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Opto-semiconductors Condensed Catalog HAMAMATSU PHOTONICS K.K.

Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

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Page 1: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Opto-semiconductorsCondensed Catalog

HAMAMATSU PHOTONICS K.K.

Page 2: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Hamamatsu Photonics has been at the cutting edge of photonics technology for 60 years. In that

time, Hamamatsu has developed and produced a wide range of opto-semiconductors such as

photodiodes, photo ICs, image sensors, and LEDs, as well as mini-spectrometers and many other

products using opto-semiconductors.

Our lineup of opto-semiconductors covers a broad spectrum from the infrared through the visible and

ultraviolet regions, extending to X-rays and even high energy particles. These are widely used in

many fields ranging from scientific measurements, medical diagnosis, communications, and

consumer electronics as well as in-vehicle applications.

In the days ahead, besides improving our semiconductor process and mounting/packaging technologies

to make them more sophisticated, we will fully utilize MOEMS (micro-opto-electro-mechanical systems)

technology that merges photonics technology with MEMS technology to develop opto-semiconductors

with even higher sensitivity, speeds, and functions.

Our unique photonics technology delivers highly sophisticated opto-semiconductors withhigh-sensitivity and high-speed response.

Koei YamamotoRepresentative Director and Senior Managing DirectorDirector of Solid State DivisionHamamatsu Photonics K. K.

C o n t e n t s

Applications of Hamamatsu opto-semiconductors ..................................... 3 - 5Opto-semiconductor selection guide .................................................... 6 - 8Manufacturing process of opto-semiconductors ................................. 9 - 12Map / Annual sales / Organization chart............................................35 - 36

1

Page 3: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Opto-semiconductorsevo lv ing wi th theadvancement o f

MOEMS techno logy

Opto-semiconductordevices

MOEMSd e v i c e s

CompactHighly functionalHigh reliability

MEMS technology

Etching

Nanoimprint

Three-dimensionalmounting technology

Assembly technology Module technologySemiconductor process technology

∙Wide spectral range(UV/visible/infrared, X-ray, high energy)

∙ High sensitivity, high-speed response∙Highly functional devices based on CMOS circuit technology

Si process

Compound semiconductorprocess

∙General-purpose and highly reliable packages,surface mount type, CSP,flip-chip bonding∙ Flexible customization∙ Ready for low- and high-volume production

Optics

Assembly

Various packages

Analysis Circuitry

Software

∙Optimum optical design and effective simulation

∙ Analog and digital circuits,ASIC, FPGA

∙ Supports various interfaces

Downsize, integration

∙ Semiconductor micromachining to produce mechanical parts, optical elements, sensors, and wafer level packages

Hamamatsu opto-semiconductors

LED.............................................. 29Optical communication devices....... 30Mini-spectrometers................. 31 - 32Opto-semiconductor modules.. 33 - 34

Flat panel sensors ......................... 23PSD (position sensitive detectors)... 24Infrared detectors .................. 25 - 26Visible light sensors ....................... 27Color sensors ................................ 28

Si photodiodes ....................... 13 - 14Si APD................................... 15 - 16MPPC®................................... 17 - 18Photo IC ................................ 19 - 20Image sensors ....................... 21 - 22

2

Page 4: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

©Frank Boston-Fotolia.com

RGB color sensors

Our automotive devices are widely used in vehicles. (In-vehicle LAN, ambient light level detection, day/night detection, windshield rain sensors, laser radars, multi-function jog dials, pedestrian protection systems, glare-proof mirrors, etc.)

Automotive applicationsRGB color sensors detect the brightness and color temperature of room light and adjusts the display colors.

LCD color adjustment

Our Si photodiodes are widely used as detectors in X-ray baggage inspection systems.

X-ray non-destructive inspection

Si photodiode arrays

CCD area image sensors are used in panoramic/cephalometric imaging equipment for dental diagnosis.

Dental X-ray imaging

CCD area image sensors

Applications of Hamamatsu opto-semiconductorsHamamatsu opto-semiconductors have been used in wide-ranging fields including communications, industry and general electronics as well as medical and scientific applications.

Subaru Telescope [by courtesy of NAOJ (National Astronomical Observatory of Japan)]

3

Page 5: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

©Nmedia-Fotolia.com

Si APD

Si APD and PIN photodiodes are used in surveying instruments for distance measurement.

RangefindersWe provide light transmit-ter and receiver devices for optical fiber communi-cations and FSO (free space optics).

Optical communications

Optical communication related devices

The MPPC is used in diverse applications for detecting extremely weak light at the photon-counting level.

Photon counting

Automotive devices

The world’s highest sensitivity CCDs manufactured by Hamamatsu are installed in the Suprime Cam/Subaru Prime Focus Camera of the Subaru Telescope at the summit of Mauna Kea, Hawaii.

Astronomical observation

CCD area image sensorFlat panel sensor

Subaru Telescope [by courtesy of NAOJ Subaru Telescope [by courtesy of NAOJ (National Astronomical Observatory of Japan)](National Astronomical Observatory of Japan)]Subaru Telescope [by courtesy of NAOJ (National Astronomical Observatory of Japan)]

4

Page 6: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

©Zoe-Fotolia.com

MPPC

Subaru Telescope [by courtesy of NAOJ (National Astronomical Observatory of Japan)]

The European Organization for Nuclear Research (CERN) in Switzer land is conducting a project involving the Large Hadron Collider (LHC). The Si strip detec-tor by HAMAMATSU is being used as the particle track detector in the collider, and is detecting particle tracks with a preci-sion on the order of several tens of μm.

High energy experiments

Si APDSi strip detector

Infrared LED and Si PIN photodiode arrays are used to configure encoders built into robots for position control.

Industrial robots

Si PIN photodiode arraysInfrared LED

Back-thinned TDI-CCD image sensors are used for wafer defect inspections.

Semiconductor manufacturing equipment

Back-thinned TDI-CCD image sensors

CMS project(by courtesy of CERN)

Applications of Hamamatsu opto-semiconductors

5

Page 7: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Opto-semiconductor selection guide

Visible

IR

Segmented type

X-ray

Near IR

IR

1D

Non-segmented type

Point sensor

Photon counter

Image sensor

Position sensor

High energy particle

Visible

2D

UV

Im

P

Lightemitter

Photosensor

6

Page 8: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

[Product name] [Applications]

Red LED Optical switches, optical fiber communications

Infrared LED Optical switches, light sources for measurement devices, optical communication devices, automatic control systems, rotary encoding

Si photodiode with compensation filter Illuminometry, copiers, color sensors

Diffusion type GaAsP photodiode Illuminometry, flame eyes (monitors)

Illuminance sensor

Color sensor Display color adjustment, color detection

Energy-saving sensors for TV and the like, light dimmers for liquid crystal panels,backlight dimmers for cell phones, light level measurements

Si photodiode

Si APD (avalanche photodiode) Optical communication devices, information equipment, automatic control systems, general electronics, car electronics, photometric equipment, medical equipment, high energy physics

Photo IC Optical switches, office automation equipment, rotary encoders, optical fiber communications

InGaAs PIN photodiode Optical communication device, IR laser monitoring, radiation thermometry, industrial measurement

PbS/PbSe photoconductive detector Radiation thermometry, flame eyes, moisture analysis, gas analysis, spectroscopy

IR laser detection, spectroscopy, radiation thermometry, gas analysis, FTIR, thermal imaging

Thermal imaging, radiation thermometry, FTIR, gas analysis, CO2 laser detection

Photon drag detector CO2 laser detection

Thermopile detector Radiation thermometry, gas analysis, flame eyes

MPPC Medical equipment, nuclear medicine, high energy physics, radiation measurement

Linear image sensor Multichannel spectroscopy, spectrum analysis, optical measurement

Photodiode array Multichannel spectroscopy, color analysis, spectrum analysis, position detection

Multi-element photodiode Position detection

Si photodiode for X-ray Baggage inspection, non-destructive inspection, medical use

PSD (position sensitive detector) Rangefinding, displacement sensing, laser optics, automatic control systems, high energy physics

X-ray image sensor Radiography, non-destructive inspection

Area image sensor Fluorescence spectroscopy, Raman spectroscopy, scientific measurement, X-ray imaging, near infrared imaging

Flat panel sensor Radiography, X-ray diffractometers, non-destructive inspection

SSD High energy physics, nuclear medicine, industrial measurement

Optical communication devices, information equipment, automatic control systems, general electronics,car electronics, photometric equipment, medical equipment, high energy physics

InSb photoconductive detector,InSb/InAs/InAsSb photovoltaic detector

MCT (HgCdTe) photoconductive/photovoltaic detector

Si photodiode for UV light

Schottky type GaAsP photodiode

Schottky type GaP photodiode

Pollution analysis, spectroscopy, medical use, UV detection, colorimetry

Pollution analysis, spectroscopy, colorimetry, UV detection

UV detection

IR-enhanced Si photodiode/Si APD YAG laser monitoring, near infrared detection

7

Page 9: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Mini-spectrometer,photosensor amplifier,APD module, etc.

