leak detectors

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Leak detection

BOC Edwards leak detectorsSpectron 600 automatic portable leak detector and accessories 15-3Spectron 300E portable leak detector and accessories 15-5Spectron 5000 console leak detectors 15-7Spectron 5000 accessories 15-10QLD modular leak detector 15-11GasCheck 3000, 3000is, 5000 and 5000is 15-14


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BOC EDWARDS LEAK DETECTORS

Using the Spectron 5000 to check the internal foil seals on milk productcontainers.

ExpertiseBOC Edwards leak detectors have been used successfully in all the appli-cations listed here and many more. With over thirty years' experience in manufacturing leak detectors, BOC Edwards has the expertise to provide equipment to test anything that should be leak-tight to known specifica-tions.

BOC Edwards will work closely with customers to ensure that the leak detectors will enhance the production process and quality control. Cus-tom-built instruments are built to suit customers' exact requirements.

Installation, commissioning and servicing are carried out by factory trained engineers and on-site demonstrations of our transportable models can be arranged.

Wide choice for all applicationsSpectron 600 portable leak detector BOC Edwards offers an easy-to-use portable model to the leak detector range, the Spectron 600. This turbo-pumped leak detector is dual flow. In reverse flow it provides fast, quantitative leak detection and in direct flow it becomes a highly accurate, qualitative analytical tool.

The Spectron 600 is available in three versions: the 600T, which has an oil-sealed mechanical backing pump; the 600D, for those applications that require 100% oil-free leak detection; and the 600DS, a dry leak detector with a stainless steel enclosure, suitable for clean-room operation. The Spectron 600 is particularly suitable for semiconductor fabrication plant where oil-free operation is essential.

The Spectron 600 incorporates a helium mass spectrometer, like the stan-dard Spectron 5000, the QLD and the Spectron 300E.

Spectron 300E The Spectron 300E is portable and is ideal for furnaces and other large process systems.

Spectron 5000 The Spectron 5000 is available in five different models all designed to give consistent, reliable performance in continuous industrial applications. The models are: the general purpose 5000S; the metal-sealed 5000X for ultra-high vacuum; the 5000E-NL for use without liquid nitrogen; the 5000SF for fast testing of small, sealed devices; and the 5000PLC which is designed for use with a programable logic controller. The PLC can be supplied by BOC Edwards or the unit can be integrated with the customer’s own control system. On-board intelligence allows the unit to be controlled through a PC and provides the facility for data collec-tion and reporting. With their extended dynamic range the Spectron 5000 leak detectors are flexible, accommodating present and future require-ments.

QLD modular leak detector The QLD offers the performance of the 5000PLC in a modular leak detection system for complete integration into the production line.

Using the Spectron 5000 to leak check heat exchangers.

Leak detection with other BOC Edwards instrumentsIn applications where the highest sensitivity of the mass spectrometer leak detector is not required, or where the application demands the detection of a specific gas, BOC Edwards offers the GasCheck leak detectors.

GasCheckThe new GasCheck range provides automatic and direct display of gas leak rates. At the heart of these instruments is a sensor which can detect any gas that has a different thermal conductivity to that of air, which results in a highly sensitive instrument which is both reliable and compact.

The GasChecks are battery operated, making them highly portable. The GasCheck 3000is and 5000is models are intrinsically safe for use in hazard-ous areas or for the detection of flammable gases.

GasChecks detect and accurately display leak rates of gases in five different groups. Gases are grouped according to their responses, enabling selection of the most appropriate group for the application.

Leak detection trainingBOC Edwards provides courses to train customers in leak detection and has been designated as an Accredited Training Establishment by the British Institute of Non-Destructive Testing for the Mass Spectrometer Leak Detection course.

APPLICATIONS

• Vacuum equipment• Electronic valves, cathode ray tubes and lamps• Semiconductor fabrication plant• Refrigeration systems and cryogenic vessels• Satellites and laser tubes• Pacemakers• Containers including those for food products and explosives • Castings and other metal fabrications• Bellows, valves and regulators• Gas lines and cylinders• Heating elements and thermostats• Leadthroughs/seals• Impregnation units• Nuclear plants and accelerators• Scientific instruments and electron microscopes• Hydraulic and pneumatic systems• Process plant, pressure vessels and components• Hermetically sealed products including electronic devices• Evaporators/condensers and heat exchangers• Pumps and compressors• Fuel tanks, gear boxes, radiators, safety systems and shock absorbers• Ink jet printer ink cartridges• Airbags


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SPECTRON 600 AUTOMATIC PORTABLE LEAK DETECTOR

Spectron 600D• One-button start up - ready to test in less than 5 minutes• Fully automatic operation, tuning and calibration• Built-in test diagnostics quickly isolate faults• Direct and Reverse flow in a single unit• Optional remote control allows testing up to 30 metres from the leak

detector• Optional sniffer probe allows easy sniffing operation through a

dedicated port• RS-232 port for connection to automated control systems and personal

computers• Dual 90° magnetic sector mass spectrometer for the highest resolution• Internal temperature-compensated calibrator, traceable to national

standards• Peak scan facility for positive identification of helium at any time during

testing• Internal vacuum valves tested for millions of cycles• Turbo pump with sealed-for-life bearing

FeaturesThe Spectron 600 portable leak detectors have been designed to provide fast, accurate leak detection from the workshop to the clean-room.

