°C - 40°C
=> 0.33nm/°C and 0.015nm/mA
2 nm
20 nm
Page 91
Laser Fiber FBG
,
-20
-10
0
Po
we
r(d
B)
Wavelength Stability with FBG
www.bookham.com
950 960 970 980 990 1000 1010 1020 1030-60
-50
-40
-30
25 °C550 mW
100 °C200 mW
10 °C10 mW
Po
we
r(d
B)
Wavelength (nm)
• External fiber Bragg grating to lock wavelength
Page 92
200mW G08 based un-cooled MiniDil
300
400
500
600
80oC
75oC
70oC
65oC
55oC
40oC
25oC
10oC
Po
we
r(m
W)
600 mW @ 10°C
400 mW @ 70°C
°
FBG-stabilizedCW-operation
www.bookham.com
• FBG stabilized within 1.2 nm wavelength shift from 10 °C..100 °C, 5 mW .. 200 mW• Total power dissipation @ 200 mW in fiber, 70°C: 0.52 W• Power variation is lower than 0.15db (50kHz bandwidth)
0 100 200 300 400 500 600 700 800 900 1000 11000
100
200
100oC
95oC
90oC
85oC
Po
we
r(m
W)
Current (mA)
200 mW @ 100°C
Page 93
600mW G08 based pump module
• Light output power
FBG-stabilizedCW-operation
600
800
1000
Po
we
r(m
W) 0.6
0.8
1.0
Effic
ien
cy
(W/A
)
www.bookham.com
• Light output power
– maximum module lightoutput power ~850mW
– fully FBG – stabilized,low noise (<0.1dB)
– no kink issue up to 1.5A
• Operation regime
– mainly determined by980nm pump reliability
• Module efficiency around ~0.7W/A in average
0 500 1000 15000
200
400
Po
we
r(m
W)
Current (mA)
0.0
0.2
0.4
Effic
ien
cy
(W/A
)
Page 94
JDSU 980nm Single Spatial Mode Pump
1.0
1.2
4.0
4.8
Chip LI
FBG module LI
VI
80 units
0 failures
Tj = 100C0
200
400
600
800
1000
1200
1400
Po
wer
(mW
)
© 2007 JDSU. All rights reserved.95
New FBG-stabilized pump module
– 660mW kink-free power
– 45 FIT chip reliability at 830mW
Mature package platform
– 5 billion field hours
– 5 FIT field reliability
0.0
0.2
0.4
0.6
0.8
0 0.2 0.4 0.6 0.8 1 1.2 1.4
Drive current (A)
Ou
tpu
tp
ow
er
(W)
0.0
0.8
1.6
2.4
3.2
Vo
ltag
e(V
)
VI 0
0 500 1000 1500 2000
Time (hrs)
Passivation
12/11/2008 96Photonics 2008, Dehli
980nm Single Mode Pump Diode:Time to COMD
Chemist fixed problem
Solved in 1987 (E2)
12/11/2008 97Photonics 2008, Dehli
Long term reliability & COMD protection
Stimulated
EmissionAbsorption:
e-h
Non-radiative
recombination
via surface states
Free carrier absorption
Catastrophic Optical Mirror Damage (COMD)
• Facet Degradation leads to formation surface states• Surface states cause non-radiative recombination• Non-radiative recombination leads to a local increase of current injection• This leads to an increase of the local temperature• Which causes a further shrinkage of the bandgap and thus
an increase of free carriers (increased free carrier absorbtion)• Additional generation of e-h pairs leads to further absorption
of stimulated laser light causing an acceleration of the thermal run away .... COMD
98 AHPSL 2008 Seminar #1
FMA G08 : SEM / EBIC images
Front view
center bulk degradation front bulk degradation(without mirror damage)
front bulk degradation(with mirror damage)
Top viewUESUES
12/11/2008 99Photonics 2008, Dehli
Avoid or reduce formation of non-radiative recombination states
• E2 -> Cleaving in high vacuum and in-situ passivation of the cleaved surface
• Use of InGaAsP based barrier materials -> reduced oxidation (“Al-free”) ->re-growth covering cleaved facets possible
Remove formation of non-radiative recombination states
• “Cleaving on air” -> Dry etching in vacuum -> in-situ nitridation or sulphation
Avoiding COMD
• “Cleaving on air” -> low energy hydrogen plasma or ion beam cleaning-> in situ passivation (ZnSe, Si,...)