MiniphotAPD

Moduleproduct

Selection guide by wavelength

Wavelength

Phot

osen

sor

Ligh

t em

itter

0.2 0.4 0.6 0.8 1 2 4 6 8 10 20 (μm)

GaAs LED

GaAlAs LED

AlGaInP LED

Si

GaP

InGaAs

PbS

PbSe

InAs

InSb

MCT

Thermopile detector

InAsSb

GaAsP

Spectralrange

UV Visible Near IR Middle IR Far IR

8

Page 10: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Thin films are formed on wafers by oxidation or CVD process.

Oxidation

SiO2

Si

Device patterns are formed by photolithographic technique.

Photolithography

SiResist

SiO2

Photomask

Selective etching is performed on the thin film on wafers.

Etching

Si

Resist

SiO2

[Typical process of Si photodiode fabrication]

Design for new products Design for custom products

Thin-film crystal growth under ultra-high vacuum in MBE equipment Thin-film crystal growth with MOCVD equipment

[Typical compound semiconductor fabrication process]

Hamamatsu has been manufacturing a wide range of opto-semiconductors using our unique wafer process technologies.

Fabricates high-speed photodiodes by integrating a PIN photodiode and high-speed signal processing circuits onto a single chip.

PIN bipolar process

The integration of circuit functions in photodetectors helps to achieve high performance, multifunctionality, and cost reduction in systems.

CMOS process

Back-thinned CCD area image sensors have a very thin photosensitive layer for high sensitivity yet low dark current.

Back-thinned CCD process

Utilizing compound semiconductor process technologies that include MBE, MOCVD, and dry etching techniques optimized for precision processing, we have been developing high-performance devices for optical communications, chemical analysis, and measurement.

Compound process

Manufacturing technologies

Product examples produced using our compound semiconductor process

InGaAs APD InGaAs linear image sensors

Semiconductor process technologies

Si wafer (before process)

Wafer process

Design Epitaxial growth process

Electrical and opticalcharacteristics

Active area Number of elements Package Reliability

[Example of custom orders]

Product examples produced using our CMOS process

Digital color sensors CMOS image sensors

Manufacturing process of opto-semiconductors

9

Page 11: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Doping impurities are injected into wafers.

Ion implantation

Si Diffusion layer

SiO2

Ion

Metal pattern is formed.

Metallization

Metal

SiDiffusion layer

SiO2

Devices on the wafer are inspected electrically and optically.

Wafer inspection

Metal

SiDiffusion layer

SiO2

Main factory (Ichino)

To assembly process

Etching is a basic semiconductor process technology. MEMS technology utilizes anisotropic etching and sacrificial layer etching as well as conventional etching techniques to provide versatile functions impossible to achieve by conventional opto-semiconductors.

EtchingNanoimprint is a technology for fabricating fine structures at a high throughput. Light curing resin is applied to a substrate upon which a master substrate with a fine structure is then pressed. Light is then irradiated to transfer the nanoscale structure to the resin.

Nanoimprint3D mount technology can be broadly grouped into “electrode technology” for fabricating structures with 3D electrical connections and “bonding technology” for making wafer level packages. Electrode technology is essential for achieving more sophisticated functions and smaller size opto-semiconductors. Electrode technology involves techniques for forming Si through-hole electrodes to extract electrodes from the backside of devices and flip-chip bonding to make electrical connections between different materials. Bonding technology includes anodic bonding and room-temperature bonding that need no adhesives and that apply direct sealing on devices to achieve ultra-small packages.

3D mount technology

Hamamatsu is developing highly functional opto-semiconductors using a wide range of MEMS technologies.

V groove formed by anisotropic etching

Actuators formed by sacrificial layer etching (bulk micromaching)

20 μm pitch indium bump electrodes

MEMS technologies

10

Nanoimprint

Page 12: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Ceramic Surface mount type ceramicTO-CAN metal Rectangular metal

Mounting/packaging technologies

Shingai factory (Assembly factory)Mitsue factory (Assembly factory)

Gold bumps are formed on wafers.

Bump forming

Wafers are cut by a spinning blade.

Blade dicing

A laser cuts a wafer by irradiating the interior ofthe wafer.

Stealth dicing

Dicing

Metal package

Ceramic package

Plastic package

Chip size package

Assembly process [Typical process]

Chips are bonded to metal bases.

Die bonding

Chips are bonded to ceramic bases.

Die bonding

Chips are bonded to lead frames.

Die bonding

Dicing

Blade dicing

Stealth dicing

or

11

Manufacturing technologies

Hamamatsu offers a variety of package types to meet diverse market needs. For example, metal packages are widely used in applications requiring high reliability. Ceramic packages are used in general applications. Plastic packages are suitable for high-volume applications where lower cost is essential. Special packages include rectangular metal packages designed for use with thermoelectrically-cooled CCD area image sensors. Many different types of surface mount packages are also available. COB (chip on board) devices and thin plastic package devices are ideal especially for applications where small, thin devices are needed. What's more, photodiode/scintillator combination devices are available that detect X-rays or radiation by converting them into visible light.

Page 13: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

Chip size packageGlass epoxy board

With scintillator With flexible cable

Plastic Long and narrow type

TSV (through silicon via) technology

Cross section example of TSV

Glass

Photodiode, IC chip

Solder bumpTSVWiring

Insulatingfilm

Chips are connected to metal bases using gold wires.

Wire-bonding

Chips are connected to ceramic bases using gold wires.

Wire-bonding

Chips are connected to lead frames using gold wires.

Wire-bonding

Chips with bumps are bonded to substrates by being flipped (inverted).

Flip chip bonding

Metal caps are welded to metal bases.

Cap sealing

Resin is injected into ceramic bases.

Resin encapsulation

Resin is molded along lead frames and chips.

Resin molding and trimming

The space between the substrate and chip is filled in with resin.

Underfill filling

Test

12

Electrical & optical characteristics are tested.

Metal package test equipment

Appearance inspection

Electrical & optical test

Plastic package test equipment

The appearances of finished products are inspected.

Appearance inspection system

X-ray & appearance inspection system

Page 14: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

13

S i P H O T O D I O D E S[Si photodiodes]Product lineup for wide-ranging applicationsSi photodiodes are used in various applications covering optical fi ber communications, copiers, analytical instruments and baggage inspection, and are available in various packages including metal, ceramic and plastic packages, as well as surface mount packages.

1 Si photodiode

4 Si photodiode with preamp

2 Si PIN photodiode

5 TE-cooled typeSi photodiode

3 Multi-element type Si photodiode

6 Si photodiode for X-ray

Spectral response (typical example)

S1226/S1336-8BQ, S1227/S1337-1010BR S3590-19, S3759, S9219

2000

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

1200300 400 500 600 700

Wavelength (nm)

Phot

osen

sitiv

ity (

A/W

)

800 900 1000 1100

(Typ. Ta=25 ºC)

S1336-8BQ(For UV to NIR)

S1337-1010BR(For UV to NIR)

S1227-1010BR(IR sensitivity suppressed)

S1226-8BQ(IR sensitivity suppressed)

QE=100%

2000

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

1200300 400 500 600 700

Wavelength (nm)

Phot

osen

sitiv

ity (

A/W

)

800 900 1000 1100

(Typ. Ta=25 ºC)

S3759 (for YAG laser)

S3590-19(high violet sensitivity)

QE=100%

S9219(visible-sensitive compensated)

KSPDB0300EC KSPDB0301EC

Features Major applications

Excellent linearity with respect to incident light

Low noise

Wide spectral response range

Mechanically rugged

Compact and lightweight

Long life

Analytical instrument

General photometry

Baggage inspection

Optical fi ber communications

Page 15: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

14

S i P H O T O D I O D E S

Product lineup

To make our photodiodes easier to use, we offer a variety of modules.

