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Granville-Phillips® Series 500 Cold Cathode Gauge with Analog Output, 2 Setpoint Relays, and optional RS-485 Digital Interface

Instruction manual part number 500001Revision D - January 2016

Series 500

Instruction Manual

Granville-Phillips Series 500 CCG Module

© 2016 MKS Instruments, Inc. All rights reserved.Granville-Phillips® is a registered trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.

Instruction Manual

Series 500

This instruction manual is for use with Granville-Phillips Series 500 Cold Cathode Gauge with RS-485 Digital Interface. A list of applicable catalog numbers is provided on the following page.


Customer Service / Technical Support:

MKS Pressure and Vacuum Measurement SolutionsMKS Instruments, Inc., Granville-Phillips® Division6450 Dry Creek ParkwayLongmont, Colorado 80503 U.S.A.Tel: 303-652-4400Fax: 303-652-2844Email: [email protected]

MKS Corporate HeadquartersMKS Instruments, Inc.2 Tech Drive, Suite 201Andover, MA 01810Tel: 978-645-5500Fax: 978-557-5100Email: [email protected]

Granville-Phillips® Series 500 Cold Cathode Gaugewith optional RS-485 Digital Interface

Catalog numbers for Series 500 Cold Cathode Gauges

Gauge AssemblyGauge with analog output, 2 setpoints, no display 500100 - ## - ### - #Gauge with analog output, 2 setpoints, digital display 500101 - ## - ### - #

Setpoint Relays

2 relays 2

Calibration

Calibrated (Higher Accuracy) CStandard S

Interface

RS-485 R4

Vacuum Connection

NW25KF ENW40KF KNW35CF (2.75 inch Conflat-type) G

Measurement Units

Torr TmBar MPascal P

Replacement Gauge (Sensor) 500200- # #Calibration

Calibrated (Higher Accuracy) CStandard S

Vacuum Connection

NW25KF ENW40KF KNW35CF (2.75 inch Conflat-type) G

Gauge Repair Kit (Field replaceable maintenance kit) 500600- K

Series 500 Cold Cathode Vacuum GaugeInstruction Manual - 500001 - Rev. D

5

Chapter 1 General Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.1 Receiving Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.2 International Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.3 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.4 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91.5 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Chapter 2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.1 Safety Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112.2 Magnets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122.3 Grounding Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132.4 High Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142.5 Over Pressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142.6 System and Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152.7 Safety Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162.8 Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162.9 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Chapter 3 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.2 Intended Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

3.2.1 Improper Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193.3 Transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203.4 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203.5 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.5.1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213.6 Electronics Enclosure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

3.6.1 Control Panel LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 223.6.2 Input/Output Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233.6.3 USB Service Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Chapter 4 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254.2 Vacuum Gauge Connection (mechanical) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

4.2.1 Mounting Location and Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264.2.2 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 274.2.3 Attach the Gauge to the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

4.3 Power and Input/Output Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 314.3.1 Power & Communications Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324.3.2 Process Control & Diagnostics Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

4.4 Grounding the Gauge to the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Chapter 5 Initial Activation of the Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355.1 Activating the Cold Cathode Gauge/Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 355.2 On-Board Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

5.2.1 Diagnostic Test Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 375.2.2 Power-On Self-Test (POST) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385.2.3 High-Voltage Timeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385.2.4 Diagnostic Digital Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Chapter 6 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416.1 Basic Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416.2 Starting the Plasma . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416.3 Starting at Low Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 416.4 Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

6.4.1 Process Gas Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 426.4.2 Line of Site By-Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 426.4.3 Pressure Dose and Gauge Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

6.5 Electronics Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

Table of Contents

6 Series 500 Cold Cathode Vacuum GaugeInstruction Manual - 500001 - Rev. D

6.5.1 High Voltage Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 426.5.2 Electrometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436.5.3 Calculating Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436.5.4 Analog I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

6.5.4.1 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 436.5.5 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 446.5.6 Setpoint Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 446.5.7 Microprocessor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

6.6 Pressure Correction Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456.6.1 Gas Species Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456.6.2 Pressure Correction Factor Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456.6.3 Sensitivity Factor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

Chapter 7 G-P Connect Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 477.1 GP Connect Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 477.2 GP Connect Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 477.3 Starting the GP Connect Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 517.4 Connecting to the CCG Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 527.5 Getting CCG Electronics Status Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 537.6 Configuring the CCG Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

7.6.1 Changing the Communication Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 557.6.2 Setting Pressure Units and Factors: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 557.6.3 Naming the Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 577.6.4 Setting the Gauge Auto ON Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 577.6.5 Setting the Gauge Auto Off Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 597.6.6 Setting the Date and Time on the Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 597.6.7 Disabling Further Commands or Disabling HV button presses . . . . . . . . . . . . . . . . . . . . . . . . . 607.6.8 Configuring the Analog Output Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 607.6.9 Configuring the Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

7.6.9.1 Manual Control of Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 617.6.9.2 Automatic Relay Based on Internal Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 617.6.9.3 Automatic Relay Based on External Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 627.6.9.4 Automatic Relay Based on Service Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 637.6.9.5 Digital IN Disable of Automatic Relay Set Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 647.6.9.6 Restoring Factory Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

7.7 Turning the Cold Cathode Gauge ON or OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 657.8 Resetting the Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 657.9 Viewing the Pressure Trend . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

7.10 Viewing VacTrac Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 667.10.1 VacTrac Simple Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

7.10.1.1 Event Counts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 667.10.1.2 Duration Times . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 677.10.1.3 Pressure Dose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 677.10.1.4 Ranges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

7.10.2 VacTrac Histograms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 687.11 Saving VacTrac Statistics to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 697.12 Saving the Device Configuration to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 707.13 Downloading the Settings in the File to the Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 707.14 Entering Commands Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 707.15 Updating the Cold Cathode Gauge Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71

7.15.1 Update Firmware Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 717.15.2 Update Specific Calibration Curve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 727.15.3 New Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

Chapter 8 Service & Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 758.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 758.2 Gauge Bake-out Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 758.3 Replace the Components of the Cold Cathode Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78


7

8.4 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Chapter 9 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 839.1 Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

Chapter 10 Digital Interface Specifications and Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8910.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8910.2 Power and RS-485 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8910.3 RS-485 Serial Protocols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90

10.3.1 RS-485 Command Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9010.3.2 RS-485 Response Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9110.3.3 USB Command and Response Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

10.4 Communication Setup Command Effect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9110.5 Error Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9110.6 General Responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9210.7 List of Series 500 CCG Module User Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9210.8 User Command Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94

Chapter 11 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131

8 Series 500 Cold Cathode Vacuum GaugeInstruction Manual - 500001 - Rev. D

1 General Information

9Series 500 Cold Cathode GaugeInstruction Manual - 500001 - Rev. D

Chapter 1

1General Information

1.1 Receiving InspectionOn receipt of the equipment, inspect all material for damage. Confirm that the shipment includes all items ordered. If items are missing or damaged, submit a claim as stated below for a domestic or international shipment, whichever is applicable.

If materials are missing or damaged, the carrier that made the delivery must be notified within 15 days of delivery, or in accordance with Interstate Commerce regulations for the filing of a claim. Any damaged material including all containers and packaging should be held for carrier inspection. Contact MKS, Granville-Phillips Division Customer Support for assistance if your shipment is not correct for reasons other than shipping damage.

1.2 International ShipmentInspect all materials received for shipping damage and confirm that the shipment includes all items ordered. If items are missing or damaged, the airfreight forwarder or airline making delivery to the customs broker must be notified within 15 days of delivery. The following illustrates to whom the claim is to be directed.

• If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs, the claim must be filed with the airfreight forwarder.

• If an airfreight forwarder delivers the shipment to a specific airline and the airline delivers the shipment to customs, the claim must be filed with the airline.

Any damaged material including all containers and packaging should be held for carrier inspection. Contact MKS, Granville-Phillips Division Customer Support for assistance if your shipment is not correct for reasons other than shipping damage.

1.3 WarrantyMKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new Granville-Phillips Products. The MKS Instruments, Inc. General Terms and Conditions of Sale provides the complete and exclusive warranty for Granville-Phillips products. This document is located on our web site at www.mksinst.com, or may be obtained by contacting an MKS, Granville-Phillips Division Customer Service Representative.

1.4 CertificationMKS, Granville-Phillips Division certifies that this product met its published specifications at the time of shipment from the factory.

1 General Information

10Series 500 Cold Cathode Gauge

Instruction Manual - 500001 - Rev. D

1.5 Service GuidelinesSome minor problems are readily corrected on site. If the product requires service, contact the MKS, Granville-Phillips Division Technical Support Department at 1-303-652-4400 or 1-800-776-6543 for troubleshooting help over the phone.

If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

When returning products to Granville-Phillips, be sure to package the products to prevent shipping damage. Granville-Phillips will supply return packaging materials at no charge upon request. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

For Customer Service / Technical Support:MKS Pressure and Vacuum Measurement SolutionsMKS Instruments, Inc., Granville-Phillips® Division6450 Dry Creek ParkwayLongmont, Colorado 80503 U.S.A.Tel: 303-652-4400Fax: 303-652-2844Email: [email protected] MKS Corporate HeadquartersMKS Instruments, Inc.2 Tech Drive, Suite 201Andover, MA 01810Tel: 978-645-5500Fax: 978-557-5100Email: [email protected]

2 Safety


Chapter 2

2Safety

2.1 Safety IntroductionSTART BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points throughout this instruction manual.

These safety alert symbols in this manual or on the Product mean caution - personal safety, property damage or danger from electric shock. Read these instructions carefully.

This product was designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions.

Danger indicates a hazardous situation which, if not avoided, will result in death or serious injury.

Warning indicates a hazardous situation which, if not avoided, could result in death or serious injury.

Caution indicates a hazardous situation or unsafe practice which, if not avoided, may result in minor or moderate personal injury.

Indicates a situation or unsafe practice which, if not avoided, may result in equipment damage.

Notice

These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact MKS, Granville-Phillips Division at the address on the title page of this instruction manual.

Safety PrecautionsFailure to comply with these instructions may result in serious personal injury, including death, or property damage.

Always observe and follow all safety notices that are provided throughout this instruction manual and on the product.

2 Safety



These safety precautions must be observed during all phases of operation, installation, and service of this product. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc./Granville-Phillips disclaims all liability for the customer's failure to comply with these requirements.

• Read Instructions – Read all safety and operating instructions before operating the product.

• Retain Instructions – Retain the Safety and Operating Instructions for future reference.

• Heed Warnings – Adhere to all warnings on the product and in the operating instructions.

• Follow Instructions – Follow all operating and maintenance instructions.

• Accessories – Do not use accessories not recommended in this manual as they may be hazardous.

2.2 MagnetsThe Series 500 Cold Cathode Gauge assembly contains a very strong rare-Earth magnet assembly. Keep it away from magnetic storage material, pacemakers, credit cards, metal objects, or any material sensitive to magnetic fields. Care and caution must be used when handling, installing, removing or storing the magnets as they may attract metal objects or damage material sensitive to magnetic fields.

Electrical Shock or Personal InjuryThe service and repair information in this manual is for the use of Qualified Service Personnel. To avoid possible electrical shock or personal injury, do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so.

Electrical Shock or FireTo reduce the risk of fire or electric shock, do not expose this product to rain or moisture.

Objects and Liquid Entry - Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock. Be careful not to spill liquid of any kind onto the products.

2 Safety


The following Safety Warning is used throughout this instruction manual where exposure to the magnet assembly could possibly affect persons that are subject to the effects of magnets.

Figure 2-1: Magnet Assembly and Product Label

2.3 Grounding RequirementsSee Grounding, Section 4.2 in the Installation chapter for more detailed requirements regarding gauge and system grounding.

Strong Magnetic FieldStrong magnetic fields can disturb electronic devices like heart pacemakers, or can impair their function. Maintain a safe distance of >10 cm between the magnet and a heart pacemaker.

Keep tools and other metallic objects away from the magnet.

Proper GroundingAll components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation.

Be aware that grounding this product does not guarantee that other components of the vacuum system are maintained at Earth ground.

Verify that the vacuum port to which the Series 500 Cold Cathode Gauge is mounted is electrically grounded. It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground. See Section 4.4 for detailed grounding instructions.

Connect power cords only to properly grounded outlets or sources.

2 Safety



2.4 High VoltageHigh Voltage is present in the unit when the electronics enclosure is connected to the Cold Cathode Gauge, powered ON, and the HV ON/OFF LED is flashing or steady green. Hazardous voltages may still be present in the module for some time after disconnecting power to the electronics enclosure. Refer to the Installation and Service chapters for more information.

2.5 Over Pressure Conditions

Suppliers of pressure relief valves and pressure relief disks can be located via an online search, and are listed on ThomasNet.com under “Relief Valves” and “Rupture Discs. Confirm that these safety devices are properly installed before installing and operating the product.

High VoltageBe aware that when high voltage is present in any vacuum system, a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at Earth ground.

This hazard is not unique to this product.

High VoltageAll conductors in, on, or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to Earth ground at all times.

High VoltageBe aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection. A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential.

This hazard is not unique to this product.

Notice

These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, please contact MKS, Granville-Phillips Division at the address on the title page of this instruction manual.

2 Safety


Ensure the following precautions are complied with at all times: (1) the proper gas cylinders are installed(2) the gas cylinder valve positions are correct on manual systems (3) the automation is correct on automated gas delivery systems

Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized.

2.6 System and Environment

Explosive EnvironmentDo not use the Series 500 Cold Cathode Gauge in an environment of explosive or combustible gases or gas mixtures. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. Do not use the product to measure the pressure of explosive gases or gas mixtures.

Chemical Fumes / Explosive EnvironmentThe fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can be dangerous to health if inhaled. Use only in well ventilated areas exhausted to the outdoors.

Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment.

Potential Automatic OperationIt is the installer's responsibility to ensure that the automatic signals provided by the product are always used in a safe manner. Carefully check the system programming before switching to automatic operation.

Vacuum Chamber High PressuresWhere an equipment malfunction could cause a hazardous situation, always provide for fail-safe operation. As an example, in an automatic backfill operation where a malfunction might cause high internal pressures, provide an appropriate pressure relief device.

2 Safety



2.7 Safety InterlocksSafety interlocks protect personal safety.

The 500 Series Cold Cathode Gauge electronics are designed with a safety interlock to prevent activation of the high voltage supply until the cold cathode sensor is installed in the electronics enclosure. A gauge detection circuit is internal to the electronics enclosure.

During installation or maintenance of the Cold Cathode Gauge, it is important to fully engage the interlock to allow the electronics to operate the gauge. See Section 4.2.3 and Section 8.3 for detailed instructions regarding the safety interlock.

2.8 ResponsibilityIt is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and laws applicable to the installation, operation and service of this equipment.

It is the responsibility of the end user to provide sufficient lighting at work to meet local regulations.

Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS, Granville-Phillips Division is the responsibility of the Customer.

MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Granville-Phillips literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.

For emergencies and for product safety related matters, contact the MKS, Granville-Phillips Division Customer Service Department. See Section 1.5 or Section 8.4 for detailed information regarding how to contact MKS, Granville-Phillps Division Customer Service Representatives.

2.9 Damage Requiring ServiceDisconnect the product from all power sources and refer servicing to Qualified Service Personnel under the following conditions:

a. When any cable or plug is damaged.

b. If any liquid has been spilled onto, or objects have fallen into the product.

c. If the product has been exposed to rain or water.

d. If the product does not operate normally even if you follow the operating instructions. Adjust only those controls that are covered by the operation instructions. Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation.

High VoltageDo not attempt to defeat the safety interlock that disables the high voltage when the electronics and sensor are not assembled together.

High voltage is supplied to the gauge during operation.

2 Safety


e. If the product has been dropped or the enclosure has been damaged.

f. When the product exhibits a distinct change in performance. This indicates a need for service.

See Service Guidelines, Section 1.5 for detailed information regarding how to contact MKS, Granville-Phillps Division Customer Service Representatives.

Notice

Do not substitute parts or modify the instrument.

Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by Granville-Phillips for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications.

Notice

Safety Check - Upon completion of any service or repairs to this product, ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order.

Notice

Finite Lifetime - After ten years of normal use or even non-use, the electrical insulation in this product may become less effective at preventing electrical shock. Under certain environmental conditions which are beyond the manufacturer’s control, some insulation material may deteriorate sooner. Therefore, periodically inspect all electrical insulation for cracks, crazing, or other signs of deterioration. Do not use if the electrical insulation has become unsafe.

2 Safety



Notes:

3 Introduction


Chapter 3

3Introduction

3.1 General DescriptionThe Series 500 Cold Cathode Gauge (CCG) Module, shown on page 2 and in Figure 3-1, is a modular instrument consisting a cold cathode gauge and electronics enclosure capable of measuring vacuum pressures from 1 x 10-9 Torr to 1 x 10-2 Torr.

Benefits of the design include:

• Compact, Convenient, Cost Saving Vacuum Measurement

• No hot filament, eliminating filament burnout

• Designed for simple disassembly and cleaning or replacement of key components

• Cool, low-power operation

• Easily removable electronics and magnets for bake out

• Optional Digital I/O or optional RS-485 compatibility with computer controlled processes

• USB service port interface for offline programming and diagnostics download

• An internal guard ring provides longer life by reducing contamination on critical components and isolating leakage current from the measurement.

• Field emission starter provides faster and more predictable start times.

• Lifetime reading that indicates when gauge maintenance is needed.

The RS-485 digital interface version provides industry-standard digital RS485 communications over networks as well as direct connections to a personal computer. The setpoint relays can be easily controlled via the RS-485 digital interface.

The setpoint relays can be used to control various devices such as safety interlock, valve, digital input for a scanner, or programmable logic controller. The setpoint relay trip points can be set to customized pressure settings to turn power ON or OFF to the appropriate device.

3.2 Intended UseThe intended use of this instrument is to measure vacuum pressure in the range of 1 x 10-9 Torr to 1 x 10-2 Torr. This device is to be used only in accordance with the instructions in this operation manual.

3.2.1 Improper Use• Removal of any factory installed components.

• Modifying any factory installed components.

• Removal of any labeling or warranty seals.

• Using any of the individual components outside the Series 500 Cold Cathode Gauge.

• Operation of this device in any condensing vapor or liquid.

• CE Conformity: The manufacturer’s declaration becomes invalid if the operator modifies the original product or installs additional components.

3 Introduction



3.3 Transportation• Reuse the original shipping container.

• Replace all of the dust caps on all ports prior to shipping.

3.4 Storage• Store the CCG Module assembly indoors between -25 0C and 55 0C.

• Bag the CCG Module assembly in a sealed or shrink wrapped bag with desiccant.

• All of the components should be bagged and boxed together along with the instructions for future reference.

3.5 Specifications

Table 3-1 Specifications for the Series 500 CCG Module

Parameter Specification

Measurement Range for N2 / Air 1,2 See notes 1 and 2, below

Torr 1x10-10 to 1x10-2 Torr

mbar 1.33x10-10 to 1.33x10-2 mbar

pascal 1.33x10-8 to 1.33 pa

Accuracy - standard (typical) +/- 30% (1x10-8 to 1x10-4 Torr)

Accuracy - calibrated gauge +/- 10% (1x10-8 to 1x10-4 Torr)

Repeatability - (typical) +/- 5% (1x10-8 to 1x10-4 Torr)

Display Vacuum Fluorescent

Update rate Every 0.5 sec.

Input power 3, 4 13.5 to 36 Vdc, 2 W continuous (see note 3, below)

Weight 4 652 gr. (23 oz.)

Operating temperature 0 oC to +50 oC (32 0F to 122 0F) ambient, indoor use only, ordinary protection from moisture

Operation humidity 0 to 90% (accuracy may be affected below 1x10-8 Torr)

Non-operating temperature -40 oC to +70 oC (-40 0F to 158 0F)

Gauge bake out temperature with magnet and electronics removed

250 oC maximum (482 0F)

Mounting orientation Any. However, avoid mounting the gauge directly below the chamber to prevent sputtered material or other debris falling into the gauge.

CE Compliance

EMC EN61326-1

Safety EN61010-1

Environmental RoHS and REACH

Setpoint relays Two, single-pole, double-throw (SPDT)

Contact rating 1 A @ 30 Vdc, Min. 5ma at 5 Vdc, max. ripple 1 Vpp

RS-485 Communication Interface

3 Introduction


1. Measurements will change with different gases and mixtures. Correction parameters must be used for gases other than N2 or Air.

2. Do NOT use Cold Cathode Gauges with flammable or explosive gases. See Section 2.6.

3. The 13.5 to 36 Vdc input power must be supplied from a power supply certified to IEC Standard with a safety extra low voltage certified output.

4. RS-485 version - other versions may vary slightly.

3.5.1 Dimensions

Figure 3-1: Series 500 Cold Cathode Module Dimensions

Data format ASCII, software selectable:8 bits, no parity, 1 stop bit8 bits, even parity, 1 stop bit8 bits, odd parity, 1 stop bit

Baud rate Software selectable, 1200 to 115200

Analog output signal

Output voltage (log) 0 to 11 Vdc

Min. output impedance 200 Ohm

Min. load impedance 10k Ohm

Min. update rate 40 Hz

Analog input signal 0 to 11 Vdc

Overpressure protection Internal and/or external at upper pressure limit

Materials exposed to gas 304 Stainless Steel, 17-7 stainless steel, ceramic, Ag/Cu brazing material, Kovar, alumina, and molybdenum

Specifications and dimensions are subject to change without notice.