The Spectron 600T uses the latest in leak detector technology in an easy-to-use, compact form. It can be operated in direct mode for high sensitivity and reverse mode for faster cycle times.

The Spectron 600D features an oil-free diaphragm/molecular drag pump for applications which demand 100% dry leak detection.

The Spectron 600DS is the 600D in a stainless steel enclosure with HEPA filters designed to conform to the most stringent clean-room standards.

The Spectron 600 is a completely self-contained portable leak detector capable of working in a wide range of environments. All that is needed is a suitable electrical supply and a helium source (helium 3 or 4, any quality). When the unit is switched on it performs a self-diagnostic routine and all of the LEDs on the user panel are tested, the foreline area is pumped down and the turbo pump ramps-up to its rated speed. The system is ready to test in less than 5 minutes, with no operator intervention.

For a leak detector to give reliable, repeatable results it is essential that it always performs at its optimum. The Spectron 600 incorporates several features designed to make it the most accurate leak detector available.

Auto Tune AlertThe Auto Tune Alert reminds the user to tune the unit every 50 hours of use. Alternatively, the user can select Automatic Auto Tune, and every time the unit is switched on it performs an automatic tuning cycle as part of the start-up process. During the tuning cycle, voltages applied to the mass spectrometer are adjusted and optimized for peak sensitivity and performance.

Calibration CheckWhen testing components with a specified maximum leak rate or if the unit is in use for extended periods, it is advisable to periodically check that it is calibrated to the internal reference leak. This is done by pressing the CAL CHECK button. The unit then performs an independent calibration check without forcing an automatic re-tune cycle. The operator can then decide whether to accept, re-calibrate or re-tune.

Competitive models automatically re-tune, giving no option to view the calibration value which creates uncertainty with respect to prior tests.

One-button Auto Tune and CalibrationIf the operator decides to re-tune the unit, he/she presses the TUNE button. The calibrator valve opens to the mass spectrometer and the anode, filament d.c., focus plates, grid and repeller voltages are automati-cally tuned. The calibrator valve closes and the amplifier offset and system background is recorded. The calibrator valve opens, the variables are sub-tracted and the amplifier gain adjusted to the temperature compensated calibrator value.

Internal CalibratorThe Spectron 600 has a built-in helium 4 calibrated leak, which delivers a specified leak in the range 1 x 10-8 to 3 x 10-8 mbar l s-1 air equivalent. Because leak rates change ± 3.3% ºC-1, the reference leak is temperature compensated and (to aid compliance with ISO-9000 and quality control procedures) it is traceable to NIST (US national standards organization, National Institute of Standards and Technology).

We recommend that the leak is re-calibrated once a year and there is a quick disconnect for changing re-certified calibrators.


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Mass SpectrometerTwo identical magnetic fields (90° sectors) are used in the Spectron 600’s mass spectrometer to make sure that only helium ions reach the ion col-lector. This is a unique feature which gives the Spectron 600 a resolution (the ability of a mass spectrometer to separate ions of different mass/charge ratios) of 14 - almost twice that of competing models.

A Magnet B Source assembly C Collector assembly

TECHNICAL DATA

Time to test600T < 8 s600D < 6 s

SensitivityDirect 6 x 10-11 mbar l s-1

Reverse, 600T 6 x 10-10 mbar l s-11

Reverse, 600D 6 x 10-9 mbar l s-11

Response timeDirect <2Reverse <41

Leak rangeStandard 10-4 mbar l s-1 to 6 x 10-11 mbar l s-1

With external pump 10 mbar l s-1 to 6 x 10-11 mbar l s-1

Resolution (resolving power) 14 at mass 41Maximum inlet pressure

Gross Atmosphere, with external roughing pumpIntermediate 0.96 mbarFine 0.33 mbar

Start-up time600T 4½ min600D 4 min

N

AB

CA

N

Roughing pump600T 1.5 ft3min-1 2-stage rotary vane pump600D 16 ft3min-1 dual stage diaphragm/ molecular

drag pumpSecondary pump 60 l s-1 turbomolecular pumpSize (height x width x depth) 381 x 521 x 356 mm Weight

600T 38.6 kg / 85 lb600D 43.6 kg / 96 lb

Electrical supply 115 V 60 Hz 10 A or 230 / 240 V 50 Hz 5 A

1 Performance determined in accordance with American Vacuum Society standards.

ORDERING INFORMATION

PRODUCT DESCRIPTION ORDERING NUMBER

Spectron 600T230 V, 50 Hz D15501000115 V, 60 Hz D15502000

Spectron 600D230 V, 50 Hz D15503000115 V, 60 Hz D15504000

Spectron 600DS230 V 50 Hz D15505000115 V, 60 Hz D15506000

Note: Appropriate electrical supply cable should be requested at time of order.

ACCESSORIES ORDERING NUMBER

CartStandard cart D15501500Stainless steel cart D15505500

Hand held remote D15501510Vacuum sniffer probe D15501520Hard travel case D15501530External roughing option kit D15501540Visco probe D15501550

SPARES ORDERING NUMBER

Maintenance kit600T D15501800600D D15503800

Source rebuild kit D15501815Filament kit, box of 5 D15501820

446 (17.56)

527 (20.75)38

1 (1

5.00

)

432

(17.

