Optimal third-harmonic generation in an optical microcavity with χ(2) and χ(3)

nonlinearities

Ming Li,1 Chang-Ling Zou,2 Chun-Hua Dong,2 and Dao-Xin Dai1, ∗

1Centre for Optical and Electromagnetic Research,State Key Laboratory for Modern Optical Instrumentation,

College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China2Key Laboratory of Quantum Information, CAS,

University of Science and Technology of China, Hefei 230026, China

Third-harmonic generation can be realized via both χ(3) and cascaded χ(2) nonlinear processesin a triply-resonant microcavity. It is still unknown how these processes interfere with each otherand the optimization of the conversion efficiency still remains as a question. In this work, theinterplay between the direct third-harmonic generation and the cascaded process combining of thesecond-harmonic generation and the sum-frequency generation are investigated. It is found that theinterference effect between these two processes can be used to improve the conversion efficiency. Byoptimizing the cavity resonance and the external coupling conditions, the saturation of the nonlinearconversion is mitigated and the third-harmonic conversion efficiency is increased. A design rule isprovided for achieving efficient third-harmonic generation in an optical microcavity, which can begeneralized further to the high-order harmonic generations.

PACS numbers: 42.65.k, 42.82.m, 42.65.Ky

INTRODUCTION

Nonlinear photonics based on the third-order nonlin-ear process (χ(3)) can be used for various applicationsin classical and quantum fields [1–4]. Generally speak-ing, the efficiency of the third-order nonlinear process isvery low, due to the very weak χ(3) susceptibilities inmost materials. High-Q optical microcavities are oftenused to enhance the nonlinear interaction [5–8], becausethe optical mode is confined tightly and the density ofstate is greatly enhanced. During the last decades, χ(3)-assisted third-harmonic generation were studied theoret-ically [9] and realized experimentally in various typesof microcavities, including microdroplets [10, 11], silicatoroid/microsphere/microbottle [12–15], SiN microring[16], silicon photonic-crystal micro/nano-cavities [17] andmicrocavities with hybrid materials [18].

To enhance the efficiency of the third-harmonic gen-eration (THG), one should increase the nonlinear sus-ceptibility of the nonlinear processes, reduce the modevolume, optimize the modal overlap as well as increasethe quality factor of the microcavity [6]. For a given ma-terial system, the size and geometry of an optimal micro-cavity should be designed to satisfy the phase-matchingand maximize the mode overlap factor [17–22]. By us-ing the intermodal dispersion of higher-order modes forphase matching and optimizing these parameters, third-harmonic generation with a efficiency of 180% W−2 hasbeen observed on an integrated photonic chip [18]. Onthe other hand, one should notice that the quality factorof an microcavity is usually limited due to the fabricationimperfection and the material absorption, which builds abarrier to increase the efficiency of THG.

∗ dxdai@zju.edu.cn

Fortunately, the mechanism of cascading different non-linear processes provides a promising approach for engi-neering the nonlinear susceptibility of the material. Forexample, it has been investigated that effective χ(3) non-linear process can be constructed with low-order χ(2) pro-cess [23]. In a high-Q microcavity, multiple and cascadednonlinear processes with high efficiency can be observedsimultaneously. People have demonstrated the second-harmonic generation (SHG), sum-frequency generation(SFG), as well as THG could be observed simultane-ously under the multiple-resonant condition in a cavityby introducing materials with both χ(2) and χ(3) non-linearity, e.g., Lithium Niobate and Aluminum Nitride(AlN). The cascading of SHG and SFG (SHG-SFG) canalso convert photons from the fundamental to the third-harmonic frequency, which is equivalent to the directχ(3)-assisted THG (DTHG). Recently, the cascading ofχ(2) processes for achieving THG was observed experi-mentally in periodically-poled MgO : LiNbO3 cavity [23]and LiNbO3 microdisk [24]. The authors demonstratedthat the cascaded effect SHG-SFG in a high χ(2) cav-ity can exceed the essential DTHG based on the χ(3)

nonlinearity. Besides, people have also oberved DTHGaccompanied by Raman scattering and four-wave mixing[25–28], which increases the potential for multiple appli-cations. In addition to THG, some other cascaded non-linear processes in cavities have also been applied for therealization of frequency combs, broadband wavelengthconversion, quantum entanglement, etc [29–32].

