Proceedings

International Conference on

MEMS, NANO and Smart Systems

July 20 to July 23, 2003

Banff, Alberta, Canada

Co-Sponsors

iCore, Canada

MANCEF, USA

Micronet R&D, Canada

National Institute of Nano Technology, Canada

University of Alberta, Canada

University of Calagry, Canada

Edited by

Wael Badawy, University of Calgary, Canada

Walied Moussa, University of Alberta, Canada

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v

Table of Contents International Conference on MEMS, NANO and Smart Systems (ICMENS 2003)

Message from the Chairs ............................................................................................................................xi

Conference Committees ............................................................................................................................xii

Session M1

Biologically Inspired Intelligent Robots Using Artificial Muscles.............................................................................2

Y. Bar-Cohen

Session M1A

Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcompoents by

Deep and Ultra Deep X-ray Lithography .................................................................................................................10

L. Jian, B. Loechel, H. Scheunemann, M. Bednarzik, Y. Desta, and J. Goettert

Finite-Element Modeling of Shape Memory Alloy Components in Smart Structures,

Part I: Non-linear Coupled Field Finite Element Procedure.....................................................................................15

M. Serry, W. Moussa, and D. Raboud

Ultrasonic/Sonic Sampler and Sensor Platform for In-situ Planetary Exploration ...................................................22

Y. Bar-Cohen, X. Bao, Z. Chang, and S. Sherrit

On The Design of an Electronic Mosquito: Design and Analysis of the Micro-needle............................................32

R. Sharaf, P. Aggarwal, K. Kaler, and W. Badawy

Session M1B

High Vertical Aspect Ratio Liga Microwave 3-DB Coupler....................................................................................38

A. Kachayev, D. Klymyshyn, S. Achenbach, and V. Saile

Femtosecond Laser Induced Forward Transfer of Materials ....................................................................................44

C. Germain and Y. Tsui

Direct Writing of Self-Assembled Monolayers on Gold Coated Substrates Using a CW Argon Laser ...................48

S. Kirkwood, M. Shadnam, R. Fedosejevs, and A. Amirfazli

Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications ...............................................53

R. Fedosejevs, M. Argument, A. Sardarli, S. Kirkwood, R. Holenstein, and Y. Tsui

Session M2A

Molecular Dynamics Calculations of the Electrostatic Properties of Tubulin and

Their Consequences for Microtubules......................................................................................................................56

J. Tuszynski, E. Carpenter, E. Crawford, J. Brown, W. Malinski, and J. Dixon

Optimizing the Performance of Electrostatic Comb-Drive Actuators Using Neural Networks................................62

H. Ahmed and W. Moussa

vi

Effects of Electrostatic Charge Accumulation during MEMS Fabrication...............................................................69

A. Antoniu, M. Salomons, and N. Reus

Electrostatic Deflections of Volume Constrained MEMS........................................................................................76

J. Pelesko and G. Goldsztein

Session M2B

Smart Materials: Applications of Nanotechnology in Drug Delivery and Drug Targeting ......................................82

R. Löbenberg

Determination of Contact Angle of Microspheres by Microscopy Methods ............................................................84

R. Mohammadi, W. Finlay, W. Roa, and A. Amirfazli

Development of a Humidity Microsensor with Thermal Reset ................................................................................89

A. Ahsan, C. Lange, and W. Moussa

A New Design for Coating Thin Film Alumina on Stainless Steel for Biomedical Applications ............................94

A. Dolatabadi, J. Mosatghimi, and V. Pershin

Session M3A

RF MEMS Switch for Wireless LAN Applications ............................................................................................... 100

K. Lee and B. Kim

RF MEMS Devices................................................................................................................................................. 103

R. Mansour, M. Bakri-Kassem, M. Daneshmand, and N. Messiha

On the Role of Machine Learning Algorithms in Developing MEMS Components.............................................. 108

D. Asmar, M. Moussa, and J. Zelek

A New Class of Tunable RF MEMS Inductors ...................................................................................................... 114

I. Zine-El-Abidine, J. McRory, and M. Okoniewski

Session M3B

Transition of MEMS Technology to Nanofabrication............................................................................................ 118

S. Jakeway, H. Crabtree, T. Veres, N. Cameron, H. Luesebrink, and T. Glinsner

Success Factors in Commercializaing University MEMS Technology through the WTC’s

Microfabrication Laboratory .................................................................................................................................. 123

K. Ritala and E. Miller

Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS........................................................... 128

X. Zhu

Novel Backend Singulation Tenchniques to Enable Commercialization of Optical MEMS.................................. 131

J. Aberson, P. Cusin, J. Wylde, R. Hickey, and H. Fettig

Session T1

High-Sensitive Magnetic-Field-Sensing Materials Composed of Metal/Semiconductor

Hybrid Nanostructures............................................................................................................................................ 134

