HFSS Spiral Inductor

Getting Started with HFSS:A Silicon Spiral Inductor

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Getting Started with HFSS: A Dielectric Resonator Antenna Problem

iii

Conventions Used in this GuidePlease take a moment to review how instructions and other useful infor-mation are presented in this guide.

• Procedures are presented as numbered lists. A single bullet indicates that the procedure has only one step.

• Bold type is used for the following:- Keyboard entries that should be typed in their entirety exactly as shown. For example, “copy file1” means to type the word copy, to type a space, and then to type file1.

- On-screen prompts and messages, names of options and text boxes, and menu commands. Menu commands are often separated by car-ats. For example, click HFSS>Excitations>Assign>Wave Port.

- Labeled keys on the computer keyboard. For example, “Press Enter” means to press the key labeled Enter.

• Italic type is used for the following:- Emphasis.- The titles of publications. - Keyboard entries when a name or a variable must be typed in place of the words in italics. For example, “copy file name” means to type the word copy, to type a space, and then to type a file name.

• The plus sign (+) is used between keyboard keys to indicate that you should press the keys at the same time. For example, “Press Shift+F1” means to press the Shift key and the F1 key at the same time.

• Toolbar buttons serve as shortcuts for executing commands. Toolbar buttons are displayed after the command they execute. For example,

“On the Draw menu, click Line ” means that you can click the Draw Line toolbar button to execute the Line command.

Alternate methods or tips are listed in the left margin in blue italic text.

Getting Started with HFSS: A Dielectric Resonator Antenna Problem

iv

Getting Help

Ansys Technical SupportTo contact Ansys technical support staff in your geographical area, please log on to the Ansys corporate website, https://www1.ansys.com.You can also contact your Ansoft account manager in order to obtain this information.All Ansoft software files are ASCII text and can be sent conveniently by e-mail. When reporting difficulties, it is extremely helpful to include very specific information about what steps were taken or what stages the simulation reached, including software files as applicable. This allows more rapid and effective debugging.

Help MenuTo access online help from the HFSS menu bar, click Help and select from the menu:• Contents - click here to open the contents of the online help.• Seach - click here to open the search function of the online help.• Index - click here to open the index of the online help.

Context-Sensitive HelpTo access online help from the HFSS user interface, do one of the follow-ing:• To open a help topic about a specific HFSS menu command, press

Shift+F1, and then click the command or toolbar icon.• To open a help topic about a specific HFSS dialog box, open the dia-

log box, and then press F1.

Contents-1

Table of Contents

1. Introduction

2. Setup Silicon Spiral Inductor ModelSetting Tool Options . . . . . . . . . . . . . . . . . . . . . 2-2Opening a New Project . . . . . . . . . . . . . . . . . . . 2-3Set Solution Type . . . . . . . . . . . . . . . . . . . . . . . . 2-4Creating the 3D Models for Dielectrics . . . . . . . 2-4

Set Model Units . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Set Default Material for Substrate . . . . . . . . . . 2-5

Create Substrate . . . . . . . . . . . . . . . . . . . . . . . 2-6

Set Default Material for Oxide Substrate . . . . 2-7

Create Oxide . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Set Default Material for Passivation . . . . . . . . 2-9

Create Passivation . . . . . . . . . . . . . . . . . . . . . 2-9

Set Default Materialfor Air Box . . . . . . . . . . . . 2-10

Create Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10

Create Radiation Boundary . . . . . . . . . . . . . . . 2-11

Create Ground . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

Assign a Perfect E boundary to the Ground . . 2-13

Hide Dielectrics . . . . . . . . . . . . . . . . . . . . . . . . 2-14

Create Spiral Inductor Geometry . . . . . . . . . . . . 2-14

Getting Started with HFSS :Spiral Inductor

Contents-2

Set Default Material . . . . . . . . . . . . . . . . . . . . . 2-14

Create Offset Coordinate System . . . . . . . . . . 2-15

Create Spiral Path . . . . . . . . . . . . . . . . . . . . . . 2-15

Create Spiral Path . . . . . . . . . . . . . . . . . . . . . . 2-17

Set Grid Plane . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Create Underpass . . . . . . . . . . . . . . . . . . . . . . 2-19