Since the TH light can be generated by both processesof χ(3) and cascaded χ(2), it is interesting to understandhow these processes influence each other and which one isbetter to maximize the THG efficiency. In our previouswork, we have demonstrated that different nonlinear pro-cesses will interfere with each other [33]. Here, we studya system based on a microring resonator (MRR) in whichboth the processes of direct χ(3) and cascaded χ(2) are

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FIG. 1. THG in a microcavity. Schematic diagram of a micro-cavity coupled with a waveguide. The microcavity is drivenby a continuous laser on the fundamental mode a. In themicrocavity, a couples with b via SHG, a, b couple with c viaSFG, a couple with c via DTHG. The DTHG and cascadedSHG-SFG can both generate photons in the TH mode c. Theintrinsic and external decay rates of mode i are κi,0 and κi,1,respectively.

involved. The behavior of these processes and the inter-play between them are investigated quantitatively. Bothregimes with a low pump power and a high pump powerare investigated. It is shown that the interference hap-pens when the quality factor of the MRR approaches acritical value. The interference can be utilized to improvethe conversion efficiency. In particular, when operatingwith a high pump power, one should optimize the reso-nant frequencies and the external coupling ratio of theMRR to compensate the saturation effect for achieving amaximal conversion efficiency.

SYSTEM AND MODEL

Fig.1 schematically illustrates a triply-resonant micro-cavity coupled with a bus waveguide. The three resonantmodes are the fundamental (FM) mode a, the second-harmonic (SH) mode b and the third-harmonic (TH)mode c with frequency ωi,0 (i ∈ {a, b, c}). This cavityis formed by or filled with nonlinear materials that haveboth none-zero χ(2) and χ(3) nonlinear susceptibilities.The inset of Fig. 1 illustrates three possible nonlinear in-teractions in this cavity: (i) DTHG between a and c viathe intrinsic χ(3) nonlinearity. (ii) SHG between a and bvia the χ(2) nonlinearity. (iii) SFG between a, b and c viathe χ(2) nonlinearity. According to the phase-matchingcondition, the conservation of angular momentum quan-tum number should be satisfied, i.e., ma = mb/2 = mc/3.The cavity is driven by a continuous-wave laser with thefrequency ωa around the resonance ωa,0 of the fundamen-tal mode. The system Hamiltonian is given by

H = H0 +H(2) +H(3) +Hd, (1)

where H0 is the free Hamiltonian of the three modes,H(2) is the nonlinear interactions due to χ(2), H(3) is thenonlinear interaction due to χ(3), and Hd is the external

coherent driving to the fundamental mode. One has

H0 = ωa,0a†a+ ωb,0b

†b+ ωc,0c†c, (2)

H(2) = g22(a†2b+ a2b†) + g21(a†b†c+ abc†), (3)

H(3) = g3(a†3c+ a3c†), (4)

Hd = εa(aeiωat + a†e−iωat), (5)

where g3 is the single photon coupling strength of DTHG,g22 is the single photon coupling rate of SHG, g21 is thesingle photon coupling rate of SFG, εa =

√2κa,1Pp/~ωa

is the pump parameter with κa,1 and Pp being the exter-nal coupling rate and pump power, respectively.

For a rotational symmetric whispering gallery micro-cavity, the single photon coupling rate of the χ(2) and χ(3)

nonlinear processes can be calculated using the methodin Ref.[6, 34]. The typical values for a AlN MRR areg22,21/2π ∼ 105 Hz, g3/2π ∼ 10 Hz [19, 35, 36]. Specially,the values can be improved greatly in a Niobate Lithiummicrocavity with optimized fabrication and structures[37]. In this model, the self-phase modulation and cross-phase modulation effects are neglected, since these effectsonly shift the resonance frequencies at very high pumppowers. It is convenient to solve this problem in the ro-tating frame of ωaa

†a+ 2ωab†b+ 3ωac

†c to eliminate thehigh frequencies, and then the free Hamiltonian

H0 = δaa†a+ δbb

†b+ δcc†c, (6)

where δi = ωi,0−ωi (i ∈ {a, b, c}) represents the detuningof the resonant mode to the photon frequency. Follow-ing the Heisenberg-Langevin equation and the mean fieldapproximation, both the operators and mean field obeythe following form,

da

dt= αaa− i3g3a

†2c− i2g22a†b− ig21b

†c− iεa (7)

db

dt= αbb− ig22a

2 − ig21a†c (8)

dc

dt= αcc− ig3a

3 − ig21ab, (9)

where αi = −iδi − κi, κi = κi,0 + κi,1 with κi,0 andκi,1 being the intrinsic decay rate of the cavity and theexternal coupling rate between the cavity and waveguide.The intracavity photon amplitude of each mode at steadystate can be solved by setting da

dt = dbdt = dc

dt = 0. Usingthe input-output relationship for the microcavity cout +cin = −i

√2κc,1cs [38], the output power of the TH light

in the waveguide and the absolute conversion efficiencycan be calculated as

PTH = 2~ωcκc,1|cs|2, (10)

η = PTH/Pp, (11)

respectively. According to Eqs. (7-10), both the inter-nal nonlinear processes and the external coupling ratesshould be optimized to achieve the maximal conversionefficiency.