Table 3-1 Specifications for the Series 500 CCG Module

Parameter Specification

3 Introduction



3.6 Electronics EnclosureThe control panel of the Series 500 Cold Cathode Module with optional RS-485 Digital Interface is shown in Figure 3-2 and described in the following paragraphs.

Figure 3-2: Cold Cathode Module Control Panel

3.6.1 Control Panel LEDs

Table 3-2: Control Panel LED

Feature Conditions Color/BehaviorHV (High Voltage) ON/OFF Button and LED

HV ON, no discharge currentHV ON, Discharge current detectedNo HV ON

Blinking GreenSolid GreenOFF

Power LED +24V input power applied, running POST+24V ON, diagnostics completeInput power OFF or below range or USB power only

Blinking GreenSolid GreenOFF

Check LED Error/Fault conditionNo diagnostic report present

GreenOFF

Maint LED Maintenance report generated (relay count, dosing, leakage current)Service report generatedNo diagnostic report present

Amber

RedOFF

RLY 1 or RLY 2 Relay 1 or 2 is active Solid Green

Note: RS-485version shown

3 Introduction


3.6.2 Input/Output ConnectorsThe Input/Output Connectors provide connection to the CCG Module assembly for input power and various gauge signals. See Section 4.3 and Section 10.1for detailed pin assignments and connection information.

3.6.3 USB Service PortThe Micro-AB socket is capable of accepting both Micro-A and Micro-B plugs. Standard operating mode will be as a USB Slave device.

The CCG electronics enclosure can be powered through the USB Service Port when connected to a PC for setup and diagnostics. When powered by only USB, the gauge will not be operational and does not need to be attached to the controller.

Figure 3-3: Micro AB USB Port

Table 3-3: Micro USB Pin Connections

Pin # Name Cable

Color Description

1 Vdc Red +5 Vdc

2 D White Data -

3 D Green Data +

4 ID Mode Detect. May be N/C, GND or used as an attached device presence indicator (shorted to GND with resistor)

5 Gnd Black Ground

3 Introduction



Notes:

4 Installation


Chapter 4

4Installation

4.1 IntroductionThis section provides the information required to install the Series 500 Cold Cathode Gauge (CCG) assembly on a vacuum system and prepare the product for use.

Terms used in this chapter

• CCG Module = The Series 500 Cold Cathode Gauge Assembly - consisting of the gauge (sensor), the magnet, and the electronics.

• CCG Gauge = the cold cathode gauge (sensor).

• CCG Electronics = the extruded aluminum enclosure that houses the electronics and firmware for the CCG Module assembly.

• GP Connect = the software application provided with the CCG product.

4.2 Vacuum Gauge Connection (mechanical)Use the following procedure to install the Cold Cathode Gauge on the vacuum system.

Notice

Disconnect all cables and sources of power from the Cold Cathode Gauge (CCG) electronics prior to installation or maintenance.



4 Installation



4.2.1 Mounting Location and OrientationThe Series 500 CCG Module can be mechanically mounted anywhere on the vacuum system in any attitude. It should be mounted in a location with free air flow and ambient temperature less than 50 0C (122 0F). The gauge is mounted to the vacuum system by the flange only. Be sure to use common vacuum practices when mounting the gauge on the vacuum system.

Care should be taken when mounting near any other device that may be sensitive to magnetic fields such as, hot cathode gauges, residual gas analyzers (quadrupoles), mag-lev turbo pumps. The double inverted design of the Cold Cathode Gauge has a low external magnetic field, however it is up to the user to determine if there is interference with another device and relocate one or the other to a different location.

Adhere to good vacuum practices throughout the installation of the gauge onto a vacuum system.

• Locate the CCG Module assembly away from devices sensitive to magnetic fields such as RGA's, hot cathodes and mag lev turbo pumps.

• Locate the CCG Module where it can be easily accessed.

• For greatest accuracy and repeatability, locate the CCG Module in a stable, room-temperature environment. Ambient temperature should never exceed 50 °C (122 °F) operating, non-condensing, or 85 °C (185 °F) non-operating. Bake out temperature with the electronics and magnet removed from the gauge is 250 °C (482 °F).

• Locate the CCG Module away from internal and external heat sources and in an area where ambient temperature remains reasonably constant.

• Do not locate the CCG Module near the pump, where gauge pressure might be lower than normal vacuum pressure.

• Do not locate the CCG Module near a gas inlet or other source of contamination.

• Do not locate the CCG Module where it will be exposed to corrosive gases such as mercury vapor or fluorine.

• Do not locate the CCG Module directly below the vacuum chamber which may allow sputtering particles or other contamination to fall into the gauge.

Notice

Install the gauge on the vacuum chamber where it is protected from physical damage and high heat.

Notice

See Section 2.5, Over Pressure Conditions, and Section 2.6, System and Environment, for important safety information before mounting the gauge.

4 Installation


4.2.2 Dimensions• See Figure 3-1 in the Introduction Chapter.

4.2.3 Attach the Gauge to the Vacuum ChamberConnect the CCG Gauge to the vacuum system flange using the appropriate gasket and mounting hardware.

For an NW25KF or NW40KF flange:

1. The NW##KF style flange requires a self-centering O-ring between mating flanges. Use a metal clamp and tighten the clamp to compress the mating flanges together. Do Not use a plastic clamp. See Grounding in Section 4.4.

2. Attach the CCG Gauge to the mating NW-style connector on the vacuum chamber. Use a new seal and the appropriate tools to tighten the metal clamp.

For an NW35CF (2-3/4 inch) flange:

1. Remove the electronics enclosure and the magnet from the gauge.

a. Press the electronics module release tab on the side of the module to remove the gauge from the electronics module. See Figure 4-1.

Figure 4-1: Remove the Electronics Enclosure from the Gauge

b. Remove the magnet assembly and store it in a safe location away from magnetic media and metal objects, as they may be damaged by, or cause damage to the magnet.

Electronics Enclosure Release Tab (shown fully depressed)

4 Installation



Figure 4-2: Remove the Magnet Assembly

2. Attach the gauge to the mating 2-3/4 inch flange on the vacuum chamber. Use a new copper seal between the flanges - do not use a previously used seal. If the flanges have leak test grooves, be sure they are properly aligned.

NOTE: Hardware recommendations for 2-3/4 inch flanges: Granville-Phillips recommends using new, non-magnetic, Silver plated, high-strength Stainless Steel bolts, nuts, and flat washers for mounting the Cold Cathode Gauge to the vacuum chamber. Check the hardware, especially the bolts, with a magnet to be sure they are non-magnetic.It is also recommended that the bolt heads be toward the gauge, and the nuts be toward the vacuum chamber. See Figure 4-3.

3. Finger tighten all 6 bolts.

4. Use the appropriate tools to tighten the 6 bolts. Tighten the bolts in a circular pattern (such as 1, 3, 5, 2, 6, 4, 1, 3, 5, 2, 6, 4) until the flanges are in contact. After contact, torque each bolt to 12 lb ft.

NOTE: Granville-Phillips recommends using a 12-point socket on a calibrated torque wrench to tighten the bolts.

Gauge Tube

Latch Groove

4 Installation


Figure 4-3: Mount the Cold Cathode Gauge to the Vacuum Chamber

Re-assemble the CCG Module.

NOTE: During re-assembly of the module, make sure the serial numbers match for the CCG sensor (gauge), the magnet, and the CCG electronics.

5. Install the magnet onto the gauge with the alignment hole towards the vacuum chamber, and matched to the alignment pin on the flange. When properly aligned, the magnet will seat flush to the flange.

Figure 4-4: Install the Magnet Assembly

6. Re-install the electronics enclosure to the gauge by pressing in AND holding in the electronics enclosure release tab to clear the gauge tube, then release the tab. The latch inside the electronics enclosure will engage the latch groove on the gauge tube, locking the electronics

Gauge Tube

Latch Groove

Alignment Hole

4 Installation



enclosure onto the gauge. Check to make sure the electronics enclosure is fully seated by gently pulling on the enclosure. Repeat this step if necessary and add forward pressure to compress the gasket on the electronics enclosure.

Figure 4-5: Install the Electronics Enclosure onto the Gauge

NOTE: The gauge electronics enclosure is designed with a safety interlock that prevents the electronics from turning ON the high voltage supply unless the gauge is fully inserted into the electronics housing. This interlock closes an electrical contact when the gauge is installed. To fully engage the interlock and allow the electronics to operate the gauge, it is important to firmly and completely install the enclosure onto the gauge, making sure the mechanical latch that holds the gauge and enclosure together is completely engaged.

Safety InterlockHigh voltage is supplied to the gauge during operation. Do not attempt to defeat the safety interlock that disables the high voltage when the electronics and sensor are not assembled together.


4 Installation


4.3 Power and Input/Output Cable ConnectionsTwo I/O 15-pin connectors are used to operate and communicate with the Cold Cathode Gauge. See Figure 4-6 for pinout assignments of the connectors. The connectors provide links for:

• Optional RS-485 communications (See Section 10.2, Power and RS-485 Cable Connections)

• Setpoint relays to control other functions of the vacuum process

• Analog input and output signals

• Remote high voltage enable and disable

• Service and maintenance status outputs

• Power inputs for the electronics

Use the supplied connector(s) on the customer supplied Input/Output cables according to the pin assignments in Figure 4-6. The cable is user-supplied; Granville-Phillips does not supply the interconnect cable.

• Use a shielded cable and connect its designated conductors to the pins of a Female subminiature "D" connector that will directly mate with the designated pins of the CCG Electronics Male subminiature "D" connector, shown in Figure 4-6.

• To prevent ground loops, connect the cable's shield to the outer shell of the Female "D" connector on the CCG Electronics. "Do not" connect the shield to the receiver side, the side that receives the CCG Electronics signal outputs.

• CE Mark compliance requires metal connector housings and cable with a braided shield.

NOTE: The information given in this section includes the optional RS-485 version. Versions without the optional RS-485, or versions with other interface communication protocols are slightly different. Refer to the chapter for the communication protocol for the gauge being used.

Figure 4-6: Power/RS-485 and Process Control/Diagnostics Connector Pin Assignments

See Section 10.1 for information on the RS-485 version of the Cold Cathode Gauge.

4 Installation



4.3.1 Power & Communications ConnectorThe control panel for the RS-485 version provides a connector for industry-standard digital RS-485 communications over networks or to a personal computer with an RS-485 interface, and a Process Control & Diagnostics connector that is used for the relay connections and to provide gauge status. The relay settings can be controlled via the RS-485 digital interface. The setpoint relays can be used to control various devices such as safety interlocks, valves, digital inputs for a scanner, or a programmable logic controller.

The Power/RS-485 connector provides the following functionality:

• External Power connection

• Gauge Identification

• Analog In and Out

• High Voltage and Discharge ON/OFF Digital Out

• High Voltage ON/OFF Digital In

• RS-485 bus (optional)

Table 4-1: Power & Communications Connector Specifications

Pin # Function Conditions Units Specification

1 Signal Common/Ground

2 Analog Output Signal Output Voltage (log)Min output impedanceMin load impedanceMin update rate

VdcOhmOhmHz

0 - 1120010k40

3 Supply + 24 nominal Vdc 13.5 to 36

4 Supply - Vdc 0

5 Analog Input Signal Input Voltage Vdc 0 to 11


7 Chassis Ground

8 MFR Device ID Resistor

9 High Voltage Active Indicator Digital Output

HV ON = highHV OFF = low

Vdc 0 to 5

10 Discharge Current Active Indicator Digital Output


Vdc 0 to 5

11 RS-485 - / Inverting Half duplex

12 RS-485 + / Non-Inverting Half duplex


14 Error Status Indicator Digital Output


Vdc 0 to 5

15 High Voltage On/Off Digital Input

4 Installation


4.3.2 Process Control & Diagnostics ConnectorThe process control and diagnostics connector provides the following functionality:

• Diagnostics Digital Out

• Diagnostics Digital In

• Setpoint Relays Disable

• Setpoint Relays 1 & 2

Table 4-2: Process Control Connector Specifications


1 Chassis Ground

2 Relay 1 Normally Closed Continuous use Amp, Vdc

1,30

3 Relay 1 Common Contact

4 Relay 1 Normally Open Continuous use Amp, Vdc

1,30

5 Relay 2 Normally Closed Continuous use Amp, Vdc

1,30

6 Relay 2 Common Contact

7 Relay 2 Normally Open Continuous use Amp, Vdc

1,30

8 Disable Relays Digital Input Signal

Relay setpoints disabledRelay setpoints enabled

GroundOpen


10 Diagnostic Trigger Digital Input Signal

Trigger a diagnosticNo action

GroundOpen


12 Maintenance Status Digital Output Signal. Open collector 40 Vdc max, 50mA, grounded emitter

Maintenance warning clearMaintenance warning alert

Ohms Hi ZLow Z


14 Service Status Digital Output Signal. Open collector 40 Vdc max, 50mA, grounded emitter

Service warning clearService error alert

Ohms Hi ZLow Z

15 Signal Common/Ground Vdc 0

4 Installation



4.4 Grounding the Gauge to the Vacuum Chamber

The Cold Cathode Gauge electronic enclosure converts the input power to +3500 Vdc on the anode. For safety, the outer housing of the Cold Cathode Gauge must be grounded to the vacuum chamber. This is accomplished by the use of a metal flange clamp for the NWxxKF type flanges. Due to the O-ring seal, grounding cannot be assumed through the fitting. The groove in the KF flange of the Cold Cathode Gauge is designed to prevent the use of a non-metallic type of flange clamp. Do not alter either the groove or a non-metallic flange clamp to attempt usage. See Section 2.3, Grounding Requirements in the Safety chapter.

If the gauge has a 2-3/4 inch ConFlat flange, the module will be properly grounded via the vacuum chamber connection.

If the gauge has an NWxxKF flange, check continuity between the gauge and the vacuum chamber. If necessary, to assure a ground connection, add a 3.31 mm2 (12 AWG) or larger copper wire between the ground tab on the electronics enclosure and the vacuum chamber. A ground lug is provided on the bottom of the electronics enclosure. See Figure 4-7.

Figure 4-7: Grounding the Cold Cathode Gauge Electronics Enclosure

Proper GroundingImproper grounding could cause product failure or personal injury.

• Follow ground network requirements for the facility.

• Maintain all exposed conductors at Earth ground.

• Ground the gauge to the vacuum chamber as illustrated below.

• Make sure the vacuum port to which the gauge is mounted is properly grounded.

• See the grounding cautions in Section 2.3.

Grounding connectiontab

5 Initial Activation of the Module


Chapter 5

5Initial Activation of the Module


• CCG Module = The Series 500 Cold Cathode Gauge Assembly - consisting of the gauge (sensor), the magnet, and the electronics enclosure.


• CCG Electronics Enclosure = the extruded aluminum enclosure that houses the electronics and firmware for the CCG Module assembly.


5.1 Activating the Cold Cathode Gauge/ElectronicsOnce 24V power is connected to the I/O connector as shown in Table 4-1, the easiest way to turn ON the gauge is to press the HV ON/OFF button on the control panel of the Module. Other ways to turn ON the gauge include:

• Send the Ion Gauge ON (IG ON) command via RS-485.

• Use the High Voltage ON/OFF Digital Input (Default is active low).

• Use the GP Connect software, connect to the gauge, then select the Turn Gauge On button on the Settings tab.

• Program the module to turn ON automatically based on an analog input voltage (likely from a Convectron or Pirani gauge).

There are also many ways to turn OFF the gauge, including:

• Press the HV ON/OFF button on the front panel when the gauge is ON.

• Send the Ion Gauge OFF (IG OFF) command via RS-485.

• Use the High Voltage ON/OFF Digital Input.

• Use the GP Connect software, connect to the gauge, then select the Turn Gauge OFF button on the Settings tab.

• Program the gauge to turn OFF automatically based on an analog input voltage (likely from a Pirani gauge).




• Program the gauge to turn OFF automatically based on the pressure reading from the CCG. By default, this will turn OFF when the gauge is 1E-2 Torr or higher.

The pressure reading can be viewed:

• on the optional display,

• read through the RS-485 port using the RD command,

• read using the GP Connect Software,

• or determined by measuring the analog voltage output.

The free GP Connect software is included on the CD. Install GP Connect software and connect to the CCG module for setup and initial operation.

The gauge is shipped with the following defaults which can be changed using the GP Connect software or RS-485 commands:

Table 5-1: Factory Default Setting

Function Default See SectionAnalog Output 0 to 11 Vdc, 1V=1E-9, 1V/decade, 0V if

HV is OFF, .5V if no discharge7.6.8

RS-485 Address 01 7.6.1

RS-485 Baud Rate 115,200 7.6.1

RS-485 Parity 8 bits, No Parity, 1 Stop Bit 7.6.1

Pressure Correction Factor 1.0 7.6.2

Gas Type Multiplier 1.0 7.6.2

Auto ON/OFF Analog Input ON <= .5V; OFF>= 2.0V, No delay, Auto ON/OFF based on Analog Input Disabled

7.6.4

HV ON/OFF Digital Input Enabled, active low, no delay 7.6.4

Internal Overpressure Enabled, 1E-2 Torr, no delay 7.6.5

Environment Multiplier 5 7.6.2

Relay 1 Setpoint Disabled, internal pressure above 1E-2, 10% hysteresis, 5 sec delay

7.6.9

Relay 2 Setpoint Disabled, Internal pressure below 1E-9, 10% hysteresis, 5 sec delay

7.6.9

Relay Disable Digital Input Disabled, active low, 0 sec delay 7.6.9.5

HV ON/OFF Switch The control panel button is enabled 7.6.7

Discharge Current Timeout No timeout 7.6.2

Sensitivity Factor Disabled, 5.0 Amps per Torr 7.6.2



5.2 On-Board DiagnosticsSelf-diagnostics are used to verify proper operation of critical functions of the CCG Module, such as the electrometer (measures plasma discharge current) and the high-voltage power supply (used to generate the plasma). These diagnostics are run by the user through a command or digital input; they are also run automatically during Power-On-Self-Test (POST) or after a "High-Voltage Timeout”.

If the result of a diagnostic is out of spec, then the diagnostic will inform the operator about the present hard and/or soft channel failures, unless disabled. The self diagnostics are run at power ON, and when the "DT" command is executed.

5.2.1 Diagnostic Test DetailsThe DT command runs diagnostic tests in a specific order: System Voltages, Analog I/O, Digital I/O, Electrometer, and Plasma Power Supply. During this time, the power light will blink green, and, if the gauge has a display, the display will show "TESTING." Note that to run the Electrometer test, it is necessary for the Plasma Voltage to bleed down through internal circuitry, so an electrometer test after a gauge has been operational will experience a delay of approximately one minute before executing. Both the display and blinking power light will continue to indicate "TESTING" during this delay.

For safety purposes, the Plasma Power Supply Test will only run after a high voltage timeout, meaning the gauge is mounted on a system.

The Series 500 Cold Cathode Gauge self-diagnoses five critical functions:

System Voltages

The CCG Module electronics has various internal voltage regulators that provide power to the rest of the module. These are verified to be within proper limits (shown in the test report - DT READ). This test will not run if the unit is only being powered through USB.

If this test fails, the user should verify that the correct voltage is supplied at the power connector and that the current to the module is not limited.

Analog Input/Output

These tests verify the Analog Input/Output channels available to the user on the Process connector. The tests stimulate the channels at points in the lower and upper part of the range and verify the resulting signal is within an expected tolerance (shown in the test report - DT READ). User connections to these channels may disrupt this test.

In the case of failure, the user should remove connections to these channels and run the test again. If the test passes, verify the connections to these channels are not improperly loading or driving the channel.

Digital Input/Output

Verifies all the Digital Input/Output channels are working by stimulating and then verifying that each channel is able to operate at both "high" and "low" digital signal-levels (shown in the test report - DT READ). Like the Analog Input/Output test, user connections to these channels may disrupt the test.

In the case of failure, the user should remove connections to these channels and run the test again. If the test passes, verify the connections to these channels are not improperly loading or driving the channel.




Electrometer

An electrometer is used to measure the discharge current in the plasma and is correlated to pressure. It is verified by using a built-in precision current source that provides a stimulus in the upper-range of the three highest magnitude gains. The resulting signal is verified to be within a specified tolerance (reported in the test report - DT READ). The other gains are not tested.

This test will not run if the Anode voltage is greater than 500V. The Anode voltage can be reduced by turning OFF the ion gauge (IG OFF) and waiting for the anode voltage to discharge (approximately 1 minute). Failure of the Anode voltage to discharge may indicate a problem with the Plasma Power Supply; verify correct operation with the Plasma Power Supply test.

If the Electrometer test fails, the user should disconnect the electronics from the gauge and run the test again. If the test passes, the problem could be with the gauge or the connection to the gauge. Failure could be the result of an incorrectly calibrated electrometer or improperly functioning electronics.

High-Voltage Power Supply (Plasma Power Supply)

This supply is responsible for powering the plasma in the gauge. It is tested by verifying that the supply is able to control to a set-point in the lower and upper part of the range (shown in the test report - DT READ). This test should be run with caution as it produces kilo-volts on the connections to the gauge. Given proper conditions (working gauge, correct pressure, etc), a plasma may be generated for a short period of time during this test.