Create Via1 . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Create Via2 . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

Create Feed . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Unite Spiral Objects . . . . . . . . . . . . . . . . . . . . . 2-22

Solve Inside Conductors . . . . . . . . . . . . . . . . . 2-23

Seed Mesh Conductors set for Solve Inside . . 2-24

Set Default Material for Ground Ring . . . . . . . 2-25

Create Ground Ring . . . . . . . . . . . . . . . . . . . . 2-25

Create Inner Ring . . . . . . . . . . . . . . . . . . . . . . 2-26

Complete the Ring . . . . . . . . . . . . . . . . . . . . . . 2-27

Create Extension 1 . . . . . . . . . . . . . . . . . . . . . 2-28

Create Extension 2 . . . . . . . . . . . . . . . . . . . . . 2-29

Create Source 1 . . . . . . . . . . . . . . . . . . . . . . . . 2-29

Create Source 2 . . . . . . . . . . . . . . . . . . . . . . . . 2-30

Group the Conductors . . . . . . . . . . . . . . . . . . . 2-30

Assign Excitation for Source1 . . . . . . . . . . . . . 2-31

Assign Excitation for Source2 . . . . . . . . . . . . . 2-33

Show All . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33

Boundary Display . . . . . . . . . . . . . . . . . . . . . . 2-33

3. Analyze Spiral ConductorAnalysis Setup . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Creating an Analysis Setup . . . . . . . . . . . . . . . 3-2

Adding a Frequency Sweep . . . . . . . . . . . . . . 3-2

Save Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3Model Validation . . . . . . . . . . . . . . . . . . . . . . . . 3-3Analyze . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3


Contents-3

Solution Data . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3Create Reports . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Create S-parameter vs. Frequency . . . . . . . . . 3-4

Custom Equations – Output Variables . . . . . . . . 3-5


Contents-4

Introduction 1-1

1 Introduction

In this exercise, we will use HFSS to create, simulate, and analyze a 2.5 turn spiral inductor.

Getting Started with HFSS: Spiral Inductor

1-2 Introduction

Nominal Design:• Spiral: 2.5T, W=15um, S=1.5um, Rad=60um

M6, 2um, = 2.8e7 S/m

• Underpass: M5, 0.5um, = 2.8e7 S/m• Stackup:

Passivation: 0.7umr = 7.9

Oxide: 9.8umr = 4.0

Substrate: 300umr = 11.9, = 10 S/m

The following features of the Ansoft HFSS are used to create this passive device model• 3D Solid Modeling

Primitives: Box, Rectangles, Cylinders


Introduction 1-3

Boolean Operations: Subtract, Unite, Duplicate• Boundary

Boundary Conditions: Perfect H/Natural• Excitations

Ports: Lumped Gap Source Port• Analysis

Sweep: Fast Frequency• Results

Cartesian plotting• Fields

Fast Frequency Sweep/Field Plots


1-4 Introduction

Setup Silicon Spiral Inductor Model 2-1

2 Setup Silicon Spiral Inductor Model

This chapter describes how to build the 3D spiral inductor model in HFSS. The process includes:

Setting the Tool OptionsBuilding the substrate, passivation and air geometriesAssigning the MaterialsCreating a Radiation boundary and Perfect E boundaryCreating the spiral, vias, and ground ring.Assigning the excitation.

To access Ansoft HFSS, click the Microsoft Start button, select Programs, and select the Ansoft, HFSS 13 program group. Click HFSS 13.


