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Nanoparticle-Based Nanophotonics Nanoparticle-Based Nanophotonics Tadashi Kawazoe : University of Tokyo Tadashi Kawazoe : University of Tokyo Particles 2007:Particle-Based Device Technologies

Nanoparticle-Based Nanophotonics

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Nanoparticle-Based NanophotonicsNanoparticle-Based Nanophotonics

Tadashi Kawazoe : University of TokyoTadashi Kawazoe : University of Tokyo

Particles 2007:Particle-Based Device Technologies

+ E=1/4πk(q/r2)

+ -

Coulomb forceF=Eq=1/4πk(q2/r2)

Electric Field & Interaction by Charges

•These equations are exact for every distances, when we do not consider their wave function. Because this equation is the definition of charge.

I(ωmn)

m

n

Wmn=4π2I/ℏc・pmn2

Propagating light

Electric Field & Interaction by Dipoles

transition

Optical Near-Field

Electric Field

pmn: (transition) electric dipole•We obtained pmn as a physically material parameter by using this relation from the experimental results.

21 2 1 2

5

( ) 3( )( )rU

r

⋅ − ⋅ ⋅= p p p r p r

•The dipole-dipole interaction is correct in nano-region?When the separation of dipoles are broad, it is exact. Because one acts as light emitter and another acts as absorber. However, when it is narrow, the dipoles change and the dipole-dipole interaction also changes. Thus the equation of dipole-dipole interaction should change in nanometric region.

•We call the electromagnetic wave in this region “Optical Near Field” and Its interaction is called “Optical Near Field Interaction”.

Separation<Size of Dipole

Particles 2007:Particle-Based Device Technologies

Nanophotonic deviceMotivation and problems

Nanophotonic deviceMotivation and problems

•I have studied communication networks. However, I have a problem of communication in English. Excuse me, please・・・・・.

Particles 2007:Particle-Based Device Technologies

Technology roadmap of optical devicesTechnology roadmap of optical devices

※MIT Microphotonics Center:Communications Technology Roadmap 2005

Particles 2007:Particle-Based Device Technologies

Connections between nanometric deviceConnections between nanometric device

Size of Photonic Devicemm nm

Wavelength of Light

Optical Source

Conventional photonic device Photonic Crystals Plasmonics

Plasmon Condenser

Device

Optical Source

Detector

Fiber

Every device can be isolated.Every device can work

individually

Using Wave Property

Downsize

Nano Optical Source

Both Changes. Optical Source

orOptical Absorber.

μm

Our Target

•Field pattern is changedbut still working for each.

Near-field Coupling

•The device operation is influenced by the load.Load

Energy Transfer for Nanophotonic DeviceEnergy Transfer for Nanophotonic Device

Input ControlOutput

1. How to use the optical near field as a signal (energy) carrier.→The energy dissipation of the sublevel transition is applicable to realize the unidirectional signal transfer, which will be shown in the next page.2. How to control the signal. →We proposed several QDs-systems to control the signal transfer, which will be mentioned later.

(1,1,1)

(1,1,1)

(2,1,1)

Near FieldEnergy Transfer

zyx nnnE ,,

BE

LL2

subτ

X YQuantum dotsOptical

Near-Field

Schematic Image of Nanophotonic DeviceTo overcome the diffraction limit, we use the optical near field.Unidirectional signal transfer is necessary in order to use ONF as a signal carrier.

Particles 2007:Particle-Based Device Technologies

Operation PrincipleOperation Principle

Energy transfer, Nanophotonic AND-, Not- gate Optical Nanofountain

Particles 2007:Particle-Based Device Technologies

Energy transfer between quantum dotsEnergy transfer between quantum dots

⎟⎟

⎜⎜

⎛⎟⎟⎠

⎞⎜⎜⎝

⎛+⎟

⎟⎠

⎞⎜⎜⎝

⎛+⎟⎟

⎞⎜⎜⎝

⎛π=2

z

z

2

y

y

2

x

x22

zyx L

n

L

n

L

n

m2)n,n,n(E

Confinement energy of carriers in a quantum cube

(1,1,1)

(1,1,1)

(2,1,1)

Near FieldEnergy Transfer

zyx nnnE ,,

BE

LL2

subτ

X Y

T. Kawazoe, et al., Phys. Rev. Lett. 88, 067404 (2002).

τlifetime>τtransfer>τsub

•In the quantum cubes, the carriers are quantized and their discrete energy levels are given by this simple equation.

•When two quantum dots with are closely spaced, the strong near-field interaction couples these resonant energy levels (1,1,1) and (2,1,1).