If this test fails, the user should disconnect the electronics from the gauge and run the test gain, being cognizant of the high-voltages present on the connections to the gauge. If the test passes, the issue could be with the gauge or the connections to the gauge. Failure may be the result of improperly functioning electronics.

5.2.2 Power-On Self-Test (POST)This is an automatic test that is run whenever power is applied to the electronics or when a reset occurs (assuming the module is configured to run POST - see the DT command). It will run the "System Voltages" test (if not under USB power) and the Electrometer test (if the anode is less than 500V).

The same tests that are run at POST can be run by the user using the DT POST command. The test results can be read using the DT READ command. Failing tests indicate to the user a significant issue with the module that might prevent plasma generation or valid pressure reporting.

5.2.3 High-Voltage TimeoutThis is an automatic test that is run whenever a timeout occurs while waiting for a discharge current. This will run the "System Voltages", "Electrometer", and "Plasma Power Supply" tests.

Test results can be read using the DT READ command and may explain why a discharge has not occurred. For example, if the "System Voltages" test fails, then the electronics might not have a sufficient power structure to generate plasma. If the "Electrometer" test fails, a discharge current may exist, but it cannot be measured. A failing "Plasma Power Supply" test may indicate that plasma cannot be generated.



5.2.4 Diagnostic Digital InputOne of the Digital Inputs can also be used to trigger the same diagnostic tests as POST - the "System Voltages" test and the "Electrometer" test. A digital output indicates if either of these tests fails. The DT READ command can also be used to read the test report.

The Diagnostic Digital Input is configured using the DTDIN command.




Notes:

6 Theory of Operation


Chapter 6

1Theory of Operation

6.1 Basic Theory of OperationCold Cathode Ion Gauges use crossed-magnetic and electric fields to confine electrons in a plasma sheath. Inside the sheath, the electrons travel in a cyloidal path, giving them an enhanced opportunity to impact residual gas ions. The high voltage potential of the electrons due to the large potential difference between the cathode and anode causes impact ionization of residual gas molecules, and then the resulting positive ions are accelerated towards the cathode (at ground). The resulting ion current is proportional to the pressure in the gauge and the current is measured and translated to a pressure reading.

The Series 500 Cold Cathode Gauge is a double inverted magnetron design. The inverted magnetron uses a cathode at ground and an anode at high voltage. The double inverted magnetron uses two magnets with the repelling poles to provide higher internal magnetic fields, thus lower external magnetic fields than a conventional design.

6.2 Starting the PlasmaThe plasma in the gauge is started by a random electron released at the cathode from any of many possible sources such as; field emission, cosmic ray, stray electrons from hot cathode gauges on the same chamber, or by a heavy molecule ionized by an ion pump. In any case, the electron ionizes a gas molecule and forms a positive ion which strikes the cathode, and a secondary electron is ejected. As the number of electrons increases, the electron cloud moves in a cycloidal motion around the anode due to crossed electric and magnetic fields. The cycloidal motion through the electric field gradient allows the electrons to gain enough energy to ionize the heavy residual gas molecules through electron impact ionization.

6.3 Starting at Low PressureHistorically, starting cold cathode gauges at pressures less than 1e-7 Torr has been difficult due to the low residual gas density in the gauge and the statistical nature of the randomly generated first ionizing event. The Series 500 Cold Cathode Gauge uses a patented guard-ring-based field emission starter that injects electrons into the ionization region, without adding their flow to the current measurement related to pressure. The field emission current is kept low so it does not interfere with low pressure measurement but high enough to give reliable starting times at normal low pressure.

With use, the start times of a cold cathode gauge may fluctuate, depending on several internal and external factors. For example, these times may become longer as the gauge ages due to contamination or sputtering. Alternatively, these times may also be faster if there is an alternative source of electrons in the vacuum chamber from hot cathode gauges, ion pumps or photons. If gauge performance has degraded due to contamination, it may be necessary to replace the internal components of the gauge that are affected. See Section 8.3 for replacement instructions.

6.4 ContaminationContamination inside the gauge envelope can degrade gauge performance. Sources of contamination include process gases, lubricants, and sputtering by-products inside the gauge tube.




6.4.1 Process Gas ContaminationContamination of the gauge elements can occur during operation due to the nature of the residual process gases inside the gauge ionization chamber. These substances can coat the internal surfaces of the cathode, anode, and starter, potentially leading to degradation of the ion current, producing noisy, or inaccurate readings, or even gauge failure.

The Series 500 Cold Cathode Gauge is designed to be easily disassembled for cleaning or replacement of key gauge elements, allowing the user to restore the gauge function. See Section 8.2 and Section 8.3 in the Service & Maintenance chapter for further details on cleaning or replacing components of the gauge to restore gauge function.

6.4.2 Line of Site By-ProductsDesorbed and sputtered by-products of the user's process may be directed at the entrance of the cold cathode gauge. Conversely, sputtering by-products produced within the gauge may also be directed towards the chamber. To minimize this line of site contamination in either direction, a baffle is built into the end of the gauge envelope.

6.4.3 Pressure Dose and Gauge LifetimeThe Series 500 Cold Cathode Gauge is the first ionization gauge to include a sophisticated pressure dose calculation used to provide diagnostic information and action based on the measurement of this dosage. The pressure dose is a function of the time the gauge has been operating, the discharge current in the gauge, and the species of gases in the gauge during operation. This dose represents the wear on the gauge due to normal operation. The dose measurement is used to calculate remaining gauge life and provide diagnostic/preventative maintenance to the user. Lifetime dependence on dose will depend on the user's vacuum chamber environment. Each user, therefore, has the ability to adjust life calculation based on an environmental factor. See the LIFE command details in the command section of the manual. The environmental factor <vac env> ranges from 0.0 to 10.0 and comes set with a nominal value of 5.0. The user may adjust this factor if they find that gauge performance is degrading faster than expected due to their operating environment.

The M03 troubleshooting code occurs when the remaining LIFE is zero. If the M03 trouble code appears and the gauge has not degraded in its performance, use the LIFE command and enter an environmental factor greater than 5 which will clear the M03 trouble code and add more percent LIFE remaining. This will be an iterative process until the ideal environmental factor is discovered. The same technique can be used if the gauge performance degrades very quickly and the LIFE remaining is not zero. Use the LIFE command and enter an environmental factor less than 5 that forces the remaining LIFE to zero. Use the same setting the next time the process is run and the M03 trouble code will appear when the gauge performance has degraded and should be replaced.

6.5 Electronics DescriptionThe Series 500 Cold Cathode Gauge electronics consist of a high voltage DC power supply to provide the potential between anode and cathode, a sensitive electrometer circuit to measure the plasma current, a microprocessor to control the gauge and map the measured plasma current to the corresponding pressure, and analog and digital I/O circuitry and relay control circuitry.

6.5.1 High Voltage Power SupplyIsolated high voltage power supply circuitry both generates and measures the high voltage potential between the gauge anode and cathode.



6.5.2 ElectrometerA multiple decade electrometer circuit measures the ion plasma discharge current flowing between the gauge anode and cathode.

6.5.3 Calculating PressureThe Cold Cathode Gauge calculates gauge pressure by mapping pressure to the plasma's bulk impedance. Plasma bulk impedance is calculated by directly measuring the differential voltage between the gauge anode and cathode, and dividing it by the ion plasma discharge current sensed by the electrometer circuit.

6.5.4 Analog I/OAnalog unipolar circuitry may be used to input signals over a 0V to +11V range, whereupon it is converted and scaled to a digital signal by the microprocessor. Conversely, the microprocessor may take digital signals and scale them to 0V to +11V signal range, whereupon they are output by unipolar analog circuitry. The Analog I/O is directly connected to specific D-Sub Connector pins.

6.5.4.1 Analog Output

The analog output offers multiple configurations to meet the needs of more advanced vacuum system. The analog output voltage always follows a log-linear interpretation of the vacuum pressure based on the following equation:

Vout represents the voltage reading on the analog output pins. Vbase is the base voltage desired for a given base pressure Pbase. The base voltage has always been assumed to be zero volts, but now it is now possible to set a particular base voltage with base pressure other than zero volts. Units of pressure for the base pressure entered by the AO command follow the pressure units set by the SU command. Slope is the number of volts per decade for the analog output. The gauge supports two independent voltages to represent when the ion gauge is OFF, and when the ion gauge is ON and waiting for a discharge current to be established. It is important to use a set of configuration parameters so that the log-linear values do not overlap the ion gauge ON/ OFF static voltage values.

Figure 5-1 illustrates four different curves for four different configurations of the analog output. The AO command is used to enter and change configuration, and can be found in the G-P Connect application or Section 10.8 of the RS-485 commands.

Curve 1 represents the analog output behavior for the Granville-Phillips Series 390 Micro-Ion gauge.

Curve 2 represents a maximized analog output voltage change for the operational range of the Cold Cathode gauge. This curve leaves the 10.0 volt to 11.0 volt range open for the IG OFF static voltage value, and the IG ON waiting for discharge static voltage value.

Curve 3 represents the factory default setting for the Cold Cathode gauge.




Curve 4 represents an accurate analog voltage representation for a tight process pressure range for 1e-4 to 1e-9 Torr.

Figure 6-1: Analog Output Voltage

6.5.5 Digital I/OTTL level (0V to +5V) digital circuitry is provided to both input and output serial information between the customer and microprocessor. This information is typically mapped to common Cold Cathode Gauge control and status functions by the microprocessor. The Digital I/O is directly connected to specific D-Sub Connector pins.

6.5.6 Setpoint RelaysTwo independent 2-FormC relays are directly controlled by the microprocessor and may be pre-programmed to toggle at specific pressure setpoints and/or toggle by microprocessor customer controlled commands. The Normally Open, Normally Closed and Common connections for both relays are directly connected to specific D-Sub Connector pins.

6.5.7 MicroprocessorA microprocessor controls all Cold Cathode Gauge and customer I/O functionality.



6.6 Pressure Correction FactorsThere are three pressure correction factors available for the Series 500 Cold Cathode Gauge. These factors allow the user to adjust the final pressure measurement output of their gauge according to gas species effects or to match other references that they have on the system. See the CFM, GTM, and SF commands in Section 10.8.

6.6.1 Gas Species CorrectionThe Series 500 Cold Cathode Gauge is calibrated to read pressure for nitrogen or air. The analog output voltage to pressure reading must be corrected for other gases. In the event that the user is operating the gauge in an environment where other gases make up the majority of the gas content, the Gas Type Multiplier should be adjusted to match the pressure value that the user expects to see based on a reference gauge calibrated to that environment.

6.6.2 Pressure Correction Factor MultiplierIn the event that the user wants to adjust the pressure reading of the Cold Cathode Gauge to match some other reference gauges, regardless of species or other operational specifics, the Correction Factor Multiplier may be changed. The pressure that the Cold Cathode Gauge reads will be multiplied by this factor.

6.6.3 Sensitivity FactorTo make the Series 500 CCG provide pressure readings similar to legacy gauges, a sensitivity factor can be used in place of the Standard or Calibrated curves that are normally used by the CCG to convert discharge impedance to pressure. When the sensitivity factor is used, pressure is determined by multiplying the discharge current times the sensitivity factor. Note that the accuracy specification is not valid when using a sensitivity factor.




Notes:

7 G-P Connect Software


Chapter 7

2G-P Connect Software

7.1 GP Connect ApplicationThe GP Connect software application is provided with the Series 500 Cold Cathode Gauge (CCG) Module to provide an easy way to configure the CCG electronics, to query the status of the gauge, and to view the VacTrac(*) statistics. It can also be used instead of a serial terminal emulator to send commands and receive responses over USB or RS-485. It is not a monitoring program, and should not be used during critical processing.

The GP Connect application can be installed only on a Windows XP or Windows 7 (32 bit or 64 bit) computer.

(*) VacTrac is statistical data gathered by the firmware in the module electronics enclosure. See Section 7.10 in this chapter and the VTRAC command on page 126 in Section 10.8.






7.2 GP Connect Software InstallationThe InstallShield wizard will install .Net 4.0, if this is not already on the PC, and the GP Connect software in a logical and easy-to-follow procedure. A restart of the PC may be required, thus other applications should be closed during the installation procedure.

The free GP Connect software is available on the MKS website: http://www.mksinst.com/docs/r/gp-500Series-218937.zip. Or navigate on the MKS website to the 500 Cold Cathode Gauge Module page and select 500 Series Cold Cathode Gauge Module software (218937).

1. Download (save) the zipped file to your computer.




2. Un-zip the downloaded folder.

3. Double click the “Disk1” folder to access the setup file.

4. Double click "CCG 500 GP Connect setup.exe" to open the installer.

Figure 7-1: Software Installation files on the CD5. InstallShield will open. Click "Next” to begin the installation.

Figure 7-2: InstallShield for the CCG Software6. Read the license agreement, select "I accept the terms in the license agreement", and click

"Next".



Figure 7-3: GP Connect Software License Agreement7. When the Windows prompt tells you that the driver has not been logo-tested do you want to

install anyway, select “Yes” (the non-default option). The USB driver is necessary for communicating with the Cold Cathode module via the service port.

Figure 7-4: Windows Security Display




8. Click “Finish” to complete the installation of the GP Connect software.

Figure 7-5: Software Installation CompleteThe GP Connect application is now installed and ready to use. Physically connect the service (USB) port, the RS485 port, or both to the host computer.

When the service port of a powered on 500 Series Cold Cathode Gauge is connected to the host PC for the first time, there will be a slight delay as the driver is installed. There will typically be a brief message that the device is ready.



7.3 Starting the GP Connect SoftwareClick the shortcut icon to start the GP connect software.

Figure 7-6: GP Connect Shortcut IconThe software displays the window shown below. The window has 3 general regions: (1) a pressure region, (2) a supported device region, and (3) the main region.

Figure 7-7: GP Connect Software Initial DisplayThe device region lists the COM ports on the host computer that may be connected to a Series 500 CCG electronics. Associated with each port listed is an indication of whether or not that port is currently available for connection to the software to send commands and receive the responses. The software must be connected to a communication port to be able to display any gauge information or to configure any gauge settings.

If the communication port is a USB port it will have the gauge icon as shown in the following example for COM port 14.

Figure 7-8: USB COM Port




If the communication port is not a USB port, a Settings button is displayed.

Figure 7-9: Non USB COM Port Settings SelectionThe main region initially displays the cold cathode status items. The main region has a tab bar across the top to change the view from status items to other views including configuration settings, relay settings, pressure trend graph, VacTrac information, and VacTrac histograms. It also includes a Command Entry tab to provide a method of directly entering firmware commands per Section 10.8 (and receiving the controller responses) in lieu of using a serial terminal emulator such as HyperTerminal, Termite, or Termie, etc.

7.4 Connecting to the CCG ElectronicsTo view any status information, or send any commands to the CCG electronics, the software must be connected to the appropriate communication port. If the port is a USB port, click the Connect button.

Figure 7-10: Connection IconIf the port is an RS-485 port, click the Settings button in the device region for that port. The software displays the following dialog box:

Figure 7-11: Serial Device Settings for RS-485Use the pull-down to select the baud rate for communication. Enter the RS-485 address for the cold cathode gauge physically connected to the port. The RS-485 address is a hex address from 00 to 3F. Select the parity from its pull-down. After all three parameters are correct, click the Save button and then click the connect button for that port.



NOTE: To determine the baud rate and parity for the port, use the Windows control panel device manager to find the port properties of the port being used. you want to connect.

NOTE: To determine the RS-485 address for a device, connect the device USB to the host PC and then connect the software to the USB port. Then use the Command entry tab to issue the SA command. This will return the current RS-485 address in hex (i.e., 0x0A for address 0A). A different RS-485 address can be set by sending the SA command (see Section 10.8).

7.5 Getting CCG Electronics Status InformationThe main status information is shown on the Status tab when the software is initially connected to a port. When the Status tab is clicked, the software queries the gauge controller and obtains fresh status information to display.

Status information includes the following:

• digital inputs

• digital outputs

• analog inputs

• analog outputs

• gauge pressure dose and estimated percent remaining life

• cold cathode unit information

• trouble codes (See Table 9-2 for possible trouble codes)

Note: Trouble codes are cleared once queried. C00, M00, and S00, as shown in the example, mean that there are no new check, maintenance, and service errors respectively.

Figure 7-12: CCG Electronics Status Information




The Status tab also includes a View Log button to view the events and errors that have occurred since the last time the log was queried. Clicking on this button opens a scrollable window with an ordered list of the gauge events and errors, each with a timestamp. This can be useful to diagnosis a problem.

The Status tab also provides a Run Diagnostics button. Clicking this button executes the self test (30 - 50 seconds) and then opens a window with the results as shown below. See Section 5.2 for details on the self diagnostic test.

Figure 7-13: CCG Electronics Diagnostics InformationThe final " DIAG PASSED" or "DIAG FAILED" summarizes whether the diagnostic test passed or failed. It is also possible that the cold cathode gauge can be used if the failures are caused by components not needed for the current use of the gauge (i.e., analog input when not using this for auto ON or auto OFF).

7.6 Configuring the CCG ElectronicsClick the Settings tab of the main tab bar near the top of the main region to configure most of the CCG electronics settings, or click the Relay tab to configure the two relays.



Figure 7-14: Settings Tab

7.6.1 Changing the Communication SettingsThe Settings tab allows the re-configuration of the communication settings including the RS-485 address, baud rate, and parity.

The CCG electronics RS-485 address is a hex number from 0x00 to 0x3F. The RS-485 Baud Rate pull-down menu includes the standard baud rates supported by the CCG electronics. The Parity pull-down menu has "no parity", "even parity", and "odd parity", which are the parities supported by the cold cathode gauge. To apply these settings, click Save. To retain the previous settings click the Cancel button.

NOTE: If connected via RS-485, changes to the RS-485 communication parameters take effect when the Save button is selected. If the RS-485 port is connected, it will be disconnected and must be reconnected with the new parameters.

7.6.2 Setting Pressure Units and Factors:The Series 500 CCG electronics can report the pressure in Torr, mBar or, Pascal. To change the pressure units, use the pull-down menu in the Pressure Settings area of the Settings tab.

Figure 7-15: Pressure Setting Portion of the Settings Tab




The Gas Type Multiplier is another entry field in the Pressure Settings area of the Settings Tab. The calibration curve for the CCG electronics is determined with nitrogen in the vacuum chamber, thus it may be necessary to correct for the gas species in the vacuum chamber in use. This is accomplished by setting a gas type multiplier to a value other than 1.0. Values accepted by the CCG electronics range from 0.01 to 10.0. As implied by the term multiplier, values greater than 1.0 will report a higher pressure for the same discharge impedance. For example, a vacuum system with helium should have a factor greater than 1.0 since its ionization efficiency is less than that of nitrogen to prevent underestimating the total pressure.

The Pressure Settings area of the Settings Tab also includes a pull-down menu to set the Environment. The environment is an adjustment factor to account for the cleanliness of the vacuum environment which will impact the gauge lifetime. Lower pressures and non-reactive gas species (a very clean environment) permit a longer life for the gauge relative to higher pressures and reactive gases (dirty environment). The environmental factor is used to estimate the remaining life of the gauge which is displayed in the Gauge Health area of the Status tab. It may be necessary to adjust this based on your experience. The default value is 5. Very clean environments (generally UHV systems) can set this value to 10. If it is determined that the gauge retains its accuracy longer or degrades faster than the lifetime indicates, this value can be adjusted.

There are additional pressure settings available in the GP Connect application by clicking on the Advanced Settings button on the Settings Tab. Clicking this button opens the following dialog box.

Figure 7-16: Advanced Settings

NOTE: Changing between Not Calibrated, Calibrated, and Sensitivity Factor is not recommended since this is preprogrammed at the factory.



Select the Not Calibrated option if the gauge has not been specially calibrated, or the Calibrated option if it has been specially calibrated at the factory to be a more accurate gauge, or select Sensitivity Factor to use a constant sensitivity factor to convert from discharge current to pressure. The GP Connect application displays a sensitivity factor field to allow changing from the default 5.0 Amps/Unit of pressure to a factor from 0.5 to 20.0.

When using a Sensitivity Factor, neither the Standard nor the Specific Calibration points are used, and the accuracy specification is not valid when using a sensitivity factor.

When the Calibrated option is chosen, the software displays a Load New Cal File button. Click this button to load a specific calibration curve for the gauge by browsing to the location of text file containing the calibration data. This option is used when replacing the gauge (sensor) with another gauge that is calibrated. Refer to Section 7.15.2 for more details.

In addition, the advance pressure Setting dialog window provides the ability to specify a pressure correction multiplier between 0.01 and 10.0. This factor can be used to match the reported pressure of the 500 Series Cold Cathode to previous gauges or to compensate for wear.

The discharge timeout refers to the time from when the High Voltage is turned ON to the time that the discharge is current is detected. The factory default is 0 (zero) for no timeout, but can be set to any number of seconds from 1 to 60000. The time it takes any cold cathode to achieve discharge is a non-deterministic event, but it is dependent upon pressure. For lower pressures it will take longer on average to achieve discharge. If the CCG electronics times out without achieving discharge, the electronics run the diagnostic test. If discharge timeouts are experienced, lengthen the timeout value or configure the auto ON to start at a higher pressure.

Click the Apply button on the Advanced Settings Dialog window to apply the changes or click the Cancel button to retain the initially displayed values.