Photodiode module

Product name Product examples

1 Si photodiode

For UV to near IR range For visible to near IR range For visible range RGB color sensor For VUV (vacuum ultraviolet) detection For monochromatic light detection For electron beam detection

2 Si PIN photodiode

Cutoff frequency: 1 GHz or more Cutoff frequency: 500 MHz to less than 1 GHz Cutoff frequency: 100 MHz to less than 500 MHz Cutoff frequency: 10 MHz to less than 100 MHz IR-enhanced type For YAG laser detection

3 Multi-element type Si photodiode Segmented type photodiode One-dimensional, two-dimensional photodiode array

4 Si photodiode with preamp5 TE-cooled type Si photodiode

For analytical instrument and precision measurement

6 Si photodiode for X-ray With scintillator Large photosensitive area type

Product name Features

Photodiode moduleThese modules are high-precision photodetectors integrating a Si photodiode or InGaAs photodiode with a current-to-voltage conversion amplifi er into a compact case. Dedicated controller is also provided (sold separately).

Photosenser amplifi erPhotosensor amplifi ers are current-to-voltage conversion amplifi ers used to amplify very slight photocurrent from a photodiode with very low noise.

0.8

0.6

0.4

0.2

0200 800 1000600400

Wavelength (nm)

1200

Phot

osen

sitiv

ity (

A/W

)

(Typ. Ta=25 °C)

IR-enhancedSi PIN photodiodeS11499 series

Previous type

QE=100%

KPINB0374EC

■ Spectral response example

CT O P ISi PIN photodiodes with enhanced near-infrared sensitivity made by MEMS technology

IR-enhanced Si PIN photodiode

These Si PIN photodiodes offer high sensitivity in the near infrared region via MEMS technology. They have both high-speed response and high sensi-tivity in the near infrared region which have been difficult to achieve up to now by conventional methods.

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15

S i A V A L A N C H E P H O T O D I O D E S[Si APD]High-speed, high-sensitivity photodiodes with an internal gain mechanismAPD (avalanche photodiodes) are high-speed, high-sensitivity photodiodes that internally amplify photocurrent by the application of a reverse voltage.Delivers a higher S/N than PIN photodiodes and is widely used in optical rangefi nders, FSO (free space optics), scintillation detectors, etc.

1 Short wavelength type 2 Near infrared type

Features Major applications

Excellent linearity with respect to incident light

Low noise

Wide spectral response range

Mechanically rugged

Compact and lightweight

Long life

Low-light-level detection

Analytical instrument

FSO

Optical rangefi nder

Optical fi ber communications

Laser radar

YAG laser detection

Wavelength (nm)

Phot

osen

sitiv

ity (

A/W

)

200 400

55

50

40

30

20

10

45

35

25

15

5

0600 800 1000 1200

Near infrared type(900 nm band, low terminal capacitance)

Near infrared type(low bias operation)

IR-enhanced type(1000 nm band/high sensitivity)

Near infrared type(low temperature coefficient)

Short wavelength type(low bias operation)

(Typ. Ta=25 °C, M=50, λ=650 nm)

Short wavelength type(low terminal capacitance)

KAPDB0096EG KAPDB0162ED

Spectral response Cutoff frequency vs. recommended wavelength

Wavelength (nm)

Cuto

ff f

requ

ency

(M

Hz)

2000

200

400

600

800

1000

400 600 800 1000 1200

High

Low

(Compared using devices with 0.5 mm photosensitive area)

Short wavelength type(low bias operation)

Short wavelength type(low terminal capacitance)

Near infrared type(low bias operation, lowtemperature coefficient)

Near infrared type(1000 nm band/high sensitivity)

Near infrared type(900 nm band, low terminal capacitance)

Page 17: Opto-semiconductors semiconductor condensed c… · Applications of Hamamatsu opto-semiconductors Hamamatsu opto-semiconductors have been used in wide-ranging fields including communications,

16

S i A V A L A N C H E P H O T O D I O D E S

Product lineup

These modules consist of an APD, low-noise amplifier, and

bias power supply integrated in a compact package.

APD modules

Type Recommended wavelength Package Features

1Short wavelength type

Low-bias operation 200 to 650 nm Metal

Enhanced sensitivity in the UV to visible range

Low terminalcapacitance

320 to 650 nmMetal,

ceramic

2Near infrared type

Low-bias operation 600 to 800 nm

MetalHigh sensitivity in near infrared region and low bias voltage operation

Surface mount type Low-cost, miniature and thin package

Low temperature coeffi cient

600 to 800 nm MetalEasy voltage adjustment due to low tem-perature coeffi cient of bias voltage

900 nm band, low terminal capacitance

800 to 1000 nm Metal Enhanced sensitivity in 900 nm band

1000 nm band/high sensitivity

900 to 1150 nm Metal Enhanced sensitivity in 1000 nm band

Response speed (Hz)

DC

Sens

itivi

ty (

V/W

)

100 10 k10 1 k 100 k 1 M 10 M 100 M 1 G103

104

105

106

107

108

109

DC to 100 kHz-1.5 × 108 V/W

50 kHz to 1 GHz2.5 × 105 V/W

4 types are available accordingto photosensitive area size and

wavelength range.4 kHz to 100 MHz

-1 × 104 V/W

DC to 10 MHz1.5 × 106 V/W

C12703-01

C12703

C5658

C12702 series

DC to 10 MHz2.5 × 106 to 1.25 × 107 V/W

C10508-01

KACCB0115EF

Sensitivity vs. response speed (APD modules)Type Features

Standard typeContains a near infrared or short wavelength type APD. FC/SMA fi ber adapters are also provided.

High-sensitivity type High gain type for detection under low illuminance

High-stability typeDigital temperature-compensation, high-stability APD module

High-speed typeOperates over a wide range of frequencies(up to 1 GHz)

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M U L T I - P I X E L P H O T O N C O U N T E R S[MPPC®]Compact opto-semiconductors with excellent photon-counting capabilityThe MPPC (multi-pixel photon counter) is a new type of photon-counting device made up of multiple APD (avalanche photodiode) pixels operated in Geiger mode. The MPPC is essentially an opto-semiconductor device with excellent photon-counting capability and which also possesses great advantages such as low-voltage operation and insensitivity to magnetic fi elds.

Features Major applications

Excellent photon-counting capability

High gain: 105 to 106

Low-bias (below 100 V) operation

Insensitive to magnetic fi elds

Simple readout-circuit operation

Low afterpulse (compared to our previous products)

Excellent time resolution

Room temperature operation

Fluorescence analysis, fl uorescence lifetime measurement

Biological fl ow cytometry

Confocal microscopes

Biochemical sensors

Bioluminescence analysis

Single molecule detection

PET

Scintillation light detection

1 For precision measurment (single type)

2 MPPC array

3 MPPC module

What is the MPPC ?The MPPC is a kind of so-called Si-PM (silicon photomultiplier) device. It is a photon-counting device consisting of multiple APD pixels operating in Geiger mode. Each APD pixel of the MPPC outputs a pulse signal when it detects one photon. The signal output from the MPPC is the total sum of the outputs from all APD pixels. The MPPC offers the high performance needed in photon counting and is used in diverse applications for detecting- extremely weak light at the photon-counting level.

RR

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18

M U L T I - P I X E L P H O T O N C O U N T E R S

Product lineup

Type Features

1For precision measurement (single type)

These are low-noise MPPCs for precision photometry. They feature high photon detection ef-fi ciency, low crosstalk, and low afterpulse. They are suitable for precision measurement, such as fl ow cytometry, DNA sequencer, laser microscope, and fl uorescence measurement, that requires low noise characteristics.They are available in two types: ceramic package and surface mount.