01)

158 (6.22) 228 (8.98)

277 (10.91)

356 (14.02)


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SPECTRON 300E PORTABLE LEAK DETECTOR

• Widest detection range 4000 to 4 10-10 mbar l s-1 - finds both large and small leaks without costly accessories

• Stable signal - even at high sensitivity• Fast - ready to operate within 5 minutes• Easy operation - vacuum or overpressure testing• Unique pumping system needs no liquid nitrogen• Fast response with rapid Helium clean up• Single handed leak detection - visco probe and spray probe can be fitted

to hand-held read-out unit• Rugged unit designed for industrial conditions

BOC Edwards Spectron 300E portable makes possible fast, effective leak detection over the range 4000 to 4 10-10 mbar l s-1 without liquid nitro-gen.

Together with the lightweight hand-held module, the Spectron 300E represents a simple to use, readily portable and reliable wide range leak detector.

Double pump systemThe Spectron 300E employs a unique double diffusion pump system for high performance combined with rugged reliability. One of the BOC Edwards E040 air cooled diffusion pumps continuously pumps the mass spectrometer head through a special restrictor. The other pumps the test piece. The high compression ratio achieved gives a fast response and very fast clean-up times unaffected by helium in the backing line. In addition, the sensitivity of the Spectron 300E is independent of the size of the backing pump used.

Process control moduleBOC Edwards’ experience and expertise has been employed to develop a control system based on the successful process control module used with the Spectron 5000. The system is simple to use at any level of control, with keylock facilities to prevent tampering, which is particularly important for a portable instrument.

The alpha-numeric display has been made 50% larger for clearer viewing at a distance and there is a standard recorder output to enable a permanent record to be made.

Unparalleled rangeThe Spectron 300E is a complete unit which gives the best specification without having to buy extras.

The massive, gross and fine test modes, all built into the unit, cover a range of 4000 to 4 10-10 mbar l s-1 and the maximum intake pressure is one atmosphere. The minimum detectable leak rate is unaffected by the size of the backing pump. Clean-up time and stability are superior to other units.

A larger roughing pump can be fitted to the trolley for rapid evacuation of larger volumes. This will not affect the sensitivity.

PortabilityThe Specton 300E is a strong, rugged leak detector designed to operate in dirty industrial conditions as well as clean research areas.

Spectron 300E features fold-down carrying handles but for those applica-tions where the unit is likely to be in demand over a large site a specially designed trolley accessory is available. The trolley runs easily on large ‘go anywhere’ wheels and features a handy lockable storage space for instru-ments, accessories and tools.

Single handed leak detectionThe hand-held control module has been designed to be as small as possible yet give all the information and control an operator will need as far away as 25 m from the leak detector.

BOC Edwards has also designed a visco probe and spray probe which can be fitted to the hand-held control module enabling single handed leak detection.

The visco probe is pumped by the E2M1.5 backing pump interstage; no need for costly auxiliary pump.


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The hand-held control module features a linear 50 segment bar graph readout of leak rate with exponent for ‘at a glance’ leak detection. The module will give an indication of valid test mode and there are four con-trols for manual/auto ranging and zeroing. There is also a socket for head-phones for the audio output when working in noisy environments. When not in use the control module can be attached to the vacuum module so that its display/controls conveniently complement the controls on the front panel.

Test recordingA data logger can be connected to the RS232 port.

Service and maintenanceThanks to the well thought out and easily accessible interior the Spectron 300E is simpler, easier and less costly to maintain than many other portable leak detector units. The mass spectrometer head will require little main-tenance since it is kept clean by use of special techniques to reduce the contaminants entering the mass spectrometer chamber.

ApplicationsTypical applications for the Spectron 300E will be found at• semiconductor production sites• chemical and power plants• vacuum furnace installations• high energy physics establishments• space simulation laboratories• nuclear research centers• refrigeration installations• any type of industrial vacuum system

TECHNICAL DATA

Minimum detectable leak rate (AVS)(air equivalent) 4 10-10 mbar l s-1

Response time (blanked test port,except on most sensitive range) 1 second Range (using massive, gross andfine test modes) 4000 to 4 10-10 mbar l s-1

Auto calibration with external reference leakTest port NW25Backing/roughing pump E2M1.5Masses 2, 3 and 4Secondary pumps Two special EO40/55 air cooled with

high helium compressionAnalog/recorder output 0 - 5 V fsdVacuum gauges

Manifold pressure Pirani PRM10KBacking pressure ThermocoupleHigh vacuum Pirani PRL10KMass spectrometer Integral ion gauge

Size 450H 600W 340D

ValvesGross, test, roughing PV10EKAir admit, backing PV5EK

Weight 45 kg / 99 lbVoltage variants 220/240 V 50/60 Hz

110 V 50/60 Hz115 V 50/60 Hz

Temperature range 12 C to 32 CHumidity 10 - 90%



Spectron 300E portable leak detector including rotary pump220/240 V, 1-phase, 50/60 Hz D15471000110 V, 1-phase, 50/60 Hz D15473000115 V, 1-phase, 50/60 Hz D15474000