H. Akinaga

vii

Session T1A

Spin Detection and Injection Using Ferromagnetic Metal and Semiconductor Hybrid Structure .......................... 142

T. Manago

Parametric Excitation of Spin Waves in Bismuth-Substituted Yttrium Iron Garnet Films

Using the First-Order Suhl Instability .................................................................................................................... 148

S. Irvine and A. Elezzabi

Numerical Study of Effects of Cellular Nanostructure on Scattered Light............................................................. 153

C. Liu, C. Capjack, W. Rozmus, K. Singh, and C. Backhouse

Relaxor Properties of TlInS2 <Fe> Composites with Nanodomain State ............................................................... 159

A. Sardarli, I. Filanovsky, R. Sardarli, O. Samedov, I. Sadigov, and I. Aslanov

Session T1B

Lattice Gas Automata Simulation of Atomistic Surface Growth............................................................................ 164

R. Budiman, A. Gerisch, A. Lawniczak, H. Ruda, and H. Fuks

Three-Dimensional Square Spiral Photonic Crystals Nanostructures by Glancing Angle Deposition................... 165

S. Kennedy, M. Jensen, and M. Brett

Direct Production of Gratings on Polymers Using UV Laser Radiation ................................................................ 172

R. Bryce, R. DeCorby, J. McMullin, and Y. Tsui

First Results in Patterning of Ultra High Aspect Ratio Microstructures by a

4T Wave Length Shifter at BESSY ........................................................................................................................ 177

M. Bednarzik, H. Scheunemann, D. Schondelmaier, and B. Loechel

Session T2A

Dynamics and Touchdown in Electrostatic MEMS................................................................................................ 182

G. Flores, G. Mercado, and J. Pelesko

Dynamics of an Electrically Actuated Resonant Microsensor................................................................................ 188

E. Abdel-Rahman, A. Nayfeh, and M. Younis

Equilibrium and Dynamic Behavior of Micro Flows Under Electrically Induced

Surface Tension Actuation Forces.......................................................................................................................... 197

N. Fortner and B. Shapiro

Electric Field Assisted Deposition of Nanowires from Carbon Nanotubes for

Nanoelectronics and Sensor Applications .............................................................................................................. 203

K. Sivakumar and B. Panchapakesan

Session T2B

MEMS Spring Probe for Next Generation Wafer Level Testing............................................................................ 214

K. Lee and B. Kim

Translation of the Phase Transition Temperature in TlInS2 Crystals with Cationic Impurity Doping ................... 218

A. Sardarli, I. Filanovsky, R. Sardarli, O. Samedov, I. Sadigov, and I. Aslanov

viii

MEMS 3D Optical Mirror/Scanner ........................................................................................................................ 222

T. Zhou, P. Wright, J. Crawford, G. Mckinnon, and Y. Zhang

Programmable Multi-Task On-Chip Processing for CMOS Imagers ..................................................................... 227

F. Boussaid, A. Bermak, and A. Bouzerdoum

Session T3

Spintronics, and Electrical Spin Injection in a Two Dimensional Electron Gas..................................................... 234

M. Johnson

Session T3A

Polymeric Nanoparticles for Targeted Delivery of Therapeutic Vaccines to Dendritic Cells ................................ 242

J. Samuel, P. Elamanchili, C. Chong, M. Lutsiak, K. Newman, M. Diwan, and G. Kwon

Micromachined Needles for Microbiological Sample and Drug Delivery System................................................. 247

P. Zhang and G. Jullien

Multi-Patch: A Chip-Based Ion-Channel Assay System for Drug Screening ........................................................ 251

N. Picollet-D’hahan, F. Sauter, F. Ricoul, C. Pudda, F. Marcel, T. Sordel, F. Chatelain, and I. Chartier

A Novel PH Sensor Using Differential ISFET Current Mode Read–Out Circuit................................................... 255

Y. Ghallab, W. Badawy, and K. Kaler

Session T3B

Particle Deposition onto Solid Surfaces with Microscopic Charge Heterogeneity: The “Bump” Effect ............... 260

M. Elimelech

Understanding Bitumen Recovery from Oil Sands through Colloidal and Interfacial Phenomena........................ 261

J. Masliyah and Z. Xu

Initial Adhesion of Microorganisms to Polymeric Membranes.............................................................................. 262

S. Kang, G. Agarwal, E. Hoek, and M. Deshusses

Electrostatic Interactions between Nanoparticles in Confined Spaces:

Influence of Confining Wall Roughness ................................................................................................................ 263

P. Das and S. Bhattacharjee

Session T4B

Energetics and Strain Field of Surface Steps.......................................................................................................... 270