•In the larger quantum dots, the energy relaxation to the lowest energy sublevels is very fast.

•This small energy dissipation disturbs the back-transfer to the smaller QD.

•Then, the energy transfer occurs from the smaller to the larger quantum dot.

•Thus, the optical near filed obtains the ability as a signal carrier.

Size Ratio=1: 2

Dissipation

Particles 2007:Particle-Based Device Technologies

OFF StateOFF State

Input Signal

Sweep Out

Output SignalOutput Signal

How to control the signal.1.Nanophotonic Switch.(AND-Gate)How to control the signal.1.Nanophotonic Switch.(AND-Gate)

ON StateON State

Input Signal

Control Signal

Output SignalOutput Signal

•For the switching operation, we consider three closely spaced cubic quantum dots with size ratio of .

•In the OFF operation, the input energy escapes to the control dot, and then the output signal is obstructed.

•In the ON operation, the escape paths are blocked by the excitation of the control dot, and then the input energy goes through the output dot giving an output signal.

•Thus, the nanophotonic switch is realized.

Size Ratio =1: 2 : 2

Particles 2007:Particle-Based Device Technologies

2.Nanophotonic NOT-Gate2.Nanophotonic NOT-Gate

IN=0:OUT=1

PumpIN=1

OUT=0

IN=1:OUT=0

No-pump(IN=0)

No-energy-transfer

+

IN OUT

Power

earth

OUTIN

QD pair:Non-resonant with each other.Nearly resonant.

Power

earth

Particles 2007:Particle-Based Device Technologies

3.The optical nano-fountain using energy transfer between quantum dots3.The optical nano-fountain using energy transfer between quantum dots

Energy dissipation

QD

Light harvesting system in photosynthetic purple bacteria

Particles 2007:Particle-Based Device Technologies

The energy transfer between quantum dots is similar to the energy transfer in the light harvesting system in photosynthetic purple bacteria. (small to large).

Experimental ResultsExperimental Results

Particles 2007:Particle-Based Device Technologies

CuCl Quantum Cube in a NaCl MatrixCuCl Quantum Cube in a NaCl Matrix

Near-Field Optical MicroscopyNear-Field Optical Microscopy

Sample for Device Operation CuCl QDs in a NaCl MatrixSample for Device Operation CuCl QDs in a NaCl Matrix

For verifying the operation principle of the nanophotonic devices, we selected the material of cubic CuCl quantum dots embedded in a NaCl matrix.

•High density of quantum dots.

•Deep potential depth.

•Nearly perfect cubic shape.

For this sample, the first essential task is to search the coupled quantum dots acting as the nanophotonic devices from the inhomogeneous size dispersed ‘sea’.

Particles 2007:Particle-Based Device Technologies

JASCO Co. LTD. :SNOM

500nm

Optical Near-Field MicroscopeOptical Near-Field Microscope

Particles 2007:Particle-Based Device Technologies

Experimental results: 1. Nanophotonic SwitchExperimental results: 1. Nanophotonic Switch

OFF StateOFF State

Input Signal

Sweep Out

Output SignalOutput Signal

ON StateON State

Input Signal

Control Signal

Output SignalOutput Signal

Particles 2007:Particle-Based Device Technologies

T.Kawazoe et al., Appl. Phys. Lett. 82, 2957(2003).

0 5 10 15 20 25 30

150

200

INTEN

SIT

Y (

a.u.

)

Time (ns)

Signal Level without pump

pump pump pump

Experimental Results: 2.NOT-Gate Experimental Results: 2.NOT-Gate

These experimental results show this coupled quantum dots system is acting as nanophotonic NOT-gate.

Applied physics B Vol. 84, No.1-2,(2006).

Particles 2007:Particle-Based Device Technologies

Experimental Results: 3. Nano-fountainExperimental Results: 3. Nano-fountain

150 nm

Optical nano-fountainIntensity Distribution

The largest quantum dot exists at the focus points.

The many middle and small sized quantum dots exist at around the focusing position.

Appl. Phys. Lett. 86 103102 (2005).

The excitation energy concentrate the largest quantum dot via optical near-field energy transfer.The focus diameter was 10 nm.It corresponds to NA≅40

The observed luminescence intensity was as five times large as luminescence intensity of the isolated single quantum dot.