Headphones D15471370Trolley (without pump) D15471500Vacuum sniffer probe D16955000Visco probe D16959000Spray probe MK II D16912000Powder leak with isolation valve D16315000Powder leaks for above:

5 10-5 to 8 10-6 mbar l s-1 (red) D163050008 10-6 to 3 10-6 mbar l s-1 (blue) D163060003 10-6 to 1 10-6 mbar l s-1 (yellow) D16307000

Quartz helium reference leak (typically 2 10-8mbar l s-1)

D32107000

Trolley pump connection kit D15471530Auxiliary pump connection kit D15471540Hand-held unit extension lead 12.5 m D15471750Spares kit for 300E D15471800Ion source D15420100Spare filaments (pack of 2) D15420102Preamplifier assembly D15471150


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SPECTRON 5000 CONSOLE LEAK DETECTORS

Choose from four standard Spectron 5000 leak detectors:• All with dynamic range• With or without liquid nitrogen• Ultra high vacuum version• Rapid cycling model• User programable menus• Modular design allows easy customizing

Spectron 5000S For all industrial and general applications requiring vac-uum leak detection from 900 down to 10-11 mbar l s-1. It offers over-pres-sure leak detection down to 5 x 10-9 mbar l s-1 with the sniffer probe accessory.

Spectron 5000X This is a variant of the 5000S for ultra high vacuum applications and where high helium ambient conditions are encountered, for example, in the testing of cryostats. The critical seals in the 5000X mass spectrometer are metal seals.

Spectron 5000E-NL This unit is designed to give optimum perfor-mance where liquid nitrogen is not available. Sensitive down to10-9 mbar l s-1 this model will usually be the most convenient detector for testing large dry systems.

Spectron 5000S-SF This detector is optimized for fast, high throughput testing of small sealed devices like semiconductor devices, opto-electron-ics and quartz crystal packages.

Spectron accessories Accessories include Gas Spray Probe, Visco and Vacuum Sniffer Probes, Quartz and Powder Reference leaks, communica-tions connectors and extension leads.

The optimized design of the Spectron 5000 ensures the best performance for all types of leak test. Spectron 5000 is the ideal unit for general leak proving and for pin-pointing and measuring the largest or smallest leaks.

Easy-to-read displays on the process control module comprise a direct digital readout of leak rate supplemented by a clear analog bar graph and exponent display. The flip cover prevents accidental operation of the less

frequently used key-pads. Spectron 5000 can be operated from the con-sole front panel or the process control module.

The reliable leak detector for industryThe rugged, reliable Spectron 5000 is designed to match industry require-ments for rapid processing to specified standards, simple operation, high reliability with easy maintenance and low cost of ownership. The Spectron 5000S or the no liquid nitrogen 5000E-NL are suitable for all styles of vacuum leak detection and over-pressure applications using the sniffer probe accessory. For rapid cycling, the Spectron 5000S-SF is ideal for test-ing small sealed components.

A special feature, called ‘Rapid Reject’, operates when the leak is so large that ordinary leak detectors would be overwhelmed and saturated with search gas. Spectron 5000 responds by immediately rejecting the part and terminating the test. This protects the unit, saves time and ensures that massively leaking parts are rejected before complete evacuation.

... and for the laboratoryThe versatility of the Spectron 5000 makes it ideal for the wide variety of leak detection applications encountered in the laboratory. The Spectron 5000S is best for general applications requiring vacuum or over-pressure leak detection. For the very stringent specifications necessary, for exam-ple, in testing ultra high vacuum systems or components, the metal sealed Spectron 5000X offers a high sensitivity feature which enables leak detec-tion down to 2 x 10-12 mbar l s-1 with liquid nitrogen. The Spectron 5000X is also appropriate for operation in high helium ambient conditions encountered in the testing of cryostats, and also for hydrogen or helium 3 leak search.

Chemical processing and metallurgical systemsThe Spectron 5000E-NL, which does not require liquid nitrogen, will usually be the most convenient model for leak testing vacuum furnaces and large systems characteristic of the process industries. Using the Visco probe accessory for over-pressure testing, leaks can be detected down to 3.5 x 10-7 mbar l s-1 up to 25 metres away from the main console unit. In applications with difficult access, we recommend the Spectron 300E portable detector, see page 15-5.

FeaturesUnrivalled leak measurement range The Spectron 5000 has four test modes which automatically span 14 decades from 900 to 2 x 10-12 mbar l s-1 and provide direct readout of leak rate for massive, gross, fine and high sensitivity leaks. There is comprehensive dynamic over-lap between leak test modes and testing can go down into the 10-9 mbar l s-1 range without liquid nitrogen. Leak rate units can be pre-selected from atm cc/s, mbar l s-1, Pa l s-1, Pa m3s-1, Torr l s-1, g yr-1, ppm concentration or mole s-1.

Comprehensive operator displays For easy observation of leak rate, program options and diagnostics, there is a direct digital readout, with dig-ital LED display of the exponent. There is also a clear analog bar graph readout. A continuous LED array indicates the current test mode (massive, gross, fine or high sensitivity).