2 MPPC arrayThese are MPPCs with several MPPC chips arranged in an array. The CSP (Chip Size Package) type MPPCs can be tiled together to fabricate large-area devices and can be coupled effi ciently to scintillators or the like.

3 MPPC module

MPPC modules are optical measurement modules with built-in MPPC. They can measure light over a wide range (10 orders of magnitude) from the photon counting region to nW (nanowatt) region. They are available in two types: non-cooled modules, which are equipped with a tem-perature compensation function for stable measurement, and cooled modules, which feature low dark count.

Measurable light level ranges of MPPC modules (product examples)

KACCC0769EA

100 102 104 106 108 1010 1012

10-18 10-15 10-9 10-610-12

(λ=450 nm)

Analog output

type

Number of incident photons (cps)

Incident light level (W)

Digital output

type

Non-cooled type/50 μm pitch

Non-cooled type/10 μm pitch

TE-cooled type/50 μm pitch

TE-cooled type/50 μm

TE-cooled type/single pixel (fiber coupling type)

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19

Features Major applications

P H O T O I C[Photo IC]Highly functional devices integrating photodiodes with signal processing circuitsThe photo IC is a light receiver element with various functions. It integrates a photosensitive element and a signal process-ing circuit into one package.

1 Schmitt trigger circuit photo IC

6 Photo IC for encoder,Encoder module

7 Photo IC for optical switch

9 Phototransistor

8 Photo IC forlaser beamsynchronousdetection

4 Color sensor

5 Photo IC for optical link

2 Light modulation photo IC 3 Illuminance sensor

Small and lightweight

Highly resistant to noise from electromagnetic induction

High reliability

Offers custom designs for producing optical

sensors to meet specifi c applications.

Merges IC design technology, CMOS circuit

technology, optical device technology, and

packaging technology.

Allows the fabrication of subminiature de-

vices that integrate multiple functions.

Paper detection in offi ce machines (copier, fax machines, etc.)

Optical switch

Light dimmers for liquid crystal panels and large-screen TV, etc.

Color adjustment for display

Plastic optical fi ber communications

Encoder

HAMAMATSU photo IC technology

Simplified external circuitreduces the total cost.

External circuit Minimum hardware Minimum software

Minimizes digital noise.

Responds to sophisticated needs. Delivers high linearity, low noise, and wide dynamic range.

Makes it easy to use photo IC. Simplifies externalinput/output terminals.

Provides spectral responsecharacteristics, etc. optimizedfor specific needs.

Interface

A/D converterAnalog signalprocessing circuit

Digital signalprocessing

circuit

Photosensor

Photo IC

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20

P H O T O I C

Product lineup

DigitalUses a 4-element photodiode that can be used to easily confi g-ure an encoder with 2-phase digital output

6Photo IC for encoder,Encoder module

Type Output Features

Digital

Digital

Analog/Digital

Digital

Digital (receiver photo IC)

Digital

Digital

Analog

Photo IC integrates a photodiode, amplifi er, Schmitt trigger cir-cuit and output transistor, etc. into one chip

Employs synchronous optical detection to ensure stable output even under fl uctuating background light

Has spectral response characteristics close to human visual sensitivity

Has sensitivity to red, green and blue light

Photo IC transmitters and receivers for plastic optical fi ber com-munications

Has functions needed for industrial optical switches

For detecting laser beam print-start timing in laser printers and digital copiers

Amplifi es the photocurrent generated by input light. Allows a larger current to be drawn even from a small active area when compared to photodiodes.

Hamamatsu photo ICs are widely used for many different needs.

1Schmitt trigger circuit photo IC

2 Light modulation photo IC

3 Illuminance sensor

4 Color sensor

5Photo IC for optical link (POF)

7 Photo IC for optical switch

8Photo IC for laser beamsynchronous detection

9 Phototransistor

Photo IC forgeneral use

Photo IC forspecial use

Application examples

Air conditioner: light/dark sensing

Station ticket gate: passenger sensing

Illuminance sensor (Photo IC diode)

Clocks: light/dark sensing

Illuminance sensor (Photo IC diode)

Light modulation photo IC

Factories

Detection of product passage

Light modulation photo IC,Photo IC for optical switch

Safety devices

Light modulation photo IC,Photo IC for optical switch

Digital copiers /Multifunctional digital office machines

Paper size detection

Light modulation photo IC

Laser origin point detection for writing on print drum

Photo IC for laser beam synchronous detection

Signal transmissionTransmitter/Receiver photo IC for optical link

Remaining paper amount detection

Light modulation photo IC

Display backlight brightness adjustment

Illuminance sensor (Photo IC diode)

Mirror and lens positioning

Photo IC for encoder/Encoder module

Color toner contrast detection

Digital color sensor

Sorter leftover paper detection

Light modulation photo IC

Illuminance sensor (Photo IC diode)

Illuminance sensor (Photo IC diode)

Vending machine: light/dark sensing

Large screen TV: light/dark sensing

Illuminance sensor (Photo IC diode)

Illuminance sensor (Photo IC diode)

Auto lighting equipment: light/dark sensing Auto hand washer: hand sensing

Boiler: flame monitor

Light modulation photo IC

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0.1 eV

InGaAs linear imagesensor (long wavelength type)

1 eV10 eV100 eV1 keV10 keV100 keV

0.01 nm 0.1 nm 1 nm 10 nm 100 nm 1 μm 10 μm

1 MeV

InGaAs linear/areaimage sensor

NMOS linearimage sensor

CMOS linearimage sensor

CMOS areaimage sensor

Distance image sensor

Back-thinned CCD

Photon energy

Wavelength

Front-illuminated CCDFront-illuminated CCD (windowless type)

NMOS linear image sensor(windowless type)

CCD for X-ray imaging

Back-thinned CCD (windowless type)

Flat panel sensor

Wavelength [nm] =1240

Photon energy [eV]

21

Features Major applications

Example of detectable energy level and spectral response range

I M A G E S E N S O R S[Image sensors]A wide lineup of image sensors suitable for spectroscopy and measurement applicationsHamamatsu provides various types of image sensors that cover a wide energy level and spectral response range from near infrared (NIR) at 2.6 μm through visible, ultraviolet, vacuum ultraviolet (VUV) down to soft X-rays and hard X-rays at several hundred keV.

1 Front-illuminated CCD area/linear image sensor2 Back-thinned CCD area/linear image sensor

3 NMOS linear image sensor

7 Photodiode array with amplifi er 8 X-ray image sensor

4 CMOS linear/areaimage sensor

5 Distance linear/area image sensor 6 InGaAs linear/area image sensor

A wide lineup covering different wavelengths

KMPDC0105EH

Spectrophotometry

Scientifi c measurement

NIR spectrometry

X-ray imaging

Obstacle detection

Security

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22

I M A G E S E N S O R S

Product lineup

Spectral response (typical example)

KMPDB0276EB

Qua

ntum

eff

icie

ncy

(%)

Wavelength (nm)

(Typ. Ta=25 °C)

0200 400 600 800 1000 1200

10

20

30

40

50

60

70

80

90

100

Back-thinnedtype

Front-illuminated type

Front-illuminated type(NIR high sensitivity)

Back-thinned type(UV high sensitivity)

Wavelength (μm)

Phot

osen

sitiv

ity (

A/W

)

0.5 1.0 1.5 2.0 2.5 3.00

0.5

1.0

1.5(Typ.)

G9201 to G9204/G9211 to G9214/G9494 series

G9206-256W G9207-256W

G9205-256WG9208-256W

G11135/G11620 series

Td=25 °CTd=-10 °CTd=-20 °C

KMIRB0068EC

CCD area image sensor (without window) InGaAs linear image sensor

Product name Features Lineup

1Front-illuminatedCCD area/linear image sensor

Image sensors with low dark current and low noise.

