EBARA's energy-saving dry vacuum pumps are used for many different applications Model ESR Model ESR a re designed for general evacuation in diverse applications, featuring low energy consumption. EBARA PRECISION MACHINERY BUSINESS ・ Ideal configuration especially for corrosive gas application ( Niresist material) ・ Small footprint, light weight ・ No shaft-seal N 2 required: Model ESR20N (Applicable to None- corrosive application) ・ Sensitive control with latest microprocessor technology ・ Easy replacement of LCD controller during pump operation ・ Lower operating cost ・ Enhanced pump RPM control function: Wide Controllable range, Idling mode ・ Digital & analog signal available: For flexible interface with process tools ・ Advanced data storage capability ・ N2 warning setting adjustable on LCD controller ・ SEMI-S2/CE marking/NRTL available Specification Table Model ESR i s suitable for a wide range of applications from light-duty proces ses like load locks and SEM to corrosive process. EBARA has recognized the need for energy efficiency, small footprint, and weight in a stand-alone roots dry vacuum pump. *1 Model "N": All Model ESR use Niresist iron *2 At maximum pumping speed and standard N2 purge flow rate. DRY VACUUM PUMPS L/min 1,300～ 2,000 3,000 4,000～ 8,500 4,000～ 10,000 10,000～ 20,000 30,000 46,000 Pa 2.0 0.53 0.67 0.5 0.2 0.2 0.5 0.13 0.2 0.2 NW40 NW50 NW100 ISO160 NW40 kW 0.7 1.7 1.0 1.1 2.9 3.1 L/min 2～8 3.5～8 2～5 2～8 2～5 2～8 3.5～8 ℃ Max. 30 Pa•m 3 /s 19～22 (0) 19～22 (3.4) 17～21 (4) 19～22 (3.4) 17～21 (4) 19～22 (3.4) kV 7.0 8.0 kg 190 170 180 Connection Gas Inlet Gas Outlet Approx.Power at Ultimate Pressure Cooling Water Flow rate Temperature N2 Gas Approx. Flow rate (N2-0 Mode) Utility Power Supply Power capacity Weight Model *1 Pumping Speed Ultimate Pressure *2 Phase/ Volt/ Freq. 200V Model 400V Model ESR 20N ESR 30 ESR 30N ESR 80W ESR 80WN ESR 100WN ESR 200W ESR 200WN ESR 300W(N) ESR 500W(N) 3Phase/200V/50Hz 3Phase/200-220V/60Hz 3Phase/380-400V/50Hz 3Phase/380-440V/60Hz Features 40 90 210 250 390 500 10.6 12.3 Model ◯◯◯ in this site is our model code

DRY VACUUM PUMPS - 荏原製作所 · EBARA's energy-saving dry vacuum pumps are used for many diﬀerent applications Model ESR Model ESR are designed for general evacuation in diverse

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Page 1: DRY VACUUM PUMPS - 荏原製作所 · EBARA's energy-saving dry vacuum pumps are used for many diﬀerent applications Model ESR Model ESR are designed for general evacuation in diverse

EBARA's energy-saving dry vacuum pumps are used for many different applications

Model ESRModel ESR a re designed for general evacuation in diverse applications, featuring low energy consumption.

EBARA PRECISION MACHINERY BUSINESS

・ Ideal configuration especially for corrosive gas application (Niresist material)・ Small footprint, light weight・ No shaft-seal N2 required: Model ESR20N (Applicable to None- corrosive application)・ Sensitive control with latest microprocessor technology・ Easy replacement of LCD controller during pump operation・ Lower operating cost・ Enhanced pump RPM control function: Wide Controllable range, Idling mode・ Digital & analog signal available: For flexible interface with process tools・ Advanced data storage capability・ N2 warning setting adjustable on LCD controller・ SEMI-S2/CE marking/NRTL available

Specification Table

Model ESR i s suitable for a wide range of applications from light-duty processes like load locks and SEM to corrosive process. EBARA has recognized the need for energy efficiency, small footprint, and weight in a stand-alone roots dry vacuum pump.

*1 Model "N": All Model ESR use Niresist iron *2 At maximum pumping speed and standard N2 purge flow rate.

DRY VACUUM PUMPS

L/min1,300～2,000

3,0004,000～8,500

4,000～10,000

10,000～20,000

30,000 46,000

Pa 2.0 0.53 0.67 0.5 0.2 0.2 0.5 0.13 0.2 0.2

NW40 NW50 NW100 ISO160

NW40

kW 0.7 1.7 1.0 1.1 2.9 3.1

L/min 2～8 3.5～8 2～5 2～8 2～5 2～8 3.5～8