3

Weak-pump regime

To reveal the basic physical insight of this system, wefirst investigate the behavior of the system under a weakpump. In this regime, the conversion efficiency from thefundamental mode a to the harmonic modes b, c are veryweak. As a result, it is resonable to apply the non-depletion approximation on mode a, under which the in-tracavity photon number can be treated as a constantsince the backaction from the harmonic modes are negli-gible. The Hamiltonian of the simplified model reducesto

H = δbb†b+ δcc

†c+ g3|as|3(c+ c†)

+g22|as|2(b+ b†) + g21|as|(b†c+ bc†), (12)

where as = iεa/ (−iδa − κa) is the intracavity photonnumber amplitude of the mode a by neglecting the back-action from modes b and c. Since the phases of as andthe coupling strengths can be absorbed into the opera-tors b and c, we replace as by |as| in the Hamiltonian.The dynamics of the SH and TH modes is described as,

db

dt= (−iδb − κb)b− ig22|as|2 − ig21|as|c (13)

dc

dt= (−iδc − κc)c− ig3|as|3 − ig21|as|b. (14)

The intracavity photon amplitude of the TH mode canbe solved as

cs =ig3 − g21g22

αb

αc +g221αb|as|2

|as|3 ≈ (ig3

αc− g21g22

αbαc)|as|3. (15)

Here the first term in the bracket represents the contribu-tion of DTHG and the other term is due to the cascadedSHG-SFG process. It can be seen that both the directχ(3) and the cascaded χ(2) processes contribute to thegeneration the TH light. As an analog to g3, the effectivethird-order nonlinear coupling strength of the cascadedSHG-SFG process can be defined as −i g21g22αb

. Now, wecan judge which process dominates the generation of theTH light by directly comparing g3 and | g21g22αb

|. The cou-pling strength g3 and g2i depend on the mode volumeand the mode overlap, which is relevant to the size andgeometry of the optical cavity. For a given optical cav-ity, the effective coupling strength | g21g22αb

| scales inverselywith the decay rate and detuning of the SH mode b. Thehigher the quality factor of mode b, the stronger the ef-fective coupling strength. For zero detuning of mode b,| g21g22αb

| reduces to g21g22κb

. The critical quality factor Qcr,

at which g3 equals g21g22κb

, is given as

Qcr =ω

2

g3

g21g22. (16)

When Qb � Qcr, the cascaded SHG-SFG process is moreefficient than the DTHG process. In contrast, for lowquality factor Qb � Qcr, the DTHG process is dominant.Therefore, it is necessary to engineer the SH mode b ifan high-Q optical cavity is available.

(a)

(b) 0.1 1

0.1

1

10

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Pump power /mW

DTHGSHG-SFGCombined

-10 -5 0 5 10

0

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db/kb

DTHGSHG-SFGCombined

FIG. 2. Interference between DTHG and SHG-SFG process.(a) The intensity of the TH mode generated from three dif-ferent processes. (b) The relation between the normalizedintensity of the TH mode and the detuning of the SH mode.The intensities are normalized to that of the DTHG processwith PTH

i /PTHDTHG (i represents the intensity of the TH mode

from DTHG, SHG-SFG and the combined process). The pa-rameters used in the calculations are g3/2π = 10Hz, g2/2π =0.1MHz, κb/2π = 1GHz, δb = 0.5κb, κa,0/2π = 0.4×109Hz,κb,0 = 4κa,0, κc,0 = 10κa,0, δb = 0.5κb. All the three modesare critically coupled to the waveguide.