------------------------------------------------------------------------------------------------------------------------------------
M. Gasser, E.E. Latta, "Method for mirror passivation of semiconductor laser diodes," U.S. Patent No. 5063173 M. Hu, L.D. Kinney,
M. Pessa, et al.,"Aluminium-free 980-nm laser diodes for Er-doped optical fiber amplifiers," SPIE 1995, vol. 2397, 333-341
K. Hausler, N. Kirstaedter, "Method and device for passivation of the resonator end faces of semiconductor lasers based on III-V semiconductor material,"U.S. Patent No. 7033852
L.K. Lindstrom, et al."Method to obtain contamination free laser mirrors and passivation of these," U.S. Patent No. 6812152
H. Kawanishi, et al."Semiconductor laser device with a sulfur-containing film provided between the facet and the protective film," U.S. Patent No. 5208468
E.C. Onyiriuka, M.X. Ouyang, C. E. Zah, "Passivation of semiconductor laser facets," U.S. Patent No. 6618409
P. Ressel et al. "Novel Passivation Process for the Mirror Facets of Al-Free Active-Region High-Power Semiconductor Diode Lasers," PTL 2005, vol. 17, no.5, 962-964
100 AHPSL 2008 Seminar #1
Reduce number of free carriers at the laser facet
• Reduce direct carrier injection without changing the bandgap(at wafer level process)
Front section isolation
• NAM (non absorbing mirrors) to reduce absorption, diffusion and thermalized carriers(at wafer level process)
Zn diffusion
Etching and subsequent re-growth of a III-V window
Avoiding COMD
Etching and subsequent re-growth of a III-V window
Si-doped and disordered windows
Vacancy induced windows (QWI)
------------------------------------------------------------------------------------------------------------------------------------
B. Schmidt et al., US Patent 6782024 - High power semiconductor laser diode
H.0. Yonezu, M. Ueno, T. Kamejima and I. Hayashi, "An AIGaAs Window Structure Laser," JQE 1979, vol. 15, no. 8, 775-781
J. Ungar, N. Bar-Chaim and I. Ury, "High-Power GaAlAs Window Lasers," EL 1986, vol. 22, no. 5, 279-280
R.L. Thornton, D.F. Welch, R.D. Burnham, T L. Paoli and P.S. Cross, "High power (2.1 W) 10-stripe AlGaAs laser arrays with Si disordered facet windows,"Appl Phys Lett 1986, vol. 49, no. 23, 1572-1574
S. Yamamura, K. Kawasaki, K. Shigihara, Y. Ota, T. Yagi and Y. Mitsui, "Highly Reliable Ridge Waveguide 980nm Pump Lasers Suitable for Submarine andMetro Application," OFC 2003, vol. 1, 398-399
J.H. Marsh, C.J. Hamilton, "Semiconductor laser," U.S. Patent No. 6760355
101 AHPSL 2008 Seminar #1
Effect of front section isolation (*)
Truncated Contact
Standard Contact
Reduction of current injection into front section (reduced local heating)
Reduction of free carriers (impact on the gain profile)
*Source: Prof. B. Witzigmann, ETH-Zurich
102 AHPSL 2008 Seminar #1
Single Mode Pump Diode:Facet passivation at 830nm and 980nm
Old (1985)Old (1985)
E1 (1986E1 (1986--7)7)E1 (1986E1 (1986--7)7)
E2 (1988E2 (1988--...)...)
12/11/2008 103Photonics 2008, Dehli
290
310
330
Curr
ent(m
A)
980nm Methuselah Lasers:17 Years of Stress Test
• Conditions:– 200mW/ Ths=30°C;
150mW/ T =75°C
www.bookham.com
190
210
230
250
270
1990 1991 1992 1993 1994 1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007
Time (years)
Curr
ent(m
A
– 200mW/ Ths=30°C;150mW/ Ths=75°C
• Reliability at 130mW/ 25°C:– Sudden Fail: 32 FIT– No wear-out
Page 104
QWI process concept
Al
Ga
As-grown bandgap Intermixed bandgap
GaAs AlGaAsAlGaAs AlGaAs
QWI allows bandgap tuning in selected areas of the chip
105 AHPSL 2008 Seminar #1
160
QWI Process StepsIntense QWI technology enables high power/brightness lasers to be produced
in a manufacturing environment
• Dielectric caps are deposited on surface of wafer
• Wafer is annealed
• Quantum wells intermix with adjacent material altering the bandgap wavelength
• Wavelength change depends on properties of dielectric cap
QWI works in a variety of materials and wavelengths
• 808 nm SQW material used in this work Photoluminescence spectra
Wavelength, nm
700 720 740 760 780 800 820 840 860
PL
inte
nsi
ty,
a.u
.