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Simple, single button testing After pressing the ‘TEST’ button, the correct test mode and increasing sensitivity will be selected automatically to accommodate any inlet pressure from atmospheric pressure down-wards. Leak rate is then displayed with audible signal if required. The unit can be pre-programed to give auto finish and auto vent. Alternatively, press ‘FINISH’ to terminate the test.

Modern communications interfacing Spectron 5000 meets require-ments for computer links and test data traceability to meet international quality standards. Output ports are conveniently grouped on a panel at the rear of the console and comprise:

• Link the RS232 port to a PC to allow remote operation of the Spectron 5000. Data can be imported into a spreadsheet for which BOC Edwards can provide customized Supervisory Control And Data Acquisition (SCADA) program based Windows™ software.

• Select and use the parallel command status port option to interface to your system controls. The PCSP has eight relay outputs (OK/prompt, Accept, Reject, Fine, Ready, Auxiliary, Gross, Massive) and eight opto-inputs (Finish, Test, Close down, Proceed, Stand-by, Calibrate, Peak, Zero).

• Select the printer port option to print data, calibration and test results directly from the Spectron 5000.

• Chart recorder output, available from the rear of the process control module.

• A headphones connection is also provided at the rear of the process control module, to allow the operator to hear the audio signal above ambient noise.

Automated operation and rapid cycling The unit is preset for auto-matic start-up, tuning and calibration prior to leak testing, so the Spectron 5000 is ready for use at the start of a shift. The Spectron 5000S has a specially designed vacuum system giving a 6 second cycle time to fine leak test with a small volume. Response time in fine leak mode is less than one second. A 30 m3h-1 roughing pump can be fitted giving higher speed for rough pumping larger volumes. After each test the Spectron 5000S and 5000X automatically switches to high speed pumping to ensure the fastest clean-up time.

Other features include:

• Single button start-up • Automatic zero • Automatic tuning • Automatic calibration • Automatic ranging • Auto gas ballast • Large work surface

High quality design and manufactureA combination of microprocessor monitoring and unique system design ensures that even in the event of accidental inlet of atmospheric pressure or power failure, the Spectron is protected automatically and returns to a ready-to-use condition.

Spectron 5000 has been designed and built to meet very high standards including IEC1010, MIL STD810E, EN50081-1 EMC emission and EN50082-2 EMC immunity, together with all appropriate EU directives. The factory where Spectron 5000 is manufactured is certified to ISO9001.

The Spectron 5000 has been subjected to extensive and stringent environ-mental testing to ensure that its performance and integrity are maintained under extreme operational or transport conditions.

Spectron 5000 features roughing, testing and air admittance valves with a life ofover 1 million cycles with 95% certainty level. A single machined block reducesthe number of internal seals required, and reduces the background helium leveldue to the ‘O’ ring permeation.

Customer careEasy servicing To keep your leak detector in the best working condi-tion, the Spectron 5000 is designed for easy and efficient servicing. Both side and front panels are easily removed for convenient access to the main components. Removal of the front panel allows immediate checking of the rotary pump oil levels. The worktop can also be removed for access.

During production, the performance parameters of each unit are recorded. A copy of this record accompanies the product manual and acts as a performance reference for servicing. The serial number, build numbers and all the original parameters can be displayed on the process control.

Self cleaning ion source The ion source is continuously heated to pre-vent contaminants being deposited in critical areas thus increasing the interval between source maintenance.

Dual filaments The Spectron mass spectrometer is fitted with a self aligning dual filament ion source. If the working filament fails during a test, you simply change to the second filament by key-pad selection and com-plete the test.


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Oil mist filters are standard For user comfort and safety, oil mist fil-ters are fitted to the rotary pumps as standard on all models.

On-site recalibration Our service engineers can recalibrate the inter-nal reference leak against a certified standard leak. The leak detector need not leave the site.

International support BOC Edwards offers a range of service options including a service contract based on call-out servicing after a number of elapsed hours to ensure that Spectron 5000 units remain in top condition for the industrial user.

TECHNICAL DATA

All Spectron 5000 leak detectors have the following features: helium reference leak, process control module and communication ports. Other features of individual units are given below. Standard 5000SFeatures Fluoroelastomer seals

NW40 test portLiquid nitrogen trap

Detectable leakMassive 9 x 102 - 1 x 10-4 mbar l s-1

Gross 9 x 10-1 - 3 x 10-9 mbar l s-1

Fine 9 x 10-3 - 2 x 10-11 mbar l s-1

High sensitivity 9 x 10-4 - 2 x 10-12 mbar l s-1

Pumping systemRotary roughing E2M18Rotary pump E2M1.5Diffusion pump E203D

Metal Sealed 5000XFeatures Metal seals

NW40 test portLiquid nitrogen trap


Gross 9 x 10-1 - 3 x 10-9 mbar l s-1

Fine 9 x 10-3 - 2 x 10-11 mbar l s-1

High sensitivity 9 x 10-4 - 2 x 10-12 mbar l s-1


SuperFast 5000S-SFFeatures Fluoroelastomer seals

Rapid testLarge flip-top chamberLiquid nitrogen trap


Gross 9 x 100 - 3 x 10-8 mbar l s-1

Fine 9 x 10-3 - 2 x 10-11 mbar l s-1


No liquid nitrogen 5000E-NLFeatures Fluoroelastomer seals

NW40 test portsDetectable leak

Massive 9 x 102 - 1 x 10-4 mbar l s-1

Gross 9 x 100 - 3 x 10-9 mbar l s-1

Fine 9 x 10-3 - 2 x 10-10 mbar l s-1

Pumping systemRotary roughing E2M18Rotary pump E2M1.5Diffusion pumps E203D and EO50