When the quality factor is close to Qcr, the interplaybetween DTHG and SHG-SFG should be taken into ac-count. Using the nonlinear coupling strengths demon-strated previously [18, 19], the Qcr for an AlN MRRis calculated around 2.0 × 105 when operating at thewavelength around 775 nm. This Q is achievable for theMRRs fabricated with the current fabrication technolo-gies. In Fig. 2(a), we plot the relationship between theintensity of the TH light and the pump power for DTHG,SHG-SFG and the combined process with the parametersg3/2π = 10 Hz, g2/2π = 0.1 MHz, κb/2π = 1 GHz andδb = 0.5κb. In this case, the efficiency of the DTHGand SHG-SFG are at the same order of magnitude. Asexpected, the efficiency of the combined process is nota direct summation of that of the cascaded SHG-SFGand DTHG process, which demonstrates the existence ofquantum interference between nonlinear frequency con-version processes. The interference is also shown inEq. (15), in which the contribution of each process is com-plex. Since the photon number in mode c is proportionalto |ig3 − g21g22

−iδb−κb|2, the value and sign of δb determines

the interference pattern and visibility.

The crucial factor that accounts for the interference isthe phase difference ∆θ between ig3 and − g21g22αb

. For

4

−π/2 < ∆θ < π/2, DTHG and cascaded SHG-SFGprocess interfere constructively and the efficiency canbe enhanced. Oppositely, the destructive interferencesuppresses the generation of the TH light. We can de-fine the effective third-order coupling strength geff

3 =ig3 − g21g22

−iδb−κbto describe the whole process. Fig. 2(b)

shows the relationship between the intensity of the THlight (normalized to the DTHG process) and the detun-ing of the SH mode. Extraordinarily, THG is not themost efficient for zero detuning of mode b, at which thecascaded χ(2)−χ(2) is the most efficient (Dashed Red linein Fig 2(b)). In the case shown in Fig. 2(b), the THG ef-ficiency can be even suppressed up to an order of magni-tude. Therefore, one must carefully control the detuningof the intermediate mode b to optimize the conversionefficiency.

Strong-pump regime

When the intracavity photon number of the pump in-

creases, the cooperativity of SHG CSHG =g222|as|

2

|αb|2 or

DTHG CDTHG =g23 |as|

4

|αc|2 approaches to unity. The non-

linear coupling induced changes of the decay rates of thecavity modes become significant. The down-conversionfrom the harmonic modes to the fundamental mode willsuppress the up-conversion. Non-depletion approxima-tion is not valid for large pump powers and the conver-sion efficiency saturates. The saturation effect has beenexperimentally observed for SHG [19] and theoreticallypredicted for THG [39]. In this situation, Eqs. (7)-(9)must be solved without approximation to analyze thebehavior of the system. Then, the intracavity photonamplitude of mode a can be derived as−g2

21

α∗b

−ig3 − g21g22α∗

b

α∗c +g221α∗

b|a|2

ig3 − g21g22αb

αc +g221αb|a|2|a|6 +

2g222

αb|a|2

(i3g3 −

2g21g22

αb+g21g22

α∗b

)ig3 − g21g22

αb

αc +g221αb|a|2|a|4 + αa

= iεa

(17)

and the amplitude of the harmonic modes are

c =ig3 − g21g22

αb

αc +g221αb|a|2

a3 (18)

b =i

αb

g22 + g21

ig3 − g21g22αb

αc +g221αb|a|2|a|2 a2. (19)

Equation (18) has the similar form as Eq. (15) with an

additional intensity dependentg221αb|a|2 term in the de-

nominator, which was neglected for weak pump powers.Also, the intracavity photon number in the fundamentalmode no longer scales linearly with the pump power withquite a portion of energy being converted to the harmonic

modes. By numerically solving Eqs. (17)-(18), the rela-tionship between the conversion efficiency and the pumppower Pp is plotted in Fig. 3(a). The blue, red and blacklines represent the conversion efficiency of the DTHG,SHG-SFG and the combined process, respectively. It canbe seen that the efficiency of THG from neither DTHGnor cascaded SHG-SFG no longer scale cubically with thepump power when the conversion efficiency is high. Dueto the saturation, not only the SHG is suppressed, butalso the SFG efficiency from mode a to c decreases. Be-cause g3 � g2, CTHG is much smaller than CSHG, the sat-uration of the cascaded SHG-SFG appears ahead of theDTHG along with the increase of the pump power. Theefficiency of cascaded SHG-SFG increases much slowerthan DTHG, which can be found by comparing the blueand red lines. At very high pump powers, the efficiencyof DTHG can even exceed that of the SHG-SFG.