For spectrophotometry For scientifi c measurement

2Back-thinnedCCD area/linear image sensor

Image sensors delivering high quantum effi ciency from visible to VUV region

For spectrophotometry For scientifi c measurement TDI-CCD area image sensor Fully-depleted back-illuminated CCD area image sensor

3 NMOS linear image sensorImage sensors with high UV-sensitivity and excel-lent output linearity, making them suitable for pre-cision photometry

Current output type (standard type) Current output type (infrared-enhanced type) Voltage output type

4 CMOS linear/area image sensor

Image sensors integrated with signal process-ing circuits, making them suitable for applications where low power consumption and downsizing of the detector unit are essential

Variable integration time type High-speed readout type High sensitivity type Digital output type SXGA/VGA format type

5 Distance linear/area image sensorImage sensors designed to measure the distance to an object by TOF method.

Distance linear image sensor Distance area image sensor

6 InGaAs linear/area image sensorImage sensors for near infrared region. Built-in CMOS IC allows easy operation.

For NIR spectrometry For DWDM monitor For NIR image detection

7 Photodiode array with amplifi erSensors combining a Si photodiode array and a signal processing IC. A long, narrow image sensor can also be confi gured by arranging multiple arrays in a row.

Long and narrow area type For non-destructive inspection

8 X-ray image sensorImage sensors and photodiode arrays delivering high quality X-ray images by coupling FOS (FOP coated with X-ray scintillator) or phosphor sheet.

CCD/CMOS area image sensors for dental imaging

TDI-CCD area image sensors Photodiode arrays with amplifi er for non-destructive inspection

Near-infrared imaging of color-painted wooden air-plane toy makes visible the cracks, traces of resin, and characters underneath the paint layer, etc.

Visible NIR

CT O P IInGaAs area image sensor (640 × 512 pixels) for easily capturing a near infrared image

The InGaAs area image sensor is a sensor for easily capturing a near

infrared image. An InGaAs photodiode chip is connected with ROIC,

and then each channel is readout from a shift-register. The ROIC

incorporates a timing generator, so video output can be obtained by

simple digital input.

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23

Major applications

Product lineup

Type Pixel size(μm)

Active area[(H) × (V) cm]

Frame rate (frames/s) Features

100 12 × 12 17 to 280

100 10 × 7 30 to 265High-speed, high-sensitivity type suitable for CT imaging and panoramic imaging.Supplied without case for assembly into equipment.

100 15 × 0.6 300

505 × 5 to 12 × 12

1 to 4Suitable for imaging of low-energy X-rays and com-patible with X-ray sources with 17 keV Mo target

505 × 5 to 12 × 12

3Active pixel sensor for low-noise readout and com-patible with X-ray below 18 keV

F L A T P A N E L S E N S O R S[Flat panel sensors]Capturing high-resolution, high-quality X-ray images in real-timeFlat panel sensors are digital X-ray image sensors capable of acquiring high-resolution, high-quality X-ray images in real-time. A fl at panel sensor is made up of a sensor board and a control board, designed for a thin, compact confi guration.

CT imaging/panoramic imaging, biochemical imaging, etc.

Radiography

X-ray diffraction

Non-destructive inspection

1For radiography (rotational type)

2For radiography (biochemical imaging)

3For radiography (X-ray diffraction)

2 For radiography (biochemical imaging) 3 For radiography (X-ray diffraction)

1 For radiography (rotational type)

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24

Product lineup

Type Lineup

Visible light cut-off type suitable for detection of near infrared light

High IR-sensitivity

Suitable for detection of microscopic spot light such as from a laser diode

Long, narrow type with active area length of 30 mm or more

High-speed response, low dark current, superior position-detection characteristic

Excellent position resolution

Wide spectral response range

High-speed response

Simultaneously detects light intensity and center-of-gravity position

of a spot light

High reliability

Position and angle sensing

Distortion and vibration measurements

Optical rangefi nders

Optical switches

Precise position measurements such as laser

displacement meters

1 One-dimensional PSD

2 Two-dimensional PSD

P O S I T I O N S E N S I T I V E D E T E C T O R S[PSD (position sensitive detectors)]Light spot position sensors used for distance and angle measurementsA PSD is a non-discrete type position photosensor that makes use of photodiode surface resistance. It provides position data as a continuous electrical signal and offers high position resolution, high-speed response, and high reliability.

1 One-dimensional PSD 2 Two-dimensional PSD

Features Major applications

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25

I N F R A R E D D E T E C T O R S[Infrared detectors]Product lineup to meet various needs for spectral response rangeInfrared detectors are utilized in a wide range of fi elds such as measurement, chemical analysis, industry, agriculture, medicine, physics and chemistry, communications, and aerospace applications.

KIRDB0259EG

1 InGaAs PIN photodiode

5 Two-color detector

4 Thermopile detector

6 Photon drag detector

2 PbS/PbSe

photoconductive

detector

3 InSb photoconductive detector/photovoltaic detector,

InAsSb/InAs photovoltaic detector,

MCT (HgCdTe) photoconductive detector/photovoltaic detector

■ Spectral response (typical example)

Wavelength (μm)

D*

(cm

· H

z1/2/W

)

108

109

1010

1011

1012

1013

1014

1 2 30 4 5 6 7 8 9 17 18 19 20 21 22 23 24 2510 11 12 13 14 15 16

MCT (-60 °C)

PbSe (-20 °C)

InAsSb (-30 °C)

InSb (-196 °C)

PbSe (25 °C)

MCT (-196 °C)

PbS (-20 °C)

PbS (25 °C)

Si (25 °C)

MCT (-196 °C) MCT (-196 °C)

Thermopile

InAs (-196 °C)

InAsSb (-196 °C)

Short wavelength enhanced type InGaAs (25 °C)

Long wavelength type InGaAs (-196 °C)

Long wavelength type InGaAs (25 °C)

Photovoltaic detectorsPhotoconductive detectorsSi thermal detectors

InAsSb for 8 μm Band (-30 ˚C)

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26

Product name Spectral response range Features Major application

1 InGaAs PIN photodiode

0.5 to 1.7 μm High-speed response Various types of active areas, arrays and packages available TE-cooled type available

Optical fi ber communications Optical power meter Gas analyzer Water content analyzer NIR (near infrared) photometry

0.9 to 1.7 μm

0.9 to 1.9 μm

0.9 to 2.1 μm

0.9 to 2.6 μm

2 PbS photoconductive detector 1 to 3.2 μm

High detectivity Can be used at room temperatures in a wide range of applications such as radiation ther-mometers and fl ame monitors

Radiation thermometer Flame monitors Water content analyzer Food ingredient analysis Spectrophotometers

2 PbSe photoconductive detector 1 to 5.2 μm

Detects wavelengths up to 5.2 μm Offers higher response speed at room tempera-tures compared to other detectors used in the same wavelength range. Suitable for a wide range of applications such as gas analyzers.

Radiation thermometer Flame monitors Gas analyzer Film thickness gauge

3 InSb photoconductive detector 1 to 6.7 μm Detects wavelengths up to around 6.5 μm, with high sensitivity over long periods due to thermoelectric cooling

Environment measurements(gas analysis, etc.) Radiation thermometer (5 μm band) FTIR IR laser detection

3 InSb photovoltaic detector 1 to 5.5 μm

Suitable for CO2 and SOx (SO, SO2, SO3) gas analysis due to high sensitivity in the 3 to 5 μm band

Covers a spectral response range close to PbSe but offers higher response speed

Radiation thermometer Thermal imaging Remote sensing Gas analyzer FTIR Spectrophotometers3 InAsSb photovoltaic detector 1 to 8.3 μm

Infrared detector in the 5 μm or 8 μm spec-tral band, with high sensitivity and high reli-ability

3 InAs photovoltaic detector 1 to 3.8 μm Covers a spectral response range close to PbS but offers higher response speed

Gas analyzer Infrared radiation measurement Infrared spectrophotometry FTIR

3MCT (HgCdTe) photoconductivedetector

1 to 25 μm

Different types of spectral response ranges are provided by changing the composition ratio of HgTe and CdTe.

