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S E 8 5 0 Spectroscopic El l ipsometer

M i c r o P h o t o n i c s Surface Test claim that their new el l ipsometer is the first to take advantage of a diode array de tec tor to provide m u l t i - c h a n n e l (pa ra l l e l ) data acquisition across the UV visible spec t rum from 250-850 nm. This develop- m e n t c o m b i n e d w i t h Fourier Transform spectro- scopy for the IR region means that the SE850 of- fers high speed spectro- scopic ell ipsometry over a b road spect ra l range of 250-1700 nm.

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The new instrument can determine film thickness, refractive index and relec- tance spectra of single and multi-layer films down to a few angstroms thickness, says MicroPhotonics. The i n s t r u m e n t is s u p p l i e d wi th Windows software, including an extensive li- brary of materials charac- t e r i s t i c s and m o d e l i n g algorithms. • Contact : MicroPho- tonics Surface Test, PO Box 3129, Allentown, PA 18106-0129, USA. Tel~

fax: [1] 610 366 7103/ 7105, e-mail: surftes- ¢@aol . c o m , h t t p : / / www. microphotonics.com

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New Shutter Virtually Eliminates Sticking EPI has developed a new PBN Shutter for 3" Modular GEN II Systems. The new company says that the new design virtually eliminates shutter sticking w h e n used with Ga and In sources, the PBN design greatly reduces the buildup of Ga or In on the shut ter blade surface, therefore reducing stick- ing of the shut ter to the furnace cooling panel.

Shutter related flux tran- sients are also reduced by m o r e than 50% due to be t t e r hea t t ransmiss ion through the PBN blade. • Contact: Michelle Alt, EPI MBE Products, 1290 Hammond Road, St. Paul, MN 55110, USA. Tel~ fax: [1] 612-653-7921/ 0725, or email: mdalt@ epimbe.com

EPI Develops SUMO for MBE According to EPI, SUMO effusion cell t e chno logy combines a unique shield- ing cap and novel crucible design which provides an advantage ove r exis t ing open faced crucible tech- nology. The technology is available for most existing MBE system designs.

The cell is capped with heat shielding, rather than thermally t ransparent PBN which EPI says results in a higher heating efficiency and reduced thermal radia- tion loss. The cell incorpo- r a t e s t w o i n d e p e n d a n t

filaments, each moni tored with EPI's pa tented band thermocouple .

Oh io State Univers i ty SUMO data has shown that the measured defect den- sities for material grown w i t h t h i s s o u r c e a r e a m o n g s t t h e l o w e s t reported. • Contact: David Ream- er, EPI MBE Products, 1290 H a m m o n d Road, St. Paul, MN 55110, USA Tel~fax: [1] 612 653 0 4 8 8 / 0 7 2 5 , e - m a i l : info@ epimbe, com

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