2-2 Setup Silicon Spiral Inductor Model

Setting Tool OptionsIn order to follow the steps outlined in this example, ver-ify that the following tool options are set:

1 Click Tools>Options>HFSS Options.

2 In the HFSS Options window, click the General tabUse Wizards for data entry when creating new boundaries:

CheckedDuplicate boundaries/mesh operations with geometry:

CheckedAuto-assign terminals on ports: Checked

Click the OK button3 Click Tools>Options>Modeler Options.4 In the Modeler Options window click the Operation tab

Automatically cover closed polylines: Checked



5 Click the Drawing tabShow measure dialog: UncheckedOperation Data Entry Mode: PointEdit property of new primitives: Checked

6 Click the OK button

Opening a New ProjectIf there is not an empty project, you can open a new project:1 In an Ansoft HFSS window, Click File>New.

2 From the Project menu, select Insert HFSS Design.



Set Solution TypeTo set the solution type:1 Click HFSS>Solution Type

2 In the Solution Type window, choose Driven Terminal


Creating the 3D Models for Dielectrics

Set Model UnitsTo set the units:1 Click 3D Modeler>Units

2 Set Model Units:Select Units: um




Set Default Material for SubstrateTo set the default material:1 Using the 3D Modeler Materials toolbar, choose Select

This opens the Select Definition window.2 Click the Add Material button

3 This opens the View/Edit Material window.For the Material Name type: My_SubFor the Value of Relative Permittivity type: 11.9 For the Value of Bulk Conductivity type: 10

4 Click the OK button to close the View/Edit Material win-dow.

5 Click the OK button to close the Select Definition window.



Create SubstrateTo create the substrate:1 Click Draw>Box

2 Using the coordinate entry fields, enter the box positionX: -270.0, Y: -270.0, Z: 0.0, Press the Enter key

3 Using the coordinate entry fields, enter the opposite cor-ner of the box:dX: 540.0, dY: 540.0, dZ: 300.0, Press the Enter key

To set the name:1 Select the Attribute tab from the Properties window.

2 For the Value of Name type: Sub




To fit the view:1 Click View>Fit All>Active View.

Set Default Material for Oxide SubstrateTo set the default material for the oxide substrate:1 Using the 3D Modeler Materials toolbar, choose Select

2 In the Select Definition window click the Add Materialbutton.

3 In the View/Edit Material window:For the Material Name type: My_OxideFor the Value of Relative Permittivity type: 4.0





Create OxideTo create substrate:1 Click Draw>Box

2 Using the coordinate entry fields, enter the box positionX: -270.0, Y: -270.0, Z: 300.0, Press the Enter key\



2 For the Value of Name type: Oxide3 Click the OK button

To fit the view:Click View>Fit All>Active View or press the CTRL+D key



Set Default Material for PassivationTo set the default material:1 Using the 3D Modeler Materials toolbar, choose Select.

2 In the Select Definition window click the Add Materialbutton.

3 In the View/Edit Material window:For the Material Name type: My_PassFor the Value of Relative Permittivity type: 7.9



Create PassivationTo create substrate:1 Click Draw>Box




2 For the Value of Name type: Pass





Set Default Materialfor Air BoxTo set the default material:

Using the 3D Modeler Materials toolbar, choose vacuum

Create AirTo create air box:1 Click Draw>Box




For the Value of Name type: Air2 Click the OK buttonTo fit the view:



Click View>Fit All>Active View

Create Radiation BoundaryTo select the object Air:1 Click Edit>Select>By Name

2 In the Object Dialog, select the objects named: Air3 Click the OK button

To create a radiation boundary1 Click HFSS>Boundaries>Assign>Radiation

2 Radiation Boundary WindowName: Rad1



Select: Radiating Only


Create GroundTo create ground:1 Click Draw>Rectangle


3 Using the coordinate entry fields, enter the opposite cor-ner of the base rectangle:dX: 540.0, dY: 540.0, dZ: 0.0, Press the Enter key


2 For the Value of Name type: Ground





Assign a Perfect E boundary to the GroundTo select the ground:1 Click Edit>Select>By Name

2 In the Select Object dialog select the objects named: Ground

3 Click the OK buttonTo assign the Perfect E boundary1 Click HFSS>Boundaries>Assign>Perfect E

2 Perfect E Boundary windowName: PerfE_Ground



Infinite Ground Plane: Unchecked


Hide DielectricsTo hide the dielectrics:1 Click Edit>Select All Visible

2 Click View>Hide Selection>All Views

Create Spiral Inductor Geometry

Set Default MaterialTo set the default material:1 Using the 3D Modeler Materials toolbar, choose Select