Standard 5000S115 V 60 Hz L18010010200 V 50/60 Hz L18110010220 V 50/60 Hz L18210010240 V 50 Hz L18310010

Metal Sealed 5000X115 V 60 Hz L18010030200 V 50/60 Hz L18110030220 V 50/60 Hz L18210030240 V 50 Hz L18310030

SuperFast 5000S-SF115 V 60 Hz L19012010200 V 50/60 Hz L19112010220 V 50/60 Hz L19212010240 V 50 Hz L19312010

No liquid nitrogen 5000E-NL115 V 60 Hz L17010010200 V 50/60 Hz L17110010220 V 50/60 Hz L17210010240 V 50 Hz L17310010


Filaments spares (set of 2) D15420102Replacement ion source D15420180


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SPECTRON 5000 ACCESSORIES

GAS SPRAY PROBE

A gas spray probe with pushbutton valve for use on evacuated test pieces. Supplied with 2 metres of plastic tube for connection to a pressure regu-lator on the gas cylinder.

VACUUM SNIFFER PROBE

Connected to the Spectron test port, this probe is for over-pressure testing. The response time is about 2 seconds and leaks down to 5 10-9 mbar I s-1 can be located.

VISCO SNIFFER PROBE

The Visco Sniffer probe (three probe lengths and fittings supplied in a convenient pouch).

For over pressure testing up to 25 metres away. On locating a leak, helium is rapidly transferred to a test port gas sampler under viscous flow.

QUARTZ REFERENCE LEAK

External reference leaks are used for calibrating leak rates and response times on large systems. Typical leak rate 2 10-8 mbar l s-1 at 20 C(specified for each leak). Can be supplied with traceable calibration certif-icate (details on request).

POWDER CHECK LEAKS

‘STICK’ TEST CHAMBER

Horizontally mounted in any orientation, the 36 mm diameter chamber allows multi-stick tests of integrated circuit packages mounted in carriers of up to 625 mm long. Closing the door starts the test cycle and a spring back plate assists unloading.

TRAPPED VOLUME LEAK DETECTION (TVLD)

BOC Edwards has developed patented testing of sealed items, such as air-bag inflator canisters, using an accessory for Spectron which can be inter-nally or externally mounted.

TVLD is especially useful for rejecting sealed parts with large volume leaks prior to the conventional helium testing but it may not increase overall cycle times.

Contact BOC Edwards for more details.



Gas spray probe (MkII) D16912000



Vacuum sniffer probe (NW40 connection) D16955000

Sensitivity (3% fsd) 3 10-7 mbar l s-1

Delay time3 m 1 s12 m 3 s25 m 7 s



Visco sniffer probe D16958000



Quartz reference leak (NW40 connection) D32108000

Type Leak rate range(all individually calibrated) (mbar l s-1)Red 5 10-5 to 8 10-6

Blue 8 10-6 to 3 10-6

Yellow 3 10-6 to 1 10-6



Powder check leak (NW40) D16317000Red compressed powder leak D16305000Blue compressed powder leak D16306000Yellow compressed powder lead D16307000



Stick test chamber (for Spectron 5000S-SF) D15441500Stick test chamber adaptor kit (for Spectron 5000S-SF) D15441105



Process control module extension lead (12 m) D15481743RS232 modem lead (5 m) D15481749RS232 IBM personal computer lead (5 m) D15481750Printer leads D15481752


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QLD MODULAR LEAK DETECTOR

BOC Edwards’ QLD modular leak detection system is designed to provide fast, accurate and easy-to-control testing for high throughput production lines and other semi-automated leak testing applications. Developed through close collaboration with production line integrators and experi-enced manufacturing engineers, the QLD system uses BOC Edwards’ state-of-the-art vacuum components to provide flexible, reliable solutions to a wide range of leak testing applications in many industries:• Automotive• Air bag inflators• Aeronautical• Electrical• Heat exchangers• Electronics• Chemical• Refrigeration and air conditioning• Food packaging• Pharmaceutical and medical

Sampling module• Compact mass spectrometer/turbo pump module with choice of high

vacuum pump• Small footprint, flexible installation• Fast cycling

At the heart of the QLD system is BOC Edwards’ field proven mass spec-trometer-based sampling module. Used to leak test nearly a billion parts to date, BOC Edwards’ ultra-stable electronics and unique self cleaning ion source have made this component an industry standard. The mass spec-trometer head is coupled to an BOC Edwards EXT70 turbomolecular pump in a compact arrangement which allows easy integration into any production line. In applications where fastest cycle times are demanded, the sampling module can be configured with an EXT70H hybrid pump and mounted directly to the sample chamber in nearly any orientation.

QLD’s wide sampling range and fast response time makes it the modular system of choice for a wide range of industrial leak testing applications.