7.6.3 Naming the Sensor The GP Connect application provides the ability to name the gauge sensor. Changing the sensor name resets the VacTrac information for the current gauge, so this should only be done when the gauge is in fact a new gauge. The gauge high-voltage must be OFF to do this since the sensor command (see section 10.8) is expected to only be used when a new gauge is installed in the CCG Module. Click the Advanced Settings button on the Settings tab. The software opens the Advanced Settings dialog which includes a field (sensor name) to enter an alphanumeric identifier for the gauge up to 31 characters long. Click the Apply button to apply this identifier, or click the Cancel button to leave the sensor name as it was. See Section 7.15.3.

7.6.4 Setting the Gauge Auto ON BehaviorThere are two ways to manually turn ON the high voltage to the gauge. One method is the HV ON/OFF switch. The other method is to send the IG ON command. This can be sent from the Command Entry tab of the GP Connect software or the gauge can be turned ON by clicking the Turn Gauge ON button on the Settings tab. If the gauge is ON, the Turn Gauge OFF button will be in the same location.

There are also two ways to signal the high voltage to turn ON automatically - by digital input or by analog input. On the Settings tab, the External Auto ON/OFF Control area provides digital IN and analog IN as the two options on a pull-down menu. If the digital IN is selected, the area displays the Enable field, a choice of Active Low or Active High, and the delay or hold time in seconds for the criteria to be met before the high voltage is turned ON. The delay can be any integer from 0 to 60000. Check the enable field to enable the digital input to auto ON (and auto OFF when the signal is reversed).




Figure 7-17: Set the Sensor (Gauge) Auto ON/OFF using DINIf Use Analog In is chosen for the External HV Auto ON source, the software displays slightly different fields to fill in as shown.

Figure 7-18: Set the Sensor (Gauge) Auto ON/OFF using AIN



The threshold voltage is the voltage input necessary to turn ON the gauge. This voltage can be any value from 0.0 to 11.0 volts. If this voltage is below the value for the analog auto OFF voltage, then voltages below this value will turn ON the gauge. If the threshold of auto ON value is greater than the value of the auto OFF, values above this threshold will turn the gauge ON. The software will show the selection, below or above, to the right of the value. Fill in a delay or hold time for the voltage to be held before the gauge high voltage is turned ON. The delay can be any integer number from 0 to 60000 seconds. Check the Enable HV Auto ON (Analog In) box to enable the selected analog IN settings.

7.6.5 Setting the Gauge Auto Off BehaviorThe Cold Cathode gauge uses its internal pressure to shutdown. This feature cannot be disabled, but a lower pressure can be input into the Internal Overpressure Shutdown area of the Settings tab to further protect the gauge since cold cathode gauges wear faster at higher pressures. The range for the pressure is 1.0E-10 to 1.0E-2 Torr in the current pressure units. If the vacuum system is subject to pressure spikes, the delay or hold time in the Internal Overpressure Shutdown area can be increased up to 10 seconds.

Figure 7-19: Set Internal Pressure Auto Off BehaviorThere are two basic methods to automatically turning the gauge OFF based upon external control - digital IN and analog IN. These automatic OFF methods are paired with the auto ON method. If Use Digital IN was chosen for auto ON, the opposite digital signal will automatically turn the gauge OFF.

If Use Analog IN was chosen for the external auto ON control, a different voltage must be specified in the Threshold field to automatically turn the gauge OFF. This voltage can be any value from 0.0 to 11.0 volts, other than the voltage for auto ON. Enter a delay or hold time for that voltage to be maintained before the gauge is turned OFF. The delay can be any integer from 0 to 60000 seconds. Check the Enable HV Auto OFF (Analog IN) box.

7.6.6 Setting the Date and Time on the ElectronicsThe date and time are reset in three instances: (1) when the CCG electronics are powered up, (2) the electronics are reset, or (3) the electronics are returned to factory defaults. In each case, the date and time is reset to 2000/01/01 00:00:00. To set the correct date and time so the timestamps in the log can be correlated with observations, enter the time in HH:MM:SS format and the date in YYYY/MM/DD format on the Settings tab in the Time and Date section.




Figure 7-20: Set the Date and Time

7.6.7 Disabling Further Commands or Disabling HV button pressesOnce the 500 Series CCG Module is configured as desired it is possible to lock out further "set" commands by checking the Command Lock box that is on the Settings tab. "Read" commands such as getting the pressure, reading the various configuration settings, or reading the digital outputs will still return valid responses but commands to change the configuration will be rejected. This command lock persists through power cycles.

When the Command Lock is enabled, commands that will be rejected are shown in gray.

Figure 7-21: Disable the HV ON/OFF SwitchIf the CCG Module is in a position where the HV ON/OFF button could be accidentally pushed, it may be desirable to disable the HV button. This is accomplished by checking the Disable HV ON/OFF Switch box on the Settings Tab. This disable function also persists across power cycles. If the auto ON and shutdown features of the gauge are configured, it should be unnecessary to permit the HV ON/OFF button use.

7.6.8 Configuring the Analog Output SettingsBy default, CCG electronics produces an analog voltage to represent the pressure. The factory default for the analog output is a log linear "line" that starts at 1.00 volts for 1.000E-9 Torr with a slope of 1.00 volt per decade of pressure in Torr. The factory default is to output 0.0 volts if the gauge is OFF and 0.5 volts if the gauge HV is ON but discharge has not yet been established (so there is no pressure reading to represent). This default can be changed by changing the values in the Analog Output Setting dialog that opens in response to clicking the Analog Output Settings button on the Settings tab. If the analog output is not desired, it can be disabled by un-checking the Enable Analog Output box.



Figure 7-22: Configure the Analog Output Settings

7.6.9 Configuring the RelaysThe CCG electronics have two relays which are programmed and commanded separately. The Relay tab of the GP Connect application provides the ability to manually turn each relay ON or OFF as well as configure the criteria for the automatic behavior of each relay.

7.6.9.1 Manual Control of Relays

To manually turn a relay ON if it is OFF, or OFF it is currently ON, use the pull-down for the relay on the Relays tab. The manual command to turn the relay ON or OFF always overrides the relay set point and the digital IN relay disable.

Figure 7-23: Manual Control of Relays

7.6.9.2 Automatic Relay Based on Internal Pressure

To configure the criteria to automatically close or open a relay, first select the appropriate trigger or source to assert the relay. The Series 500 Cold Cathode provides three sources to trigger the relay to close: (1) internal pressure, (2) external voltage through the analog in, or (3) service errors. The software will display the fields that need to be entered or selected based upon the trigger source chosen.




Figure 7-24: Set the Automatic Relay Based on Sensor Internal PressureFor instance, when using internal pressure to trigger the relay, the following settings are entered:

(1) a threshold pressure in the current pressure units, whether to trigger the relay when the pressure is above or below that threshold pressure,

(2) a hysteresis percentage,

(3) a delay or hold time in seconds for the pressure before activating the relay,

(4) a relay state when there is no pressure reading, or there is zero voltage on the analog IN.

The hysteresis and delay time are used to prevent responding to pressure spikes. The delay can be from 0 to 60000 seconds. The relay state when there is no pressure should be configured to either ON or OFF.

Click the Apply button to set this configuration for the relay set point. Then select Auto Enable on the pull-down menu to enable the automatic behavior of the relay.

7.6.9.3 Automatic Relay Based on External Voltage

When using an external voltage to trigger the relay, select the External Voltage radio button. The GP connect application displays several fields that must be filled in to configure the automatic relay set point as shown below.



Figure 7-25: Set the Automatic Relay Based on External VoltageThe external voltage trigger requires a voltage threshold. The relay can be specified to close when the analog IN voltage is either above the threshold voltage or below the threshold voltage for a delay time in seconds. The delay in seconds can be from 0 to 60000 seconds. The hysteresis percent should also be specified. The delay and hysteresis are used to prevent relay fluctuation when the analog IN voltage is near the threshold. When there is zero voltage, the relay state should be configured to either ON or OFF.

Click the Apply button to set this configuration for the relay set point. Then select the Auto Enable on the pull-down menu to enable the automatic behavior of the relay.

7.6.9.4 Automatic Relay Based on Service Error

When using service errors to trigger the relay, select the Service Errors radio button. The GP Connect application displays the following:




Figure 7-26: Set the Automatic Relay Based on Service ErrorClick the Apply button and then select the Auto Enable on the pull-down to enable the automatic behavior of the relay. There will be no delay between detecting a service error and activating the relay.

7.6.9.5 Digital IN Disable of Automatic Relay Set Points

It is also possible to use a digital input to disable both automatic relay set point configurations. To disable the relay set points, check the Enable box in the Relay Disable Input area on the Relays tab and use the pull-down menu to select Disable when low or Disable when high as appropriate:

Figure 7-27: Disable Automatic Relay Set Points with DIN



The disable input can be Disabled when Low so that grounding the digital input will disable the relay set points and pulling it high will enable the relay set points. The disable input can also be defined as Disable When High so that pulling the digit input high will disable the relay set points and grounding the digital input will enable the relay set points. A delay or hold time from 0 to 60000 seconds can also be specified.

7.6.9.6 Restoring Factory Defaults

The CCG electronics can be returned to the factory defaults by clicking the Restore Factory Defaults button on the Setting Tab. Resetting to factory defaults does not reset the communication parameters but it may turn OFF the gauge. See the FAC command in Section 10.8 for more detail on the factory defaults. The software connection to the port will be lost when the restore factory defaults is executed. To get the status or modify any settings, click the refresh Device List button to see that the port is available and then reconnect the software.

7.7 Turning the Cold Cathode Gauge ON or OFFThe CCG electronics provide two ways to manually turn ON the high voltage to the gauge. One method is the HV ON/OFF switch. The other method is to send the IG ON command. This can be sent from the Command Entry tab of the GP Connect software, or the gauge can be turned ON by clicking the Turn Gauge ON button on the Settings tab.

If the gauge is ON, the button on the Setting tab is labeled Turn Gauge OFF. Clicking on this button will turn the gauge OFF. Alternatively the Command Entry tab can be use to send the IG OFF or IG 0 command to turn the gauge OFF. Note that the discharge dissipates slowly after the gauge high voltage is turned OFF, so the gauge should not be immediately removed from the electronics.

7.8 Resetting the GaugeThe CCG Electronics can be reset similar to a power cycle by clicking the Reset Gauge button on the Settings tab. This does not change the configuration settings, so even though the gauge high voltage gets turned OFF, the auto ON setting may cause the high voltage to turn ON again. Resetting the gauge will disconnect the software from the gauge.

7.9 Viewing the Pressure TrendThe GP Connect software provides the ability to view the pressure trend. To view the pressure trend, click the Pressure Tab. If the gauge discharge current is ON, the software will display a graph of the pressure versus time. The time axis is very short, so to zoom out to see a longer time frame (as when pumping the vacuum system down). Hold the Shift key and right click the mouse to zoom to the desired view. The mouse must be in the graph region for this to work.

• To zoom in on the pressure trend graph time axis, hold the Shift key down while right clicking the mouse.

• To zoom out on the pressure axis hold the CTRL key down while left clicking the mouse.

• To zoom in on the pressure curve hold the CTRL key down and right click the mouse.

• The mouse wheel can also be used to zoom in and out.

Alternatively if the scale is close, click the orange edge of the graph axis to get a double headed arrow and then pull the end of the graph scale in the direction to get more or less of that axis.




7.10 Viewing VacTrac StatisticsThe CCG Electronics stores statistics on gauge and electronics use every 15 minutes. These VacTrac statistics can be useful to determine how long the gauge has been turned ON, whether a gauge is wearing out, if the discharge timeout configuration is reasonable, if the gauge is being exposed to overpressure conditions, etc.

7.10.1 VacTrac Simple StatisticsTo view VacTrac statistics, first click the VacTrac tab and then click the Update VacTrac Information button. The software displays the event counts, duration times, pressure dose, and controller ranges as shown separately below.

7.10.1.1 Event Counts

The GP Connect application displays the event counts for tracked events in the column of the VacTrac data labeled Event Counts. Click the Update VacTrac Information button to get the latest counts.

Figure 7-28: VacTrac Event Counts



7.10.1.2 Duration Times

The GP Connect application displays cumulative duration times for tracked statistics in the column of the VacTrac data labeled Times. These are all hours (or factions of an hour) for the current gauge or for all gauges that have been connected to the electronics. With experience, these statistics can be used to estimate the need for cleaning, replacing or calibrating components. Click the Update VacTrac Information button to get the latest durations.

Figure 7-29: VacTrac Duration Times

7.10.1.3 Pressure Dose

The GP Connection application trend shows the pressure dose for the current gauge in VacTrac column of VacTrac data labeled Trends. The pressure dose along with the environmental setting is used to predict the remaining gauge life. See Section 6.4.3.

Figure 7-30: VacTrac Pressure Dose

7.10.1.4 Ranges

At the bottom of the VacTrac tab are the VacTrac ranges for various voltages, seconds to establish discharge, discharge current, discharge impedance and temperature. The Guard ring leakage current is of particular interest to track over time as when the leakage current gets to a micro-amp, the gauge will need to be cleaned or replaced. Click on the Update VacTrac Information button to get the latest ranges.

Some fields may contain NaN for 'not a number'. For instance, if the gauge has not established discharge then the Discharge current (current gauge) fields will be NaN.




Figure 7-31: VacTrac Ranges

7.10.2 VacTrac HistogramsTo view the VacTrac histogram data, click the VacTrac Histogram tab. Initially the tab may look like the following:

Figure 7-32: VacTrac Histogram TabClick the Update VacTrac Information button to get fresh VacTrac data. Then select the histogram graph from the pull-down menu (e.g., discharge minutes per decade Torr for the current gauge). The software will display the histogram graph for that data.

Once a histogram is selected, click the Update VacTrac Information button to refresh the data for the histogram, and the software will display the same histogram with the updated data.

Note that each histogram bar has the VacTrac value for that discrete interval (bin) written on it.



Figure 7-33: Sample Histogram Graph

7.11 Saving VacTrac Statistics to a FileVacTrac statistics can be saved to a file to preserve them when a sensor is renamed or as a potential aid in identifying problems with the CCG. The GP Connect application provides a file browser dialog to save the VacTrac information to a file when the sensor is renamed, and it provides the same browser dialog at any time from the File Menu by selecting the Save VacTrac Data option.

Figure 7-34: File Menu




Figure 7-35: File Browser for Specifying File

7.12 Saving the Device Configuration to a File The current device configuration settings can be saved to a text file for later use or to program additional gauges. Use the File menu while connected to the CCG Electronics. Click the Save Current Device Settings option. A file browser dialog window is displayed. Navigate to a folder for which you have write permissions and enter a file name for the file. The file will get an extension of .ccgset.

The *.ccgset file is a text file that can be read by text editors and can be used to return the configuration for the same device later or as a starting configuration of other cold cathode gauges.

Click the Cancel button the file browser dialog window to not save a configuration file.

7.13 Downloading the Settings in the File to the DeviceA *.ccgset file that contains device settings can be downloaded to one or more devices. To do this, use the Load Settings File option on the File menu. This option has two further variations - (1) to load the configuration to the connected device via the Currently Connected Device option or (2) to load the configuration to multiple devices via the Multiple Devices option. Click the appropriate option and select the *.ccgset file to load.

For the currently selected device the configuration in the file will be downloaded to the device. For Multiple Devices, select which devices are to be configured with the settings. The software will then send the appropriate commands to each device in turn.

7.14 Entering Commands DirectlyClick the Command Entry tab in the main region to enter commands directly. Any commands listed in Table 10-4 and described in Section 10.8 are allowed. However, there is one major difference between using this feature of the GP connect software versus using a serial terminal, and that is that the start character and address are not entered by the user even when connected to an RS-485 port.



The GPS Connect application prefixes the start character and RS-485 address when necessary based upon its connection information. The response has the RS-485 address stripped (if necessary) but does start with the response start character returned - * for success or ? for errors.

7.15 Updating the Cold Cathode Gauge ElectronicsEventually it may be necessary to update the electronics firmware, or to replace a gauge, or update the special calibration curve for the gauge.

7.15.1 Update Firmware VersionTo upgrade the firmware, copy the new firmware release (a DFU file) to a known location on the host PC or a server that can be accessed from the host PC. Verify that the USB (service connection) of the cold cathode electronics to be updated is physically connected to the host PC but do not connect the software to the COM port. An error message will occur if the USB is connected to the COM port.

Select the Upgrade Firmware option on the File menu. The software displays a dialog window as shown:

Figure 7-36: Firmware Upgrade DialogIf multiple CCG Modules are physically connected to the host via the PC, they will be displayed in this dialog window. Check Include in the upgrade box for the cold cathode gauge to be upgraded. The current firmware version is displayed for each device listed.

Click the Browse button and then navigate to the DFU file containing the firmware version to be installed so that the name is in the field. Then click the Start Upgrade button.

The software will erase the current firmware version and copy the new version to the device. While this is happening the COM port of the cold cathode will disappear from the Supported Devices region. Once the firmware is updated the USB COM port will appear in the Supported Devices region and the firmware upgrade window will show “Upgrade Completed Successfully”. Close the window and connect the software to this COM port and verify that the Status Tab Unit Information area shows the expected firmware revision.

NOTE: It is important to get the correct DFU file. Otherwise, the device may stay in the DFU mode and not show on the device list; in which, case power cycle the device and load the correct DFU file.




7.15.2 Update Specific Calibration CurveIf a calibrated replacement gauge that was specifically calibrated for higher accuracy is used or replaced, the specific calibration data may need to be loaded into the CCG electronics. To do this, click on the Advanced Setting button on the Settings Tab. Select the Calibrated radio button. The software will display a Load New Cal File.

Click the Load New Cal File button. The software will display a file browser dialog window. Select the file containing the specific calibration data. Be sure to use the correct factory calibration file for the sensor being used.

Figure 7-37: Update Specific Calibration File

7.15.3 New SensorSee Section 8.3 for instructions to replace the sensor (gauge). To maintain separate VacTrac statistics for the new sensor, the new sensor should be given a new identifier prior to turning it ON. Click the Advanced Settings button on the Settings tab. The software opens the Advanced Settings dialog. Enter an alphanumeric identifier up to 31 characters long for the sensor in the Sensor field. Click the Save button to apply this name and to reset the VacTrac statistics for the current sensor.

NOTE: Changing the sensor name issues the sensor command which resets the VacTrac information for the current sensor, so this should only be done when the sensor is in fact a new one.

The software will display the message shown in Figure 7-38. Click OK to change the name or click Cancel to not change the name of the sensor.

• OK = the software will display a file browser dialog to save the current VacTrac information to a file. See Section 7.11. Canceling the file browser dialog will only cancel saving the VacTrac information to a file - the sensor name will be changed.



Figure 7-38: Sensor Name Change Warning MessageIf the new sensor has a specific calibration curve, follow the directions in Section 7.15.2 to load the correct calibration curve into the electronics.




Notes:

8 Service & Maintenance


Chapter 8

3Service & Maintenance

8.1 IntroductionThe procedures in this section provide instructions for normal service issues that may be required during use of the Series 500 Cold Cathode Gauge.





• GP Connect = the software application provided with the hardware (gauge/electronics assembly).

8.2 Gauge Bake-out ProcedureBaking the Series 500 Cold Cathode Gauge helps reduce residual background gases and can help if contamination has occurred.

This procedure requires removing the electronics enclosure and the magnet from the Cold Cathode Gauge.

Hot SurfaceDo not touch the gauge or the immediate surrounding area of the vacuum chamber during the bake out process. Wait until the bake out process has finished and the area has cooled.

Gauge bake out temperature with the magnet removed is 250 0C maximum.




Figure 8-1: Magnet Assembly and Product Label

To bake the Cold Cathode Gauge:

1. Turn OFF Power to the gauge.

2. Disconnect both cables from the electronics module.

3. Press the electronics enclosure release tab on the side of the enclosure to remove the enclosure from the gauge, which will remain attached to the vacuum chamber. See Section 8-2.

Figure 8-2: Remove the Electronics Enclosure from the Gauge

4. Remove the magnet assembly and store it in a safe location away from magnetic media and metal objects, as they may be damaged by, or cause damage to the magnet.

5. Use an insulated heat tape rated for conductive surfaces or a suitable heat source with a controller to safely bake the gauge to a temperature of 250 0C (482 0F).

6. Remove the heat source after baking and allow the gauge to fully cool.






Figure 8-3: Remove the Magnet Assembly

7. Re-assemble the gauge. Install the magnet with the alignment hole towards the vacuum chamber, and matched to the alignment pin on the flange. When properly aligned, the magnet will seat flush to the flange.

NOTE: During re-assembly of the module, make sure the serial numbers match for the CCG sensor (gauge), the magnet, and the CCG electronics.

8. Re-install the electronics enclosure to the gauge by pressing in AND holding in the electronics enclosure release tab to clear the gauge tube, then release the tab. The latch inside the electronics enclosure will engage the latch groove on the gauge tube, locking the electronics enclosure onto the gauge. Check to make sure the electronics enclosure is fully seated by gently pulling on the enclosure. Repeat this step if necessary and add forward pressure to compress the gasket on the electronics enclosure.

NOTE: The gauge electronics enclosure is designed with a safety interlock that prevents the electronics from turning ON the high voltage supply unless the gauge is fully inserted into the electronics housing. This interlock closes an electrical contact when the gauge is installed. To fully engage the interlock and allow the electronics to operate the gauge, it is important to firmly and completely install the enclosure onto the gauge, making sure the mechanical latch that holds the gauge and enclosure together is completely engaged.