0
20
40
60
80
100
120
140 SuppressedIntermixed
Intermixing cap Suppressing cap
QW
High TemperatureAnneal
106 AHPSL 2008 Seminar #1
150
200
250
300
350
Po
wer
(mW
)
Avoiding COMD: QWI (quantum well intermixing)
• Uncoated 830 nm lasers
• Test conditions: Initial CW measurement followed by a pulsed L-I
NAM0 nm shift
NAM45 nm shift
NAM65 nm shift
QWIregions
0
50
100
150
0 250 500 750 1000 1250 1500 1750
Current (mA)
Po
wer
(mW
)
Increase of the bandgap closeto the facet region
Reduction of free carriers
Reduction of local absorption
ConventionalLaser
Transparentoutput
waveguide
107 AHPSL 2008 Seminar #1
3 Years 980 nm MiniDIL Operation
• 200 mW ex-fiber at 70°C heatsink
– FBG wavelength stabilized
www.bookham.com Page 108
Assumptions
– Known failure modes
– Laser diode lifetime follows “bath tube” curve
– Infant mortality rate is vanishing or can be screened out by burn-in
– Constant failure rate (intrinsic period) is determined by sudden death(or a short wear out period followed by sudden death)
– Wear out is expected to kick in after guaranteed device life time
– Constant failure rate can be described by:
Classical life test strategy:single emitter devices
)exp( TkEPIFR bayx
www.bookham.com
tonset
109 AHPSL 2008 Seminar #1
Lifetest: results stress cell matrix
• All CoS post burn-in (300h, 1260mA, 85C)
Cell Power Current Junction (Case) Temperature Starts Device Hours Failures1 820 mW 1030 mA 89°C (60°C) 196 892'362 h 162 820 mW 1130 mA 116°C (80°C) 193 772'622 h 473 820 mW 1260 mA 140°C (95°C) 141 460'990 h 704 820 mW 1340 mA 151°C (100°C) 91 142'324 h 325 680 mW 1080 mA 147°C (110°C) 93 369'253 h 37
• 16 lots lots started– 2 excluded (atypical)– LV not yet applied– No selection after burn-in
• Assume functional dependence Derive• Derive parameters for which cell test results are most likely
– Maximum likelyhood analysis
5 680 mW 1080 mA 147°C (110°C) 93 369'253 h 37714 2'637'551 h 202
12/11/2008 110Photonics 2008, Dehli
)(
00
0kTkT
Eyxa
ep
p
j
jFRFails
Maximum Likelyhood analysis:Ea:=0.45eV; x,y free
• X and y are anticorrelated, x+y=3.6• FR base failure rate: At 930 mA, 36°C junction temperature (25°C case)
x free, y free; Ea := 0.45 eV
x 1.5y 2.1
Ea 0.45 eV
FR 1'376 FITP 99%
12/11/2008 111Photonics 2008, Dehli
)(
00
0kTkT
Eyxa
ep
p
j
jFRFails
Wavelength Range for major industrial applications /technologies requiring (red / MIR) HPL
Medical
Printing
DPSS
GaAs Capability
800nm 900nm 1000nm 1100nm700nm600nm 1400nm 1600nm
Medical Medical
InP CapabilityAlGaInP Capability
Fiber Laser Pumps FiberLaserSeeds
Direct Diode Applications
Laser TV Pumps & SHG
Nd YAGReplacement
TelcoPumps
TelcoPumps
Opticalstorage
Display,... LIDAR
112 AHPSL 2008 Seminar #1
Materials for Semiconductor Laser Processing
113 AHPSL 2008 Seminar #1
Broad Area
114Photonics 2008, Dehli12/11/2008
Broad Area
High powers are limited by power density atfacet
-> Use a wider facet, broad area laser diode:
1. higher heatload: Need to solder devicesNarrow Stripe: J-up
1. higher heatload: Need to solder devicesjunction down to heatsink
– Cooling
2. This leads to degradation of beamquality, i.e. multi lateral mode behavior
– Coupling to fiber
115Photonics 2008, Dehli12/11/2008
Broad Area: J-down
Cooling
116Photonics 2008, Dehli12/11/2008
Types of coolers for hard solder bar mounting
(*)
* Christoph Harder; “Chapter: Pump Diode Lasers”, Optical Fiber Telecommunications V A (Fifth Edition),Components and Subsystems, Editor: Ivan P. Kaminow, Tingye Li and Alan E. Willner, pp. 107-144.