Electronics control module• Standard 2U 19" wide enclosure, rack mountable• Universal power compatibility• Can be used remotely up to 5 m from sampling module

System electronics are housed in a standard 19" wide rack-mountable enclosure. This module can be installed up to 5 m away from the sampling module, thereby allowing maximum flexibility in production line layout for the system builder or retrofit designer. In order to satisfy most power requirements, the QLD system is available with a universal power supply of 90 - 253 V, 50/60 Hz.

Roughing and backing modules• Wide range of BOC Edwards pump options• Dry option available• All pumps sized to the application

As a recognized technology leader in the design, manufacture and opera-tion of vacuum pumps, BOC Edwards offers a full range of pumping solu-tions to satisfy the most challenging leak testing applications. From our small (3.4 to 8.4 ft3min-1, 5.8 to 14.2 m3h-1) RV pumps to our larger (12.1 to 172 ft3min-1, 20.5 to 292 m3h-1) EM pumps, BOC Edwards manufac-tures a performance and cost optimized solution to your most demanding roughing and backing pump requirements.

In applications where oil-free pumps are required to inhibit helium back-ground build-up, BOC Edwards’ dry pumps are the logical choice. With an installed base of more than 40000 such pumps worldwide, BOC Edwards is the recognized leader in dry pump design, manufacture and operation. All ESDP-series dry pumps used in QLD systems satisfy the unique demands of leak detection and are backed by BOC Edwards’ extensive applications and field support networks.

QLD sampling module.


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Display and communication module• BOC Edwards PLC-Link software provides direct PLC control of all

system functions• Display modules show system status and provide local operator control

of key system functions• Full range of system set-up, control and diagnostic screens

On-line leak detection systems are often plagued by slow, inflexible, non-intuitive communications and control interfaces. BOC Edwards again pushes the state-of-the-art with its unique PLC-Link software. Designed to provide direct control of all leak detector functions and data communica-tions via a programable logic controller, PLC-Link provides the fastest, most intuitive interface of any leak detector.

Loaded into a PLC, the PLC-Link provides direct control of all leak detec-tor functions (zero, peak, calibration, etc.) and direct access to real time data (leak rate, background level, etc.) via Allen-Bradley’s Data Highway Plus network, Device Net, or similar products. PLC manufacturers’ display modules can be configured with a series of highly intuitive, user friendly screens which allow manual control of system functions and which provide real time display of system status, error conditions, data reports, and so forth.

Options and accessoriesThe QLD system is further optimized through the use of several configu-ration options and accessories:

Massive Leak Mode A BOC Edwards innovation, this option allows leak testing to commence at near-atmospheric pressure, thereby providing early indication of large leaks and the ability to terminate the test before the system can be poisoned.

Visco Probe Designed for use in overpressure applications, this acces-sory provides fast response and can be used up to 25 m away.

Trapped Volume Module This patented system is used to verify the integrity of parts where large leaks and long queue times may combine to render a helium test inconclusive. It is also used to provide a quality check on the helium fill process and hardware.

Local Display Module When plugged into the Electronics Control Module, this accessory provides local read out of leak rate.

BOC Edwards PLC-Link software Available for most PLCs in flash EPROM, PCMCIA or floppy disk formats.

Design, installation and trainingIn addition to state-of-the-art equipment, BOC Edwards offers something unique in the leak detector industry - peace of mind. Using the latest com-puter design and modelling techniques, our design and applications staff can assist in system configuration and operation. Our renowned Vacuum Training Center provides a broad range of practical, hands-on courses and our worldwide service organization is trained and equipped to provide rapid response to any requests.

All QLD systems are fully assembled and tested by BOC Edwards and are shipped with all appropriate test data. Further, all systems use BOC Edwards vacuum components exclusively, thereby eliminating third-party equipment problems and ensuring high reliability and service support. Lastly, all BOC Edwards products are in compliance with CE mark certifi-cation requirements.

All QLD systems are configured to meet application-specific requirements. The QLD selection matrix guides you through the choices of pump, display and communications. BOC Edwards staff will be pleased to advise you fur-ther.

TECHNICAL DATA

Sensitivity1 10-2 - 10-9 mbar l s-1

Measurement limitsAmplifier drift <0.3% fsd after warm upNoise <2.5% fsd after warm up

Response time limits (for helium)2 <0.5 seconds for Fine TestStart-up/close down times

Warm-up time to Ready 2 minutesTime to Closed Down 20 seconds

Maximum test pressureEXT70H <10 mbarEXT70 <0.5 mbar

Maximum internal pressure 1500 mbar absoluteMaximum surface temperature

(at an ambient of 40 C) 70 CVacuum unit

Width 208 mmDepth (without EXT70 lead fitted) 300 mmHeight (with MS head lead fitted) 435 mmMass 12.5 kg (27.5 lbs)Maximum acoustic noise emission <70 dB (A)

Electronics Control ModuleWidth 430 mmDepth 240 mmHeight 123 mmFront panel size (2U) 483 132 mmMass 5.8 kg (12.8 lbs)PLC dimensions On request

Single phase power supply 90/253 V, 50/60 HzCurrent with EXT70 pump operating 2.0 AElectrical supply (not supplied) IEC to EN60.320 / BS4491Backing port NW16