Particles 2007:Particle-Based Device Technologies

Optical Content Addressable MemoryOptical Content Addressable Memory

Nanophotonics Team 41

3.20 3.25 3.30

CuCl in NaCl 40K

376nm

381.3nm

325nm0

0

LU

MIN

ES

CE

NC

E I

NT

EN

SIT

Y

PHOTON ENERGY (eV)

0

(325nm, 376nm, 381.3nm)

(0, 1, 0)

(0, 0, 1)

(1, 0, 0)

(1, 1, 1)

(1, 0, 1)

(1, 0, 0)

3.20 3.25 3.30

0

0

0

CuCl in NaCl 40K

376nm

381.3nm325nm

325nm

LU

MIN

ESC

EN

CE

IN

TE

NSI

TY

PHOTON ENERGY (eV)

381.3nm325nm

Output

InputSummation 実証実験

3.225 eV (384 nm, 5.9 nm)

150nm

QD2

QD3

QDC

1 nm

3.1 nm

4.1 nm

5.9 nm

QD1325 nmIN1

376 nmIN2

381.3 nmIN3

384 nm

OUT

CuCl QDs (40K)

Optical Content Addressable Memory

AND-Gate

Optical Nano-fountain

Combination of And-gate and Nano-fountain realizes Optical CAM.(Output=ΣA・B): Opt. Lett., Vol. 30, No.2, 201-204, (2005).

Particles 2007:Particle-Based Device Technologies

Broadcasting systemBroadcasting system

Block 1 Block 2 Block m

λ~

~1

μm

~1 μm

IN1: 325 nmIN2: none

0

0.24

200 nm

~1 μm

~1

μm

200 nm

IN1: 325 nmIN2: 384.7 nm

OFF state ON state

IN1325 nm

IN2384.7 nm

Sample: CuCl QD in a NaCl Matrix

Average size: 4.2 nm

Broadcast実証実験

Many AND-Gates

Broadcasting System

Many AND-gates can act as broadcasting system, which delivers the data to many Receivers. :Opt. Express, Vol. 14, 306-313 (2006).

Particles 2007:Particle-Based Device Technologies

Buffering systemBuffering system

375 380 385 390

0

100

200

300

400

500

600

700

WAVELENGTH (nm)

TIM

E D

ELA

Y (

ps)

入力読み出し

0 250 5000

1

2

3

INTEN

SIT

Y (

a.u.)

TIME DELAY (ns)

遅延出力信号

Fitting: t1=1300ps, t2=600ps, Interaction-1=155ps

章動

1往復=1バッファ時間

励起

(入力

読み出し

出力移動

エネルギー移動‘

inputOutput

Delayed signal

Buffering system

NOT-Gate

Combination of Nutation and NOT-gate realizes Optical Data buffering system.: CLEO/QELS 2006.

Particles 2007:Particle-Based Device Technologies

Fundamental difference: Conventional and Nanophotonic devices

Conventional photonic device

Determination of operation

•In conventional case, device size may be decreased to diffraction limit.

•However, operating determination is made out side of the device.->device size is large.

•Cascadability has also problem, because there is no determination in inter-device.

•When we connects AND gate and NOT gate, they could not act as NAND gate.

•So for NAND operation, we must design it as another total system as NAND-gate.

no determination

Input Signal

Sweep Out

Output SignalOutput Signal

Nanophotonic device

Dissipations for determination

•In the nanophotonic device, many dissipation parts for determination are in the device.->Total device size is small.

•When we make NAND gate, we only connect AND gate and NOT gate. Because the small dissipation supports each device operation.•This small dissipation also supports low power consumption.

Particles 2007:Particle-Based Device Technologies

Performance comparisonPerformance comparison

Existent electronic device (CPU) 109 transistors 1GHz/100W=1transistor:10-7WNanophotonic switch 1GHz/ 1switch: 10meV×109/s=10MeV/s=10-12W

Nanophotonic switch can be integrated 105 times higher density than the existent electronic device (CPU).

Consideration of thermal problem

10

103

104

103

102

104

ON-OFF Contrast:C

1~1photon~100ps(λ/10)3Nanophotonicswitch

10-1~-2103~4

photons100fs(nλ)3Quantum well

sub-level

10-4~-5103~4

photons1ns(nλ)3χ(3) resonant

10-3106

photons10fs(nλ)3χ(3) non-

resonant

10-2~-310-18~-17J10ps(nλ)3Mach-Zehnder

10-5~-610-18~-17J1μs(nλ)3Optical MEMS

Figure of Merit:Switching Energy:E (/cycle)

Switching time:tsw

Size:VClassification

10

103

104

103

102

104

ON-OFF Contrast:C

1~1photon~100ps(λ/10)3Nanophotonicswitch

10-1~-2103~4

photons100fs(nλ)3Quantum well

sub-level

10-4~-5103~4

photons1ns(nλ)3χ(3) resonant

10-3106

photons10fs(nλ)3χ(3) non-

resonant

10-2~-310-18~-17J10ps(nλ)3Mach-Zehnder

10-5~-610-18~-17J1μs(nλ)3Optical MEMS

Figure of Merit:Switching Energy:E (/cycle)