Available with thermoelectric coolers, cryo-genic dewars

Thermal imaging Remote sensing

FTIR CO2 laser detection Spectrophotometers

3MCT (HgCdTe) photovoltaic detector

1 to 13.5 μm High-speed response Low noise

FTIR Thermal camera Radiation thermometer Spectrophotometers Environmental measurement Astronomy and space observation

4 Thermopile detector 1 to 25 μm Sensors that generate thermoelectromotive force in proportion to the energy level of incident light

Gas analysis CO2 concentration measurement

5Two-colordetector

Si + PbS 0.2 to 3 μm Wide spectral response range from UV to IR Two-color detectors incorporate an infrared-trans-mitting Si photodiode mounted over a PbS detec-tor, PbSe detector or InGaAs PIN photodiode

Spectrophotometers Laser monitors Flame monitors Radiation thermometer

Si + PbSe 0.2 to 4.85 μm

Si + InGaAs 0.32 to 2.55 μm

InGaAs + InGaAs 0.9 to 2.55 μm A sensor made of two vertically stacked InGaAs PIN photodiodes with different spectral ranges

6 Photon drag detector 10 μm

High-speed detectors with high sensitivity in 10 μm band (for CO2 laser detection)

Room temperature operation with high- speed response

CO2 laser detection Infrared detection

Product lineupI N F R A R E D D E T E C T O R S

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27

Major applications

Product lineup

Type Features

Si photodiode with a fi lter that corrects the spectral range to have sensitivity only in the visible range

Photo ICs with spectral response characteristics close to human visual sensitivity

Compound semiconductor photosensor that delivers spectral sensitivity close to the human eye without using any fi lters

Exposure meter, illuminometer

Cellular phone backlight dimmer

Energy-saving sensor for large-screen TV, etc.

Light dimmers for liquid crystal panels

Automatic lighting system

Various types of light level measurement

2 Si photodiode

1 Illuminance sensor

3 GaAsP photodiode

V I S I B L E L I G H T S E N S O R S[Visible light sensors]Spectral response close to that of the human eyeVisible light sensors are broadly used as illuminance sensors.

2 Si photodiode 3 GaAsP photodiode

1 Illuminance sensor

0.1

0.2

0.3

0.4

0.5

0.7

0.9

0.6

0.8

1.0

0200 400 600 800

Wavelength (nm)

1000 1200

Rela

tive

sens

itivi

ty

(Typ. Ta=25 °C, VR=5 V)

Human eye sensitivity

KPICB0121EA

■ Spectral response example (photo IC diode)

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28

Major applications

Product lineup

Type Features

These are color sensors designed to respectively detect monochromatic colors of blue (λp=460 nm), green (λp=540 nm) and red (λp=660 nm).

These are color sensors molded into a plastic package having a 3-channel (RGB) photodiode sen-sitive to the blue, green and red regions of the spectrum.

These are color sensors sensitive to red, green, and blue light.Detected signals are output serially as digital data.

These modules are used for monitoring of LCD backlight colors and for simple color detection.

White balance adjustment

Color control, color identifi cation

Portable or mobile equipment

RGB-LCD backlight monitors

Light source color temperature detection

Various types of color detection

1 Si photodiode

2 RGB color photodiode

3 Digital color sensor

4 Color sensor module

C O L O R S E N S O R S[Color sensors]Small sensor for LCD monitoring and simple color detectionHamamatsu provides single-color sensors that are sensitive to red, green and blue light, as well as RGB color sensors.

1 Si photodiode 2 RGB color photodiode

3 Digital color sensor

4 Color sensor module

Wavelength (nm)

Phot

osen

sitiv

ity (

A/W

)

400 7006003000

0.10

0.20

0.05

0.15

0.25

500 800

(Typ. Ta=25 °C)

Green

Red

Blue

KSPDB0246EA

■ Spectral response example (RGB color photodiode)

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29

Product lineup

L I G H T E M I T T I N G D I O D E S[LED]Infrared LED and red LED with high outputCompared to laser diodes, LEDs offer advantages such as lower cost and longer life. Hamamatsu has developed and produced various types of LEDs that enhance emission effi ciency via a high output power LED chip mounted on a refl ective package base, which makes the light emitted from the chip edges refl ect towards the front.

5 For FSO (free space optics)

1 For optical switch

6 For optical link 7 SIP type 8 Bullet type

3 For moisture detection

4 CO2 detection

2 For optical encoder

High output

Available in various types of packages

Optical switch

Encoder

Light source for moisture meter

Optical rangefi nder

Optical fi ber communications

FSO

Features Major applications

Type Features

1 For optical switchInfrared

Refl ector type High output power

Ball-lens type Narrow directivity, uniform emission pattern

Peripheral electrode type Shadow of wire does not appear in emission pattern.

Red Refl ector type High output power

2 For optical encoderOptimized lens shape allows these LEDs to emit highly collimated beams.High reliability is obtained since these LEDs do not use a current confi nement structure chip.

3 For moisture detection Long wavelength LED with peak emission wavelengths at 1.45 μm

4 CO2 detection Middle infrared LED with peak emission wavelength at 4.3 μm

5 For FSOHigh-speed, high output power LED.Transmitter/receiver module for VICS (Vehicle Information and Communication System) is also available.

6 For optical link These LEDs are suitable for 50 Mbps and 125 Mbps optical link.

7 SIP type These LEDs are high-power LEDs molded into a miniature, clear plastic package.

8 Bullet type These LEDs are high-power LEDs encapsulated in a bullet-shaped package.

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30

Product lineup

Type Features

High-speed photodiodes available in a variety of packages (ROSA, metal, receptacle, pigtail).

Hamamatsu provides large area photodiodes and high-power LEDs, as well as a light emitter/receiver module designed for vehicle-mounted VICS (Vehicle Information and Communication System).

These devices are used to monitor laser diodes or DWDM.

These are light receivers and emitters suitable for medium to low speed optical links.

1For high-speed optical fi ber communications

2 For optical data link

3 For FSO

4For optical power and wavelength monitor

O P T I C A L C O M M U N I C A T I O N D E V I C E S[Optical communication devices]High-speed devices for optical fi ber communications and FSO (free space optics)Hamamatsu provides high-quality receiver/transmitter devices designed for long-range, high-speed communications and short-range, low-speed communications, as well as FSO.

1 For high-speed optical fi ber communications

2 For optical data link

3 For FSO 4 For optical power and wavelength monitor

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31

M I N I - S P E C T R O M E T E R S[Mini-spectrometers]Integrating an optical system, image sensor and circuitHamamatsu offers a full line of mini-spectrometers that are integrated with an optical system, image sensor, and circuit by fabricating the grating section using micromachining techniques.

Features

Evaluation of light source characteristics

Taste analyzers

Water content measurement

Film thickness measurement

Semiconductor process control

Low-light-level measurement such as fl uorescence

measurement

Installation into measurement equipment

2 TM series 3 RC series 5 MS series

High throughput due to transmission grating made of quartz

Highly accurate optical characteristics

No external power supply required:

Uses USB bus power (Non-cooled type, excluding CCD type)

Low noise (Cooled type)

Compact design for easy assembly

Contains a wavelength conversion factor

(Data supplied only with OEM models)

1 TG series

4 FT series

Major applications

Micro-spectrometer

CT O P IUltra-compact (fi nger-tip size) spectrometer head integrating MEMS and image sensor technologies

Micro-spectrometers are ultra-compact spectrometer heads developed based on our MEMS and image sen-

sor technologies. The adoption of a newly designed optical system has achieved a remarkably small size,

less than half the volume of the previous mini-spectrometer MS series (C10988MA-01). This product is suit-

able for integration into a variety of devices, such as integration into printers and hand-held color monitor-

ing devices that require color management. It is also suitable for applications that collaborate with portable

devices, such as smartphones and tablets.

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32

USBcable

Optical fiber forlight input

PC

Mini-spectrometer

Quartz cell

Light source

Light to be measured is guided into the entrance port through an optical

fi ber and the spectrum measured with the built-in image sensor is output

through the USB port to a PC for data acquisition. There are no moving

parts inside the unit so stable measurements are obtained at all times. An

optical fi ber that guides light input from external sources allows a fl exible

measurement setup.