Since the saturation behaviors of the direct χ(3) andthe cascaded χ(2) nonlinear processes are different, theircontributions to the whole process scale differently withthe pump power. The interference will be different forhigh pump powers. Fig. 3(b) shows the conversion effi-ciency against the detuning δb of the SH mode for differ-ent pump powers. As a consequence of the unsynchro-nized saturation effect of the cascaded SHG-SFG andDTHG processes, the interference fringe becomes lesspronounced. The maximal enhancement factor decreasesas the pump increases and the optimal detuning δb,m formaximum THG efficiency shifts to larger values when thepump increases (Fig. 3(c)). For very high values of thepump power, the individual DTHG is efficient enough.The presence of the SH mode and their coupling addnonlinear losses to the TH mode, thus reducing the con-version efficiency. In this case, tuning the SH mode offthe resonance is more favorable. Simultaneously, the THmode also add nonlinear loss to the SH mode and theSHG efficiency is also reduced.

To summarize briefly, the efficiency of THG is deter-mined in two ways in the high-pump regime. On theone hand, the generation of the TH photons via the cas-caded SHG-SFG process and the DTHG interfere witheach other. On the other hand, the cascaded SHG-SFGand DTHG process change the decay rates of the funda-mental and TH modes. The cavity modes experience anadditional nonlinear decay channel, with the total decayrate κ = κ0 + κ1 + κnl, which suppresses the nonlinearfrequency conversion. Since the saturation of these twoprocess are unsynchronized, the constructive interferenceis also destroyed.

OPTIMAL THIRD-HARMONIC GENERATION

In this section, we come to a more realistic question forpractical applications that what is the upper limit of theTHG efficiency and how to achieve that efficiency if thepump power and the intrinsic quality factor of the mi-crocavity are limited. In the above sections, we have ex-plicitly pointed out that the interference between DTHG

5

(a)

(b)1 10 100

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effi

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Pump power /mW

DTHGSHG-SFG

Total

-10 -5 0 5 10

0

1

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Non-depletionPump = 10 mWPump = 20 mWPump = 100 mW

No

rma

lize

d i

nte

ns

ity

db/kb

0 40 80 120 160

-8

-6

-4

-2

0

Pump power /mW

1

2

3

4

Max

imu

m i

nte

nsi

ty

Op

tim

al d

etu

nin

g d

b,m

/kb

(c)

FIG. 3. Saturation effects in TH light generation. (a) Rela-tion between the conversion efficiency from the fundamentalfrequency to the TH frequency for three different processes.The cascaded SHG-SFG saturates first when increasing thepump power. (b) Interference fringes for different pump pow-ers. The saturation of the SHG-SFG process destroys theconstructive interference significantly. (c) Optimal detuning(Blue line) of the SH mode for TH light generation and thecorresponding maximum enhancement factor (Orange line)over the DTHG process. When the pump increases, the op-timal detuning shifts to larger values and the constructiveinterference is destroyed. In the high-pump regime, THG isdominated by the DTHG process.

and cascaded SHG-SFG process can be used to improvethe THG efficiency with low pump powers. While oper-ating with high pump powers, the enhancement providedby the interference is weakened. Also, the decay rates orquality factors of the cavity mode decreases due to thenonlinear coupling [19, 40].

For experiments, several parameters are fixed due tothe limitations of material and fabrication, therefore thenonlinear coupling strengths g21,22,3 and the intrinsicquality factor Qi,0 = ωi

2κi,0of the three resonant modes

(iε{a, b, c}) are limited. So, we can engineer the mode fre-quency detuning δb and the external coupling strengthsκi,1 to optimize the THG. The role of δb is to control the

interference between the DTHG and the SHG-SFG pro-cesses, while the κi,1 balances the extraction of the THlight from the cavity (κc,1/κc), the cooperativity of thenonlinear frequency conversion and also the saturationeffect.

Fig. 4(a) shows the absolute conversion efficiency ηfor different external coupling rates with pump powerPp = 10 mW (weak pump) and Pp = 1000 mW (strongpump). The detuning δb is chosen to be the optimaldetuning as studied in Fig. 3(b). It is found that, thecritical coupling for both the fundamental mode and theTH mode is required to achieve maximum conversion ef-ficiency for weak coupling regime. The reason is that thecooperativities CTHG � 1 and CSHG � 1 in this regime,the backaction induced decay rate κi,nl (saturation effect)can be neglected compared to κi,0. In this case, the op-timal external coupling rate that balances the extractionand cooperativity is κc,1 ≈ κc,0 and κa,1 ≈ κa,0. Sincethere is no input or output required for the mode b, thuswe want κb,1 ≈ 0.

