Embed Size (px)
Citation preview
Page 1Confidential
Ceramic Servo Motors
Page 2Confidential
Theory Of Operation
Traditional Piezo VS
Reversed Piezo VS
Ultrasonic Standing Wave
Page 3Confidential
Piezo Direct and Reverse Effect
Page 4Confidential
Poling a Piezo Element
Page 5Confidential
Basic Structure of Nanomotion’s Piezoelectric Element
Page 6Confidential
Ultrasonic Standing Waves
Simultaneous excitation of both modes
creates motion at the edge of motor fingertip
Bending Mode Longitudinal Mode
Slide
+ =
Page 7Confidential
Finite Element SimulationLongitudinal ModeBending Mode
Page 8Confidential
Motor Ellipse
Amplitude of ellipse varies with voltage Slow speed – ellipse at the few nm level High speed- ellipse at the tens of microns The larger the ellipse, the more the mechanical
stress, the more the heat, the less the duty cycle
Page 9Confidential
Nanomotion Motor Basics
Linear Motion Rotary Motion
RotaryRotary TableTable
PZT
Linear StageLinear Stage
PZT
Page 10Confidential
Motor Assembly
Page 11Confidential
Page 12Confidential
Motor Features
Standard motors for most operating environments Unlimited travel with small operating package (Drive
strips to 4m length) Superior move & settle & Slow speed CV Vacuum motors for high and UHV
Up to 10-10 Torr Non-Magnetic motors / No EMI from motor No servo dither & no hysteresis Built in holding / braking without power consumption Wide range of dynamic performance
(Resolution to 1nm, velocity from 1u/sec to 300mm/sec) Cost effective direct drive solution
Page 13Confidential
The “EDGE”
New ‘high volume’ industrial motor.– Low voltage– Supported by ASIC based driver– Low price in volume
Performance Characteristics– Max velocity: 150mm/sec– Max force: 30g (.3N)– Highest resolution: 1um– Requires straight slide (to 10um)
Page 14Confidential
The “EDGE”
Drive System– The Edge is supported by a dual axis ASIC
• 2 independent drive/control or one drive for (2) motors.• ASIC is a complete drive + simple control, programmed via I2C
protocol. Can close the loop at 5um resolution (30k counts/sec)• ASIC drive available with +/-10vdc input for use with external servo
controller.
Market Positioning– Mid to high volume industrial markets
• Biomedical: Pumps, biometric security, Drug delivery• Military/Aerospace: Aperture control, shutters, target manipulation• Vision: Industrial focus/zoom
Page 15Confidential
The “EDGE” Benefit / Feature
– SIZE: Smallest closed loop servo motor– SAFETY: Low voltage for medical applications– POWER: .3N force– COST: Low price in volume
Target Applications– Aperture/Shutter control (vision, laser, etc)– Medical devices (pumps, wands, fluid control)– Vision/Industrial focus/zoom
Page 16Confidential
DuraMotor
Next Generation Motor byNanomotion
For Better Productivity and Cleanliness
at Challenging Motion Conditions
Page 17Confidential
DuraMotor
Introduction Critical factor definition in vacuum environment Operating Conditions Experimental results and analysis Summary and conclusions Design recommendations
Page 18Confidential
Introduction Nanomotion products are serving a wide range of applications
Challenging applications are often involved with high cleanliness requirements– Semiconductor, FPD, data storage, high resolution microscopy– Medical, military, and Nanotech applications with analytical instruments
Main factors impacting performance at the above conditions– Stage stiffness– Motion dynamics– Vacuum VS Ambient environment– Control optimization
DuraMotor was designed for – Operation at challenging motion environments to achieve HIGH PRODUCTIVITY
• High dynamics – acceleration, velocity• Vacuum environment• High duty cycle
– Full compatibility with the HR motor family– Seamless integration with existing servo or open loop systems
Page 19Confidential
Critical Factor Definition at Vacuum applicationsExperimental Comparison for Standard HR Motors
Stage Stiffness and Motion Dynamics are the Critical Factors
Particle Emmision Vacuum applications
0.16
0.04
0.08
0.02
0
0.05
0.1
0.15
0.2
0.25
0.3
Pa
rtic
le [p
/t/m
m]
Page 20Confidential
Design Recommendation
DuraMotor is recommended for challenging vacuum and ambient applications
High stiffness stage is the most critical factor for the motor performance with low particles level
Servo parameter optimization is essential to avoid vibrations which contribute to particles during dynamic move profiles
Both HR and DuraMotor are suitable to use at high stiffness and well controlled servo systems
A stiff stage design with DuraMotor allows for
high productivity (dynamics) and cleanliness in motion systems
Page 21Confidential
DuraMotor Benefit / Feature
– CLEANLINESS: Reduced particle generation– DURABILITY: Higher accel rates, more aggressive move
profiles.