Connection example (transmission light measurement)

KACCC0524EA

M I N I - S P E C T R O M E T E R S

Product lineup

Series TypeSpectral response

rangeSpectral resolution

Max.Internal image sensor

1 TG series

High sensitivity C9404CA200 to 400 nm

3 nm Back-thinned typeCCD image sensorHigh resolution C9404CAH 1 nm*

IR-enhanced C9405CB 500 to 1100 nm5 nm

(550 to 900 nm)IR-enhanced back-thinned

CCD image sensor

High resolution C11713CA 500 to 600 nm0.3 nm*

Back-thinned typeCCD image sensor

High resolution C11714CB 790 to 920 nmIR-enhanced back-thinned

CCD image sensor

Near IR C11482GA900 to 1700 nm

7 nm

InGaAslinear image sensor

Near IR (cooled) C9913GC 7 nm

Near IR (cooled) C9914GB 1100 to 2200 nm 8 nm

Near IR (cooled) C11118GA 900 to 2550 nm 20 nm

2 TM series

High sensitivity C10082CA

200 to 800 nm

6 nm Back-thinned typeCCD image sensorHigh resolution C10082CAH 1 nm*

Wide dynamic range C10082MD 6 nmCMOS

linear image sensor

High sensitivity C10083CA

320 to 1000 nm

8 nm(320 to 900 nm) Back-thinned type

CCD image sensorHigh resolution C10083CAH

1 nm*(320 to 900 nm)

Wide dynamic range C10083MD 8 nmCMOS

linear image sensor

Trigger-compatible C11697MB 8 nmHigh-sensitivity CMOSlinear image sensor

3 RC series

Compact C11007MA340 to 780 nm 9 nm

CMOSlinear image sensor

Compact (for installation in devices) C11009MA

Compact C11008MA640 to 1050 nm 8 nm

Compact (for installation in devices) C11010MA

4 FT series Compact, thin C13053MA 500 to 1100 nm 3.5 nmHigh sensitivity

CMOS linear image sensor

5 MS seriesUltra-compact (for installation in devices) C10988MA-01 340 to 750 nm 14 nm CMOS

linear image sensorUltra-compact (for installation in devices) C11708MA 640 to 1050 nm 20 nm

* Typ.

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33

O P T O - S E M I C O N D U C T O R M O D U L E S[Opto-semiconductor modules]Modules using opto-semiconductors / Circuits for operating opto-semiconductorsHamamatsu provides a wide variety of opto-semiconductor modules developed by our own module technology capable of extracting the maximum performance from opto-semiconductors. Custom products are also available by request. Please feel free to consult us.

Technologies that create opto-semiconductor modules

9 Flame eye

1 MPPC module

5 Photodiode module6 Photosensor amplifi er

11 Sunlight sensor 13 Multichannel detector head

12 Infrared detector module with preamp

4 Mini-spectrometer

3 Radiation detector module

8 PSD signalprocessing circuit

7 PSD module

10 RGB color sensor module

2 APD module

14 Peripheral product for image sensor

Photodiode, image sensor,

etc. AmpPhotosensor

LEDLD

Light emitter

Driver

Signal processing(analog/digital)

Opto-semiconductor module configuration example

Opto-semiconductor

Opto-semiconductor

Optical components (filter, lens, etc.)

Interface

Housing

Circuitry

●Our mounting technology combines compactness, high functionality, and low cost.

Optical technology●Optimal optical design for high-performance modules●Use of simulations

●High-precision micromachining●Helps make modular components smaller and modules more functional

MEMS* technology

Opto-semiconductor technology

Software technology

●Optimized for optical devices and applications●Supports high sensitivity, low noise, high speed, and multiple channels

Circuit technology Mounting technology

* Micro-electro-mechanical systems

●The detector, which is the heart of module, uses Hamamatsu opto-semiconductor, which have a long

track record for many years in the fields of analysis, measurement, automobiles, and consumer products.●Custom designs are available to achieve the features you want.

●The sample software makes swift evaluation possible.●USB, RS-232C, and other types of

interfaces are available.

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34

O P T O - S E M I C O N D U C T O R M O D U L E S

Product lineup

Products Features Application example

1 MPPC moduleMPPC modules are photon-counting modules that contain an MPPC capable of detecting extermely low-level light.

Fluorescence lifetime measurement Biological fl ow cytometry Bioluminescence analysis Low-light-level detection

2 APD moduleAPD modules are high-speed, high-sensitivity photodetectors us-ing an APD (avalanche photodiode).

Low-light-level detection Optical power meters Laser monitors

3 Radiation detector moduleThese modules incorporate a scintillator and MPPC and are designed to detect gamma-rays.

Environmental monitoring and mapping

Screening tasks

4 Mini-spectrometerThese compact spectrometers integrate an optical system, an image sensor, and a circuit.

Color monitoring Film thickness measurement Plastic sorting

5 Photodiode modulePhotodiode modules are high-precision photodetectors combining a photodiode and current-to-voltage conversion amp. Dedicated signal processing unit is also provided.

Precision photometry Light source power monitors Illuminometers, color difference meters

6 Photosensor amplifi erThese photosensor amplifi ers are current-to-voltage conver-sion amplifi ers for amplifying photocurrent with low noise.

Precision photometry Optical power meters Illuminometers

7 PSD modulePSD modules are high-precision position-detectors combining a PSD and current-to-voltage conversion amp. Dedicated signal processing unit is also provided.

Optical axis alignment Rangefi nder

3D measurement

8 PSD signal processing circuit These are signal processing circuits for evaluation of PSDs. Performance evaluation of PSD

9 Flame eyeThe fl ame eye is a sensor that monitors fl ames in oil boilers and heating equipment.

Flame detection in oil boilers and heaters

10 RGB color sensor module These modules have built-in RGB color sensor. RGB-LED backlight monitor for TFT-LCD

11 Sunlight sensorSunlight sensors detect the light level of sunlight and ambient light. A photodiode with superb linearity relative to the light level is built in a small case with a connector.

Ambient light detection Automatic lighting sensors

12 Infrared detector module with preamp These modules integrate an infrared detector and a preamp. Infrared detection

13 Multichannel detector head

Multichannel detector heads incorporate a driver circuit designed for various types of image sensors (CCD area image sensors, InGaAs linear image sensors, NMOS linear image sensors). Con-troller for multichannel detector head is also available.

Spectrophotometer Raman spectroscopy Semiconductor inspection Radiation thermometry

14Peripheral product forimage sensor

Driver circuit and pulse generator that are designed to match the CCD image sensor and CMOS/NMOS/InGaAs linear image sensor types are provided.

Multichannel spectrophotometry

CT O P ISubminiature, low power consumption MEMS mirrors

We provide miniature electromagnetic mirrors that incorporate our

unique MEMS technology. Within a magnetic fi eld generated by the

magnet, electrical current fl owing in the coil surrounding the mirror

produces a Lorentz force based on Fleming’s rule that drives the

mirror. Hamamatsu MEMS mirrors offer a wide optical deflection

angle and high mirror refl ectivity as well as low power consump-

tion.

Optical principle

Incidentlaser Force

Current

Current

ForceMagneticfieldMagnet

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35

Factory/Research laboratory/Domestic sales office

Main factory (Ichino) Mitsue factory Shingai factory

Sendaisales office

Tokyo branch office

Tsukuba labolatoryTsukuba sales office

Osakasales officeNishinihon

sales office

Opto-semiconductors : Main factory (Ichino), Mitsue factory,Shingai factory

Electron tube products : Toyooka factory, Tenno glass works Beijing Hamamatsu photon techniques Ltd. (China)

System products : Joko factory Laser products : Miyakoda factory

Factories

Central research laboratory Tsukuba research laboratory Industries development laboratory

Laboratories

Tokyo sales office Osaka sales office Chubu sales office Sendai sales office Tsukuba sales office Nishinihon sales office

Domestic sales offices

Toyooka factory

Central researchlaboratory

Industriesdevelopmentlaboratory

Miyakoda factory

Joko factory

Tenno glassworks JR Tokaido line

JR TokaidoShinkansen line

Tenryu Riverthe Sea of Enshu

Lake Sanaru Hamamatsustation

LakeHamana

Tomei express way

Hamamatsu IC

Hamamatsu nishi IC

Mikkabi IC

Main factory(Ichino)

Shingaifactory

Mitsuefactory

HeadquartersChubu sales office

Hamamatsu

Annual sales

3513979235

2654461518

4000090732

3675180937

4329892583

Entire company

Solid state division

2011

2013

2014

2009

2010

0 10000 20000 30000 40000 50000 800007000060000 90000 100000(million yen)

38137851082012

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36

Organization chart of solid state division

Bussiness Promotion

General Affairs

Management

Administration

Quality Control

Development ModuleThe 2nd Develop. Group

CMOS integrated circuitThe 3rd, 5th Develop. Group

SoftwareThe 1st Develop. Group

LED, NIR photodiode, optical communication deviceThe 11th Dept.