- Passive Cooling (copper heat sink with heat exchanger -> Water or Air cooled)
- Active Cooling of high power bars (micro, meso or macro channel cooler)
- Active cooling of single emitter devices (TEC and heat exchanger)
117 AHPSL 2008 Seminar #1
9xxnm Multimode Pump DiodesHeat removal
Ball
Wedge
Golddraht
Chip
Soldered to
Submount
AuSnSoldered toexpansion matchedmaterials forheat spreading
Water
Cu
CuW
AlN CT
Em
atc
hC
TE
mis
matc
hMechanicalpressure thermalcontact to copperheatsink
12/11/2008 118Photonics 2008, Dehli
Cooling: Micro Channel Coolers
12/11/2008 119Photonics 2008, Dehli
Bar Blow up (Indium solder issue)
GaAs bar
Copper MCC
Coppertop contact
Photonics 2008, Dehli
• Indium is used to overcome cte differencesbetween GaAs and copper
• Indium is stable under CW operation but notunder on/off operation– Increased thermal resistance leads to bar blow
up
Copper MCC
12/11/2008 120
AuSn technology on MCC
Photonics 2008, Dehli
• Hard solder (AuSn) attach to expansion matched heatspreader of bar• Low smile assembly of bar on submount to MCC (this interface is still cte
mismatched)• Low stress cathode contact with wire bonds
AuSn solder unchanged after 7000 h LT(40 Mega cycles of hard on/off)
12/11/2008 121
Beamquality
2a
NA
Beam with aperture radius of “a” and divergence of “NA”The beam parameter product and the etendue is
– BPP=a*NA– Etendue=(a*NA*Pi)2, or a*b*NAx*Nay*p2 for an elliptical beam
•The minimum beam parameter product and etendue (corresponding to a single
lateral mode) is given by– BPP=a*NA=Lambda/ p =0.32um*rad for lambda=1um– Etendue=(a*NA* p)2=Lambda2=1*10-8 cm2 ster for lambda =1um
12/11/2008 122Photonics 2008, Dehli
9xxnm Multimode Pump Diodes:Thermal Blooming at high PowerTop view of BA laser
NAdn
n
dT
Issues of Low NA lasers
0.003
0.004
0.005
0.006
dn
Low NA laser Achieved by low dn waveguide
dn Ridge
Lateral temperature profile
dT=5K -> NA=0.09
Keep dT<5K
0
0.001
0.002
0.003
0 0.05 0.1 0.15 0.2
NA
dn
dT=5K
12/11/2008 123Photonics 2008, Dehli
0 2 4 6 8 10 120
2
4
6
8
10
12
CW m easurem entp-side down m ounted on C-m ount
lig
ht
ou
tpu
tp
ow
er
(W)
15°C25°C55°C75°C
SES8-9xx-01 performance
CW= 960 nm
www.bookham.com
0 2 4 6 8 10 12
injection current (A)
• Electro-Optical
– Power: 8 W @ 8 A
– Reliability: <5% fail in 10‘000h
30
25
20
15
10
5
0
po
wer
(W)
3020100
current (A)
Q-CW(0.3ms)
Page 124
Number of Lateral Modes in BA chip
100um BA, #of modes
15
20
25
30
35
40
Nu
mb
er
of
mo
des
,
• Low NA broad area laser radiance:– Closing in on single mode lasers– 8W from NA=0.15NA: 400mW per lateral mode
• Reduce NA of broad area laser to increase radiance– NA dominated by thermal blooming– ->Need chip with very high power conversion
0
5
10
0 0.1 0.2
NA
Nu
mb
er
of
mo
des
,
12/11/2008 125Photonics 2008, Dehli
High Power Laser Diodes: 20 years ago
• Narrow stripe laser:– COMD: Mirror blows up at high powers
-> Spread beam to decrease powerdensity at facet:
Coherent arraysSurface grating lasers
In the 80‘
Never achieved reliablebeamstability for highvolume applications
Surface grating lasersMOPATaper LaserAlpha DFBVCSEL
12/11/2008 126Photonics 2008, Dehli
1-D Active Photonic Crystal ROW Array
Index
Gain
3.427
3.403
Resonant Mode at S = 1.0 mm
S 4 mm
I = 9 x Ith
1.6 W CW ( l= 0.98 mm)