9. Re-connect the cables to the electronics enclosure.

Safety InterlockHigh voltage is supplied to the gauge during operation. Do not attempt to defeat the safety interlock that disables the high voltage when the electronics and sensor are not assembled together.

Gauge Tube

Latch Groove

Alignment Hole




8.3 Replace the Components of the Cold Cathode GaugeContaminated components of the Cold Cathode Gauge can be replaced if error code M03 is displayed (see Table 9-2) or the gauge performance has changed and accuracy is believed to be compromised (see Section 6.4). Use Granville-Phillips’ field replacement kit #500600-K shown in Figure 8-4 and Figure 8-6.

Figure 8-4: Gauge Replacement Parts

This procedure requires removing the electronics enclosure and the magnet from the Cold Cathode Gauge. Use good vacuum practices to protect the vacuum system and components from contamination during this procedure.

1. Turn OFF the vacuum pumps and vent the vacuum chamber to atmosphere.

2. Remove the electronics enclosure and magnet from the gauge. See Steps 1 through 5 of Section 8.2 to remove the electronics enclosure and the magnet.

3. Remove the gauge from the vacuum system.

a. For a 2-3/4 inch ConFlat-type flange, remove the 6 bolts that attach the gauge to the vacuum chamber and remove the gauge from the vacuum chamber.

b. For an NW25KF or NW40KF flange, remove the metal clamp and remove the gauge from the vacuum chamber.

4. Remove the snap ring with snap ring pliers. See Figure 8-5.





Figure 8-5: Remove the Snap Ring

5. Gently remove the baffle top. See Figure 8-6. Make a note of the orientation of the baffle top and make sure the new part is installed properly during reassembly of the gauge. See the Notice in Step 8.

Figure 8-6: Gauge Internal Parts

6. Remove the baffle bottom.

7. Tip the gauge and allow the cathode cage to slide out.

8. Reassemble in the reverse order with new cathode cage parts kit #500600-K.

a. Insert the cathode cage, the baffle bottom, and the baffle top.

Baffle Bottom

Baffle Top

Snap Ring

Cold Cathode Gauge Housing

CathodeCage




9. Carefully replace the snap ring in place to hold the cage together.

Figure 8-7: Snap Ring Installed

10. Attach the gauge to the vacuum chamber. Be sure to use a new seal between the gauge and the vacuum chamber. See Section 4.2.3 for proper installation procedures.

11. Install the magnet and electronics enclosure on the gauge. See Steps 7 through 9 of Section 8.2 to reassemble the magnet and electronics enclosure.

Notice

Insert the Cathode Cage with the larger opening toward the gauge port. The Baffle Bottom is symetrical and can be installed with either side facing toward the gauge port.

The Baffle Top MUST be installed with the “cupped” side (concave side) over the Baffle. If it is not installed properly, the instrument will not function properly.



8.4 Service GuidelinesSome minor problems are readily corrected on site. If the product requires service, contact the MKS, Granville-Phillips Division Technical Support Department at 1-303-652-4400 or 1-800-776-6543 for troubleshooting help over the phone.

If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

When returning products to Granville-Phillips, be sure to package the products to prevent shipping damage. Granville-Phillips will supply return packaging materials at no charge upon request. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

For Customer Service / Technical Support:MKS Pressure and Vacuum Measurement SolutionsMKS Instruments, Inc., Granville-Phillips® Division6450 Dry Creek ParkwayLongmont, Colorado 80503 U.S.A.Tel: 303-652-4400Fax: 303-652-2844Email: [email protected] MKS Corporate HeadquartersMKS Instruments, Inc.2 Tech Drive, Suite 201Andover, MA 01810Tel: 978-645-5500Fax: 978-557-5100Email: [email protected]




Notes:

9 Troubleshooting


Chapter 9

4Troubleshooting

9.1 Troubleshooting Procedures

Table 9-1: Troubleshooting Procedures

Problem Possible Cause Corrective Action

Power indicator does not illuminate.

1. The Power supply is disconnected, OFF, or inadequate for the load.

2. The I/O connector may be wired incorrectly.

1. A switching power supply may shut down from the current surge upon power up. If a switching supply is used, size the current limit to two times the working load. See Table 3-2 in Chapter 3.

2. Refer to Chapter 4, Installation.

Unit does not respond to RS-485 communication from the host but the Power Indicator illuminates.

1. RS-485 not powered.

2. RS-485 address, baud rate, or parity may not be set correctly.

Ensure 24 Vdc is supplied to unit.

2. Refer to the G-P Connect application or the SA, SB, and SP commands in Section 10.8.

The Cold Cathode Gauge will not stay on. (always reads READY on the display).

1. Fault condition indicated by reading response to LOG ERROR command.

2. System pressure is too high; the display will say OVER PRESS.

3. Pressure below 1.0E-10 Torr. (If the gauge has a digital display, it shows LOW PRESS.)

1. Refer to the G-P Connect application or the LOG command in Section 10.8.

2. Verify the overpressure settings and reduce the pressure to the proper range.

3. Ensure that the proper pressure units, gas type multiplier, and pressure correction factors are in use. Raise the pressure if necessary.

9 Troubleshooting



Inaccurate pressure readings. 1. Mechanical damage. If the unit is dropped or excessive force is applied to the vacuum connections during installation, gauge elements may be damaged or pin leaks may occur.

2. Contamination. Pump oil and other organic compounds or metal coating from a sputtering process can cause electrical current leakage between the gauge elements.

3. Location of the gauge.

1. Replace damaged gauge.

2. Replace the internal components of the gauge. See Section 8.3.

3. Make sure there is adequate conductance to the gauge from the chamber, and the gauge is properly located to measure pressure in the area of interest.

Process control setpoint does not function as expected.

1.The I/O connector may be wired incorrectly.

2.Incorrect set points values programmed.

3. Manual relay command has overridden the relay setpoint.

4. RLYDIN was used to disable the relay setpoint.

1.Refer to Chapter 4, Installation.

2.Read the RLYSPx data and correct.

3.Issue the RLYSPx command (Section 10.8) to re-enable the automatic behavior.

4.Pull the relay digital input high or send the RLYDIN 0 command (See the G-P Connect application or Section 10.8)

Maintenance LED illuminated green.

1. Warning that the Gauge should be serviced at the next maintenance period.

1. Use the Maintenance code to determine what needs to be serviced. This will be on the display, displayed in the G-P Connect application, or available in the log.

Maintenance LED illuminated red.

1. Indicates a serious problem with the Gauge such that pressure readings will not be possible until corrected.

1. Use the service code to determine the failure indicated. This will be on the unit display, displayed in the G-P Connect application, or available in the log.



9 Troubleshooting


Pressing the HV button does not turn the unit ON or OFF.

1. The button has been locked out to prevent accidentally turning the unit ON or OFF. If the unit has a display, press the HV button to see a brief disabled message.

2. The pressure is above the current overpressure limit, so the unit will not turn ON.

1. Use the G-P Connect application or the BL command in Section 10.8 to unlock the HV button.

2. Use the G-P Connect application to correct overpressure thresholds. If the external overpressure is in use verify the analog in to the module.

The display is blank but power is ON and receiving responses to commands.

1. The display is susceptible to electrostatic discharge.

1. Use the G-P Connect application or the DAR command in Section 10.8 to shorten the display auto reset time.

2. Prevent electrostatic discharges.

Overpressure reading when other devices on the vacuum system indicated proper range.

1. The overpressure limit may be set incorrectly.

1. Use the G-P Connect application to correct the overpressure configuration. (Lengthening the delay time may help.)

2. Issue the IGINT command (see Section 10.8) and verify that the overpressure limit is set properly. Issue the IGEXT command and if it is ON, verify that the analog in signal is not indicating overpressure. The analog in voltage to indicate overpressure is set in the IGAIN command.

Response of "INVALID" or gauge won't turn ON. (RD command returns "IG OFF").

1. Sensor not detected.

2. The plasma power supply is not properly powering the plasma in the gauge.

1. Verify connections to the gauge and that the module is correctly mounted.

2. Run the DT READ command (See Section 10.8) and verify that the plasma power supply passes the internal diagnostics. (See Section 5.2.1)

"LOCKED" response to command.

1. Commands could have changed the configuration or have been locked out.

1. Use the G-P Connect application or the LOCK command in Section 10.8 to unlock commands if necessary.



9 Troubleshooting



Table 9-2: Troubleshooting Codes

Code Error Name Error Level

User Correct

ableAction

C01 Input voltage out of range Check Yes Verify correct voltages are input to the Gauge.

C02 Gauge I/O operation sent while input voltage out of range

Check Yes Retry gauge I/O operation after input voltages have been corrected and stabilized.

C03 Gauge I/O operation sent while only USB powered only

Check Yes Supply 24V.

C04 HV discharge timeout Check Yes Increase timeout, or increase pressure for easier start. Verify auto ON settings.

C05 HV on request in overpressure condition

Check Yes Lower pressure into range and resend HV on request.

C06 Command syntax error Check Yes Send corrected command.

C07 Sensor disconnected from module Check Yes Reattach the module to the sensor and verify that the latch is in the proper position.

C08 Sensor disconnected from module while HV ON

Check Yes Turn OFF HV and reattach the module to the sensor. Verify that the latch is in the proper position.

C09 Over temperature Check Yes Reduce the heat source near the module.

C10 Persistent storage write error Check No

C11 Persistent storage read error Check No

C12 Persistent storage initialization error

Check No

C13 Button pressed while Locked Check Yes Send the button unlock command (BL 0).

9 Troubleshooting


C14 Gauge I/O operation while board health bad

Check Yes Use the G-P Connect application or the DT command in Section 10.8 to verify proper input voltages and repeat the diagnostic test prior to other gauge I/O operations.

M01 Relay 1 cycles exceeded Maintenance

Yes Replace the module.

M02 Relay 2 cycles exceeded Maintenance

Yes Replace the module.

M03 Pressure dose over limit Maintenance

Yes Replace the gauge or order the gauge parts replacement kit. See Section 6.4.3.

Contact customer service for assistance.

S01 High voltage supply failure Service No Contact Customer Service.

S02 Electrometer failure Service No Contact Customer Service.

S03 Feed-through current over limit Service No Contact Customer Service.

S04 Guard ring leakage current over limit

Service No Contact Customer Service.

S05 System voltages out of range Service No Contact Customer Service.

S06 Analog output diagnostic failure Service No May still be able to run; depends on the use of the analog output for process. Otherwise contact Customer Service.

S07 Analog input diagnostic failure Service No May still be able to run; depends on the use of the analog input for process. Otherwise contact Customer Service.

S08 Digital I/O diagnostic failure Service No May still be able to run; depends on the configured use of digital I/O. Otherwise contact Customer Service

Table 9-2: Troubleshooting Codes

Code Error Name Error Level

User Correct

ableAction

9 Troubleshooting



Notes:

10 Digital Interface Specifications and Protocol


Chapter 105Digital Interface

Specifications and Protocol

10.1 IntroductionThis chapter provides information for the USB and optional RS-485 digital communication interfaces for the Series 500 CCG Module. See Section 10.3.3 and Section 3.6.3 for information regarding use of the USB command and response structures.

The optional RS-485 digital interface version of the CCG Module provides industry-standard digital RS-485 communications over networks as well as direct connections to a personal computer. The setpoint relays can be easily controlled via the RS-485 digital interface.

10.2 Power and RS-485 Cable ConnectionsThe Power/RS-485 connector provides the following functionality:

• External Power connection

• Gauge Identification

• Analog In and Out

• High Voltage and Discharge ON/OFF Digital Out

• High Voltage ON/OFF Digital In

• RS-485 bus

Figure 10-1: Power & RS-485 Connector Pin Assignments

NOTE: See Section 4.3.2 for detailed information on the Process Control connector.

See Section 4.3 for detailed connection information.




10.3 RS-485 Serial ProtocolsThe serial protocol is command-response using ASCII characters. If a backspace character (0x08) is received, it erases the previously received character. The Line Feed character (0x0A) will be ignored and not added to the receive buffer. White space characters are received but are ignored by the command parser. Command parameters are assumed to be decimal unless preceded by a "0x", and then it is assumed to be hexadecimal.

10.3.1 RS-485 Command Structure<start char><address><command><data (for some commands)><end char>

start char : '#'

address: 2 hex digits

command: see the list of commands in Section 10.7 and Section 10.8

data: some commands accept a data argument

end char: CR (0x0D)

Table 10-1: Power & Communications Connector Specifications



2 Analog Output Signal Output Voltage (log)Min output impedanceMin load impedanceMin update rate

VdcOhmOhmHz

0 - 1120010k40

3 Supply + 24 nominal Vdc 13.5 to 36

4 Supply - Vdc 0

5 Analog Input Signal Input Voltage Vdc 0 to 11


7 Chassis Ground

8 MFR Device ID Resistor

9 High Voltage Active Indicator Digital Output


Vdc 0 to 5

10 Discharge Current Active Indicator Digital Output


Vdc 0 to 5

11 RS-485 - / Inverting Half duplex

12 RS-485 + / Non-Inverting Half duplex


14 Error Status Indicator Digital Output


Vdc 0 to 5

15 High Voltage On/Off Digital Input



10.3.2 RS-485 Response Structure<start char><address><response><end char>

start char : '*' for success, '?' for error

address: 2 hex digits

response: see the list of commands in Section 10.7 and Section 10.8

end char: CR (0x0D)

10.3.3 USB Command and Response StructuresThe USB service port commands and responses are structured the same as the RS-485 version without the <start char> and <address>. The responses are structured the same without the <address>.

10.4 Communication Setup Command EffectCommands SA, SB, and SP will take effect immediately after the PROGM OK response is sent to the previous address, baud rate, or parity.

10.5 Error Responses

Table 10-2: Error Responses

Error Response DescriptionINVALID Get or set operation is invalid based on current configuration.

LOCKED Setting this parameter is locked.

RANGE ER Parameter is out of range.

SYNTX ER Response for invalid command syntax.

IG OFF Pressure requested while the ion gauge is OFF.

NO DISCHARGE Pressure requested while the ion gauge is ON but no discharge.

STORAGE READ ER Reading the parameter configuration from non volatile storage failed. The hardware will use factory defaults and continue to function properly.

STORAGE WRITE ER Writing the parameter to non volatile storage failed, but the parameter took effect in the hardware. The device will continue to function properly, but the parameter configuration will not come back after a power cycle.




10.6 General Responses

10.7 List of Series 500 CCG Module User Commands

Table 10-3: General Responses

General Response DescriptionPROGM OK Successful command execution.

0 OFF Hardware state is OFF.

1 ON Hardware state is ON.

TORR Pressure units of Torr.

MBAR Pressure units of millibar.

PASCAL Pressure units of Pascal.

E Parity is set to even.

O Parity is set to odd.

N Parity is set to none.

PROGM OK RESETTING

Device is resetting.

Table 10-4: List of 500 CCG Module User Commands

Command Page # Description

AO 94 Get or set the analog output mode.

BL 95 Set the gauge button lock or get the button lock state.

CC 95 Get or set the calibration curve.

CCID 96 Get or set the calibration curve ID string.

CFM 96 Get or set the pressure correction factor multiplier.

DAR 97 Get or set the display auto reset period.

DOSE 97 Get the current dose value in Coulombs for the installed gauge.

DT 98 Run the diagnostic test commands.

DTDIN 99 Get or set the digital input trigger configuration for diagnostic test.

DTPOST 99 Turns POST ON or OFF.

FAC 100 Reset all controller settings back to factory defaults.

GTM 102 Get or set the gas type multiplier.

HELP 102 Get all the supported user commands.

IG 103 Get or set the cold cathode ion gauge ON or OFF.

IGAIN 104 Get or set the cold cathode ion gauge configuration for Analog Input.

IGAUTO 105 Get or set the cold cathode ion gauge auto ON/OFF configuration.

IGDIN 106 Get or set the cold cathode ion gauge auto ON / OFF configuration for Digital Input.



IGEXT 106 Get or set the cold cathode ion gauge external over pressure configuration.

IGINT 107 Get or set the internal cold cathode ion gauge over pressure configuration.

IGT 108 Get or set the cold cathode ion gauge turn ON timeout.

LIFE 108 Get or set the vacuum environment setting and expected lifetime value.

LOCK 109 Get or set communication command lock.

LOG 110 Get or set system log.

RCC 111 Read the calibration curve data.

RD 113 Read the current value of an output or input.

RDZ 115 Read the anode voltage, discharge current, and impedance.

RLYx 115 Get or set the relay manually ON or OFF.

RLYSPx 116 Get or set the relay set point configuration.

RLYDIN 117 Get or set the digital input trigger configuration to disable the relay set points.

RST 118 Reset the controller.

RU 118 Read units of pressure.

SA 119 Get or set the RS-485 address.

SB 119 Get or set the baud rate.

SENSOR 120 Get or set the sensor serial number and reset the sensor VTRAC stat.

SF 120 Get or set the sensitivity factor.

SN 121 Get the serial number.

SP 121 Get or set the parity and data bits.

SPLASH 121 Show startup configuration information on the display.

STAMP 122 Get or set the date and time stamping of every command response.

SU 123 Set the units of pressure.

SYSDFU 123 Force the unit to enter Device Firmware Update (DFU) mode.

SYSINFO 123 Get all of the embedded information from the unit.

TEMP 124 Get the current temperature.

TIME 124 Get and set the date and time.

UPTIME 125 Read the total Power ON Hours since the last power cycle or RST command.

VER 126 Get the part number, FW version, Agile ID.

VTRAC 126 Get the VacTrac statistics from the controller.

Table 10-4: List of 500 CCG Module User Commands

Command Page # Description




10.8 User Command DescriptionsThe syntax for each command is shown for the RS-485 version. The Service Port command syntax does not include the #<address> before each command.

AO Get or set analog output mode.

Description:The AO command is used to get or set the analog output mode. The analog output voltage follows a log-linear voltage output of the total pressure measured by cold cathode ionization gauge. The pressure and voltage parameters specify a point on the line and the slope is entered in volts per decade. The OFF state specifies the voltage present on the output when the IG is OFF. The ON state specifies the voltage present on the output when the IG is ON and no discharge current. The OFF state voltage and the ON state voltage can be set to the maximum range of the analog output which is 0 – 11.0 volts. The log-linear pressure to voltage translation has a maximum range of 0 – 11.0 volts. The ranges overlap, so care must be taken to enter intelligent values so the output value makes sense.

Command Syntax:#<address> AO <CR>#<address> AO <enable><CR>#<address> AO <enable>,<voltage>,<pressure>,<slope>,<ig OFF state>,<ig ON

state><CR>where <enable> is:0 or OFF Analog output enable is OFF.1 or ON Analog output enable is ON.where <voltage> is:0.0 – 11.0 Analog output voltage at the pressure set point.where <pressure> is:1.0000E-11 – 1.0000E-01 Pressure set point. (based on units in the SU command)where <slope> is:0.0 – 10.0 Volts per decade. (positive slope)where <ig OFF state> is:0.0 – 11.0 Voltage when the Ion gauge high voltage is OFF.where <ig ON state> is:0.0 – 11.0 Voltage when the ion gauge high voltage is ON and

no discharge current.Response:

*<address> <enable>,<voltage>,<pressure>,<slope>,<ig OFF state>,<ig ON state><CR>Normal

*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:Command Response Description

#01 AO 1,1.0,1.0E-9,1.0,0.0,11.0<CR>

*01 PROGM OK<CR> Set the Analog out voltage range based on the pressures of interest.

#01 AO<CR> *01 1,1.0,1.0E-9,1.0,0.0,11.0<CR>

Get the analog out settings.

#01 AO 0<CR> *01 PROGM OK<CR> Disable the analog output.



BL Set the gauge button lock or get the button lock state.

Description:The BL command is used to turn ON/OFF the gauge button lock. When the gauge button lock is ON, the module will not respond to button presses to turn the gauge ON or OFF. When the gauge button lock is OFF, the module will respond to button presses by turning the gauge ON or OFF depending on the current state of the gauge.

Command Syntax:#<address> BL <CR>#<address> BL <parameter><CR>where <parameter> is:0 or OFF1 or ONResponse:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

CC Get or set the calibration curve.

Description:The CC command is used to select which calibration curve is used to calculate total pressure, or read what is currently selected.

Command Syntax:#<address> CC<CR>#<address> CC <cal curve><CR>where <cal curve> is:NOMINAL Nominal is generic factory N2 curve.SPECIFIC Specific is gauge calibrated to N2 curve.SF Sensitivity Factor (Amps/Pressure Units).

Response:*<address> <cal curve><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

Command Response Description

#01 BL<CR> *01 0 OFF<CR> Get the button lock status.

#01 BL<CR> *01 1 ON<CR> Get the button lock status.

#01 BL 1<CR> *01 PROGM OK<CR> Turn ON the button lock.

#01 BL OFF<CR> *01 PROGM OK<CR> Turn OFF the button lock.


#01 CC NOMINAL<CR> *01 PROGM OK<CR> Set the calibration curve to the nominal curve.




CCID Get or set the calibration curve identifier programmed in the module.

Description:The CCID command is used to read the calibration curve identifier programmed in the module. It is also used to set the calibration curve identifier if a new calibration curve is loaded into the module.

