RION CO., LTD. 21

.

2µm 3µm 4µm

Num

ber

of S

igna

l Pul

ses

coun

ted

Particle Size = Signal Thresholds with Size Calibration

Instrument response to2µm PSL spheres

Instrument response to3µm PSL spheres

1µm

Sensitivity Criteria

RION CO., LTD. 22

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

0.1 1 10

Particle diameter (µm)

Rel

ativ

e sc

atte

red

light

inte

nsity

:Experimental

Theoretical

0.312µm

2.001µm

0.700µm 1.020µm

0.506µm

Calibration Curve

RION CO., LTD. 23

Calibration Curve

Size Sensitivity Depend on a Material of Particle/Medium.

1.E+00

1.E+01

1.E+02

1.E+03

1.E+04

1.E+05

1.E+06

1.E+07

0.1 1 10

Particle diameter (µm)

Rel

ativ

e sc

atte

red

light

inte

nsity

m=1.33

m=1.46

m=1.60

m=1.78

m: Refractive index of particlesWavelength=0.633µm

(refractive index of medium=1)

(m: Refractive indexof Particles)

RION CO., LTD. 24

Microscope

Standard Particle Sensor

Particle Counter(Products)

Standard Particles

Reference Particle Counter

Counting Accuracy

Standard Particles

Standard Particles

RION CO., LTD. 25

Flow Cell

Light Intensity Distribution

Laser Lens

Sample Laser Beam

Time

Vol

tage

Signal

Resolution

Same Particle Size

RION CO., LTD. 26

Particle Size

Cou

nted

Rat

e

PSL Size Distribution

Measured Size Distribution

High Resolution Low Resolution

RION CO., LTD. 27

Concentration Limit

Flow Cell

Laser BeamParticles

Laser

Amp.

Lens Photo Detector

Vol

tage

TimeSignal

RION CO., LTD. 28

10

100

1000

10000

100000

1000000

10 100 1000 10000 100000 1000000

Ideal

Experimental

Calculated

Count Loss (5%)

Count Loss (10%)

Particle Concentration of Sample

Mea

sure

d P

artic

le C

once

ntra

tion

RION CO., LTD. 29

Flow RateFlow Rate is important for Calibration and Measurement.

Particle Counter

Precision film type flow-meter

Airborne Particle Counter

RION CO., LTD. 30

Flow Rate Check for

Liquid borne Particle Counter

Particle Counter

+ Stop watchDrain

RION CO., LTD. 31

Particle Counter (Products)

Measuring Instruments

RION Standard

Official Standard

Trace-ability for physical value

RION CO., LTD. 32

����������

Traceability for Particle Counter

ElectrotechanicalLaboratory

JSR

BIPMCommunicationsResearchLaboratory

BIPM

Particle Counter (Products)

StandardParticles

Weigh Pulse Generator

Particle Size Mass Time

PTB

Frequency Counter

YHP

JEMIC

Volt Meter

Pulse HeightAnalyzer

Fluke Sartorius

StandardWeight

NRLM

JQA JQA

Voltage

RION CO., LTD. 33

A Point of Notice for Particle Measurementusing

Airborne Particle Counter

• Check a Flow Rate• Tube Material• Tube Length• Pressure Drop of Sampling System• Zero Count Check• Calibration within a year

RION CO., LTD. 34

Sampling Tube Material

Do not use a materials that cause staticelectricity such as Teflon, Silicon etc. because particles will deposit on the wall of tube.

We recommend nylon.

RION CO., LTD. 35

Sampling Tube Length

Long tube will cause deposit particleson the wall of tube.It’s depend on a 1. inner diameter of tube2. particle size3. flow rate

RION CO., LTD. 36

Pressure Drop of Sampling System

Particle Counter

Manometer

Sample

An over reduction of pressure of the inlet will cause low counting efficiency, erroneous countand will dirty an optical system.

Inlet

RION CO., LTD. 37

A Point of Notice for Particle Measurementusing

Liquid-borne Particle Counter

• Check a chemicals• Flashing• Babble • Residual Sample (Change a Chemicals)• Sample Pressure• Calibration within a year

RION CO., LTD. 38

Check a wet materials of particle counter

Hydrogen Fluoride (HF) will dissolve glasses and quartz.

Wet material should be Sapphire. In case of sampling HF.

RION CO., LTD. 39

Flashing a sampling line is a basic

Accurate particle measurement is requiringflash a sampling line for remove a depositedparticles.

RION CO., LTD. 40

Bubble

Particle Counters count bubbles same asparticles.

Residual Sample

According to circumstances particles willgenerate particles by chemical reaction.

RION CO., LTD. 41

Conclusions

• Particle Counters are useful for many field.

• There are many standards for cleanliness.

• Some standards described for calibration,sampling and measurement.

• Operating Procedure is important for accuratelymeasurement.