Resonant (lateral) leaky-wave coupling
Bragg condition exactly satisfied
(20 - 40)-element phase-locked arrays
15.010.05.0-15.0 -10.0 -5.0 0.0
Angle (Degrees)
q1/2= 0.67° = 1.8 x D.L.hp= 23%
1.0 W power in main lobe40-element 200 mm aperture *
* H, Yang et al., Appl. Phys. Lett., 76, 1219 (2000)
9xxnm MM Pump Diode: CW on C-mount
20
15
10
5
ou
tpu
tp
ow
er(W
)
15ºC25ºC35ºC
www.bookham.com
• ~90 um emission width
• 19 W CW roll over power at 15 C
• Temperature insensitive: To ~ 200K
• At 35 C
– 9 W at 9 A
– >65% conversion efficiency at9W
current (A)
0
ou
tpu
tp
ow
er(W
)
242220181614121086420
35ºC45ºC
Page 128
Etendue Matching
Theoretical limits:• 4800 single mode lasers fit in a 200um/0.22NA fiber• 350 Standard BA lasers fit in a 200um/0.22NA fiberWith polarization multiplexing and wavelength division multiplexing even mor
diodes can fir in the fiber
12/11/2008 129Photonics 2008, Dehli
MM Uncooled Module with >14W
6
8
10
12
14
16
Ex
-Fib
reP
ow
er
(W)
10°C
25°C
45°C
www.bookham.com
• Record Performance:
– >14W @ 18A and 10 C Ths
• Module fully qualified for industrial and telecom standards
– 8W Industrial Product
0
2
4
6
0 2 4 6 8 10 12 14 16 18 20
injection current (A)
Ex
-Fib
reP
ow
er
(W)
Page 130
• Module
– 3 single emitters inside
– 2-pin package
– 0.15NA or 0.22NA in 105um fiber
– Floating anode/cathode
– 1060nm blocking filter included
Example II: 20W Multi-Emitter Module
P-I -V Curves of 0.15NA 20W Modules at 25C:30 6
www.bookham.com Page 131
• Electro-Optical
– Power: 20+W
– Current: <<10A
– Wavelengths: 915, 940, 960, 975nm
0
5
10
15
20
25
0 1 2 3 4 5 6 7 8 9 10 11 12
Diode Current (A)
Lig
htP
ow
er
(W)
0
1
2
3
4
5
Dio
de
Vo
lta
ge
(V)
AHPSL 2008 Seminar #1
New generation 9xx broad area chip
T=15C
10
15
20
25
30
Po
wer,
W
pulsed
CW
2
4
6
8
10
12
14
16
Po
we
r,W
25C
35C
45C
55C
70C
90C
© 2006 JDSU. All rights reserved.132
19.0W maximum CW power from ~ 100um aperture
0
5
0 5 10 15 20 25 30
Current, A
0
2
0 5 10 15
Current, A
T=15C0
5
10
15
20
25
30
0 5 10 15 20 25 30
Ou
tpu
tp
ow
er
(W)
pulsed
CW
JDSU 9XXnm Multi Mode Pump
Cell 4, 11.1W average power, 14A, 113C
0
2
4
6
8
10
12
14
0 1000 2000 3000 4000
Po
we
r,W
© 2007 JDSU. All rights reserved.133
Drive current (A)
100mm wide aperture chip– 20W CW rollover power
105mm diameter, 0.2NA fiber– 8W rated power at 10A
Commercial 6397-L3 Design CW Operation
0
2
4
6
8
10
0 2 4 6 8 10 12
Current (A)
xF
ibe
rP
ow
er
(W)
20C
30C
40C
0 1000 2000 3000 4000
Time. hrs
6396 Chip Reliability Improvement
MLE Results:
hrs
n
eVE
op
A
6101.5
7.2
61.0
54.0
50%
90%
99%
Unre
liabili
ty
6396 c
6390
6390
6396
© 2005 JDSU. All rights reserved.134
Revised reliability:– P=8.0W
– Th=35C
– Median time to failure=1,500,000 hrs (60% C.L.)
– 6% F at 20khr (60% C.L.) 1%
5%
10%
1000.00 1.00E+610000.00 1.00E+5Time, hrs
Unre
liabili
ty
Example: JDSU L4 module performance & testing
Laser chip– InAlGaAs
– 880-1000nm
– 100mm aperture
– 4.1mm cavity
– AuSn solder 15
20
25
Po
we
r(W
) 45%
60%
75%
Pow
er
co
nve
rsio
nE
ffic
ien
cy
.
ex-facet
ex-fiber
© 2008 JDSU. All rights reserved. SSDLTR June 2008135
Fiber-coupled package– 105mm diameter
– 0.15 or 0.22NA
– Rth = 2.2oC/W
– 10W rated power
– 50% wall plug 0
5
10
0 5 10 15 20 25
Current (A)
Po
we
r(W
)0%
15%
30%
Pow
er
co
nve
rsio
nE
ffic
ien
cy
.
