HVM of UHP Organometallics

Dr. Ravi Gukathasen

What We Do

Organometallic Synthesis Experience

Define precursorsPublished DataInitial screening

Small-scale Synthesis

Evaluate Volatility and Thermal

stabilitySafety and EH&S

ManufacturingLarger-scale

Synthesis100 Kgs - Several

Metric Tons

Purify Quality

Define SpecificationsPackage in Canisters

HIGH PURITY SEMIGRADE Production

What We Do

Materials EngagementEnd User

OEM

DSCPrecursor

Manufacturing

Suppliers

Early identification and development of chemistry is vital to large scale precursor manufacture – Effects Cost of Ownership and EH&S.

• DSC develops precursors early and scales-up to HVM (kg – MT)• Provide Hi-purity semiconductor grade (>7N’s)

Rapid responseto

precursor development

Support OEMswith precursors for

deposition processes and thin film metrology

Support suppliers with high volume

precursors to validate QA and support packaging as required in high volume

Products in High Volume ManufactureIII-Vs 2014 2015 2016

1 P and As

t-butyl (alkyl) Phosphines and Arsines

DRAM and FLASH MEMORY - ALD (k=10->50) 2014 2015 2016

2 Hf/ZrO2 - TEMAH, TDMAH, TEMAZ, CpZr/CpHf - (NR2)3

TBTDET, TBTDEN (NbO, electrodes & TaCN)

3 Phase Change Memory - GeSb ( alkyl Germanium & Antimony)

Metals and Electrodes 2014 2015 2016

4

Interconnect Barriers: TiN- TDMAT, TaN-PDMAT, Cobalt- CpCo(CO)2, CCTBA

Double Patterning- Silicon oxide 2014 2015 2016

5 Dielectrics SiO2-BDEAS

Packaging and Semi-Grade 2014 2015 20166 High Purity - with semi grade ICPMS, low ppb specs7 High Purity Solid Precursor 8 Stainless Steel Container Packaging

DIGITAL SPECIALTY PRECURSORS High Volume Production

Cleanroom and Canisters

UT-ollaboration

Metric Ton / yr Production

Canister Clean and Fill High Purity Purification Pilot - Kg Scale

300+ Kgs / yr Production

Pilot - Kg Scale- Production

Kgs-Metric Ton / yr Production

Pilot - Kg Scale- Production

Metric Ton / yr Production

300+ Kgs / yr Production

Toronto, Canada

Booth S15