Command Syntax:#<address> CCID<CR>#<address> CCID <ID string><CR>where <ID string> is:“0-31 quoted characters” New calibration curve ID string. The label must be

quoted.Response:

*<address> “0-31 quoted characters”<CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.

Example:

CFM Get or set the pressure correction factor multiplier.

Description:The CF command is used to set or get the pressure correction factor. The current or impedance is converted to a pressure and then is multiplied by this correction factor to generate a resulting pressure. The default value for the correction factor is 1.0.

Command Syntax:#<address> CFM<CR>#<address> CFM <value><CR>where <value> is:1.0e-2 - 1.0e+1 Pressure Correction factor multiplier.

Response:*<address> <value><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

#01 CC<CR> *01 NOMINAL<CR> Get the currently selected calibration curve.


#01 CCID<CR> *01 CCIG-CURVE-0001000<CR>

Get the current curve ID.

#01 CCID “CCIG-CURVE-0002000<CR>

*01 PROGM OK<CR> Set a new curve ID.

#01 CCID<CR> *01 CCIG-CURVE-0002000<CR>

Get the current curve ID.


#01 CFM<CR> *01 1.0<CR> Get the current correction factor multiplier.




DAR Get or set the display auto reset timeout and force an auto reset of the display.

Description:The DAR command is used to get or set the amount of time before the display is automatically reset and the parameters are refreshed on the screen. This feature is necessary because the display is susceptible to an ESD event which will cause the display to go blank. Sending the command without a parameter will force a display auto reset and will also return the current timeout value. The timeout parameter is the number of minutes between each display auto reset event. The factory default value is 1440 minutes which is once every 24 hours. The timeout period restarts after each power cycle. To disable the display auto reset, enter 0 for the timeout period. The maximum timeout period is 1 year which is 525600 minutes.

Command Syntax:#<address> DAR<CR>#<address> DAR <timeout><CR>where <timeout> is positive integer values:0 Disables the display auto reset.1-525600 Number of minutes between display auto resets.

Response:*<address> 0<CR> Normal*<address> 1440<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

DOSE Get the current dose value in Coulombs for the installed gauge.

Description:Get the current dose value in Coulombs for the installed gauge.

Command Syntax:

#<address> DOSE<CR>

#01 CFM 0.1<CR> *01 PROGM OK<CR> Set the correction factor multiplier to 0.1.

#01 CFM<CR> *01 1.0e-1<CR> Get current correction factor multiplier is now 0.1.


#01 DAR 0<CR> *01 PROGM OK<CR> Disable the display auto reset.

#01 DAR<CR> *01 0<CR> Force a display auto reset and get the display auto reset period.

#01 DAR 1440<CR> *01 PROGM OK<CR> Set display auto reset period to once every 24 hours which is 1440 minutes.

#01 DAR<CR> *01 1440<CR> Force a display auto reset and get the display auto reset period.





Response:*<address> <dose value><CR> Normal

Example:

DT Run the diagnostic test commands.

Description:The DT command is used to run the diagnostic test commands.

Command Syntax:#<address> DT<CR>#<address> DT <modifier><CR>Where <modifier> is:ALL Test everything, including unsafe voltages.POST Run same test as POST.READ Read latest test data.

Response:*<address><test label>: <test data><NL> <test label>: <test data><NL> <CR>

Example:


#01 DOSE<CR> *01 1.02663e-02<CR>

Current dose value in Coulombs.

Command Response

#01 DT<CR> *01 System Voltage: +5.09563E+00,+4.75000E+00,+5.25000E+00,PASS

System Voltage: +1.20403E+01,+1.14000E+01,+1.26000E+01,PASS

System Voltage: +2.28185E+01,+1.35000E+01,+3.80000E+01,PASS

Analog Output: +1.00000E+00,+5.00000E-02,+9.89375E-01,PASS

Analog Output: +1.00000E+01,+5.00000E-02,+9.90606E+00,PASS

Analog Input: +5.00000E-01,+5.00000E-02,+4.98833E-01,PASS

Analog Input: +2.85000E+00,+5.00000E-02,+2.84244E+00,PASS

High Voltage Indicator: Low,Low,PASS

High Voltage Indicator: High,High,PASS

Discharge Current Indicator: Low,Low,PASS

Discharge Current Indicator: High,High,PASS

Error Status Indicator: Low,Low,PASS

Error Status Indicator: High,High,PASS

Maintenance Status Indicator: Low,Low,PASS

Maintenance Status Indicator: High,High,PASS

Service Status Indicator: Low,Low,PASS

Service Status Indicator: High,High,PASS

Electrometer: -2.16196E+04,+1.00000E-01,-2.15152E+04,NOT TESTED

Electrometer: -1.18640E+05,+1.00000E-01,-1.17819E+05,PASS




DTDIN Get or set the digital input trigger configuration for diagnostic test.

Description:The DTDIN command is used to configure the digital input to start a diagnostic test. When the DTDIN enable is ON, grounding the digital input will start one diagnostic test sequence. Transitions on the pin are ignored if a diagnostic test is already running. The digital outputs dedicated to status must be monitored for errors.

Command Syntax:#<address> DTDIN <CR>#<address> DTDIN <enable><CR>#<address> DTDIN <enable>,<input threshold>,<delay><CR>where <enable> is:0 or OFF Digital input diagnostic test trigger disabled.1 or ON Digital input diagnostic test trigger enabled.where <input threshold> is:HIGH Digital input is active high.LOW Digital input is active low.where <delay> is:0 - 60000 Number of seconds to wait after the threshold

condition has been meet before starting a diagnostic test.

Response:*<address> <enable>,<input threshold>,<delay><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

DTPOST Turn POST ON/OFF.

Description:DTPOST is used to set/get the running of POST (Power-ON-Self-Test) at POR (Power-ON-Reset).



Plasma Power Supply: +2.00000E+03,+1.00000E-02,+2.00158E+03,PASS

Plasma Power Supply: +4.00000E+03,+1.00000E-02,+4.00252E+03,PASS

<CR>


#01 DTDIN<CR> *01 0,LOW,0<CR> Get the current digital input trigger configuration which is disabled.

#01 DTDIN 1<CR> *01 PROGM OK<CR> Enable the digital input trigger configuration.

#01 DTDIN 0<CR> *01 PROGM OK<CR> Disable the digital input trigger configuration.

Command Response




Command Syntax:#<address>DTPOST <CR>#<address> DTPOST <enable><CR>where <enable> is:0 or OFF POST at POR OFF.1 or ON POST at POR ON.

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal

Example:

FAC Set all controller settings to factory defaults.

Description:The FAC command will set all of the user configurable settings of the controller to the factory defaults. This command performs an automatic reset to the controller to force the initialization of all factory settings.

Command Syntax:#<address> FAC<CR>

Response:*<address> PROGM OK RESETTING<CR>Normal response to command.

Example:

List of affected commands:


#01 IG<CR> *01 0 OFF<CR> Get POST is OFF.

#01 IG<CR> *01 1 ON<CR> Get POST is ON.

#01 IG 1<CR> *01 PROGM OK<CR> Set POST ON.

#01 IG 0<CR> *01 PROGM OK<CR> Set POST OFF.


#01 FAC<CR> *01 PROGM OK RESETTING<CR>

Reset controller setting back to factory defaults.

User Command User command settings after FAC command

Description

#01 AO<CR> *01 1,1.0,1.0E-9,1.0,0.0,0.5<CR>

Analog output configured and enabled.

#01 BL<CR> *01 0 OFF<CR> Button lock disabled.

#01 CC<CR> *01 NOMINAL<CR> Calibration curve set to Nominal.

#01 CC<ID> NA Not affected by the FAC command.

#01 CFM<CR> *01 1.0<CR> Pressure correction factor multiplier set to 1.

#01 DAR<CR> *01 1440<CR> Display auto reset period set to 1440 minutes (once every 24 hours).

#01 DOSE<CR> NA Not affected by the FAC command.

#01 DT<CR> NA Not affected by the FAC command.

#01 DTDIN<CR> *01 0,LOW,0<CR> Diagnostic test digital input configured but disabled.



#01 DTPOST<CR> *01 1,ON<CR> Diagnostic test at POR (POST) is enabled.

#01 FAC<CR> NA Not affected by the FAC command.

#01 GTM<CR> *01 1.0<CR> Gas type multiplier set to 1.

#01 HELP<CR> NA Not affected by the FAC command.

#01 IG<CR> NA Ion gauge turns OFF.

#01 IGAIN<CR> *01 0.5,2.0,0, 0<CR>

Ion gauge turn ON voltage is <= 0.5 volts and the turn OFF voltage for external over pressure is >=2.0 volts. No delay.

#01 IGAUTO<CR> *01 1,DIN<CR> Ion gauge auto ON configured for digital input and enabled.

#01 IGDIN<CR> *01 LOW,0<CR> Ion gauge auto ON configuration for digital input, active low with no delay.

#01 IGEXT<CR> *01 0<CR> Ion gauge external overpressure is disabled. See the IGAIN for configuration.

#01 IGINT<CR> *01 1.0e-2,0<CR> Ion gauge internal overpressure configured for ion gauge pressure above 1.0e-2 Torr with no delay.

#01 IGT<CR> *01 0<CR> Ion gauge turn ON timeout is set to never timeout.

#01 LIFE<CR> *01 5.0,100<CR> Vacuum environment acceleration factor set to 5. Remaining life is still dependent on dose.

#01 LOCK<CR> NA Not affected by the FAC command.

#01 LOG<CR> See description The LOG is cleared and ECHO mode is OFF. See the LOG command.

#01 RCC<CR> NA Not affected by the FAC command.

#01 RD<CR> NA Not affected by the FAC command.

#01 RDZ<CR> NA Not affected by the FAC command.

#01 RLY1<CR> *01 0 OFF<CR> Relay state is not preserved over a reset so they will turn OFF.

#01 RLY2<CR> *01 0 OFF<CR> Relay state is not preserved over a reset so they will turn OFF.

#01 RLYSP1<CR> *01 0,PRESSIG,ABOVE,1.0e-2,10,5,0<CR>

Relay 1 set point is configured but disabled.

#01 RLYSP2<CR> *01 0,PRESSIG,BELOW,1.0e-9,10,5,0<CR>

Relay 2 set point is configured but disabled.

#01 RLYDIN<CR> *01 0,LOW,0<CR> Digital input relay set point disable is configured but disabled.

#01 RST<CR> NA Not affected by the FAC command.

#01 RU<CR> *01 TORR<CR> Pressure units set to Torr.

#01 SA<CR> NA Not affected by the FAC command.

#01 SB<CR> NA Not affected by the FAC command.

#01 SENSOR<CR> NA Not affected by the FAC command.

#01 SF<CR> *01 5.0<CR> Sensitivity factor set to 5 amps per Torr.

#01 SN<CR> NA Not affected by the FAC command.


Description




GTM Get or set gas type multiplier.

Description:The GTM command is used to set or get the gas type multiplier. The current or impedance is converted to a pressure and then is multiplied by the gas type multiplier to generate a resulting pressure. The default value for the gas type multiplier is 1.0. This factor is used to adjust for the gas species.

Command Syntax:#<address> GTM<CR>#<address> GTM <value><CR>where <value> is:1.0e-2 - 1.0e+1 Gas type multiplier.

Response:*<address> <value><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

HELP Get all the supported user commands

Description:The Help command will return the supported user commands.

Command Syntax:#<address> HELP<CR>

#01 SP<CR> NA Not affected by the FAC command.

#01 SPLASH<CR> *01 1 ON<CR> Startup configuration will be shown on the display at POR.

#01 STAMP<CR> *01 0 OFF<CR> Command response time stamping is OFF.

#01 SU<CR> NA Not affected by the FAC command.

#01 SYSDFU<CR> NA Not affected by the FAC command.

#01 SYSINFO<CR> NA Not affected by the FAC Command.

#01 TEMP<CR> NA Not affected by the FAC command.

#01 TIME<CR> *01 2000/01/01,00:00:00<CR>

Reset to the factory value.

#01 UL<CR> *01 NORMAL<CR> User level command access is set to Normal.

#01 UPTIME<CR> NA Not affected by the FAC command.

#01 VER<CR> NA Not affected by the FAC command.

#01 VTRAC<CR> NA Not affected by the FAC command.


#01 GTM<CR> *01 1.0<CR> Get current gas type multiplier (default 1.0).

#01 GTM 0.1<CR> *01 PROGM OK<CR> Set gas type multiplier to 0.1.

#01 GTM<CR> *01 1.0e-1<CR> Get gas type multiplier is now 0.1.


Description



Response:*<address> <LF><command name><LF><last command name><CR>

Example:

IG Get or set the cold cathode ion gauge ON/OFF state.

Description:The IG command is used to get and set the ON/OFF state of the high voltage power supply. Using the IG command while IGAUTO configuration is enabled will result in the IGAUTO configuration being disabled. Pressing the Power button on the gauge will have the same affect on the IGAUTO configuration being disabled. The IG command cannot be used to determine if a discharge current has been established. Use the RD command to determine if pressure is valid.

Command Syntax:#<address> IG <CR>#<address> IG <output state><CR>where <output state> is:0 or OFF Ion gauge high voltage is OFF.1 or ON Ion gauge high voltage is ON.

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> INVALID<CR> Not possible base on module state.?<address> LOCKED<CR> Setting this parameter is locked.


#01 HELP<CR> *01<LF>

FAC<LF>

IG<LF>

IGT<LF>

RD AIN<LF>

RD AOUT<LF>

RD PRESSIG<LF>

RD<LF>

RDZ<LF>

RST<LF>

RU<LF>

SA<LF>

SB<LF>

SP<LF>

SU<LF>

TEMP<LF>

TIME<LF>

UL<LF>

UPTIME<LF>

VER<CR>




Example:

IGAIN Get or set the cold cathode ion gauge configuration for Analog Input.

Description:The IGAIN command is used to configure the trigger conditions for the Analog Input to turn ON the cold cathode ion gauge high voltage supply. It is also used to configure the trigger condition for the Analog Input to turn OFF the cold cathode ion gauge in the event of an over pressure condition. The FAC command must be used in conjunction with the IGAUTO command to enable the analog input as the auto ON input. The IGAIN command also configures the analog input for the IGEXT command over pressure condition. The ON voltage and the OFF voltage must not be the same value. One voltage must be greater than the other depending on analog voltage slope with respect to pressure. The values between the ON voltage and the OFF voltage have no affect.

Command Syntax:#<address> IGAIN <CR>#<address> IGAIN <ON voltage>,<OFF voltage>,<delay ON>,<delay OFF><CR>where <ON voltage> is:0.0 - 11.0 Input is AIN voltage desired to turn ON the IG. This

voltage is used by the IGAUTO command to turn ON the ion gauge.

where <OFF voltage> is:0.0 - 11.0 Input is AIN voltage desired to turn OFF the IG. This

voltage is considered to be the external over pressure condition.

where <delay ON> is:0 - 60000 Number of seconds to wait after the threshold

condition has been meet before activating the output.where <delay OFF> is:0 - 60000 Number of seconds to wait after the threshold

condition has been meet before activating the output.Response:

*<address> <input test>,<input threshold>,<delay><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range?<address> LOCKED<CR> Setting this parameter is locked

Example:


#01 IG<CR> *01 0 OFF<CR> Get IG is OFF.

#01 IG<CR> *01 1 ON<CR> Get IG is ON.

#01 IG 1<CR> *01 PROGM OK<CR> Set IG ON.

#01 IG 0<CR> *01 PROGM OK<CR> Set IG OFF.


#01 IGAIN 2.0,0.5,0,0<CR>

*01 PROGM OK<CR> Decreasing pressure with increasing voltage.

#01 IGAIN<CR> *01 2.0,0.5,0,0<CR>

Get the current IGAIN setting.

#01 IGAIN 1.0,8.0,0,0<CR>

*01 PROGM OK<CR> Increasing pressure with increasing voltage.



IGAUTO Get or set the cold cathode ion gauge auto ON/OFF configuration.

Description:The IGAUTO command is used to get and set the auto ON/OFF configuration of the high voltage power supply. Only one type of input can be selected to turn ON the ion gauge. When an automatic behavior is configured to turn ON the ion gauge, and a manual action is taken to turn OFF the ion gauge, and automatic behavior is disabled. The IGAUTO command with the enable parameter set to 1 must be sent to turn ON the automatic behavior. The Button Lock (BL) command should be used if it is not desirable for a button press to disable the automatic behavior. This is done to ensure that the source of the IG ON command is always known and prevent conflicting commands. Use the IGAIN command to configure the Analog Input threshold. Use the IGDIN command to configure the Digital Input polarity.

Command Syntax:#<address> IGAUTO <CR>#<address> IGAUTO <enable><CR>#<address> IGAUTO <enable>,<input type><CR>where <enable> is:0 - OFF IG Auto ON is disabled.1 - ON IG Auto ON is enabled.where <input type> is:AIN Analog InputDIN Digital Input

Response:*<address> <enable>,<input type><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

#01 IGAIN<CR> *01 1.0,8.0,0,0<CR>

Get the current IGAIN setting.

#01 IGAIN 4.2,4.2,0,0<CR>

?01 SYNTX ERR<CR> Voltage ON cannot equal voltage OFF.


#01 IGAUTO<CR> *01 1,DIN<CR> Get current auto on configuration is enabled using digital in.

#01 IGAUTO 1,AIN<CR>

*01 PROGM OK<CR> Enable auto on configuration using analog in.

#01 IGAUTO<CR> *01 1,AIN<CR> Get current auto on configuration is analog input enabled.

#01 IGAUTO 0<CR> *01 PROGM OK<CR> Disable auto ON.

#01 IGAUTO<CR> *01 0,AIN<CR> Auto ON is disabled.

#01 IGAUTO 1<CR> *01 PROGM OK<CR> Enable auto on (using previous setting of analog input).





IGDIN Get or set the cold cathode ion gauge auto ON / OFF configuration for Digital Input.

Description:The IGDIN command is used to configure the trigger conditions for the Digital Input to turn the cold cathode ion gauge high voltage supply ON or OFF. This command must be used in conjunction with the IGAUTO command to enable this and the auto ON input.

Command Syntax:#<address> IGDIN <CR>#<address> IGDIN <input threshold>,<delay><CR>where <input threshold> is:HIGH Digital input is active high.LOW Digital input is active low.where <delay> is:0 - 60000 Number of seconds to wait after the threshold


*<address> <input threshold>,<delay><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

IGEXT Get or set the cold cathode ion gauge external over pressure enable.

Description:The IGEXT command is used to enable the external over pressure protection to turn OFF the high voltage power supply. The Analog Input (AIN) source for over pressure will turn the high voltage supply OFF and will prevent any command or AUTO ON configuration from turning the gauge back ON until AIN voltage is not in the overpressure region. This is the preferred method of over pressure protection for the ion gauge. The IGAIN command is used to configure the voltage to turn the IG OFF.

Command Syntax:#<address> IGEXT<CR>#<address> IGEXT <enable><CR>where <enable> is:0 - OFF Over pressure protection is disabled.1 - ON Over pressure protection is enabled.

Response:*<address> <enable><CR> Normal


#01 IGDIN LOW,0<CR>

*01 PROGM OK<CR> Configure digital input trigger to active low.

#01 IGDIN<CR> *01 LOW,0<CR> Get configuration for ion gauge digital input is active low with no delay.

#01 IGDIN HIGH,0<CR>

*01 PROGM OK<CR> Configure the ion gauge digital input trigger active high.

#01 IGDIN<CR> *01 HIGH,0<CR> Get configuration for ion gauge digital trigger is high with no delay.



*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

IGINT Get or set the internal cold cathode ion gauge over pressure configuration.

Description:The IGINT command is used to configure the internal over pressure input to turn OFF the high voltage power supply in the event of an over pressure condition. The ion gauge (IG) input source for over pressure will turn the high voltage supply OFF, but a command or an AUTO ON configuration will turn the gauge back ON. This can cause the ion gauge to cycle ON and OFF very rapidly. The internal over pressure protection is always advised to remain enabled to act as a backup in case the external over pressure protection is disabled. Internal overpressure is always ON, but the threshold and hold-time are configurable.

Command Syntax:#<address> IGINT<CR>#<address> IGINT <input threshold>,<delay><CR>where <input threshold> is:1.0000E-02 - 1.0000E-10 Input is IG, pressure units from SU command.where <delay> is:0 - 10 Number of seconds to wait after the threshold.


*<address> <enable>,<input threshold>,<delay><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:


#01 IGEXT<CR> *01 0 OFF<CR> Ion Gauge external over pressure protection disabled (FAC default).

#01 IGEXT 1<CR> *01 PROGM OK<CR> Enable the external over pressure protection.

#01 IGEXT<CR> *01 0 ON<CR> Get the external over pressure status.

#01 IGEXT 0<CR> *01 PROGM OK<CR> Disable external over pressure protection.


#01 IGINT<CR> *01 1.0e-2,0<CR> Ion Gauge internal over pressure protection enabled (FAC default).

#01 IGINT 1.0e-4,0<CR>

*01 PROGM OK<CR> Set change internal over pressure threshold.

#01 IGINT<CR> *01 1.0e-4,0<CR> Get current over pressure setting.




IGT Get or set the cold cathode ion gauge turn ON timeout.