Switching time:tsw

Size:VClassificationEtV

C

sw ⋅⋅

Particles 2007:Particle-Based Device Technologies

Experimental Results for other materialsExperimental Results for other materials

Particles 2007:Particle-Based Device Technologies

Other Logic circuitsOther Logic circuits

Logic circuits

Particles 2007:Particle-Based Device Technologies

Nanophotonic Switch using ZnO Nanorod

Lw:3.25nm

Lw:4nm

359.5nm(output)

362nm(input)

Pulse In

Relaxation

325nm (supply)

Forbidden

Lw:3.25nm Lw:4nm

on

- 0 . 5 0 0 . 5 1 1 . 5 2

D e l a y ( n s )

PulseIn

3 5 0 3 6 0 3 7 0

W a v e l e n g t h ( n m )

output

On

PL

inte

nsi

ty (

a.u

.)

OffIn

ten

sity

(a

.u.)

input

Nanophotonic Switch using ZnO Nano-rodNanophotonic Switch using ZnO Nano-rod

T. Yatsui, S. Sangu, T. Kawazoe, and M. Ohtsu, Appl. Phys. Lett., vol.90, no.22, pp.223110-1 -3, May 2007.

Particles 2007:Particle-Based Device Technologies

Nonadiabatic PhotolithographyNonadiabatic Photolithography

Nonadiabatic photolithography is one of the most promising method to fabricate the nanophotonic devices.

Here, I introduce the experimental results briefly.Theory: see T. Kawazoe, et al., J. Chem. Phys.122 024715 (2005).

Particles 2007:Particle-Based Device Technologies

Background & Motivation

Too expensive!!

We found the Nonadiabatic Photochemical Reaction.the Nonadiabatic Photochemical Reaction.

And proposed the photolithographyusing the nonadiabatic reaction.(Nonadiabatic photolithography)

Low price of equipmentsHigh resolutionLow power consumption

Cost of equipment is $100milion.Power consumption is 100billion KWh/year in Japan 2005.

•Photolithography is the practical high-throughput method to produce electronic and photonic devices

•In order to make patterns much smaller, the wavelength of a light source must be shorten, due to the diffraction limit

Particles 2007:Particle-Based Device Technologies

Internuclear Distance

Pot

enti

al E

ner

gyAdiabatic reaction

ActivationEnergy

molecule

light

molecule

dissociation

Potential Curves of Electron in Molecular OrbitalPotential Curves of Electron in Molecular Orbital

Particles 2007:Particle-Based Device Technologies

T.Kawazoe、K.Kobayashi、S.Takubo、M.Ohtsu “Nonadiabatic photo-dissociation process using an optical near field“Journal of Chemical Physics 、122、024715(2005)

Far Field: adiabatic Near Field: nonadiabatic

e-

Nuclear

Nonadiabatic photochemical reactionNonadiabatic photochemical reaction

Steeply spatial gradient of optical near field can excite the molecular vibration mode directly.

Particles 2007:Particle-Based Device Technologies

ActivationEnergy

Pot

enti

al E

ner

gy

Internuclear Distance

UV light Red light

Molecular vibration modeExcitedState

GroundState

•In the nonadiabatic reaction, transition to higher molecular vibration mode is allowed by the optical near field.

•Thus, in this reaction, UV light is not necessary for photo-chemical reaction including the photolithography.

Nonadiabatic photochemical reactionParticles 2007:Particle-Based Device Technologies

Contact exposure

Near-field exposure

Nonadiabatic exposure

H. Yonemitsu, T. Kawazoe, et. al, J. Lumin. 122-123, PP.230-233 (2007).

Comparison of typical fabricated resultsComparison of typical fabricated resultsParticles 2007:Particle-Based Device Technologies

This method increase in the resolution of photolithography. By using 550 nm light,

Fabrication of 45nm-L&S was succeeded.

Φ100nm ring-array FWHM 50nm Fabricated Cr-Line

HP125nm: 2-dimentional array HP45nm: L&S

Application Nonadiabatic Reaction to Photolithography II

Particles 2007:Particle-Based Device Technologies

Prototype stepper by Canon Co. LTD. & Univ. TokyoPrototype stepper by Canon Co. LTD. & Univ. Tokyo

32nm L&S

Prototype stepper was completed (2006).It has 32nm resolution, but its cost was less than 10% of EUV stepper and EB lithography.

Particles 2007:Particle-Based Device Technologies