2 Select Definition Window:3 Click the Add Material button4 View/Edit Material Window:

For the Material Name type: My_Met



For the Value of Bulk Conductivity type: 2.8e7



Create Offset Coordinate SystemTo create an offset Coordinate System:1 Click Modeler>Coordinate System>Create>Relative

CS>Offset

2 Using the coordinate entry fields, enter the originX: 0.0, Y: 0.0, Z: 304.8, Press the Enter key

Create Spiral PathTo create the path:1 Click Draw>Line

Using the coordinate entry fields, enter the vertex point:X: -67.5 , Y: 7.5, Z: 1.0 Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: -67.5 , Y: -67.5 , Z: 1.0 Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 84.0, Y: - 67.5, Z: 1.0 Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 84.0, Y: 84.0, Z: 1.0 Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: - 84.0, Y: 84.0, Z: 1.0 Press the Enter key



Using the coordinate entry fields, enter the vertex point:X: - 84.0, Y: -84.0, Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 100.5 , Y: -84.0, Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 100.5 , Y: 100.5 , Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: - 100.5 , Y: 100.5 , Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: - 100.5 , Y: - 100.5, Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 117.0, Y: -100.5, Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 117.0, Y: 0.0, Z: 1.0, Press the Enter keyUsing the coordinate entry fields, enter the vertex point:X: 131.0, Y: 0.0, Z: 1.0, Press the Enter key

2 Using the mouse, right-click and select Done


For the Value of Name type: Spiral



Click the OK button when the Properties dialog appears

Create Spiral PathTo assign trace width and thickness1 In the Modeler Tree expand the tree under Spiral and right-



click on Create Polyline, and select Properties.

In Properties window change Type to Rectangle

Also change:Width: 15 umHeight: 2 um

To fit the view:



Click View>Fit All>Active View. Or press the CTRL+D key

Set Grid PlaneTo set the grid plane:

Click Modeler>Grid Plane>XY

Create UnderpassTo create underpass:1 Click Draw>Box.

2 Using the coordinate entry fields, enter the box positionX: -60.0, Y: 7.5, Z: -0.8, Press the Enter key

3 Using the coordinate entry fields, enter the opposite cor-ner of the box:dX: -75.0, dY: -15.0, dZ: -0.5, Press the Enter key


2 For the Value of Name type: Underpass





Create Via1To create via:1 Click Draw>Box

2 Using the coordinate entry fields, enter the box positionX: -60.0, Y: 7.5, Z: 0.0, Press the Enter key



2 For the Value of Name type: Via1




Create Via2To create via:1 Click Draw>Box




2 For the Value of Name type: Via23 Click the OK button



To fit the view:Click View>Fit All>Active View.

Create FeedTo create feed:1 Click Draw>Box


3 Using the coordinate entry fields, enter the opposite cor-ner of the box:dX: -22.0, dY: -15.0, dZ: 2.0, Press the Enter key


2 For the Value of Name type: Feed3 Click the OK button


Unite Spiral ObjectsTo select spiral objects1 In the model tree, highlight: Spiral, and Via1, Via2, Feed



and Underpass

2 Click Modeler>Boolean>UniteTo fit the view:

Click View>Fit All>Active View or press the CTRL+D key

Solve Inside ConductorsTo solve inside:1 Click Edit>Select by Name

2 In the Select Object dialog, select: Spiral

3 Click Edit>Properties4 Properties dialog Attribute tab:



Solve Inside: Checked5 Click the OK button6 Note the warning message in the Message Window: Solving

inside a solid with high conductivity may require a large mesh.

Seed Mesh Conductors set for Solve InsideTo solve inside:1 Click Edit>Select All Visible

2 Click HFSS>Mesh Operations>Assign>Inside Selec-tion>Length Based

3 Element Length Based Refinement dialogName: Length1Restrict Length of Elements: UncheckedRestrict Number of Elements: CheckedMaximum Number of Elements: 5000




Set Default Material for Ground RingTo set the default material:1 Using the 3D Modeler Materials toolbar, choose Select.