R. Budiman

Computational Patent Mapping: Intelligent Agents for Nanotechnology............................................................... 274

T. Yeap, G. Loo, and S. Pang

Application of Adaptive Multilevel Substructuring Technique to Model CMOS

Micromachined Thermistor Gas Sensor, Part (I): A Feasibility Study................................................................... 279

K. Sadek and W. Moussa

ix

Dynamic MEMS Measurement Using a Strobed Interferometric System with

Combined Coherence Sensing and Phase Information ........................................................................................... 285

E. Novak, D. Wan, P. Unruh, and J. Schmit

Session W1

Micro and Nano Sensors Snoop Around ................................................................................................................ 290

H. Baltes

Session W1A

Finite Element Simulation and Theoretical Analysis of Microelectromechanical System Relays ......................... 292

Y. Zhang and D. Li

Nonlinear Effects in MEMS Capacitive Microphone Design ................................................................................ 297

S. Chowdhury, M. Ahmadi, and W. Miller

Preliminary Analysis of Magnetic Shielding Design.............................................................................................. 303

G. Jiang, E. Borzabadi, and H. Barki

Microgripper: Design, Finite Element Analysis and Laser Microfabrication......................................................... 308

E. Bordatchev and S. Nikumb

Session W1B

Quantum Size Effect in Magnetic Tunnel Junctions with Single-Crystal Ultrathin Electrodes ............................. 316

T. Nagahama, S. Yuasa, and Y. Suzuki

The Emergence of High-Density Semiconductor-Compatible Spintronic Memory ............................................... 321

B. Cockburn

Evaporated Nanostructured Y2O3: Eu Thin Films .................................................................................................. 327

P. Hrudey, M. Taschuk, Y. Tsui, R. Fedosejevs, J. Sit, and M. Brett

Performance Improvement of a Magnetically Levitated Microrobot Using an Adaptive Control ......................... 332

M. Khamesee, N. Kato, Y. Nomura, and T. Nakamura

Session W2A

Conductivity in CdSe Quantum Dots and TiO2 Nanoparticles: What Can THz Spectroscopy Tell Us?................ 340

G. Turner, M. Beard, and C. Schmuttenmaer

Super-Fine Ink-Jet Printing for Nanotechnology.................................................................................................... 346

K. Murata

Measurement of the Conductivity Exponent in Random Percolating Networks of

Nanoscale Bismuth Clusters ................................................................................................................................... 350

A. Dunbar, J. Partridge, M. Schulze, S. Scott and S. Brown

On-Chip Skin Detection for Color CMOS Imagers................................................................................................ 357

F. Boussaid, D. Chai, and A. Bouzerdoum

x

Session W2B

Transient Electro-osmotic Pumping in Rectangular Microchannels ...................................................................... 364

G. Karimi and J. Culham

A Microfluidic Device with On-Chip Optical Waveguide Interrogation of Individual

Biological Cells for Medical Diagnostics ............................................................................................................... 373

K. Singh, C. Liu, C. Capjack, W. Rozmus, and C. Backhouse

Microfluidic Chips for the Molecular Analysis of Human Cancer......................................................................... 377

C. Backhouse, T. Footz, S. Adamia, and L. Pilarski

A Proposal for the Multivalued Modulation System Based on the Projection to Subspace ................................... 383

K. Murata and H. Kubota

Session W3A

Application of Adaptive Multilevel Substructuring Technique to Model CMOS Micromachined

Thermistor Gas Sensor, Part (II): Effect of Manufacturing Uncertainties in the Reliability of MEMS ................. 390

K. Sadek and W. Moussa

Design and Fabrication of Microchannels for Magnetohydrodynamic Flow ......................................................... 396

J. Bao and D. Harrison

High-Temperature Bragg Grating Waveguide Sensor............................................................................................ 400

B. Zhang and M. Kahrizi

Finite Element Modeling of a Capacitive Micromachined Ultrasonic Transducer................................................. 405

B. Kirchmayer, W. Moussa, and M. Checkel

Session W3B

Pressure-Induced Polygonization of Filled Multiwall Carbon Nanotube ............................................................... 412

C. Wang, C. Ru, and A. Mioduchowski

Benzocyclobutene (BCB) Based Intracortical Neural Implant............................................................................... 418

K. Lee, J. He, A. Singh, and B. Kim

Finite-Element Modeling of Shape Memory Alloy Components in Smart Structures, Part II:

Application on Shape-Memory-Alloy–Embedded Smart Composite for Self-Damage Control ............................ 423

M. Serry, W. Moussa, and D. Raboud

Terahertz Wave Propagation in Multiwall Carbon Nanotubes ............................................................................... 430

J. Yoon, C. Ru, and A. Mioduchowski

Author Index ..................................................................................................................................................435