When operating with a high pump power Pp =1000 mW, the maximum conversion efficiency 51.7 % isobtained at κa,1 = 2.95 κa,0 and κc,1 = 5.01 κc,0, whichlies in the over-coupled region. If the external couplingrates are set as κa,1 = κa,0 and κc,1 = κc,0, the con-version efficiency is only 25.0 %. This indicates thatthe cooperativities approaches to 1, leading to relativelylarge changes of the effective decay rates of the modes,κi,nl ∼ κi,0. Therefore, the loaded quality factors ofmode a and c will decrease and the waveguide-cavity cou-pling rates must be optimized to a higher value to ensurethe critical coupling condition κa,1 = κa,0 + κa,nl andκc,1 = κc,0 + κc,nl.

Taking both the internal and external coupling param-eters into consideration, we calculate the achievable con-version efficiency of THG using a microcavity with givenpump power. By optimizing the detuning δb of the SHmode b and the external coupling rates of the fundamen-tal and TH modes, we obtain the relationship betweenthe pump power and the maximum conversion efficiency,as shown in Fig. 4(b). The dashed red line shows the ef-ficiency of DTHG without optimal condition for the ex-ternal coupling. By comparing the optimal and DTHGprocess, it is beneficial to utilize the cascaded SHG-SFGand the constructive interference effect when the pumppower is low. As the pump increases, the advantage ofthe cascaded process and the interference is weakenedby the saturation and the two lines get close to eachother. Therefore, there is no need to design the cascadedSHG-SFG process if the pump is too high since DTHGdominates the TH light generation. In the top right ofthe Fig. 4(b), the separation of the two lines becomeslarge again. In this area, the higher conversion efficiencymainly attributes from the optimized external couplingconditions.

6

(b)

10 100 1000

0.01

0.1

1

10

Co

up

lin

g r

ate

s k

i,1/k

i,0

Effi

cien

cy %

Pump power /mW

OptimizedDTHG

0

2

4

6

(a)

0

0.008

0.004

0

0.2

0.4

FIG. 4. Optimization of the conversion efficiency. (a) Rela-tionship between the conversion efficiency and the externalcoupling rates κa,1 and κc,1. Left: Pp = 10 mW . Right:Pp = 1000 mW . In the high-pump regime, the cavity modesshould be designed over-coupled to the waveguide to achieveoptimal efficiency. (b) Relationship between the optimal THGefficiency and the pump power. Black line: the detuning δb,external coupling rates κa,1 and κc,1 are optimized; Red line:efficiency of DTHG with all the modes critical-coupled to thewaveguide. Orange: optimal external coupling rate of thefundamental mode a. Blue: optimal external coupling rate ofthe TH mode c. The external coupling rates shown in this fig-ure are normalized to the corresponding intrinsic decay ratesκi,0.

CONCLUSION

In conclusion, we have studied the third-harmonic gen-eration in an optical microcavity, which allows both the

χ(3)-assisted direct THG and χ(2)-assisted cascaded SHGand SFG for the generation of the third-harmonic light.Under the non-depletion approximation for weak pump,we explicitly show the contributions of direct THG andthe cascading of SHG and SFG processes and predictthe interference between them. According to our anal-ysis, the detuning of the intermediate second-harmonicmode plays a significant role on the conversion efficiency.For high pump powers, we analyze the different satura-tion effects of these processes. The interference fringebecomes less pronounced and the external coupling con-dition should be optimized to improve the THG effi-ciency. At last, the optimal conversion efficiency for amicrocavity with given parameters and pump power isstudied. Our results clearly explain the mechanisms ofTHG in presence of both χ(2) and χ(3) nonlinearity andgive guidelines to optimize the nonlinear conversion ef-ficiency. Since our study is based on the parameters ofmicrocavities with current fabrication and experimentaltechnologies, we believe the new phenomenon predictedin our work will be experimentally demonstrated and findtheir applications in the near future. The analyses canbe also generalized to other nonlinear processes, such asSHG, Raman, and high-order harmonic generations [41],which would stimulate more new physics with cascadednonlinear optics effects..

ACKNOWLEDGMENTS

This work was supported by National Natural ScienceFoundation of China (NSFC) (61725503, 61431166001,11861121002, 61505195), Zhejiang Provincial NaturalScience Foundation (Z18F050002), China PostdoctoralScience Foundation (No. 2017M621919).

