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Home-Made DC Magnetron Sputtering System

[PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

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Page 1: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Home-Made DC Magnetron Sputtering System

Page 2: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Chamber and Gas supply

Page 3: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Chamber, pumps and gas supply

Page 4: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Plasma ON

Plasma ON

Page 5: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Mo Target,

2kV

Page 6: [PPT]Home-Made DC Magnetron Sputtering System - …faculty.kfupm.edu.sa/.../research_files/magnetron.ppt · Web viewHome-Made DC Magnetron Sputtering System Chamber and Gas supply

Surface Science Group


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