15C
AHPSL 2008 Seminar #1
Accelerated life test examples
Chip Life Test– 9.3W, 13A
– Tcase = 70oC
– Tj = 117oC
– 28 lasers
– 0 failures
© 2008 JDSU. All rights reserved. SSDLTR June 2008136
-10%
-5%
0%
5%
10%
0 1,000 2,000 3,000 4,000
Time (hours)
Po
we
rC
ha
ng
e
Package Test– 10W, 12A
– Tcase = 35oC
– 14 lasers
– 0 failures
AHPSL 2008 Seminar #1
L4 Package qualification and robustness tests
-10%
-5%
0%
5%
10%
Time
Zero
Mech
Shock
Vibration
De
lta
Po
we
r
500G Mechanical Shock+ 20G Vibration Reference Telcordia GR-468
– Zero package failures in full suite
– Proves robustness of design
12 units
10%85C / 85% RH Damp Heat
© 2008 JDSU. All rights reserved. SSDLTR June 2008137
-10%
-5%
0%
5%
10%
0 100 200 300 400 500
No of CyclesD
elta
Po
we
r
-40C to +85CTemperature Cycling
27 units
-10%
-5%
0%
5%
10%
0 1000 2000 3000 4000 5000
Time (hours)
De
lta
Po
we
r
18 units
AHPSL 2008 Seminar #1
Pump power trends – commercially available
15% annualincrease in reliablepower
Similar trend for
10
Fib
er-
co
up
led
CW
Po
we
r(W
)
L3-6397
L3-6390
L4-6398
L3-6396
L2-6380
© 2008 JDSU. All rights reserved. SSDLTR June 2008138
Similar trend for– 8XXnm
– Single mode lasers
– Multi mode lasers
– Bars1
1992 1994 1996 1998 2000 2002 2004 2006 2008
Year
Fib
er-
co
up
led
CW
Po
we
r(W
)
9XXnm 105mm diameter fiber “Reliable” rated power
AHPSL 2008 Seminar #1
Example III: FiberExample III: Fiber Coupled Devices of 2006 designCoupled Devices of 2006 design::PLDPLD--2020--9xx9xx series based on L=3.0mm COS: Ø=100 mm fiber, NA < 0.12
139 12/11/2008 AHPSL 2008 Seminar #1 Photonics 2008, Dehli
Example IV: FiberExample IV: Fiber Coupled Devices of 2008 design:Coupled Devices of 2008 design:PLDPLD--3030--9xx9xx series (based on L=4.5mm COS): Ø=100 mm fiber , NA < 0.12
140 12/11/2008 AHPSL 2008 Seminar #1 Photonics 2008, Dehli
141 AHPSL 2008 Seminar #1
142 AHPSL 2008 Seminar #1
Example I: Second-Generation Fiber Pump Modules
• Characteristics
– Multiple emitters (e.g., a single mini-bar)
– Micro-optics for beam conditioning
– More power in (e.g., higher current at std voltage)
• Features
143
H2 short presentation
• Features
– Enhanced brightness per fiber channel
– Reduced thermal and electrical resistance (higher power at rollover)
– CoS with single-emitter economies, no smile
– Independent dropouts, reduced facet loading, enhance reliability
– Highly scalable at module level
AHPSL 2008 Seminar #1
• Brightness of industrial modules now exceeds 1 MW/cm2-sr
e.g.,
- 20W, 105um core, 0.20NA
- 915nm, 940nm, 976nm
Mini-Bar Fiber Pump Module
Orion™ series
3.8cm
30 0.6
144
H2 short presentation
- mini-bar architecture
- very high reliability
0
5
10
15
20
25
0 5 10 15 20 25 30 35
Current (A)
Po
wer
(W)
0
0.1
0.2
0.3
0.4
0.5
PC
E
Power
PCE
Specified Operating Pt
AHPSL 2008 Seminar #1
Mini-Bar Reliability: verification of emitter independence
CoS: 5-element mini-bar on CT
(AuSn solder on CuW heatsink)
single-emitter failures
145
H2 short presentation
Multi-Stripe Modules as Ensembles of Semi-Independent Emitters:
• failures are dominated by random, sudden failures of individual emitters
• the failure of an individual emitter only impacts other emitters by an increase in ensemble drivecurrent (for constant power) and warming of the other stripes on the same mini-bar
• all assumptions are consistent with test data giving over 300,000 hrs MTBEF (mean timebetween emitter failure) at the specified operating point