[1] R. W. Boyd, Nonlinear optics (Academic press 2003).[2] G. P. Agrawal, Nonlinear fiber optics (Academic press

2007).[3] C. Reimer, M. Kues, P. Roztocki, B. Wetzel, F. Grazioso,

B. E. Little, S. T. Chu, T. Johnston, Y. Bromberg,L. Caspani D. J. Moss and R. Morandotti, Generationof multiphoton entangled quantum states by means ofintegrated frequency combs, Science 351, 1176 (2016).

[4] J. Leuthold, C. Koos, and W. Freude, Nonlinear siliconphotonics, Nat. Photonics 4, 535 (2010).

[5] K. J. Vahala, Optical microcavities, Nature 424, 839(2003).

[6] D. V. Strekalov, C. Marquardt, A. B. Matsko, H. G.Schwefel, and G. Leuchs, Nonlinear and quantum opticswith whispering gallery resonators, J. Opt. 18, 123002(2016).

[7] G. Lin, A. Coillet, and Y. K. Chembo, Nonlinear pho-tonics with high-Q whispering-gallery-mode resonators,

Adv. Opt. Photon. 9, 828 (2017).[8] H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nico-

laescu, A. Fang, and M. Paniccia, An all-silicon ramanlaser, Nature 433, 292 (2005).

[9] H. Hashemi, A. W. Rodriguez, J. D. Joannopoulos,M. Soljacic, and S. G. Johnson, Nonlinear harmonicgeneration and devices in doubly resonant kerr cavities,Phys. Rev. A 79, 013812 (2009).

[10] D. H. Leach, R. K. Chang, W. P. Acker, and S. C. Hill,Third-order sum-frequency generation in droplets: ex-perimental results, J. Opt. Soc. Am. B 10, 34 (1993).

[11] J. Kasparian, B. Kramer, J. P. Dewitz, S. Vajda,P. Rairoux, B. Vezin, V. Boutou, T. Leisner, W. Hubner,J. P. Wolf, L. Woste, and K. H. Bennemann, Angulardependences of third harmonic generation from micro-droplets, Phys. Rev. Lett. 78, 2952 (1997).

[12] T. Carmon and K. J. Vahala, Visible continuous emis-sion from a silica microphotonic device by third-harmonic

7

generation, Nat. Phys. 3, 430 (2007).[13] R. Ismaeel, T. Lee, M. Ding, N. G. R. Broderick, and

G. Brambilla, Nonlinear microfiber loop resonators forresonantly enhanced third harmonic generation, Opt.Lett. 37, 5121 (2012).

[14] D. Farnesi, A. Barucci, G. C. Righini, S. Berneschi,S. Soria, and G. Nunzi Conti, Optical frequency con-version in silica-whispering-gallery-mode microsphericalresonators, Phys. Rev. Lett. 112, 093901 (2014).

[15] M. Asano, S. Komori, R. Ikuta, N. Imoto, S. K. Ozdemir,and T. Yamamoto, Visible light emission from a silica mi-crobottle resonator by second- and third-harmonic gen-eration, Opt. Lett. 41, 5793 (2016).

[16] J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson,Harmonic generation in silicon nitride ring resonators,Opt. Express 19, 11415 (2011),

[17] M. Galli, D. Gerace, K. Welna, T. F. Krauss,L. O’Faolain, G. Guizzetti, and L. C. Andreani, Low-power continuous-wave generation of visible harmonicsin silicon photonic crystal nanocavities, Opt. Express 18,26613 (2010).

[18] J. B. Surya, X. Guo, C.-L. Zou, and H. X. Tang, Effi-cient third-harmonic generation in composite aluminumnitride/silicon nitride microrings, Optica 5, 103 (2018).

[19] X. Guo, C. Zou, and H. Tang, Second-harmonic gener-ation in aluminum nitride microrings with 2500 %/ Wconversion efficiency, Optica 3, 1126 (2016).

[20] Z. Lin, X. Liang, M. Loncar, S. G. Johnson, and A. W.Rodriguez, Cavity-enhanced second-harmonic generationvia nonlinear-overlap optimization, Optica 3, 233 (2016).

[21] K.-H. Kim, M.-S. Hwang, H.-R. Kim, J.-H. Choi, Y.-S. No, and H.-G. Park, Direct observation of exceptionalpoints in coupled photonic-crystal lasers with asymmetricoptical gains, Nat. Commun. 7, 13893 (2016).

[22] Y. Zeng, I. Roland, X. Checoury, Z. Han, M. El Kurdi,S. Sauvage, B. Gayral, C. Brimont, T. Guillet, F. Se-mond and P. Boucaud, Imaging of photonic crystal lo-calized modes through third-harmonic generation, ACSPhotonics 3, 1240 (2016).