2 In the Select Definition window:3 Type pec in the Search by Name field


Create Ground RingTo create outer ring:1 Click Draw>Box




2 For the Value of Name type: Ring3 Click the OK buttonTo fit the view:




Create Inner RingTo create inner ring:1 Click Draw>Box




2 For the Value of Name type: Inner3 Click the OK button

To fit the view:




Complete the RingTo select the objects Ring and Inner:1 Click Edit>Select>By Name

2 In the Select Object dialog, select the objects named: Ring, Inner

3 Click the OK buttonTo complete the ring:1 Click Modeler>Boolean>Subtract

2 Subtract WindowBlank Parts: RingTool Parts: Inner




Create Extension 1To create extension:1 Click Draw>Box


3 Using the coordinate entry fields, enter the opposite cor-ner of the box:dX: -53.0, dY: -15.0, dZ: 2.0, Press the Enter key


2 For the Value of Name type: Ring_Ext13 Click the OK button



Create Extension 2To create extension:1 Click Draw>Box

2 Using the coordinate entry fields, enter the box positionX: 146.0, Y: 7.5, Z: 0.0, Press the Enter key

3 Using the coordinate entry fields, enter the opposite cor-ner of the box:dX: 64.0, dY: -15.0, dZ: 2.0, Press the Enter key


2 For the Value of Name type: Ring_Ext23 Click the OK buttonTo fit the view:


Create Source 1To create source:1 Click Draw>Rectangle


3 Using the coordinate entry fields, enter the opposite cor-ner of the base rectangle:dX: -15.0, dY: -15.0, dZ: 0.0, Press the Enter key




2 For the Value of Name type: Source13 Click the OK buttonTo fit the view:

Click View>Fit All>Active View.

Create Source 2To create source:1 Click Draw>Rectangle

2 Using the coordinate entry fields, enter the box positionX: 131.0, Y: 7.5, Z: 1.0, Press the Enter key

3 Using the coordinate entry fields, enter the opposite cor-ner of the base rectangle:dX: 15.0, dY: -15.0, dZ: 0.0, Press the Enter key


2 For the Value of Name type: Source23 Click the OK buttonTo fit the view:


Group the ConductorsTo group the conductors:1 Click Edit>Select>By Name

2 In the Select Object dialog, select the objects named: Ring, Ring_Ext1, Ring_Ext2

3 Click the OK button4 Click, Modeler>Boolean>UniteTo fit the view:




Assign Excitation for Source1To select the object Source1:1 Click Edit>Select>By Name

2 In the Select Object dialog, select the objects named: Source1


To assign lumped port excitation:1 Click HFSS>Excitations>Assign>Lumped Port

2 Lumped Port: General Port Name: 1Conductor: RingUse as Reference: Checked

Note You can also select the object from the Model Tree.



Highlight Selected conductors: Checked

3 Click OK



Assign Excitation for Source2To select the object Source2:1 In the History tree, expand the Unassigned objects tree.

2 ISelect Source2.

To assign lumped port excitation1 Click HFSS>Excitations>Assign>Lumped Port

Lumped Port: General Port Name: 2Conductor: RingUse as Reference: CheckedHighlight Selected conductors: Checked

2 Click OK

Show AllTo show all object

Click View>Show All>All Views

Boundary DisplayTo verify the boundary setup:1 Click HFSS>Boundary Display (Solver View)

2 From the Solver View of Boundaries, toggle the Visibility check box for the boundaries you wish to display.The background (Perfect Conductor) is displayed as the outer boundary.The Perfect Conductors are displayed as the smetal



boundary.