Target Applications– Semiconductor vacuum stages for wafer inspection, E-
beam & Ion beam microscopes– XY & Z motion for medical microscopes– Any application that is sensitive to contamination
Page 22Confidential
The “Flex DC”
Page 23Confidential
Flex DC Product Configuration
– Single Axis (AB1A or AB5)– Dual Axis (AB1A, AB5, or Mixed)
8 kHz Servo Update Rate DAC Output +/-10v, 16 bit Easy to use GUI RS232, Ethernet, and CAN-open interface Quadrature Encoder input
– Sin/Cosine Multiplier Option
Page 24Confidential
Flex DC Hardware I/O
– 8 x Digital Isolated Inputs– 2 x Digital Isolated Outputs– 2 x Digital Fast Inputs– 2 x Digital Fast Outputs
AC Input (wall)– 100 – 240 VAC, 50-60 Hz
Page 25Confidential
Flex DC Software PID or PIV Control Algorithm Data Recording Nanomotion Algorithms for:
– Deadband– Ultra-High Resolution Positioning– Thermal Protection (to come)
Page 26Confidential
Flex DC
Board level dual axis option Board level 4 axis option Rack mounted box with 4 axis (TBD)
Page 27Confidential
Flex DC Benefit / Feature
– SINGLE RESPONSIBLITY: Eliminating all the guess work of interfacing drives & controls
– EASE OF USE: Simple front end GUI and strong factory support (from Nanomotion)
– PLUG & PLAY: Set up for any FB motor and encoder to plug directly into the controller
– COMMUNICATIONS: RS232, Ethernet, CAN-Open
Target Applications– EVERY FB or CUSTOM STAGE CUSTOMER (you will not
sell many of these without our motors. It is a support product.
Page 28Confidential
Stages Nanomotion continues to expand its offering of
standard stages and custom motion systems to be a provider of complete motion solutions.
Page 29Confidential
Stages “Nanomotion” Standard
Stages– FB Linear Stages
• Sizes: 50mm to 150mm wide• Travels: up to 300mm• Resolutions: 1um to 10nm• Single and multi axis
– FBR Rotary Stages• 60mm output diameter• (150mm diameter available)• Resolution of 5 to 0.5 arc seconds• Single or multiple HR2 motors
Page 30Confidential
Custom Motion Systems
Nanomotion’s first “hybrid” motion platform, combining two axis of Nanomotion motors with one axis of ballscrew and step motor drive.
Page 31Confidential
Custom & Semi-Standard Motion Systems
Motion systems that utilize standard components of bearings, slides and encoders, but require custom machined assembly housings creates distinction in the market place.
Page 32Confidential
Custom Drive Electronics
Nanomotion has designed and manufactured many custom drive configurations for customer applications.– Small multi axis amplifiers
• 4 channel card for HR1 motors
– Miniature amplifiers with TTL inputs• To drive ST or MM motors
Nanomotion will look to standardize an offering of smaller electronics (based on motor sizes).
Do not let electronics packaging be an obstacle to developing an application.
Page 33Confidential
Drive Technology Comparison
Page 34Confidential
Drive Technology Comparison
2 Piece Construction ?? Piece Construction
Page 35Confidential
Drive Technology Comparison
Nanomotion positions its ceramic servo motors against other applications using step or servo motors or stages with closed loop rotary step or servo motors (using ball/lead screw) or brushless linear servo motors.