Compound semiconductor wafer processCompound Process Group

Infrared detectorThe 2nd Dept.

The 1st Mfg.

Si photodiode, Si APD, PSD, MPPC, SSDThe 30th Dept.

Si photodiode for X-ray detectionThe 3rd Dept.The 2nd Mfg.

Photo IC, Si photodiode, PSD, LED (plastic package)The 36th Dept.The 3rd Mfg.

Mass product assemblyThe 1st Assembly GroupShingai Mfg.

Si wafer processProcess Production GroupSi Wafer Process

MEMS products, SLMThe 51st Dept.The 7th Mfg.

Linear image sensorThe 41st Dept.

Area image sensorThe 34th Dept.

Circuit for image sensorThe 46th Dept.

The 4th Mfg.

Equipment and machinery engineeringAssembly mgt Group

Equipment and machinery engineeringProcess mgt Group

Facility management and maintenanceFacility mgt Group

Production headquarter

Photosensor moduleThe 32nd Dept.

Light measurement module & unitThe 29th Dept.The 5th Mfg.

Flat panel sensorThe 45th Dept.

X-ray image sensorThe 44th Dept.The 6th Mfg.

Assembly, inspectionThe 1st Assembly Group

Production technology, equipment technologyProduction Technology GroupMitsue Mfg.

MEMS processMEMS Process Group

MEMS Develop. GroupMEMS

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Main Products

Information in this catalogue isbelieved to be reliable. However,no responsibility is assumed forpossible inaccuracies or omissions.Specifications are subject tochange without notice. No patentrights are granted to any of thecircuits described herein.

© 2015 Hamamatsu Photonics K.K.

Quality, technology, and serviceare part of every product.

HAMAMATSU PHOTONICS K.K., Solid State Division1126-1, Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558, JapanTelephone: (81)53-434-3311, Fax: (81)53-434-5184

www.hamamatsu.com

Sales OfficesSales Offices

Cat. No. KOTH0001E15Mar. 2015 DNPrinted in Japan (2,500)

Japan:HAMAMATSU PHOTONICS K.K.325-6, Sunayama-cho, Naka-ku,Hamamatsu City, Shizuoka Pref. 430-8587, JapanTelephone: (81)53-452-2141, Fax: (81)53-456-7889E-mail: [email protected]

China:HAMAMATSU PHOTONICS (CHINA) Co., Ltd.Main Office1201 Tower B, Jiaming Center, 27 Dongsanhuan Beilu, Chaoyang District, 100020 Beijing, ChinaTelephone: (86)10-6586-6006, Fax: (86)10-6586-2866E-mail: [email protected]

Shanghai Branch4905 Wheelock Square, 1717 Nanjing Road West, Jingan District, 200040 Shanghai, ChinaTelephone: (86)21-6089-7018, Fax: (86)21-6089-7017

U.S.A.:HAMAMATSU CORPORATIONMain Office360 Foothill Road, Bridgewater, NJ 08807, U.S.A.Telephone: (1)908-231-0960, Fax: (1)908-231-1218E-mail: [email protected]

California Office2875 Moorpark Ave. San Jose, CA 95128, U.S.A.Telephone: (1)408-261-2022, Fax: (1)408-261-2522E-mail: [email protected]

Chicago Office4711 Golf Road, Suite 805, Skokie, IL 60076, U.S.A.Telephone: (1)847-725-6046, Fax: (1)847-825-2189E-mail: [email protected]

Boston Office20 Park Plaza, Suite 312, Boston, MA 02116, U.S.A.Telephone: (1)617-536-9900, Fax: (1)408-261-2522E-mail: [email protected]

United Kingdom:HAMAMATSU PHOTONICS UK LimitedMain Office2 Howard Court, 10 Tewin Road, Welwyn Garden City,Hertfordshire AL7 1BW, UKTelephone: (44)1707-294888, Fax: (44)1707-325777E-mail: [email protected]

South Africa Office:PO Box 1112, Buccleuch 2066, Johannesburg, South AfricaTelephone/Fax: (27)11-802-5505

France, Portugal, Belgium, Switzerland, Spain:HAMAMATSU PHOTONICS FRANCE S.A.R.L.Main Office19, Rue du Saule Trapu Parc du Moulin de Massy,91882 Massy Cedex, FranceTelephone: (33)1 69 53 71 00Fax: (33)1 69 53 71 10E-mail: [email protected]

Swiss OfficeDornacherplatz 7 4500 Solothurn, SwitzerlandTelephone: (41)32-625-60-60, Fax: (41)32-625-60-61E-mail: [email protected]

Belgian OfficeAxisparc Technology, rue Andre Dumont 7 1435Mont-Saint-Guibert, BelgiumTelephone: (32)10 45 63 34Fax: (32)10 45 63 67E-mail: [email protected]

Spanish OfficeC. Argenters, 4 edif 2 Parque Tecnológico del Vallés08290 Cerdanyola (Barcelona), SpainTelephone: (34)93 582 44 30Fax: (34)93 582 44 31E-mail: [email protected]

Germany, Denmark, The Netherlands, Poland:HAMAMATSU PHOTONICS DEUTSCHLAND GmbH.Main OfficeArzbergerstr. 10, D-82211 Herrsching am Ammersee, GermanyTelephone: (49)8152-375-0, Fax: (49)8152-265-8E-mail: [email protected]

Danish OfficeLautruphøj 1-3, DK-2750 Ballerup, DenmarkTelephone: (45)70-20-93-69, Fax: (45)44-20-99-10Email: [email protected]

Netherlands OfficeTelevisieweg 2, NL-1322 AC Almere, The NetherlandsTelephone: (31)36-5405384, Fax: (31)36-5244948E-mail: [email protected]

Poland Office02-525 Warsaw, 8 St. A. Boboli Str., PolandTelephone: (48)22-646-0016, Fax: (48)22-646-0018E-mail: [email protected]

North Europe and CIS:HAMAMATSU PHOTONICS NORDEN ABMain OfficeTorshamnsgatan 35 16440 Kista, SwedenTelephone: (46)8-509 031 00, Fax: (46)8-509 031 01E-mail: [email protected]

Russian Office11, Christoprudny Boulevard, Building 1, Office 114,101000, Moscow, RussiaTelephone: (7)495 258 85 18, Fax: (7)495 258 85 19E-mail: [email protected]

Italy:HAMAMATSU PHOTONICS ITALIA S.r.l.Main OfficeStrada della Moia, 1 int. 6, 20020 Arese (Milano), ItalyTelephone: (39)02-935-81-733, Fax: (39)02-935-81-741E-mail: [email protected]

Rome OfficeViale Cesare Pavese, 435, 00144 Roma, ItalyTelephone: (39)06-50513454, Fax: (39)06-50513460E-mail: [email protected]

Opto-semiconductorsSi photodiodesAPDMPPCPhoto ICImage sensorsPSDInfrared detectorsLEDOptical communication devicesAutomotive devicesX-ray flat panel sensorsMini-spectrometersOpto-semiconductor modules

Electron TubesPhotomultiplier TubesPhotomultiplier Tube ModulesMicrochannel PlatesImage IntensifiersXenon Lamps / Mercury Xenon LampsDeuterium LampsLight Source Applied ProductsLaser Applied ProductsMicrofocus X-ray SourcesX-ray Imaging Devices

Imaging and Processing SystemsCameras / Image Processing Measuring SystemsX-ray ProductsLife Science SystemsMedical SystemsSemiconductor Failure Analysis SystemsFPD / LED Characteristic Evaluation SystemsSpectroscopic and Optical Measurement Systems

Laser ProductsSemiconductor lasersApplied products of semiconductor lasersSolid state lasers

MPPC is the registered trademark of Hamamatsu Photonics K.K. (Japan, U.S.A, EU, Switzerland)