Approx. 75 µm

Approx. 30 µm

Aperture 10 µm diameter

0500

10001500

20002500

31506.5

7

7.5

8.08.1

0

1000

2000Y [µm] X [µm]

Thickness[µm]

3000

40506.5

8.1

The MSV-5000 series is a microscopic spectrophotometer system providing transmittance/reflectance measurements of a microscopic sample area with a wide wavelength range from ultraviolet to near infrared.A broad range of applications including the collection of transmittance/reflectance spectra of a sample, measurement of the band gap and film thickness of semiconductors, evaluation of the optical characteristics of functional crystals and the color analysis of microscopic samples can be easily implemented using the MSV-5000 series.

Microscopic image of an LCD panel

Transmittance spectra of color filters for an LCD panel

Film thickness distribution of semiconductor detector protection layer

Microscopic SpectrophotometerMSV-5000 Series

The microscope system utilizes wide-band cassegrain objectives to provide transmittance/reflectance measurements continuously from 200 to 2700 nm (MSV-5200).

Wide spectral measurement rangeThe optional automated stage enhances the operation performance of the system especially for mapping and multi-point measurements.

Auto XYZ stage

An automated Glan-Taylor polarizer system (standard) provides polarization measurements in combination with the optional automated polarization analyzer.

Polarization measurementSpectra ManagerTM II software, a cross-platform control and analysis package for all JASCO spectroscopic instruments, offers quick and easy data acquisition and analysis.

JASCO Spectra ManagerTM II

A circular 10 μm aperture was applied for each subpixel of red, green and blue (R, G, B).

The film thickness distribution of semiconductor detector protection layer was calculated from interference wave shape in NIR region.

780Wavelength [nm]

80

60

40

20

0

%T

700

:R:G:B

380 500 600

MSV-5000 Leaflet EN Feb. 2012 P.01

JASCO INTERNATIONAL CO., LTD.4-21, Sennin-cho 2-chome, Hachioji, Tokyo 193-0835, Japan Tel: +81-42-666-1322 Fax: +81-42-665-6512 http://www.jascoint.co.jp/english/Australia, China, Hong Kong, India, Indonesia, Korea, Malaysia, New Zealand, Pakistan, Philippines, Russia, Singapore, Taiwan, Thailand

JASCO EUROPE s.r.l. Via Luigi Cadorna 1, 23894 Cremella (Lc), Italy Tel: +39-039-9215811 Fax: +39-039-9215835 http://www.jasco-europe.com JASCO Deutschland www.jasco.de, JASCO UK www.jasco.co.uk, JASCO France www.jascofrance.fr, JASCO Benelux www.jasco.nl, JASCO Spain www.jasco-spain.com, JASCO Scandinavia www.jascoscandinavia.seItaly, Germany, U.K., France, Netherlands, Belgium, Luxembourg, Spain, Sweden, Norway, Denmark, Austria, Finland, Greece, Hungary, Poland, Portugal, Romania, Switzerland, Algeria, Cyprus, Egypt, Israel, Jordan, Kuwait, Lebanon, Morocco, Saudi Arabia, South Africa, Syria, Tunisia, Turkey, U.A.E., Yemen

JASCO INCORPORATED28600 Mary's Court, Easton, MD 21601, U.S.A Tel:+1-800-333-5272 +1-410-822-1220 Fax:+1-410-822-7526 http://www.jascoinc.comU.S.A., Canada, Costa Rica, Mexico, Puerto Rico, Argentina, Brazil, Chile, Colombia, Paraguay, Peru, Uruguay, Guatemala

Specifications are subject to change without notice.

For more information, please contact:

MSV-1202 Printed in Japan.

Specifications

Model:

Light source:Light source (option):Wavelength range:

Wavelength accuracy:

Spectral bandwidth:

Scan modes:

Detector:

Sample observation:Sample observation (option):Objective:

Condenser mirror:

Aperture:

Sample stage:Sample stage (option):Polarizer:Analyzer (option):

Control panel:

Dimensions: Weight:Power requirement:Software: OS:

Program:

Program (option) *3

MSV-5100 MSV-5200 MSV-5300Optical system: Double beam single monochromator Czerny-Turner mount

30W Deuterium lamp, 20W Halogen lamp150W Xenon lamp (air-cooled)

200 - 900 nm

± 0.3 nm (656.1 nm)

1, 2, 5, 10, L2, L5, L10 nm

200 - 2700 nm 200 - 1600 nm

± 0.3 nm (656.1 nm)± 1.5 nm (1312.2 nm)

1, 2, 5, 10, L2, L5, L10 nm (UV/Vis)4, 8, 20, 40, L8, L20, L40 nm (NIR)

1, 2, 5, 10, L2, L5, L10 nm (UV/Vis)2, 4, 10, 20, L4, L10, L20 nm (NIR)

Continuous scan, step scan

PMT PMTPeltier-cooled PbS

PMTPeltier-cooled InGaAs

High resolution CMOS camera (1600 × 1200 pixel), optical zoom, ATOS feature, LED illuminationBinocular, polarized observation, objective lens

Cassegrain objective, ×10, ×16, ×32 selectable *1

Cassegrain collection mirror, ×10, ×16, ×32 user-interchangeable *1

(Automated condenser mirror compensation function)

User-selectable dual-aperture settings for circular and rectangular (slit type) apertures10, 20, 30, 50, 100, 200 μmφ (×16 objective)5, 10, 15, 25, 50, 100 μmφ (×32 objectibe)

16, 32, 48, 80, 160, 320 μmφ (×10 objective)

Manual stage (working area: X 50 × Y 75 × Z 20 mm) *2

Auto stage (working area: X 76 × Y 52 × Z 25 mm, 1 µm step) *2, joystick (option) Glan-Taylor, automatic insertion/angle settingGlan-Taylor, automatic insertion/angle setting

Cassegrain switching and indicator, transmittance/reflectance mode indicator, aperture selection, measurement start/stop, auto focus, automatic condenser mirror compensation, optical zoom, automated sample illumination, sample compartment illumination ON/OFF, ATOS illumination ON/OFF

700 (W) × 740 (D) × 640 (H) mm105 kg150 VA

JASCO Spectra ManagerTM IIWindows7 Professional

Microscope Measurement (multi-point measurement, line and lattice mapping), Micro Spectra Analysis, Spectra Analysis (data processing such as film thickness calculation, color calculation, peak detection, derivatives), Time-Course Measurement, Validation, JASCO Canvas, Administrative Tools

Fixed wavelength mapping (line and lattice mode), auto focus, multi-image

*1. Cassegrain objective and cassegraing collection mirror are provided with the same magnification.*2. The moving distance of the condensor mirror and the objective magnification depends upon the sample.*3. Optional programs are provided when auto stage is selected.