single-emitter failures
AHPSL 2008 Seminar #1
Fiber combinerFused and Proximity
Fused: (6+1)*1 Proximity: (2+1)*1
Fused can be extended to beyond 20 inputsProximity needs high brightness pumps
Fiber NA
Signal input HI 1060
Pump Ports 6*105um 0.22
Output 20um/400um 0.06/0.46
12/11/2008 146Photonics 2008, Dehli
Pump power injectionCoaxial dual claddingCoaxial cladding400um, NA=0.46: 150’000 modes
12/11/2008 147Photonics 2008, Dehli
Fiber Laser: MOPA
Seed laser
Pump Diode
Dual Clad Yb
MMPMFPMF
• Seed laser– Fiber laser: Good spectral control
Need external modulators (Pockels Cell)– Diode laser: Excellent dynamic control
FP laser have poor spectral control, of no concern DFB have excellent spectral and dynamic control
• Pumplaser– High Brightness: Single emitter broad area 9xxnm MM diode
Seed laserPump Diode
12/11/2008 148Photonics 2008, Dehli
Scalability of Fiber Laser
• Serial
• Parallel– Coherent Incoherent
~
~ ~
~
~
12/11/2008 149Photonics 2008, Dehli
Power Photonics: Fiber LaserFiber Delivered Beam Machining Tool
• Solid State– Hermetically sealed Diodes coupled to Fibers– Fiber delivery
• Technology– Apply telecom technology to power photonics
Page 150
‘SM’ fiber Fiber laser
12/11/2008 Photonics 2008, Dehli
9xxnm 120W Bar Performance
P-I curve at 25Cup to 200W:
• Electro-Optical
– Power: 120W @ 140A
– Threshold: 14A
– Slope Eff.: 1W/A
• Reliability0
25
50
75
100
125
150
175
200
Po
wer
(W)
www.bookham.com
Condition 120W pulsed (1.33Hz, 0<->140A)
• Reliability
– 5’200h at 120W lifetest dataat 1.33Hz full on/off pulsedconditions available
– The extrapolated medianlifetime is above 80’000hrs or350 MShots, less than 1%fails after 120 MShots.
– No open fails
0
0 100 200
Current (A)
0.5
0.6
0.7
0.8
0.9
1
1.1
0 1000 2000 3000 4000 5000 6000
Time (h)
Rel.
po
wer
(a.u
.)
Page 151
Bar with 425W CW at 980nm
400
300
200
CW
pow
er(W
)
www.bookham.com
– 425W at 980nm, 1cm, 50% FF
– On standard MCC
– 3.6mm long laser cavity
200
100
0
CW
pow
er(W
)
6005004003002001000
current (A)
Page 152
High-efficiency bars
Performance of JDSU/SHEDS 100W Bars
50
75
100
125
150
Ou
tpu
tP
ow
er
(W)
60%
65%
70%
75%
80%
Po
we
rC
on
ve
rsio
nE
fficie
nc
y
© 2006 JDSU. All rights reserved.153
>75% wall plug efficiency from 120W 940nm bar(SHEDS design)
0
25
50
0 20 40 60 80 100 120
Drive Current (A)
Ou
tpu
tP
ow
er
(W)
50%
55%
60%
Po
we
rC
on
ve
rsio
nE
fficie
nc
y
Results – Compare FF = 50% to FF = 33% Mesochannel Compact Heat Exchanger (MesCHE)
Rth = 0.38 C/W
L = 3.5 mm160
180
200
220
240
Po
we
r(W
)40
50
60
EO
Eff
icie
nc
y(%
)
Tj = 60 C
MesCHE
12/11/2008Photonics 2008, Dehli 154
L = 3.5 mm
P = 127 W (FF=50%)
P = 151 W (FF=33%)
0
20
40
60
80
100
120
140
0 20 40 60 80 100 120 140 160 180 200 220
Po
we
r(W
)
0
10
20
30
Current (A)
EO
Eff
icie
nc
y(%
)
FF=50% ModelFF=50% DataFF=33% ModelFF=33% DataFF=50% Model
AHPSL 2008 Seminar #1
Results – Compare FF = 50% to FF = 33%Microchannel Cooler (MCC)
210
240
270
300
50
60
70
EO
Eff
icie
nc
y(%
)
MCC
Tj = 60 C
Rth = 0.23 C/W
L = 3.5 mm
12/11/2008Photonics 2008, Dehli 155
0
30
60
90
120
150
180
0 50 100 150 200 250
Current (A)
Po
wer
(W)
0
10
20
30
40
EO
Eff
icie
nc
y(%
)
FF=50% ModelFF=50% DataFF=33% ModelFF=33% DataFF=50% Model
L = 3.5 mm
P = 200 W (FF=50%)
P = 207 W (FF=33%)
AHPSL 2008 Seminar #1
Reducing Complexity: 9xx 1/3 size VHB Bar
0.6
0.7
0.8
0.9
1
1.1
no
rma
lize
do
utp
ut
po
we
r(a
.u.)