3 Click View>Active View Visibility to hide all of the geom-etry objects. This makes it easier to see the boundary.

4 Click the Done button when you are finished

Analyze Spiral Conductor 3-1

3 Analyze Spiral Conductor

This chapter describes how to:Setup and run the Analysis.Generate Reports


3-2 Analyze Spiral Conductor

Analysis Setup

Creating an Analysis SetupTo create an analysis setup:1 Click HFSS>Analysis Setup>Add Solution Setup

2 In the Solution Setup window: click the General tab:Solution Frequency: 12.0GHzMaximum Number of Passes: 20Maximum Delta S: 0.02

3 Click the Options tab:Do Lambda Refinement: CheckedLambda Target: 0.05Maximum Refinement per pass: 30%Minimum Number of Passes: 6Minimum Number of Converged Passes: 2Order of Basis Function: Zero Order


Adding a Frequency SweepTo add a frequency sweep:1 Click HFSS>Analysis Setup>Add Sweep

2 Select Solution Setup: Setup1 Click the OK button

3 Edit Sweep Window:Sweep Type: InterpolatingFrequency Setup Type: Linear StepStart: 0.1GHzStop: 20.0GHzStep: 0.1GHz

4 Interpolating Sweep OptionsMax Solutions: 50Error Tolerance: 0.1%




Save ProjectTo save the project:1 In an Ansoft HFSS window, Click File>Save As.

2 From the Save As window, type the Filename: hfss_spiral_inductor

3 Click the Save button

Model ValidationTo validate the model:1 Click HFSS>Validation Check

2 Click the Close buttonNote: To view any errors or warning messages, use the Mes-sage Manager.

AnalyzeTo start the solution process:

Click HFSS>Analyze All

Solution DataTo view the Solution Data:1 Click HFSS>Results>Solution Data

2 To view the Profile click the Profile Tab.3 To view the Convergence click the Convergence Tab

Note: The default view is for convergence is Table. Select the Plot radio button to view a graphical representations



of the convergence data.

4 To view the Matrix Data click the Matrix Data TabNote: To view a real-time update of the Matrix Data, set the Simulation to Setup1, Last Adaptive

5 Click the Close button

Create Reports

Create S-parameter vs. FrequencyTo Create a report:1 Click HFSS>Results>Create Terminal Solution Data

Report>Rectangular Plot

2 In the New Report window, Traces TabSolution: Setup1: SweepDomain: SweepCategory: Terminal S-Parameters



Quantity: St(Source1_T1, Source1_T1)and St(Source1_T1, Source2_T1)Function: dB

3 Click the New Report button4 Click the Close button

Custom Equations – Output Variables1 Select the menu item HFSS>Results>Create Terminal Solu-

tion Data Report>Rectangular Plot

2 In the New Report window, Trace Tab click the Output Variables button

3 In the Output Variables dialog:Name: Q11Expression:Category: Terminal Y Parameters



Quantity: Yt(Source1_T1, Source1_T1)Function: imClick the Insert Quantity into Expression buttonType: /Quantity: Yt(Source1_T1, Source1_T1)Function: reClick the Insert Quantity into Expression button

4 Click Add.5 Repeat for Q22, by replacing Yt(Source1_T1,

Source1_T1) with Yt(Source2_T1, Source2_T1)6 Click Add.

7 Click the Done button to close the Output Variables dia-log.

8 In the New Reports dialog:Solution: Setup1: Sweep1Domain: SweepCategory: Output VariablesQuantity: Q11, Q22Function: absClick the New report button



Click Close button

To use Output Variables for another report:1 Click HFSS>Results>Create Terminal Solution Data

Report>Rectangular Plot

2 In the New Report window, Trace Tab click the Output Variables buttonIn the Output Variables dialog:Name: L11Expression field: Type: -1/(2*pi*freq*Category: Terminal Y ParametersQuantity: Yt(Source1_T1, Source1_T1)Function: imClick the Insert Quantity into Expression button



Type: )

3 Click the Add button

4 Click the Done button to close the Output Variables dia-log.

5 In the New Reports dialog:Solution: Setup1: SweepDomain: SweepCategory: Output VariablesQuantity: L11Function: none

6 Click the New Report button



7 Click Close button



Documents

HFSS Spiral Inductor