Description:The IGT command is used to get or set the amount of time the high voltage power supply will remain ON without establishing a discharge current. Once the timeout occurs, the high voltage supply will automatically turn OFF.

Command Syntax:#<address> IGT<CR>#<address> IGT <timeout><CR>where <timeout> is:0 HV will not turn OFF due to a timeout.1-60000 Number of seconds before timeout.

Response:*<address> 0 OFF<CR> Normal*<address> 600 <CR> Seconds*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

LIFE Get or set the vacuum environment acceleration factor and expected gauge lifetime value.

Description:Get or set the vacuum environment setting and expected gauge lifetime value. The vacuum environment setting is a scaling factor based on predominant gas species and cleanliness. An environment that is characterized as being dirty should have the scaling factor set between 0 and 5. A characteristically clean environment where a gauge typically lasts a long time should have the scaling factor set between 5 and 10. (The default setting is 5.) The remaining life is a value between 0 and 100%.

Command Syntax:#<address> LIFE<CR>#<address> LIFE <vac env><CR>where <vac env> is:0.0 - 10.0 Vacuum environment acceleration factor.

Response:*<address> <vac env>,<remaining life><CR>

Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.


#01 IGT 0<CR> *01 PROGM OK<CR> Set the IG high voltage timeout OFF.

#01 IGT<CR> *01 0<CR> Get the IG high voltage timeout.

#01 IGT 600<CR> *01 PROGM OK<CR> Set IG high voltage timeout to 600 seconds.

#01 IGT<CR> *01 600<CR> Get the IG high voltage timeout.



Example:

LOCK Get or set command lock.

Description:The LOCK command enables/disables commands from changing gauge settings. When the LOCK is ON, commands that change gauge settings will not be allowed, but 'get' commands will return the appropriate data. When the LOCK is OFF, setting and getting all gauge settings with commands will be allowed.

Command Syntax:#<address> LOCK <CR>#<address> LOCK <parameter><CR>where <parameter> is:0 or OFF1 or ON

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.

Example:

List of affected commands:


#01 LIFE<CR> *01 +5.00000E+00,+1.00000E+02

Vacuum environment setting of 5.0 and 100% gauge life remaining.

#01 LIFE 5.0<CR> *01 PROGM OK<CR> Set vacuum environment setting to 5.0.


#01 LOCK<CR> *01 0 OFF<CR> Get the communication LOCK status.

#01 LOCK<CR> *01 1 ON<CR> Get the communication LOCK status.

#01 LOCK 0<CR> *01 PROGM OK<CR> Turn OFF the communication lock.

#01 LOCK 1<CR> *01 PROGM OK<CR> Turn ON the communication lock.

#01 LOCK 4<CR> ?01 RANGE ER<CR> Parameter is out of range.

User Command Affected by the LOCK command

#01 AO<CR> YES

#01 BL<CR> YES

#01 CC<CR> YES

#01 CC<ID> YES

#01 CFM<CR> YES

#01 DAR<CR> YES

#01 DOSE<CR> NO

#01 DT<CR> YES

#01 DTDIN<CR> YES

#01 DTPOST<CR> YES

#01 FAC<CR> YES

#01 GTM<CR> YES




LOG Get the event log and display the output on the terminal screen.

Description:The LOG command is used to get the event log and display the output on the terminal screen.

Command Syntax:#<address> LOG <CR>#<address> LOG <option><CR>

#01 HELP<CR> NO

#01 IG<CR> YES

#01 IGAIN<CR> YES

#01 IGAUTO<CR> YES

#01 IGDIN<CR> YES

#01 IGEXT<CR> YES

#01 IGINT<CR> YES

#01 IGT<CR> YES

#01 LIFE<CR> YES

#01 LOCK<CR> NO

#01 LOG<CR> YES

#01 RCC<CR> NO

#01 RD<CR> NO

#01 RDZ<CR> NO

#01 RLY1<CR> YES

#01 RLY2<CR> YES

#01 RLYSP1<CR> YES

#01 RLYSP2<CR> YES

#01 RLYDIN<CR> YES

#01 RST<CR> YES

#01 RU<CR> NO

#01 SA<CR> YES

#01 SB<CR> YES

#01 SENSOR<CR> YES

#01 SF<CR> YES

#01 SN<CR> NO

#01 SP<CR> YES

#01 SPLASH<CR> YES

#01 STAMP<CR> YES

#01 SU<CR> YES

#01 SYSDFU<CR> YES

#01 SYSINFO<CR> NO

#01 TEMP<CR> NO

#01 TIME<CR> YES

#01 UL<CR> YES

#01 UPTIME<CR> NO

#01 VER<CR> NO

#01 VTRAC<CR> NO

User Command Affected by the LOCK command



#<address> LOG <option>, <parameter><CR>where <option> is:EVENT Event log COMMAND Command logERROR Error logALL All logs togetherCLEAR Clears all logsECHO Log echo modewhere <parameter> is:0 - N Display the last N entries in the log based on a log

type specified (EVENT, COMMAND, ERROR, ALL)0 or OFF Disables echo of the system log to the USB diagnostic

port.1 or ON Enables echo of the system log to the USB diagnostic

port.Response:

<date,time>,<numeric value>,<text><LF>Normal<date,time>,<numeric value>,<text><LF>*<address> DONE<CR>?<address> LOCKED<CR> Setting this parameter is locked.

Example:

RCC Read the calibration curve data.

Description:The RCC command will return the data for the currently used calibration, or any other specified calibration curve. The maximum number of calibration points returned by this command is 100, and a minimum of 2.

Command Syntax:#<address> RCC<CR>#<address> RCC <cal curve><CR>where <cal curve> is:NOMINAL Nominal calibration curve.SPECIFIC Calibration curve specific to the gauge.


#01 LOG EVENT 3<CR>

<LF>

12/31/2012,23:59:59.000,0x00000001,Relay1 ON<LF>

01/03/2013,02:00:00.005,0x00000000,Relay1 OFF<LF>

02/13/2013,13:39:43.100,120,Gauge over temp<LF>

* DONE<CR> Display the last 3 entries in the event log.




Response:*<address> <cal curve> <LF> NormalIndex1,Impedance1, Pressure1<LF>Index2,Impedance2, Pressure2<LF>…IndexN-1,ImpedanceN-1, PressureN-1<LF>IndexN,ImpedanceN, PressureN<CR>

Example:


#01 RCC NOMINAL<CR>

*01 NOMINAL<LF> Get the calibration curve for Nitrogen (impedance, pressure). Pressure in table is in Torr and is used internally to calculate the pressure from impedance. That number is converted to the units set by the SU command. GTM, CFM are also applied to the final pressure reading returned to the user.

1, 2.90E+06, 1.00E-01<LF>

2, 3.07E+06, 4.51E-02<LF>

3, 3.28E+06, 2.47E-02<LF>

4, 3.60E+06, 1.28E-02<LF>

5, 3.85E+06, 9.10E-03<LF>

6, 4.36E+06, 5.10E-03<LF>

7, 4.63E+06, 3.94E-03<LF>

8, 5.45E+06, 1.98E-03<LF>

9, 6.18E+06, 1.08E-03<LF>

10, 6.41E+06, 3.59E-04<LF>

11, 6.60E+06, 1.68E-04<LF>

12, 7.38E+06, 1.07E-04<LF>

13, 9.83E+06, 7.10E-05<LF>

14, 1.32E+07, 4.53E-05<LF>

15, 2.23E+07, 2.18E-05<LF>

16, 3.98E+07, 1.14E-05<LF>

17, 5.03E+07, 8.93E-06<LF>

18, 8.25E+07, 5.72E-06<LF>



RD Read the current value of an input or output type.

Description:The RD command will return the current value of an output or an input. Sending the RD command without a parameter will read the total pressure from the cold cathode gauge. If the cold cathode gauge is OFF, the response will be "IG OFF". If a discharge current has not been established, the response will be "NO DISCHARGE", otherwise the command will return a valid pressure. Sending the RD command with the input type equal to PRESSIG will result in the same behavior described above. Reading other IO types will respond with values corresponding to that type.

Command Syntax:#<address> RD<CR>#<address> RD <io type><CR>where <io type> is:

19, 1.66E+08, 2.49E-06<LF>

20, 3.43E+08, 1.10E-06<LF>

21, 9.46E+08, 4.55E-07<LF>

22, 1.41E+09, 2.99E-07<LF>

23, 2.83E+09, 1.29E-07<LF>

24, 5.29E+09, 1.07E-07<LF>

25, 6.90E+09, 8.20E-08<LF>

26, 1.07E+10, 5.03E-08<LF>

27, 1.67E+10, 2.96E-08<LF>

28, 2.41E+10, 1.81E-08<LF>

29, 3.73E+10, 9.10E-09<LF>

30, 5.16E+10, 4.80E-09<LF>

31, 6.19E+10, 2.50E-09<LF>

32, 6.60E+10, 2.00E-09<CR>

#01 RCC SPECIFIC<CR>

*01 SPECIFIC<LF> Get the calibration curve for Nitrogen (impedance, pressure). Pressure reported in units set by the SU command.

1, 2.90E+06, 1.00E-01<LF>

2, 7.38E+06, 1.07E-04<LF>

3, 6.60E+10, 2.00E-09<CR>





PRESSIG Pressure reading from the Ion Gauge.AIN Analog Input voltage.AOUT Analog output voltage.DTDIN Diagnostic test digital input state ON/OFF.IGDIN Ion gauge digital input state ON/OFF.RLYDIN Relay disable digital input state ON/OFF.CHECK Check Status Condition (tied to the Check LED).MAINT Maintenance Status Condition (tied to the Maint

LED).SERVICE Service Status Condition.RLYx Relay actuation.CHECKDOUT Check status digital output.MAINTDOUT Maintenance status digital output.SERVICEDOUT Service status digital output.IGHVDOUT Ion gauge high voltage status digital output.IGCURDOUT Ion gauge discharge current status digital output.

Response:*<address> 3.58E-07<CR> Normal*<address> IG OFF<CR> Normal*<address> NO DISCHARGE<CR>Normal

Example:Command Response Description

#01 RD<CR> *01 3.58E-07<CR> IG total pressure.

#01 RD<CR> *01 IG OFF<CR> The IG is OFF and the total pressure was requested.

#01 RD<CR> *01 NO DISCHARGE<CR>

A discharge current has not been established and the total pressure was requested.

#01 RD PRESSIG<CR> *01 3.58E-07<CR> IG total pressure.

#01 RD PRESSIG<CR> *01 IG OFF<CR> The IG is OFF and the total pressure was requested.

#01 RD PRESSIG<CR> *01 NO DISCHARGE<CR>

A discharge current has not been established and the total pressure was requested.

#01 RD AIN<CR> *01 4.2534<CR> Analog In voltage.

#01 RD AOUT<CR> *01 8.4112<CR> Analog output voltage.

#01 RD DTDIN<CR> *01 0 OFF<CR> Diagnostic test digital input is OFF.

#01 RD IGDIN<CR> *01 0 OFF<CR> Ion gauge digital input is OFF.

#01 RD RLYDIN<CR> *01 0 OFF<CR> Relay disable digital input is OFF.

#01 RD CHECK<CR> *01 C00<CR> No check codes present.

#01 RD MAINT<CR> *01 M00<CR> No maintenance codes present.

#01 RD SERVICE<CR> *01 S00<CR> No service codes present.

#01 RD CHECKDOUT<CR>

*01 0 OFF<CR> No check codes present so digital output is OFF.

#01 RD MAINTDOUT<CR>

*01 0 OFF<CR> No maintenance codes present so digital output is OFF.

#01 RD SERVICEDOUT<CR>

*01 0 OFF<CR> No service codes present so digital output is OFF.

#01 RD IGHVDOUT<CR>

*01 0 OFF<CR> Ion gauge high voltage is OFF so digital output is OFF.



RDZ Read the anode voltage, discharge current, and impedance.

Description:The RDZ command will return the anode voltage, discharge current, and measured impedance prior to conversion to total pressure. If the cold cathode gauge is OFF, the response will be "IG OFF". If a discharge current has not been established, the response will be "NO DISCHARGE".

Command Syntax:#<address> RDZ<CR>

Response:*<address> <anode voltage>,<discharge current>,<impedance><CR>Normal*<address> IG OFF<CR> Normal*<address> NO DISCHARGE<CR>Normal

Example:

RLYx Get or set the relay manually ON or OFF.

Description:The RLYx (where x is 1 or 2) command is used to set the relay manually ON or OFF. Sending the RLYx command with the RLYSPx configuration enable ON, will cause the enable to be turned OFF and execute the RLYx command. Sending the RLYx command with the RLYDIN enabled ON, will cause the enable to be turned OFF and execute the RLYx command. A manual behavior will always override an automatic behavior. The automatic behavior enable must be turned ON again after executing the RLYx command.

Command Syntax:#<address> RLYx <CR>#<address> RLYx <parameter><CR>where <parameter> is:0 or OFF Relay is OFF1 or ON Relay is ON

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal

#01 RD IGCURDOUT<CR>

*01 0 OFF<CR> Ion gauge discharge current is zero so digital output is OFF.

#01 RD RLY1<CR> *01 0 OFF<CR> Set Point Relay1 is OFF (not actuated).

#01 RD RLY2<CR> *01 0 OFF<CR> Set Point Relay2 is OFF (not actuated).


#01 RDZ<CR> *01 2500.0,1.0E-09,2.50E+12<CR>

Anode voltage, discharge current, and impedance.

#01 RDZ<CR> *01 IG OFF<CR> The IG is OFF and the impedance was requested.

#01 RDZ<CR> *01 NO DISCHARGE<CR>

A discharge current has not been established and the impedance was requested.





?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

RLYSPx Get or set the relay set point configuration.

Description:The RLYSPx (where x is 1 or 2) command is used to access the set point configuration for Relay 1 and Relay 2. The set point relay can be configured to be driven from the ion gauge pressure, the analog input voltage, or any Service Error Trouble Codes. Each relay can be configured independently. The <ig OFF state> is used to describe what the relay should do when the ion gauge high voltage is turned OFF. If the RLYSPx is enabled and the RLYx command is sent, the RLYSPx enable is turned OFF and the RLYx command is executed.

Command Syntax:#<address> RLYSPx <CR>#<address> RLYSPx <enable><CR>#<address> RLYSPx <enable>,<error type>,<delay><CR>#<address> RLYSPx <enable>,<input type>,<input test>,<input

threshold>,<hysteresis>, <delay>,<OFF state><CR>where <enable> is:0 - OFF Relay set point configuration disabled.1 - ON Relay set point configuration enabled.where <error type> is:ERROR Service Trouble Code Error.where <input type> is:PRESSIG Ion gauge total pressure.AIN Analog Input voltage.where <input test> is:ABOVE The value from the input is greater than or equal to

the threshold value.BELOW The value from the input is less than the threshold

value.where <input threshold> is:1.0000E-01 - 1.0000E-11 Input is PRESSIG, pressure units from SU command0.0 - 11.0 Input is AIN, voltage.where <hysteresis> is:0 - 100 Percentage hysteresis applied to the threshold.where <delay> is:0 - 60000 Number of seconds to wait after the threshold

condition has been meet before activating the output.where <OFF state> is:0 - OFF Relay is OFF when the PRESSIG high voltage is OFF,

or the AIN voltage is zero.


#01 RLY1<CR> *01 1 ON Get state of relay 1, it is ON.

#01 RLY2<CR> *01 1 ON Get state of relay 2, it is ON.

#01 RLY1 0<CR> *01 PROGM OK<CR> Turn relay 1 OFF.

#01 RLY2 0<CR> *01 PROGM OK<CR> Turn relay 2 OFF.



1 - ON Relay is ON when the PRESSIG high voltage is OFF, or the AIN voltage is zero.

Response:*<address> <enable>,<input type>,<input test>,<input threshold>,<hysteresis>,<delay>,<OFF state><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

RLYDIN Get or set the digital input trigger configuration to disable the relay set points.

Description:The RLYDIN command is used to configure the digital input to disable the relay set point configuration. When the RLYDIN enable with LOW is ON, grounding the digital input will disable all the set point relay configurations. When the digital input is pulled high, all the set point relay configurations will be enabled again. If the RLYDIN is enabled and the RLYx command is sent, the RLYDIN enable is turned OFF and the RLYx command is executed. The manual relay command always overrides the automatic settings.

Command Syntax:#<address> RLYDIN <CR>#<address> RLYDIN <enable><CR>#<address> RLYDIN <enable>,<input threshold>,<delay><CR>where <enable> is:0 or OFF Digital input relay disable is disabled.1 or ON Digital input relay disable is enabled.where <input threshold> is:HIGH Digital input is active high.


#01 RLYSP1<CR> *01 1,PRESSIG,ABOVE,1.0e-2,10,5,0<CR>

Get SP1.

#01 RLYSP2<CR> *01 1,PRESSIG,BELOW,1.0e-9,10,5,0<CR>

Get SP2.

#01 RLYSP1 0<CR> *01 PROGM OK<CR> Disable SP1.

#01 RLYSP2 0<CR> *01 PROGM OK<CR> Disable SP2.

#01 RLYSP1<CR> *01 0,AIN,BELOW,5.0,10,0,0<CR>

Get SP1.

#01 RLYSP2<CR> *01 0,AIN,ABOVE,7.0,10,0,0<CR>

Get SP2.

#01 RLYSP1 1,AIN,BELOW,5.0,10,0,0<CR>

*01 PROGM OK<CR> Set SP1 to AIN.

#01 RLYSP2 1,AIN,ABOVE,7.0,10,0,0<CR>

*01 PROGM OK<CR> Set SP2 to AIN.

#01 RLYSP1 1,ERROR,0<CR>

*01 PROGM OK<CR> Set SP1 to ERROR.

#01 RLYSP1<CR> *01 1,ERROR,0<CR> Get SP1.




LOW Digital input is active low.where <delay> is:0 - 60000 Number of seconds to wait after the threshold

condition has been meet before disabling the relay set point.

Response:*<address> <enable>,<input threshold>,<delay><CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

RST Reset the gauge controller.

Description:The RST command will reset the gauge controller state similar to a power cycle.

Command Syntax:#<address> RST<CR>

Response:*<address> PROGM OK RESETTING<CR>Normal response to command.

Example:

RU Read the units of total pressure from the cold cathode IG.

Description:The RU command will return the units for total pressure from the cold cathode gauge.

Command Syntax:#<address> RU<CR>

Response:*<address> TORR<CR> Normal*<address> MBAR<CR> Normal*<address> PASCAL<CR> Normal

Example:


#01 RLYDIN<CR> *01 0,HIGH,0<CR> Get relay digital input trigger configuration, it is disabled.

#01 RLYDIN 1,HIGH,0<CR>

*01 PROGM OK<CR> Set the relay digital input trigger to enabled with high signal and no delay.

#01 RLYDIN 0<CR> *01 PROGM OK<CR> Disable the relay digital input trigger.


#01 RST<CR> *PROGM OK RESETTING

Reset the gauge controller.


#01 RU<CR> *01 TORR<CR> Units of TORR.

#01 RU<CR> *01 MBAR<CR> Units of MBAR.

#01 RU<CR> *01 PASCAL<CR> Units of PASCAL.



SA Get or set the RS-485 address.

Description:The SA command is used to change the address of the RS-485 interface. Setting the address takes effect immediately after sending the PROGM OK response to the previous address. A device reset is not required to update the configuration.

Command Syntax:#<address> SA<CR>#<address> SA <address><CR>where <address> is:0x00 - 0x3F Address range in hex.0 - 63 Address range in dec.

Response:*<address> <address><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

SB Get or set the RS-485 communication baud rate.

Description:The SB command is used to change the baud rate of the RS-485 interface. Setting the baud rate takes effect immediately after sending the PROGM OK response at the previous baud rate. A device reset is not required to update the configuration.

Command Syntax:#<address> SB<CR>#<address> SB <baud rate><CR>where <baud rate> is:1200, 2400, 4800, 9600, 14400, 19200, 28800, 38400, 57600, or 115200

Response:*<address> <baud rate><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:


#01 SA 0x10<CR> *01 PROGM OK<CR> Set the address to 16 (0x10).

#01 SA 16<CR> *01 PROGM OK<CR> Set the address to 16 (0x10).

#01 SA<CR> *01 0x10<CR> Get the address.


#01 SB 19200<CR> *01 PROGM OK<CR> Set the baud rate to 19200.

#01 SB<CR> *01 19200<CR> Get the baud rate.




SENSOR Get or set the sensor serial number programmed in the module and reset the sensor VTRAC stats associated with the sensor.

Description:The SENSOR command is used to read the sensor serial number. It is also used to set the serial number for a new sensor and reset the sensor VTRAC stats.

Command Syntax:#<address> SENSOR <CR>#<address> SENSOR <gauge serial number><CR>where <gauge serial number> is:"0-31 quoted characters "New gauge serial number. The label must be

quoted.Response:

*<address> "0-31 quoted characters"<CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.

Example:

SF Get or set the sensitivity factor.

Description:The SF command is used to get or set the sensitivity factor used for converting discharge current to pressure. The Sensitivity Factor is single point calibration for a straight line approximation with the units of Amps / Unit of pressure.

Command Syntax:#<address> SF<CR>#<address> SF <sensitivity factor><CR>where <sensitivity factor> is:0.5 - 20.0 Amps / Unit of pressure.