90W / 100A40
60
80
100
120
140
160
Vo
ltag
e(V
)
CW Room Temperature
Lig
ht
Ou
tpu
tP
ow
er
(W)
Wallp
lug
Eff
icie
ncy
(%)
0.5
1.0
1.5
2.0
10
20
30
40
50
60
Power 80 W Theatsink
25°C
Inte
nsi
ty(a
.u.)
40
60
80
100
120
140
160
Vo
ltag
e(V
)
CW Room Temperature
Lig
ht
Ou
tpu
tP
ow
er
(W)
Wallp
lug
Eff
icie
ncy
(%)
0.5
1.0
1.5
2.0
10
20
30
40
50
60
Power 80 W Theatsink
25°C
Inte
nsi
ty(a
.u.)
www.bookham.com Page 156
• Reduced 1/3 size BAR on MCC
– Significant reduction on complexity of high power systems due to high totalpower from actively cooled MCC
– Maintain drive currents below 100A at increased brightness (bar size)
• Efficiency >55%, smile 1um, lat. farfield 8° (90% power)
– Highly reliable operation (hard pulse 1.3 Hz, 50% duty cycle, full ON-OFF)
• Power wear-out <1% / 1000h
0.5
0.6
0 1000 2000 3000 4000 5000
time (h)
no
rma
lize
do
utp
ut
po
we
r(a
.u.)
90W / 100A
0 50 100 150 2000
20
Injection Current (A)
0.0 0
10
970 980 990Wavelength (nm)
0 50 100 150 2000
20
Injection Current (A)
0.0 0
10
970 980 990Wavelength (nm)
AHPSL 2008 Seminar #1
Challenges for the design of HPL:Bar Bonding – Low Smile and High Current Capability
Subsystem design
• Submount material (expansion matched)• Robust cooler design (avoid corrosion)• Strain – Stress (reduced at all interfaces)• low Smile (hard solder, low smile)
Picture with courtesy of
• low Smile (hard solder, low smile)• Passive optics design (efficient)• Fiber diameter (low core, low NA)
157 AHPSL 2008 Seminar #1
Bar multiplexing to achieve highest opticalpower densities for direct application
Picture with courtesy of
158
Wavelength division multiplexing
High Power Single Mode Laser Diode
EDFA: Killer application: Done and dusted
used now for printing
12/11/2008 159Photonics 2008, Dehli
Direct Coupled Diodes:
• Practical limits to radiance?
12/11/2008 160Photonics 2008, Dehli
9xxnm Multimode Pump Diodes:Machining directly with Pump Diodes
200um,0.22
600um,0.22
1500um,0.22
Direct Diode
• Single Mode Pump Diode: 1W• Multimode Pump Diode: 0.5W/mode
– Low cost packaging needed
1.E+02
1.E+03
1.E+04
1.E+05
1.E+06
0 200 400 600 800 1000 1200 1400 1600
Diameter (um)N
um
ber
of
Mo
des
,
(bo
thP
ol)
,
Number of Modes in Fiber
50um.0.22
12/11/2008 161Photonics 2008, Dehli
About the author
• Professional Summary
Dr. Christoph Harder has received the Electrical Engineering Diplomafrom the ETH in 1979, Zurich, Switzerland and the Master and PhD inElectrical Engineering in 1980 and 1983 from Caltech, Pasadena, USA.Christoph is co-founder of the IBM Zurich Laser Diode Enterprise whichpioneered, among other laser diodes, the first 980nm high powerpump laser for telecom optical amplifiers. It is estimated that todaymore than 50% of the internet links (including intercontinentalcommunication) are powered up by such laser diodes, eithermanufactured in Zurich (majority) or by licensed partners.
12/11/2008 162Photonics 2008, Dehli
manufactured in Zurich (majority) or by licensed partners.
Christoph has been managing during the last few years the high powerlaser diode R&D effort in Zurich expanding, working closely with amultitude of customers, the product range into 14xx pumps as well as808 and 9xx multimode pumps for industrial applications. Dr. Harderhas published more than 100 papers and 20 patents and has held avariety of staff and management positions at ETH, Caltech, IBM,Uniphase, JDS Uniphase, Nortel and Bookham.
Dr. Harder was General Chair of the International Semiconductor LaserConference and the LEOS Annual Meeting, was on the board ofIEEE/LEOS and has served on numerous technical program and steeringcommittees. Today he is active on the board of OSA, BHL, President ofSwisslaser.net and on the direction committee of NCCR QP.
Dr. Christoph HarderHarder&Partner
Email:[email protected]:www.charder.ch