1 Standard leak detection range with EXT70

2 measured in accordance with AVS standard 2.1


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LE

AK

DE

TE

CT

ION

ORDERING INFORMATIONTurbomolecular pump0 EXT701 EXT70H

Mode0 Fine1 Massive and fine

Voltage supply0 115 V1 200 V2 230 V

Roughing pumpNone 0E2M18 1E2M28 2ESDP30A 3

Backing pumpNone 0E2M18 1E2M28 2E2M1.5 3ESDP12 4

DisplayNone 0ABPV550 1Siemens 2Mitsubishi 3GE 4

CommunicationsPLC link 0AB5/04 1Siemens 2Mitsubishi 3GE 4


Massive kit D15483800Trapped volume module kit D15483801Handset D154830802 m electrical supply cable (no plug) D385011025 m extension cable for 19 inch rack D154830735 m turbo pump cable to 19 inch rack D39618050Visco probe kit D16959000Quartz leak (typically 2 10-8 mbar l s-1) D32107000Powder leak fitting kit D16315000Compressed powder leak - RED D16305000Compressed powder leak - BLUE D16306000Compressed powder leak - YELLOW D16307000PLC link software1 D15483802Panel view software1 D154838031 If the PLC and Display Module are purchased from BOC Edwards, the software is pre-loaded.


Filament spares (set of 2) D15420102Ion source replacement D15420400Ion source kit D15420103

L2 – –


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GASCHECK 3000, 3000is, 5000 and 5000is

GasCheck 3000is GasCheck 5000

Introduced as an enhanced replacement for the popular GasCheck B4 and B4is, the GasCheck 3000 and 3000is incorporate the following new features:-• A new backlit dot matrix LCD for improved viewing in poor lighting.• Leak rate indication by both flashing LED and sounder, for easier use in

all environments.• A new tactile keyboard with fewer keys, for improved feel and simpler

use.• Improved temperature stability for better performance in uncontrolled

areas.

The new GasCheck 5000 and 5000is incorporate, in addition to the above enhancements, the following features:-• Fully user programable, including selectable units and alarm level, for

maximum flexibility.

Industrial leak detection of all gasesThe new GasCheck range provides automatic and direct display of gas leak rates. At the heart of these instruments is a sensor which can detect any gas that has a different thermal conductivity to that of air, resulting in a highly sensitive instrument which is both reliable and compact.

GasChecks are battery operated, making them highly portable. The GasCheck 3000is and 5000is models are intrinsically safe for use in hazard-ous areas or for the detection of flammable gases.

GasChecks detect and accurately display leak rates of gases in five different groups. Gases are grouped according to their responses, enabling selection of the most appropriate group for the application.

Features

APPLICATIONS

Typical applications are:-• Leak detection of welds, joints, seams and gaskets on components that

are pressurized with a traceable gas such as helium or carbon dioxide• Valve emission evaluation to EPA (environmental protection agency)

method 2.1• Leak testing refrigeration plants• Safety checks on cylinders or aerosols• Use in mass spectrometry and gas chromatography• Leak detection of domestic and industrial combustible gas installations,

equipment, meters, valves and controls (3000is and 5000is version only)

Calibrated portable reference leaksPortable reference leaks may be used to calibrate GasChecks. These are refillable with helium or R134a, have a typical leak rate of 3 x 10-4

mbar l s-1 and are traceable to NAMAS standards.

TECHNICAL DATA

• Direct reading of leak rate

• Audio and visual signal

• Selection of 5 gas groups

• High sensitivity 2 x 10-5 ml s-1 He• Fast response 1 second (typically)• Peak hold facility• Choice of units 3000 & 3000is ml s-1

• 5000 & 5000is ml min-1, ml s-1, ft3yr-1, ppm, sccm, mm3s-1 & mm3min-1

• Fully user programable option 5000 & 5000is• Data logging option 5000 & 5000is• Intrinsically safe option available

for hazardous T4 rated conditions 3000is & 5000is

Detector Dual micro-volume thermalconductivity cell

Minimum detectable limit 1 x 10-5 ml s-1 (17 gyr-1, 760 ppm)R134a2 x 10-5 ml s-1 Helium

Response timeShort probe <1 sLong probe 9 s

Recovery time 1 sBatteries 4 off AA type alkalineTemperature range

Operating 3000 & 5000 0 to 50 °C3000is & 5000is 0 to 40 °C

Storage -25 to 70 °CDimensions

Length with 110 mm, short probe 385 mmLength with 300 mm, long probe 575 mmStorage case 420 x 320 x 97 mm

WeightUnpacked 1.6 kg (3.5 lbs)Packed 0.5 kg (1.1 lbs)

StandardsIntrinsic safety EN 50014, EN 50020 (3000is & 5000is

only)Electrical noise immunity EN 61326, class B emissions



GasCheck 3000 D14130000GasCheck 3000is D14130100GasCheck 5000 D14131000GasCheck 5000is D14131100


Reference leak for R134a Call for detailsReference leak for Helium Call for details


Short probe D14128801Long probe D14128802Replacement battery holder D14130802Nozzle D14130800Nozzle (3000is and 5000is version only) D14130801

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