Response:*<address> <sensitivity factor> <CR>Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:


#01 SENSOR<CR> *01 CCIG-GAUGE-0001000<CR>

Get the current sensor SN.

#01 SENSOR "CCIG-GAUGE-0002000"<CR>

*01 PROGM OK<CR> Set a new sensor SN and reset the VTRAC sensor stats.


#01 SF 9.12<CR> *01 PROGM OK<CR> Set the Sensitivity Factor.

#01 SF<CR> *01 9.12<CR> Get the Sensitivity Factor.



SN Get the device serial number.

Description:The SN command will return the unit serial number programmed by the factory.

Command Syntax:#<address> SN <CR>

Response:*<address> <serial number><CR>Normal

Example:

SP Set the RS-485 parity.

Description:The SP command is used to change the parity of the RS-485 interface. Setting the parity takes effect immediately after sending the PROGM OK response at the previous parity. A device reset is not required to update the configuration.

Command Syntax:#<address> SP<CR>#<address> SP <parity><CR>where <parity> is:N Set to 8 bits, no parity, 1 stop bit.E Set to 8 bits, even parity, 1 stop bit.O Set to 8 bits, odd parity, 1 stop bit.

Response:*<address> <parity><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

SPLASH Show startup configuration information on the display.

Description:The SPLASH command will put all of the startup configuration information on the display like a power ON reset to the gauge. The command is also used to enable or disable the splash screen information at power ON reset.

Command Syntax:#<address> SPLASH<CR>#<address> SPLASH <parameter><CR>


#01 SN<CR> *01 500A1234<CR> Get the device serial number.


#01 SP N<CR> *01 PROGM OK<CR> Set No parity.

#01 SP E<CR> *01 PROGM OK<CR> Set Even parity.

#01 SP O<CR> *01 PROGM OK<CR> Set Odd parity.

#01 SP<CR> *01 O<CR> Get Odd parity.




where <parameter> is:0 or OFF Disable splash screen at POR.1 or ON Enable splash screen at POR.

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

STAMP Get or set the date and time stamping of every command response.

Description:The STAMP command is used to enable or disable the time stamping of every command response.

Command Syntax:#<address> STAMP<CR>#<address> STAMP <parameter><CR>

where <parameter> is:0 or OFF Command time stamp enable is OFF.1 or ON Command time stamp enable is ON.

Response:*<address> 0 OFF<CR> Normal*<address> 1 ON<CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:


#01 SPLASH<CR> *01 0 OFF<CR> Splash screen information will not be displayed at POR.

#01 SPLASH<CR> *01 1 ON<CR> Splash screen information will be displayed at POR, and the configuration will be displayed immediately on the display.

#01 SPLASH ON<CR> *01 PROGM OK<CR>


#01 STAMP<CR> *01 0 OFF<CR> Get current time stamping configuration, defaulted OFF.

#01 STAMP 1<CR> *01 PROGM OK<CR> Turn ON time stamping of command responses.

#01 STAMP<CR> *01 2012/12/31,23:59:59,1 ON<CR>

Get current time stamp configuration (with time stamping turned ON).



SU Set the units for total pressure.

Description:The SU command is used to set the units for total pressure reported by the cold cathode IG.

Command Syntax:#<address> SU <unit><CR>where <unit> is:T or TORR TorrM or MBAR mBarP or PASCAL Pascal

Response:*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

SYSDFU Force the unit to enter Device Firmware Update (DFU) mode.

Description:Force the unit to enter DFU mode.

Command Syntax:#<address> SYSDFU<CR>

Response:?<address> LOCKED<CR> Setting this parameter is locked.

Example:

SYSINFO Get all of the embedded log information from the unit.

Description:This command will extract all of the embedded log information from the unit for assisting in field debug.

Command Syntax:#<address> SYSINFO<CR>

Response:?<address> LOCKED<CR> Setting this parameter is locked.


#01 SU T<CR> *01 PROGM OK<CR> Set the units to Torr.

#01 SU TORR<CR> *01 PROGM OK<CR> Set the units to Torr.

#01 SU M<CR> *01 PROGM OK<CR> Set the units to mBar.

#01 SU MBAR<CR> *01 PROGM OK<CR> Set the units to mBar.

#01 SU P<CR> *01 PROGM OK<CR> Set the units to Pascal.

#01 SU PASCAL<CR> *01 PROGM OK<CR> Set the units to Pascal.


#01 SYSDFU<CR> PROGM OK RESETTING<CR>

Resets the device into the DFU boot loader.




Example:

TEMP Read the temperature inside the module.

Description:Read the temperature inside the module.

Command Syntax:#<address> TEMP<CR>

Response:*<address> <temperature><CR> Normal

Example:

TIME Get or set module date and time.

Description:The TIME command is used to set the module date and time all in one command. The date portion of the command must be in the format of yyyy/mm/dd, where yyyy is the year (2000 - 2099), mm is the month (01 - 12), and dd is the day (01 - 31). The time portion of the command is entered in military time, where hh is the hours (00 - 23), mm is the minutes (00 - 59), and ss is the seconds (00 - 59).

Command Syntax:#<address> TIME <CR>#<address> TIME <date>,<time><CR>where <date> is:yyyy/mm/dd Date format 2012/12/31where <time> is:hh:mm:ss Time format 23:59:59

Response:*<address> <date>,<time><CR> Normal*<address> PROGM OK<CR> Normal?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:


#01 SYSINFO<CR> (Too large to show in this table.)

Show embedded log information.


#01 TEMP<CR> *01 +3.05E+01<CR> Displays the ambient temperature in degrees C.


#01 TIME 2012/12/31,23:59:59<CR>

*01 PROGM OK<CR> Set the date and time.

#01 TIME<CR> *01 2012/12/31,23:59:59<CR>

Get the date and time.



UL Get or set the user command access level.

Description:The UL command is used to get or set the user command access level. The NORMAL user level gives access to all the customer commands. The FACTORY user level gives access to all the NORMAL user level commands and enhanced diagnostic level commands. The MFG user level gives access to all the NORMAL and FACTORY level commands plus product specific configuration commands. Different passwords are required to enter the FACTORY or MFG user levels. A power cycle, RST command, or a FAC command will all return the user level command access to NORMAL. A password is not required to return to NORMAL user mode.

Command Syntax:#<address> UL<CR>#<address> UL <parameter><CR>#<address> UL <parameter>,"<password>"<CR>where <parameter> is:NORMAL Normal user command access level.FAC Factory user command access level.MFG Manufacturing user command access level.where "<password>" is:(see source code) Quoted password to unlock commands.

Response:*<address> NORMAL<CR> Normal*<address> FAC<CR> Normal*<address> MFG<CR> Normal*<address> PROGM OK<CR> Normal?<address> LOCKED<CR> Setting this parameter is locked.?<address> SYNTX ER<CR> Parameters were incorrect.

Example:

UPTIME Read the total power ON hours since the last power cycle or RST command.

Description:The UPTIME command is used to read the total power ON hours since the last power cycle.\, FAC, or RST command.

Command Syntax:#<address> UPTIME <CR>

Response:*<address> <days>,<time><CR> Normal*<address> PROGM OK<CR> Normal


#01 UL<CR> *01 NORMAL<CR> Get the user command access level.

#01 UL NORMAL<CR> *01 PROGM OK<CR> Set the user command access level to NORMAL.

#01 UL FAC,"FACTORYPW"<CR>

*01 PROGM OK<CR> Set the user command access level to FAC.

#01 UL MFG,"MFGPW"<CR>

*01 PROGM OK<CR> Set the user command access level to MFG.




?<address> RANGE ER<CR> Parameter is out of range.?<address> LOCKED<CR> Setting this parameter is locked.

Example:

VER Get device version information.

Description:Get the catalog number, Agile ID, and Firmware revision.

Command Syntax:#<address> VER<CR>

Response:*<address> <catalog number>,<serial number>,<FW rev><CR>Normal

Example:

VTRAC Get the VacTrac statistics from the CCG Module.

Description:The VTRAC command will return the VacTrac statistics about the gauge and module usage. Statistics are stored every 15 minutes. These statistics provide an overview of the operation of the controller and the current gauge. The statistics include power cycles, discharge timeouts, hours the controller has been powered, hours the gauge has been reading pressures, voltage and current ranges, and other items of interest.

Command Syntax:#<address>VTRAC [NOLABEL,][EVENT | TIME | HISTOGRAM | RANGE | DOSE [,<id>]]

Response:*<address>

Example:


#01 UPTIME<CR> *01 123,24:59:59<CR>

Get the power ON time since the last RST or POR.


#01 VER<CR> *01 CCIG-500-01,123456-00A,01.01.00123<CR>

Get device version information.


#01 VTRAC EVENT,2<CR>

*01<LF> 1 USB power up<LF><CR>

Get just the event statistic for second event.



#01 VTRAC EVENT

*01<LF> 3 External PS power up<LF>2 USB power up<LF>125 HVPS power cycle (all gauges)<LF>125 HVPS power cycle (current gauge)<LF>1 Discharge timeout (all gauges)<LF>1 Discharge timeout (current gauge)<LF>111 Discharge established (all gauges) <LF>111 Discharge established (current gauge) <LF>1 SP1 actuations<LF>24 SP2 actuations<LF>0 HVPS overpressure shutdown<LF>8 Button command HVPS on<LF>6 Console command HVPS on<LF>0 DIN HV on<LF>0 Auto HV on<LF>0 Max temperature exceeded<LF>0 Gauge removed with HVPS active<LF>0 Flash writes<LF>0 Firmware updates<LF>0 Flash memory stick connections<LF>12764 Commands received on process port<LF>607 Commands received on service port<LF>0 Calibration curve updated<LF>1 Timeout limit reprogrammed<LF>0 Gauge changes<LF><CR>

Get all of the event statistics.

#01 VTRAC TIME *01<LF> 61.99 Hours on with External PS<LF>63.60 Hours on USB powered<LF>25.95 Hours HVPS on (all gauges)<LF>25.95 Hours HVPS on (current gauge)<LF>25.38 Hours discharge on (all gauges)<LF>25.38 Hours discharge on (current gauge)<LF>0.09 Hours discharge on at >= 1E-5 Torr (all gauges)<LF>0.09 Hours discharge on at >= 1E-5 Torr (current gauge)<LF>0.00 Hours over temperature<LF>0.19 Hours SP1 actuated<LF>0.04 Hours SP2 actuated<LF>0.00 Hours DOUT ports active<LF><CR>

Get the time duration statistics.





#01 VTRAC HISTOGRAM

*01 0,0,9,102,0,0,0,0,0,0 Discharge established events per decade Torr (current gauge) [1E-11 to 1E-2, 1 decade increments]<LF>0,70,34,0,0,0,0,0,0,0,0,0,2,0,0,5 Discharge established events per time period (current gauge) [0 to 30 seconds, 2s increments] ]<LF>0.0,0.0,168.8,1332.2,17.7,2.1,1.7,4.1,0.0,0.0 Discharge minutes per decade Torr (current gauge) [1E-11 to 1E-2, 1 decade increments] ]<LF>0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.2,104.6,528.2,724.4,2135.5,328.3,0.0,0.0,0.0,0.0,0.0,0.0 Minutes operational per temperature [-20 to 70 deg C, 2 deg increments] ]<LF>1561.3,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0 HVPS active minutes per watt (all gauges) [0.0 to 3.0 watts, 0.1 watt increments] ]<LF>1561.3,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0 HVPS active minutes per watt (current gauge) [0.0 to 3.0 watts, 0.1 watt increments] ]<LF>0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,89.2,492.9,504.1,451.6,23.4,0.0,0.0,0.0,0.0,0.0,0.0 HVPS active minutes per temperature [-20 to 70 deg C, 2 deg increments] ]<LF>98.3,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,3723.5,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0,0.0 Extern PS active minutes per voltage [13.0 to 36.0 volts, 1.0 volt increments] ]<LF><CR>

Get the histogram statistics.




#01 VTRAC RANGE

*01<LF> +2.00000E+03,+4.00000E+03,+2.00003E+03,+2.00000E+03 HVPS source voltage (all gauges)<LF>+2.00000E+03,+4.00000E+03,+2.00003E+03,+2.00000E+03 HVPS source voltage (current gauge)<LF>+0.00000E+00,+6.16202E-01,+2.07147E-01,+1.67013E-01 HVPS input power (current gauge)<LF>+3.00000E+00,+2.61000E+02,+7.73874E+00,+3.00000E+00 Discharge establish seconds (current gauge)<LF>+2.00542E-09,+4.80819E-05,+2.76559E-07,+6.44724E-08 Discharge current (all gauges)<LF>+2.00542E-09,+4.80819E-05,+2.76559E-07,+6.44724E-08 Discharge current (current gauge)<LF>+1.79125E+07,+9.92955E+11,+5.33385E+10,+3.08273E+10 Discharge impedance (all gauges)<LF>+1.79125E+07,+9.92955E+11,+5.33385E+10,+3.08265E+10 Discharge impedance (current gauge)<LF>+1.38322E+03,+2.15608E+03,+2.05762E+03,+1.99970E+03 Discharge event voltage (all gauges)<LF>+1.38322E+03,+2.15608E+03,+2.05762E+03,+1.99970E+03 Discharge event voltage (current gauge)<LF>+6.57936E+00,+4.07416E+03,+1.98073E+03,+1.98733E+03 HVPS anode voltage (all gauges)<LF>+6.57936E+00,+4.07416E+03,+1.98073E+03,+1.98670E+03 HVPS anode voltage (current gauge)<LF>+0.00000E+00,+3.07692E-07,+2.01681E-08,+0.00000E+00 Guard ring leakage current (current gauge)<LF>-4.30000E-05,+0.00000E+00,-1.17009E-05,+0.00000E+00 Electrometer offset null voltage<LF>+4.19154E+00,+2.38711E+01,+2.32548E+01,+2.37207E+01 External Power Supply voltage<LF>-1.00000E+08,-2.10000E+04,-3.36400E+07,-9.10000E+06 Electrometer gain<LF>+3.47985E-03,+1.24231E+01,+1.17589E+01,+1.19985E+01 +12V supply voltage<LF>+4.53033E+00,+5.12240E+00,+5.07865E+00,+5.07989E+00 +5V supply voltage<LF>+6.31283E-09,+3.46977E-08,+1.40289E-06,+3.46977E-08 Measured pressure in Torr (all gauges)<LF>+6.31283E-09,+3.47041E-08,+1.40289E-06,+3.47041E-08 Measured pressure in Torr (current gauge)<LF>+2.45898E+01,+3.83626E+01,+3.60751E+01,+3.68974E+01 Measured temperature<LF><CR>

Get just the ranges for all gauges that have been connected to the controller and for the current gauge. Ranges are shown as minimum value, maximum value, average value, and current value. If an item has not been calculated (e.g., the current gauge has not established discharge), NaN will be displayed for that item.

#01 VTRAC DOSE *01<LF> +2.11512E-001 Dose (Amp-seconds)<LF><CR>

Get the dose for the current gauge.





#01 VTRAC *01<LF> Sensor serial number: [1001A] <LF><LF>Counts: <LF><LF>3 External PS power up<LF>2 USB power up<LF>125 HVPS power cycle (all gauges)<LF>125 HVPS power cycle (current gauge)<LF>Discharge timeout (all gauges)<LF>Discharge timeout (current gauge)<LF>111 Discharge established (all gauges) <LF>111 Discharge established (current gauge)<LF> …<LF>Time:<LF><LF>62.38 Hours on with External PS<LF>63.98 Hours on USB powered<LF>26.34 Hours HVPS on (all gauges)<LF> …

Histograms: <LF><LF>

0,0,9,102,0,0,0,0,0,0 Discharge established events per decade Torr (current gauge) [1E-11 to 1E-2, 1 decade increments] <LF>0,70,34,0,0,0,0,0,0,0,0,0,2,0,0,5 Discharge established events per time period (current gauge) [0 to 30 seconds, 2s increments]<LF> …<LF>Ranges (min/max/ave/current value): <LF><LF>+2.00000E+03,+4.00000E+03,+2.00003E+03,+2.00000E+03 HVPS source voltage (all gauges <LF>+2.00000E+03,+4.00000E+03,+2.00003E+03,+2.00000E+03 HVPS source voltage (current gauge)<LF> …<LF>Trends: <LF><LF>+2.11564E-001 Dose (Amp-seconds)<LF<CR>

Get all of the VacTrac Statistics.

#01 VTRAC NOLABEL,EVENT,1

*01<LF> 3<LF><CR>

Get just the number of times the external PS was powered up (the first event in the list).


AAnalog Output Signal

Specifications 21CCable Connections

I/O 31, 89Power 31, 89

Caution Notices & Symbols 11, 12, 13CCG Electronics

Status Information 53CE Compliance 20COM Ports 51Communication Settings

GP Connect 55Compliance

CE 20Environmental 20

ConnectionCables 31, 89Gauge 25Power 31, 89

Contamination 41Process Gas 42

Control PanelI/O Connectors 23LEDs 22USB Service Port 23

Customer Service & SupportContact Information 3, 134

DData Format

Specifications 21Diagnostics

Analog I/OInput 37Digital I/O 37Digital Input 39Electrometer 38High Voltage Timeout 38High-Voltage Power Supply 38On-Board 37Power ON Self Test 38Test Details 37

Digital Interface 89RS-485 Command Structure 89RS-485 Error Responses 91RS-485 General Responses 91RS-485 Protocol 89RS-485 Response Structure 89RS-485 Specifications 89RS-485 User Command Descriptions 94RS-485 User Commands 92USB 89

Dimensions 21

Dose 42, 53, 66, 67, 87, 129EElectronics Description

Analog I/O 43Digital I/O 44Electrometer 43High Voltage Power Supply 42Microprocessor 44Setpoint Relays 44

Electronics ModuleConfigure 54Introduction 22Status Information 53

EnvironmentSystem 15

Explosive Environments 15GGas Type Multiplier 36, 45, 56, 83, 92, 101, 102Gauge

Activating 35Bake-out Procedure 75Components Repair Kit 4, 78Components Replacement 78Connection 25Initial Activation 35Mounting Flange Type 27Mounting Instructions 27Mounting Location 25Mounting Orientation 25Torque Bolts 28

GP Connect 47COM ports 51Communication Settings 55Configure Analog Output Behavior 60Configure the rRelays 61Configuring the Electronics 54Enter Commands Directly 70Name the Sensor 57Pressure Trend 65Reset the Gauge 65Save the Configuration 70Serial Device Setings 52Set Date & Time 59Set Gauge Auto OFF Behavior 59Set Gauge Auto ON Behavior 57Set Pressure Units 55Software Installation 47Starting 51to a CCG Module 52Turn the Gauge ON/OFF 65Update Firmware 71Update New Sensor 72Update Specific Calibration Curve 72

Series 500 Cold Cathode GaugeInstruction Manual - 500001 - Rev. D

Index

GroundingGauge to Vacuum Chamber 13, 34Requirements 13, 34

HHigh Voltage 14

Power Supply 42Troubleshooting Code 87

IInitial Gauge Activation 35Installation

Cables 31Gauge 27

InterlocksSafety 16, 30, 77

IntroductionElectronics Module 22General Description 19Improper Use 19Intended Use 19

MMagnet

Safety 25, 76Magnets

Safety 12, 75, 78Measurement Range 19, 20OOperation

Basic Theory 41Starting at Low Pressure 41Starting the Plasma 41

Over Pressure Conditions 14PPower

Connection 31, 89Requirement 20, 32

Pressure Correction Factor Multiplier 45, 83, 92,96, 100Pressure Correction Factors

Gas/Sensitivity 45Pressure Dose 42, 53, 66, 67, 87RReceiving Inspection 9Repair Kit

Gauge Components 4, 78RS-485

Cable Connections 89See Digital Interface and USB 89

SSafety

Cautions & Warnings 11, 12, 13Interlocks 16, 30, 77Magnet 25, 76Magnets 78

Sensitivity Factor 36, 45, 56, 57, 95, 101, 120Serial Device Settings

GP Connect 52Service 16

Contact Information 81Guidelines 10, 81

Software InstallationGP Connect 47

Specific Calibration 57, 72, 73Specifications 20

Accuracy 20Analog Output Signal 21Data Format 21Dimensions 21Power 20Pressure Measurement Ranges 20Storage 20Temperatures 20

TTerms

used in this chapter 25, 35, 47, 75Torque

Gauge Mount Bolts 28Troubleshooting Procedures 83

Error Codes 86UUSB

Command & Response Structures 91Communication Interface 89Connector 23Pinout Data 23Service Port 23

VVacTrac 47, 52, 57, 66, 67, 68, 69, 72, 126Vacuum Measurement Range 19, 20VTRAC

Description 126WWarning Notices & Symbols 11, 12, 13Warranty 9


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Instruction manual part number 500001Revision D - January 2016

Series 500

Instruction Manual


Customer Service / Technical Support:

MKS Pressure and Vacuum Measurement SolutionsMKS Instruments, Inc., Granville-Phillips® Division6450 Dry Creek ParkwayLongmont, Colorado 80503 U.S.A.Tel: 303-652-4400Fax: 303-652-2844Email: [email protected]

MKS Corporate HeadquartersMKS Instruments, Inc.2 Tech Drive, Suite 201Andover, MA 01810Tel: 978-645-5500Fax: 978-557-5100Email: [email protected]

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