[23] K. Sasagawa and M. Tsuchiya, Highly efficient third har-monic generation in a periodically poled MgO:LiNbO3disk resonator, Appl. Phys. Express 2 (2009).

[24] S. Liu, Y. Zheng, and X. Chen, Cascading second-ordernonlinear processes in a lithium niobate-on-insulator mi-crodisk, Opt. Lett. 42, 3626 (2017).

[25] A. Chen-Jinnai, T. Kato, S. Fujii, T. Nagano, T. Ko-batake, and T. Tanabe, Broad bandwidth third-harmonicgeneration via four-wave mixing and stimulated ramanscattering in a microcavity, Opt. Express 24, 26322(2016).

[26] W. Liang, A. A. Savchenkov, Z. Xie, J. F. McMillan,J. Burkhart, V. S. Ilchenko, C. W. Wong, A. B. Matsko,and L. Maleki, Miniature multioctave light source basedon a monolithic microcavity, Optica 2, 40 (2015).

[27] L. Wang, L. Chang, N. Volet, M. H. Pfeiffer, M. Zervas,H. Guo, T. J. Kippenberg, and J. E. Bowers, Frequencycomb generation in the green using silicon nitride mi-croresonators, Laser Photonics Rev. 10, 631 (2016).

[28] S. Fujii, T. Kato, R. Suzuki, and T. Tanabe, Third-harmonic blue light generation from kerr clustered combsand dispersive waves, Opt. Lett. 42, 2010 (2017).

[29] H.-T. Tan and H. Huang, Bright quadripartite entangle-

ment from competing χ(2) nonlinearities, Phys. Rev. A83, 015802 (2011).

[30] V. Ulvila, C. Phillips, L. Halonen, and M. Vainio,Frequency comb generation by a continuous-wave-pumped optical parametric oscillator based on cascadingquadratic nonlinearitiesl, Opt. Lett. 38, 4281 (2013).

[31] H. Jung, R. Stoll, X. Guo, D. Fischer, and H. X. Tang,Green, red, and IR frequency comb line generation fromsingle ir pump in aln microring resonator, Optica 1, 396(2014).

[32] R. Wolf, I. Breunig, H. Zappe, and K. Buse, Cascadedsecond-order optical nonlinearities in on-chip micro rings,Opt. Express 25, 29927 (2017).

[33] M. Li, C. L. Zou, C. H. Dong, X. F. Ren, and D. X. Dai,Enhancement of the second-harmonic generation basedon the cascaded second- and third-order nonlinear pro-cesses in a multimode optical microcavity, arXiv preprintarXiv:1805.08388 (2018).

[34] X. Guo, C.-L. Zou, H. Jung, Z. Gong, A. Bruch, L. Jiang,and H. X. Tang, Efficient visible frequency comb gen-eration via cherenkov radiation from a kerr microcomb,arXiv preprint arXiv:1704.04264 (2017).

[35] X. Guo, C. L. Zou, H. Jung, and H. X. Tang, On-ChipStrong Coupling and Efficient Frequency Conversion be-tween Telecom and Visible Optical Modes, Phys. Rev.Lett. 117, 123902 (2016).

[36] X. Guo, C.-L. Zou, C. Schuck, H. Jung, R. Cheng, andH. X. Tang, Parametric down-conversion photon-pairsource on a nanophotonic chip, Light Sci. Appl. 6, e16249(2017).

[37] M. Zhang, C. Wang, R. Cheng, A. Shams-Ansari, andM. Loncar, Monolithic ultra-high-Q lithium niobate mi-croring resonator, Optica 4, 1536 (2017).

[38] D. F. Walls and G. J. Milburn, Quantum optics (SpringerScience & Business Media 2007).

[39] R. Yu, C. Ding, J. Wang, and D. Zhang, Enhanced vis-ible light generation in an active microcavity via third-harmonic conversion beyond the non-depletion approxi-mation, J. Appl. Phys. 122, 244303 (2017).

[40] J. Li, H. Lee, T. Chen, and K. J. Vahala, Characteriza-tion of a high coherence, brillouin microcavity laser onsilicon, Opt. Express 20, 20170 (2012).

[41] J. Moore, M. Tomes, T. Carmon, and M. Jarrahi,Continuous-wave ultraviolet emission through fourth-harmonic generation in a whispering-gallery resonator,Opt. Express 19, 24139 (2011).