Page 36Confidential
Positioning with respect toother motion technologies
MotorDriveFeedbackConfiguration
Step MotorLead/ball screwNoneOpen Loop
Step MotorLead/ball screwRotary EncoderClosed Loop
Servo MotorLead/ball screwRotary EncoderClosed Loop
Step MotorLead/ball screwLinear EncoderClosed Loop
Servo MotorLead/ball screwLinear EncoderClosed Loop
Ceramic Servo MotorLinear EncoderClosed Loop
DC Linear Servo Motor Linear EncoderClosed Loop
Page 37Confidential
Drive Technology Comparison
VS
Page 38Confidential
Performance Comparison
Travel Accuracy / Repeatability Velocity Accel / Decel Load
Dynamic/Static Stiffness Smoothness of Motion Control Interface Special Environments Cost
Page 39Confidential
Travel Comparison
Travel can be configured for any length in both systems Once ballscrew length is defined, travel is fixed Ballscrew has length limitations by diameter and bearing span Nanomotion can travel any length defined by bearing structure
Advantage: Ceramic Servo Motors
Page 40Confidential
Accuracy / Repeatability Comparison
Nanomotion relies on direct feedback on the motion platform and does NOT induce any potential errors from mounting or compliance.
Ballscrews can use either linear or rotary encoders which can introduce errors related to lead error, screw mounting, or compliance.
Ceramic servo motors have no negative effects with respect to accuracy and work to the limit of the feedback.
Advantage: Ceramic Servo Motors
Page 41Confidential
Velocity Comparison
While ballscrews are limited by the pitch and critical speed, based on mounting, Nanomotion’s motor technology is limited to 250mm/sec.
High pitch ballscrews can go much faster
Advantage: Ballscrews & Rotary Motor for Speed However, Nanomotion has a significantly higher bandwidth in
velocity, with a ratio of 1:250,000
Advantage: Ceramic Servo Motors for Range
Page 42Confidential
Accel /Decel Comparison
In terms of pure acceleration, Nanomotion has achieved rates in excess of 10g’s.
Ballscrews have a practical limit of ~1g, before balls start jamming in the return tubes.
While ceramic servo motors can achieve a high rate, it is very load dependent.
Advantage: Shared / Application Dependent
Page 43Confidential
Load Comparison
While ceramic servo motors are competitive within the defined speed/force curves, the mechanical advantage of the ballscrew is much greater than the force capability of our direct drive.
Advantage: Ballscrew & Rotary Motor
Page 44Confidential
Dynamic Stiffness Comparison
Dynamic stiffness is a function of the motor response, control loop, and mechanical system.
The compliance in a rotary motor – coupling- bearing mount- ballscrew creates a much slower response.
The direct drive of a motor coupled to the load, without any internal motor inertia, makes ceramic servo motors a much faster responding technology
Advantage: Ceramic Servo Motors
Page 45Confidential
Static Stiffness Comparison
The static stiffness of the ballscrew can be significantly higher that the ceramic servo motors.
However, it is dependent on the shaft bearing configuration and type and ball nut preload.
Advantage: Ballscrew & Rotary Motor
Page 46Confidential
Smoothness Comparison
The impact of ball bearings running in/out of preload creates vibration that will be transmitted to the mechanical structure.
The issues of ball screw pitch diameter variations and preload variations create torque fluctuations that will effect smoothness of travel.
Ceramic servo motors do not effect the bearing structure and can travel smoothly at the level of 1 micron/sec.
Advantage: Ceramic Servo Motors
Page 47Confidential
Control Interface Comparison
Most rotary servo motors and amplifiers have the ability to accept step/direction inputs as well as analog inputs
Nanomotion amplifiers are limited:– +/-10 vdc analog input
– SPI digital input
However, the new AB5 allows use with ANY controller that provides +/-10 vdc, including PLC’s
Advantage: Ballscrew & Rotary Motor
Page 48Confidential
Special Environment Comparison
Nanomotion’s ceramic servo motors are well suited to:– Vacuum & UHV– High Magnetic Field– Clean Room– Radiation– High RF
Rotary motors with ballscrews (and lubricants) are far more limited
Advantage: Ceramic Servo Motors
Page 49Confidential
Comparison SummaryCharacteristicAdvantageTravelNanomotion
Accuracy/RepeatabilityNanomotion
VelocityMax Speed –Ballscrew
Bandwidth -Nanomotion
Accel / DecelEven
LoadBallscrew
Dynamic StiffnessNanomotion
Static StiffnessBallscrew
SmoothnessNanomotion
Control InterfaceBallscrew
Special EnvironmentsNanomotion
CostNanomotion
Page 50Confidential
Comparison Summary
Ceramic Servo Motors bring advantages in size, simplicity, force per volume, dynamic performance, and cost over traditional drive technology.
![[DESIGN] Piezo-Piezo to Pie](https://img.dokumen.tips/doc/110x75/5571f8bb49795991698df909/design-piezo-piezo-to-pie.jpg)
